Diagnostic studies of species concentrations in a capacitively coupled RF plasma containing CH4-H2-Ar

Three plasma diagnostic methods, tunable infrared diode laser absorption spectroscopy, optical emission spectroscopy and microwave interferometry have been used to monitor concentrations of transient and stable molecules, CH3, CH4, C2H2, C2H6, and of electrons in capacitively coupled CH4-H-2-Ar radiofrequency (RF) plasmas (f(RF) = 13.56 MHz, p = 100 Pa, phi (total)= 66 sccm) for various discharge power values (P = 10-100 W) and gas mixtures. The degree of dissociation of the methane precursor varied between 3% and 60%. The methyl radical concentration was found to be in the order of 10(12) molecules cm(-3) and the electron concentration in the order of loll cm(-3). The methyl radical concentration and the concentrations of the stable C-2 hydrocarbons, C2H2 and C2H6, produced in the plasma, increased with discharge power. The fragmentation rates of the methane precursor and conversion rates to the measured C-2 hydrocarbons were estimated in dependence on discharge power. Radial distributions of the electron and methyl radical concentrations, and of the gas temperature were measured for the first time simultaneously in the plasma region between the discharge electrodes. The measurements allow us to draw qualitative conclusions on the main chemical processes and the plasma chemical reaction paths.

Plasma Jets Driven by Ultraintense-Laser Interaction with Thin Foils

Experimental evidence of plasma jets ejected from the rear side of thin solid targets irradiated by ultraintense (> 10(19) W cm(-2)) laser pulses is presented. The jets, detected by transverse interferometric measurements with high spatial and temporal resolutions, show collimated expansion lasting for several hundreds of picoseconds and have substantially steep density gradients at their periphery. The role played by radiation pressure of the laser in the jet formation process is highlighted analytically and by extensive two-dimensional particle-in-cell simulations.

Observation of Collisionless Shocks in Laser-Plasma Experiments

The propagation in a rarefied plasma (n(e)less than or similar to 10(15) cm(-3)) of collisionless shock waves and ion-acoustic solitons, excited following the interaction of a long (tau(L)similar to 470 ps) and intense (I similar to 10(15) W cm(-2)) laser pulse with solid targets, has been investigated via proton probing techniques. The shocks' structures and related electric field distributions were reconstructed with high spatial and temporal resolution. The experimental results were interpreted within the framework of the nonlinear wave description based on the Korteweg-de Vries-Burgers equation.

The role of the relative voltage and phase for frequency coupling in a dual-frequency capacitively coupled plasma

Frequency coupling in multifrequency discharges is a complex nonlinear interaction of the different frequency components. An alpha-mode low pressure rf capacitively coupled plasma operated simultaneously with two frequencies is investigated and the coupling of the two frequencies is observed to greatly influence the excitation and ionization within the discharge. Through this, plasma production and sustainment are dictated by the corresponding electron dynamics and can be manipulated through the dual-frequency sheath. These mechanisms are influenced by the relative voltage and also the relative phase of the two frequencies.

Plasma Ionization in Low-Pressure Radio-Frequency Discharges. Part I: Optical Measurements

The electron dynamics in the low-pressure operation regime ($«$ 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave–particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons drives a two-stream instability also dissipating power in the plasma.