Improving f(MAX)/f(T) ratio in FinFETs using source/drain extension region engineering

A design methodology to optimise the ratio of maximum oscillation frequency to cutoff frequency, f(MAX)/f(T), in 60 nm FinFETs is presented. Results show that 25 to 60% improvement in f(MAX)/f(T) at drain currents of 20-300 mu A/mu m can be achieved in a non-overlap gate-source/drain architecture. The reported work provides new insights into the design and optimisation of nanoscale FinFETs for RF applications.

Max separation clustering for feature extraction from Optical Emission Spectroscopy Data

This paper proposes max separation clustering (MSC), a new non-hierarchical clustering method used for feature extraction from optical emission spectroscopy (OES) data for plasma etch process control applications. OES data is high dimensional and inherently highly redundant with the result that it is difficult if not impossible to recognize useful features and key variables by direct visualization. MSC is developed for clustering variables with distinctive patterns and providing effective pattern representation by a small number of representative variables. The relationship between signal-to-noise ratio (SNR) and clustering performance is highlighted, leading to a requirement that low SNR signals be removed before applying MSC. Experimental results on industrial OES data show that MSC with low SNR signal removal produces effective summarization of the dominant patterns in the data.

Scaled Heavy-Ball Acceleration of the Richardson-Lucy Algorithm

The Richardson-Lucy algorithm is one of the most important algorithms in the image deconvolution area. However, one of its drawbacks is slow convergence. A very significant acceleration is obtained by the technique proposed by Biggs and Andrews (BA), which is implemented in the deconvlucy function of the Image Processing MATLAB toolbox. The BA method was developed heuristically with no proof of convergence. In this paper, we introduce the Heavy-Ball (H-B) method for Poisson data optimization and extend it to a scaled H-B method, which includes the BA method as a special case. The method has proof of the convergence rate of O(k-2), where k is the number of iterations. We demonstrate the superior convergence performance of the scaled H-B method on both synthetic and real 3D images.