Laser annealing of sputtered silicon for wafer-bonding applications

Sputtered silicon is investigated as a bonding layer for transfer of pre-processed silicon layers to various insulating substrates. Although the material appears suitable for low temperature processing, previous work has shown that gas trapped in the pores of the sputtered material is released at temperatures above 350 degrees C and further increases of temperature lead to destruction of any bonded interface. Pre-annealing at 1000 degrees C before bonding drives out gas and/or seals the surface, but for device applications where processing temperatures must be kept below about 300 degrees C, this technique cannot be used. In the current work, we have investigated the effect of excimer laser-annealing to heat the sputtered silicon surface to high temperature whilst minimising heating of the underlying substrate. Temperature profile simulations are presented and the results of RBS, TEM and AFM used to characterise the annealed layers. The results verify that gases are present in the sub-surface layers and suggest that while sealing of the surface is important for suppression of the out-diffusion of gases, immediate surface gas removal may also play a role. The laser-annealing technique appears to be an effective method of treating sputtered silicon, yielding a low roughness surface suitable for wafer bonding, thermal splitting and layer transfer.

Raman satellites in optical scattering from a laser-ablated Mg plume

Raman satellites have been observed in the scattering of a Nd:YAG laser (532 nm) from a laser-ablated Mg plasma plume. We identify them as originating from transitions between the fine-structure components of the metastable 3s3p P-3(0,1,2) level of Mg. We have calculated the cross sections for Raman and Rayleigh scattering from the metastable state. Comparison of the expected ratio of the satellites to the Rayleigh peak indicates the changing population fraction of the metastable states in the plume.

Recent developments in X-UV optics and X-UV diagnostics

Metrology of XUV beams (X-ray lasers, high-harmonic generation and VUV free-electron lasers) is of crucial importance for the development of applications. We have thus developed several new optical systems enabling us to measure the optical properties of XUV beams. By use of a Michelson interferometer working as a Fourier-transform spectrometer, the line shapes of different X-ray lasers have been measured with a very high accuracy (Deltalambda/lambdasimilar to10(-6)). Achievement of the first XUV wavefront sensor has enabled us to measure the beam quality of laser-pumped as well as discharge-pumped X-ray lasers. A capillary discharge X-ray laser has demonstrated a very good wavefront allowing us to achieve an intensity as high as 3x10(14) W cm(-2) by focusing with a f=5 cm mirror. The sensor accuracy has been measured using a calibrated spherical wave generated by diffraction. The accuracy has been estimated to be as good as lambda/120 at 13 nm. Commercial developments are underway. At Laboratoire d'Optique Appliquee, we are setting up a new beamline based on high-harmonic generation in order to start the femtosecond, coherent XUV optic .

Measurement of the duration of X-ray lasing pumped by an optical laser pulse of picosecond duration

Measurements of the duration of X-ray lasing pumped with picosecond pulses from the VULCAN optical laser are obtained using a streak camera with 700 fs temporal resolution. Combined with a temporal smearing due to the spectrometer employed, we have measured X-ray laser pulse durations for Ni-like silver at 13.9 nm with a total time resolution of 1.1 ps. For Ni-like silver, the X-ray laser output has a steep rise followed by an approximately exponential temporal decay with measured full-width at half-maximum (FWHM) of 3.7 (+/-0.5) ps. For Ne-like nickel lasing at 23.1 nm, the measured duration of lasing is approximate to10.7 (+/-1) ps (FWHM). An estimate of the duration of the X-ray laser gain has been obtained by temporally resolving spectrally integrated continuum and resonance line emission. For Ni-like silver, this time of emission is approximate to22 (+/-2) ps (FWHM), while for Ne-like nickel we measure approximate to35 (+/-2) ps (FWHM). Assuming that these times of emission correspond to the gain duration, we show that a simple model consistently relates the gain durations to the measured durations of X-ray lasing. (C) 2002 Elsevier Science B.V. All rights reserved.

Measurements of the XUV transmission of aluminium with a soft x-ray laser

We have used XUV lasers to make absolute measurements of the photoabsorption coefficient of Al at energies just below that of the L3 absorption edge at 72.7 eV. Transmission measurements at photon energies of 53.7 and 63.3 eV have been made using Ne-like Ni and Ge XUV lasers. The XUV laser output was recorded in first and second orders using a flat-field spectrometer. Al foils with steps of various thicknesses were placed over the first order diffracted signal, while the second order diffraction was used to monitor the beam profile at each position. The transmission data agree extremely well with the original measurements at these wavelengths made by Henke and co-workers (Henke B L, Gullikson E M and Davis J C 1993 At. Data Nucl. Data Tables 54 18 1), but are in conflict with subsequent measurements which are currently in common use (Gullikson E M, Denham P, Mrowka S and Underwood J H 1994 Phys. Rev. B 49 16 283). The exact values of the absorption coefficients in this region of the spectrum have significant implications for the diagnosis of the energy and intensity output of XUV lasers.

Photodissociation of D-3(+) in an intense, femtosecond laser field

H-3(+) is the simplest triatomic molecule and plays an important role in laboratory and astrophysical plasmas. It is very stable both in terms of its electronic and nuclear degrees of freedom but is difficult to study in depth in the laboratory due to its ionic nature. In this communication, experimental results are presented for the strong field dissociation of the isotopic analogue D-3(+), using 30 fs, 800 nm laser pulses with intensities up to 10(16) W cm(-2). By employing a novel experimental set-up, ions were confined in an electrostatic ion trap so that dissociation of the molecule could be studied as it radiatively cools. It was determined that dissociation could only be observed for molecules in ro-vibrational states relatively close to the dissociation limit, while more tightly bound states demonstrated remarkable stability in even the strongest fields.

Soft x-ray free electron laser microfocus for exploring matter under extreme conditions

We have focused a beam (BL3) of FLASH (Free-electron LASer in Hamburg: lambda = 13.5 nm, pulse length 15 fs, pulse energy 10-40 mu J, 5Hz) using a fine polished off-axis parabola having a focal length of 270 mm and coated with a Mo/Si multilayer with an initial reflectivity of 67% at 13.5 nm. The OAP was mounted and aligned with a picomotor controlled six-axis gimbal. Beam imprints on poly(methyl methacrylate) -PMMA were used to measure focus and the focused beam was used to create isochoric heating of various slab targets. Results show the focal spot has a diameter of

Short pulse laser-induced dissociation of vibrationally cold, trapped molecular ions

An electrostatic trapping scheme for use in the study of light-induced dissociation of molecular ions is outlined. We present a detailed description of the electrostatic reflection storage device and specifically demonstrate its use in the preparation of a vibrationally cold ensemble of deuterium hydride (HD+) ions. By interacting an intense femtosecond laser with this target and detecting neutral fragmentation products, we are able to elucidate previously inaccessible dissociation dynamics for fundamental diatomics in intense laser fields. In this context, we present new results of intense field dissociation of HD+ which are interpreted in terms of recent theoretical calculations.

Observation of the transient charging of a laser-irradiated solid

The proton radiography technique has been used to investigate the incidence of a 3 x10(19) W/cm(2) infrared pulse with a 125 mu m-diameter gold wire. The laser interaction is observed to drive the growth of a radial electric field similar to 10(10) V/m on the surface of the wire which rises and decays over a temporal window of 20 ps. Such studies of the ultrafast charging of a solid irradiated at high-intensity may be of relevance to schemes for laser-driven ion acceleration and the fast-ignitor concept for inertial confinement fusion.

Theory of laser-driven double-ionization of atoms at Ti : sapphire laser wavelengths

Progress in the theoretical understanding of non-sequential double-ionization of atoms is reviewed from its beginnings with Kuchiev's work in the late 1980s and Corkum's work in the early 1990s to the present day. The crucial role of laboratory experiment as a persistent stimulus to theoretical endeavour is underlined but the predictive roles of simple, yet fundamental, theory and also of a full quantum mechanical description are not forgotten. A theoretical forward look is provided.

Double-ionization dynamics of laser-driven helium

We report a new method which allows sequential and non-sequential double-ionization rates in laser-driven helium to be distinguished and calculated separately. The method is applied to calculate such rates for two laser pulses, one of 0.236 au frequency and 8.0 × 1015 W cm-2 peak intensity, the other of 1.0 au frequency and also of 8.0 × 1015 W cm-2 peak intensity.

Laser pulse compression and amplification via Raman backscattering in plasma

A simple theoretical model is proposed for the interaction between two counter-propagating laser pulses (a pump and a seed pulse) in unmagnetized plasma. Pulse compression and amplification are observed via numerical simulation. A one dimensional fluid model for stimulated Raman backscattering is proposed to investigate the pulse compression and pulse amplification mechanisms. To accomplish this, energy is transferred from the long pump pulse to a seed pulse, with a Langmuir plasma wave mediating the transfer. The study focuses on the intensity profile of the pump laser pulse. A Gaussian and a ring intensity profile are, separately, considered for the pump laser pulse.