Atmospheric pressure plasma chemical vapor deposition reactor for 100 mm wafers, optimized for minimum contamination at low gas flow rates

Gas discharge plasmas used for thinfilm deposition by plasma-enhanced chemical vapor deposition (PECVD) must be devoid of contaminants, like dust or active species which disturb the intended chemical reaction. In atmospheric pressure plasma systems employing an inert gas, the main source of such contamination is the residual air inside the system. To enable the construction of an atmospheric pressure plasma (APP) system with minimal contamination, we have carried out fluid dynamic simulation of the APP chamber into which an inert gas is injected at different mass flow rates. On the basis of the simulation results, we have designed and built a simple, scaled APP system, which is capable of holding a 100 mm substrate wafer, so that the presence of air (contamination) in the APP chamber is minimized with as low a flow rate of argon as possible. This is examined systematically by examining optical emission from the plasma as a function of inert gas flow rate. It is found that optical emission from the plasma shows the presence of atmospheric air, if the inlet argon flow rate is lowered below 300 sccm. That there is minimal contamination of the APP reactor built here, was verified by conducting an atmospheric pressure PECVD process under acetylene flow, combined with argon flow at 100 sccm and 500 sccm. The deposition of a polymer coating is confirmed by infrared spectroscopy. X-ray photoelectron spectroscopy shows that the polymer coating contains only 5% of oxygen, which is comparable to the oxygen content in polymer deposits obtained in low-pressure PECVD systems. (C) 2015 AIP Publishing LLC.

Non-disruptive and null-deflection mass flow measurement by a pressure compensation technique

Accurate mass flow measurement is very important in various monitoring and control applications. This paper proposes a novel method of fluid flow measurement by compensating the pressure drop across the ends of measuring unit using a compensating pump. The pressure drop due to the flow is balanced by a feedback control loop. This is a null-deflection type of measurement. As the insertion of such a measuring unit does not affect the functioning of the systems, this is also a non-disruptive flow measurement method. The implementation and design of such a unit are discussed. The system is modeled and simulated using the bond graph technique and it is experimentally validated. (C) 2009 Elsevier Ltd. All rights reserved.

On the mass flow rate from silos with lateral exit holes

The mass flow rate, (m) over dot, associated with the lateral outflow of dry, cohesionless granular material through circular orifices of diameter D made in vertical walls of silos was measured experimentally in order to determine also the influence of the wall thickness of the silo, w. Geometrical arguments, based on the outflow happening, are given in order to have a general correlation for (m) over dot embracing both quantities, D and w. The angle of repose appears to be an important characterization factor in these kinds of flows.

Electric current-induced mass flow in very thin infinite metallic films

This paper reports on the mass transport behavior of infinitely extended, continuous, and very thin metallic films under the influence of electric current. Application of direct current of high densities (> 10(8) A/m(2)) results in visible melting of thin film at only one of the electrodes, and the melt then flows towards the other electrode in a circularly symmetric fashion forming a microscale ring pattern. For the two tested thin film systems, namely Cr and Al, of thicknesses ranging from 4 to 20 nm, the above directional flow consistently occurred from cathode to anode and anode to cathode, respectively. Furthermore, application of alternating electric current results in flow of the liquid material from both the electrodes. The dependence of critical flow behavior parameters, such as flow direction, flow velocity, and evolution of the ring diameter, are experimentally determined. Analytical models based on the principles of electromigration in liquid-phase materials are developed to explain the experimental observations.

EXPERIMENTAL INVESTIGATION OF UNSTEADY FLOW IN A TRANSONIC UNI-STAGE AXIAL COMPRESSOR

Detailed steady and unsteady experimental measurements and analysis were performed on a Single stage Transonic Axial Compressor with asymmetric rotor tip clearance for studying the compressor stall phenomena. The installed compressor had asymmetric tip clearance around the rotor casing varying from about 0.65mm to 1.25mm. A calibrated 5-hole aerodynamic probe was traversed radially at exit of rotor and showed the characteristics of increased flow angle at lower mass flow rates for all the speeds. Mach number distribution and boundary layer effects were also clearly captured. Unsteady measurements for velocity were carried out to study the stall cell behavior using a single component calibrated hotwire probe oriented in axial and tangential directions for choke/free flow and near stall conditions. The hotwire probe was traversed radially across the annulus at inlet to the compressor and showed that the velocity fluctuations were dissimilar when probe was aligned axial and tangential to the flow. Averaged velocities across the annulus showed the reduction in velocity as stall was approached. Axial mean flow velocity decreased across the annulus for all the speeds investigated. Tangential velocity at free flow condition was higher at the tip region due to larger radius. At stall condition, the tangential velocity showed decreased velocities at the tip and slightly increased velocities at the hub section indicating that the flow has breakdown at the tip region of the blade and fluid is accelerated below the blockage zone. The averaged turbulent intensity in axial and tangential flow directions increased from free flow to stall condition for all compressor rated speeds. Fast Fourier Transform (FFT) of the raw signals at stall flow condition showed stall cell and its corresponding frequency of occurrence. The stalling frequency of about half of rotational speed of the rotor along with large tip clearance suggests that modal type stall inception was occurring.

On the ignition and extinction problems in forced convection systems

In this paper the problem of ignition and extinction has been formulated for the flow of a compressible fluid with Prandtl and Schmidt numbers taken as unity. In particular, the problems of (i) a jet impinging on a wall of combustible material and (ii) the opposed jet diffusion flame have been studied. In the wall jet case, three approximations in the momentum equation namely, (i) potential flow, (ii) viscous flow, (ii) viscous incompressible with k = 1 and (iii) Lees' approximation (taking pressure gradient terms zero) are studied. It is shown that the predictions of the mass flow rates at extinction are not very sensitive to the approximations made in the momentum equation. The effects of varying the wall temperature in the case (i) and the jet temperature in the case (ii) on the extinction speeds have been studied. The effects of varying the activation energy and the free stream oxidant concentration in case (ii), have also been investigated.

Comparative study of air heating solar collectors

Three types of conventional solar air heater are designed such that their heat absorbing areas and the pressure drops across them are equal for equal air mass flow rates per unit collector area. The results of thermal performance tests conducted simultaneously on these collectors, under the same environmental conditions, are presented.

The effect of surface mass transfer on buoyancy induced flow in a variable porosity medium adjacent to a vertical heated plate

The effect of surface mass transfer on buoyancy induced flow in a variable porosity medium adjacent to a heated vertical plate is studied for high Rayleigh numbers. Similarity solutions are obtained within the frame work of boundary layer theory for a power law variation in surface temperature,T Wpropx lambda and surface injectionv Wpropx(lambda–1/2). The analysis incorporates the expression connecting porosity and permeability and also the expression connecting porosity and effective thermal diffusivity. The influence of thermal dispersion on the flow and heat transfer characteristics are also analysed in detail. The results of the present analysis document the fact that variable porosity enhances heat transfer rate and the magnitude of velocity near the wall. The governing equations are solved using an implicit finite difference scheme for both the Darcy flow model and Forchheimer flow model, the latter analysis being confined to an isothermal surface and an impermeable vertical plate. The influence of the intertial terms in the Forchheimer model is to decrease the heat transfer and flow rates and the influence of thermal dispersion is to increase the heat transfer rate.

Two-temperature accretion around rotating black holes: a description of the general advective flow paradigm in the presence of various cooling processes to explain low to high luminous sources

We investigate viscous two-temperature accretion disc flows around rotating black holes. We describe the global solution of accretion flows with a sub-Keplerian angular momentum profile, by solving the underlying conservation equations including explicit cooling processes self-consistently. Bremsstrahlung, synchrotron and inverse Comptonization of soft photons are considered as possible cooling mechanisms. We focus on the set of solutions for sub-Eddington, Eddington and super-Eddington mass accretion rates around Schwarzschild and Kerr black holes with a Kerr parameter of 0.998. It is found that the flow, during its infall from the Keplerian to sub-Kepleria transition region to the black hole event horizon, passes through various phases of advection: the general advective paradigm to the radiatively inefficient phase, and vice versa. Hence, the flow governs a much lower electron temperature similar to 10(8)-10(9.5) K, in the range of accretion rate in Eddington units 0.01 less than or similar to (M) over dot less than or similar to 100, compared to the hot protons of temperature similar to 10(10.2)-10(11.8) K. Therefore, the solution may potentially explain the hard X-rays and gamma-rays emitted from active galactic nuclei (AGNs) and X-ray binaries. We then compare the solutions for two different regimes of viscosity. We conclude that a weakly viscous flow is expected to be cooling dominated, particularly at the inner region of the disc, compared to its highly viscous counterpart, which is radiatively inefficient. With all the solutions in hand, we finally reproduce the observed luminosities of the underfed AGNs and quasars (e. g. Sgr A*) to ultraluminous X-ray sources (e. g. SS433), at different combinations of input parameters, such as the mass accretion rate and the ratio of specific heats. The set of solutions also predicts appropriately the luminosity observed in highly luminous AGNs and ultraluminous quasars (e. g. PKS 0743-67).

Simultaneous heat and mass transfer in unsteady free convection from two-dimensional and axisymmetric bodies

The unsteady laminar free convection boundary layer flows around two-dimensional and axisymmetric bodies placed in an ambient fluid of infinite extent have been studied when the flow is driven by thermal buoyancy forces and buoyancy forces from species diffusion. The unsteadiness in the flow field is caused by both temperature and concentration at the wall which vary arbitrarily with time. The coupled nonlinear partial differential equations with three independent variables governing the flow have been solved numerically using an implicit finite-difference scheme in combination with the quasilinearization technique. Computations have been performed for a circular cylinder and a sphere. The skin friction, heat transfer and mass transfer are strongly dependent on the variation of the wall temperature and concentration with time. Also the skin friction and heat transfer increase or decrease as the buoyancy forces from species diffusion assist and oppose, respectively, the thermal buoyancy force, whereas the mass transfer rate is higher for small values of the ratio of the buoyancy parameters than for large values. The local heat and mass transfer rates are maximum at the stagnation point and they decrease progressively with increase of the angular position from the stagnation point.

Unsteady laminar compressible swirling flow with massive blowing

THE study of swirling boundary layers is of considerable importance in many rotodynamic machines such as rockets, jet engines, swirl generators, swirl atomizers, arc heaters, etc. For example, the introduction of swirl in a flow acceleration device such as a nozzle in a rocket engine promises efficient mass flow control. In nuclear rockets, swirl is used to retain the uranium atoms in the rocket chamber. With these applications in mind, Back1 and Muthanna and Nath2 have obtained the similarity solutions for a low-speed three-dimensional steady laminar compressible boundary layer with swirl inside an axisymmetric surface of variable cross section. The aim of the present analysis is to study the effect of massive blowing rates on the unsteady laminar swirling compressible boundary-layer flow of an axisymmetric body of arbitrary cross section when the freestream velocity and blowing rate vary with time. The type of swirl considered here is that of a free vortex superimposed on the longitudinal flow of a compressible fluid with variable properties. The analysis is applicable to external flow over a body as well as internal flow along a surface. For the case of external flow, strong blowing can have significant use in cooling the surface of hypervelocity vehicles, particularly when ablation occurs under large aerodynamic or radiative heating, but there may not be such an important application of strong blowing in the case of internal flow. The governing partial differential equations have been solved numerically using an implicit finite difference scheme with a quasilinearization technique.3 High temperature gas effects, such as radiation, dissociation, and ionization, etc., are not investigated. The nomenclature is usually that of Ref. 4 and is listed in the full paper.

Steady compressible flow of cohesionless granular materials through a wedge-shaped bunker

A continuum model based on the critical-state theory of soil mechanics is used to generate stress, density, and velocity profiles, and to compute discharge rates for the flow of granular material in a mass flow bunker. The bin–hopper transition region is idealized as a shock across which all the variables change discontinuously. Comparison with the work of Michalowski (1987) shows that his experimentally determined rupture layer lies between his prediction and that of the present theory. However, it resembles the former more closely. The conventional condition involving a traction-free surface at the hopper exit is abandoned in favour of an exit shock below which the material falls vertically with zero frictional stress. The basic equations, which are not classifiable under any of the standard types, require excessive computational time. This problem is alleviated by the introduction of the Mohr–Coulomb approximation (MCA). The stress, density, and velocity profiles obtained by integration of the MCA converge to asymptotic fields on moving down the hopper. Expressions for these fields are derived by a perturbation method. Computational difficulties are encountered for bunkers with wall angles θw [gt-or-equal, slanted] 15° these are overcome by altering the initial conditions. Predicted discharge rates lie significantly below the measured values of Nguyen et al. (1980), ranging from 38% at θw = 15° to 59% at θw = 32°. The poor prediction appears to be largely due to the exit condition used here. Paradoxically, incompressible discharge rates lie closer to the measured values. An approximate semi-analytical expression for the discharge rate is obtained, which predicts values within 9% of the exact (numerical) ones in the compressible case, and 11% in the incompressible case. The approximate analysis also suggests that inclusion of density variation decreases the discharge rate. This is borne out by the exact (numerical) results – for the parameter values investigated, the compressible discharge rate is about 10% lower than the incompressible value. A preliminary comparison of the predicted density profiles with the measurements of Fickie et al. (1989) shows that the material within the hopper dilates more strongly than predicted. Surprisingly, just below the exit slot, there is good agreement between theory and experiment.

Modeling of nonreacting and reacting turbulent spray jets using a fully stochastic separated flow approach

Numerical modeling of several turbulent nonreacting and reacting spray jets is carried out using a fully stochastic separated flow (FSSF) approach. As is widely used, the carrier-phase is considered in an Eulerian framework, while the dispersed phase is tracked in a Lagrangian framework following the stochastic separated flow (SSF) model. Various interactions between the two phases are taken into account by means of two-way coupling. Spray evaporation is described using a thermal model with an infinite conductivity in the liquid phase. The gas-phase turbulence terms are closed using the k-epsilon model. A novel mixture fraction based approach is used to stochastically model the fluctuating temperature and composition in the gas phase and these are then used to refine the estimates of the heat and mass transfer rates between the droplets and the surrounding gas-phase. In classical SSF (CSSF) methods, stochastic fluctuations of only the gas-phase velocity are modeled. Successful implementation of the FSSF approach to turbulent nonreacting and reacting spray jets is demonstrated. Results are compared against experimental measurements as well as with predictions using the CSSF approach for both nonreacting and reacting spray jets. The FSSF approach shows little difference from the CSSF predictions for nonreacting spray jets but differences are significant for reacting spray jets. In general, the FSSF approach gives good predictions of the flame length and structure but further improvements in modeling may be needed to improve the accuracy of some details of the Predictions. (C) 2011 The Combustion Institute. Published by Elsevier Inc. All rights reserved.

Mass Distribution Studies in Effervescent Sprays

An experimental study on liquid mass distribution in effervescent sprays using water and air as working fluids is presented in this paper. Optical patternation and techniques of image processing are employed for analyzing the spray. The flow regime inside the effervescent atomizer largely dictates the mass distribution patterns. The patterns are seen to vary from concentrated, poorly atomized liquid lumps to uniformly distributed, fine droplets as the flow regime changes from bubbly flow to annular flow. A large variety of instantaneous spray patterns are observed in bubbly flow regime indicating a highly unsteady atomization process. However, relatively better consistency in spray patterns is observed at higher gas flow rates. Thus, the degree of unsteadiness gradually diminishes as gas flow rate is increased. The axial evolution of the spray in annular mode shows good mixing of liquid and gas across the interface.

Microcontinuum approach to the pulsatile flow in tubes with and without longitudinal vibration

A fully developed pulsatile flow in a circular rigid tube is analysed by a microcontinuum approach. Solutions for radial variation of axial velocity and cell rotational velocity across the tube are obtained using the momentum integral method. Simplified forms of the solutions are presented for the relevant physiological data. Marked deviations in the results are observed when compared to a Newtonian fluid model. It is interesting to see that there is sufficient reduction in the mass flow rate, phase lag and friction due to the micropolar character of the fluid.