Copper Diffusion Barrier Deposition on Integrated Circuit Devices by Atomic Layer Deposition Technique

Transfer from aluminum to copper metallization and decreasing feature size of integrated circuit devices generated a need for new diffusion barrier process. Copper metallization comprised entirely new process flow with new materials such as low-k insulators and etch stoppers, which made the diffusion barrier integration demanding. Atomic Layer Deposition technique was seen as one of the most promising techniques to deposit copper diffusion barrier for future devices. Atomic Layer Deposition technique was utilized to deposit titanium nitride, tungsten nitride, and tungsten nitride carbide diffusion barriers. Titanium nitride was deposited with a conventional process, and also with new in situ reduction process where titanium metal was used as a reducing agent. Tungsten nitride was deposited with a well-known process from tungsten hexafluoride and ammonia, but tungsten nitride carbide as a new material required a new process chemistry. In addition to material properties, the process integration for the copper metallization was studied making compatibility experiments on different surface materials. Based on these studies, titanium nitride and tungsten nitride processes were found to be incompatible with copper metal. However, tungsten nitride carbide film was compatible with copper and exhibited the most promising properties to be integrated for the copper metallization scheme. The process scale-up on 300 mm wafer comprised extensive film uniformity studies, which improved understanding of non-uniformity sources of the ALD growth and the process-specific requirements for the ALD reactor design. Based on these studies, it was discovered that the TiN process from titanium tetrachloride and ammonia required the reactor design of perpendicular flow for successful scale-up. The copper metallization scheme also includes process steps of the copper oxide reduction prior to the barrier deposition and the copper seed deposition prior to the copper metal deposition. Easy and simple copper oxide reduction process was developed, where the substrate was exposed gaseous reducing agent under vacuum and at elevated temperature. Because the reduction was observed efficient enough to reduce thick copper oxide film, the process was considered also as an alternative method to make the copper seed film via copper oxide reduction.

Responses of Scots pine to nickel and copper exposure and herbivory

The goal of this thesis was to examine the ecophysiological responses of Scots pine (Pinus sylvestris L.), with an emphasis on the oxidative enzyme peroxidase and plant phenolics to environmental stresses like elevated levels of nickel (Ni) and copper (Cu), and herbivory. The effects of Ni and Cu were studied in a gradient survey at a sulphur dioxide contaminated site in the Kola Peninsula, and with experiments in which seedlings were exposed to Ni mist or to Ni and Cu amended into the soil. In addition, experimental Ni exposure was combined with disturbance of the natural lichen cover of the forest ground layer. Pine sawfly attack was simulated in the early season defoliation experiment, in which mature Scots pine were defoliated (100 %) during two successive years in a dry, nutrient-poor Scots pine stand. In addition, the effect of previous defoliation on the growth of sawfly (Diprion pini L.) larvae was studied. Apoplastic peroxidase activity was elevated in the needles of pine in a Ni- , Cu- and SO2- polluted environment, which indicated an increased oxidative stress. Increased foliar peroxidase activity due to Ni contamination was shown in the experiment, in which Ni was added as mist. No such response was found in peroxidase acitivity of the roots exposed to elevated Ni and/or Cu in the soil. Elevated Ni in the soil increased the concentration of foliar condensed tannins, which are able to bind heavy metals in the cells. Addition of low levels of Ni in the soil appeared to benefit pine seedlings, which was seen as promoted shoot growth and better condition of the roots. Wet Ni deposition of 2000 mg m-2 reduced growth and survival of pine seedlings, whereas deposition levels 200 mg m-2 or 20 mg m-2 caused no effects in a 2-y lasting experiment. The lichen mat on the forest floor did not act as an effective buffer against the adverse impacts of heavy metals on pine seedlings. However, some evidence was found indicating that soil microbes profited from the lichen mat. Artificial defoliation increased peroxidase activity in the Scots pine needles. In addition, defoliation decreased nitrogen, diamine putrescine and glucose concentrations in the needles and increased the concentrations of several phenolic compounds, starch and sucrose. Previous artificial defoliation led to poor growth of sawfly larvae reared on the pines, suggesting delayed induced resistance in Scots pine. However, there was no consistent relationship between inducibility (proportional increase in a compound following defoliation) and adverse effects on the growth of pine sawfly larvae. The observed inducible responses in needle phenolics due to previous defoliation thus appear to represent non-specific responses against sawflies.

Èto i to v povesti Staruha Daniila Harmsa

This dissertation focuses on the short story Starukha (The Old Woman), one of the last works of the Russian writer Daniil Kharms (1905-1942). The story, written in 1939, is analysed using the Kharmsian concepts èto and to (this and that) as a heuristic interpretative model. The first chapter gives a detailed analysis of this model, as well as a survey of the critical work done to date on Kharms and Starukha. In the second chapter the model is applied to study the different states of consciousness of the male protagonist. This is significant, because he is the "I" of the work, from whose point of view everything is being told. The third chapter takes a closer look at the reality of the world that exists independently of the consciousness of the protagonist. Physical objects can be said to bear - besides their everyday meaning - a hidden symbolic meaning. Similarly, the characters can be considered as representatives of everyday reality and otherworldliness. The fourth chapter deals with the narrative devices of Starukha. The problematics of the relation between fact and fiction plays an essential role in the story. Kharms's use of Ich-Erzählung and different tenses, which contributes to achieving a complicated elaboration of this kind of problematics, is examined in detail. The fifth chapter provides an intertextual reading of Starukha, based on its allusions to the Bible and the Christian tradition. As a result, the whole story can be seen as a kind of meditation on the Passion of Christ. The final chapter examines how the important Kharmsian concepts of the grotesque and the absurd manifest themselves in Starukha. The old woman represents in a grotesque way two opposite systems: the religious and the totalitarian. The absurdity of Starukha can be claimed to be illusory. Therefore, it is better to speak about paradoxicality. Starukha itself is a kind of paradox, in the sense that it tries to say something of the ultimate truth of reality, which inevitably remains ineffable.

Andegraund : Istorija i mify leningradskoj neoficial'noj literatury

The history of the Leningrad underground is one of the key themes of late socialism. Samizdat, "black humour", religious syncretism, dissidence, apolitical bohemianism, the pathos of freedom of individuality and the mechanics of literature are closely interlinked with the cultural mythology of this passed epoch. Describing conceptions that, when taken together, form the contemporary understanding of unofficial culture, the author creates a historical portrait of this environment. Amongst the central figures here, there are well-known writers (Bitov, Brodsky, Dovlatov, Khvostenko, Krivulin) and literary activists who still await recognition. The analysis of works, many of which were only distributed in typewritten publications in the 1960s-1980s, gives a preliminary definition of the key factors that united the authors of the unofficial community. The book begins with a critique of the identification of the Soviet underground with political dissidence or with a society living in autonomous independence with regard to the state. Describing the historical development of the various names for this environment (the underground, samizdat, unofficial culture, podpolie and others), the author follows the genesis of the community from its appearance, in the years of "the Thaw", through to perestroika, when it dissolved. Taking the history of the publication of Bitov's "The Pushkin House" as an example, the concept of the unofficial is interpreted as a risky interaction with the authorities. Unofficial culture is then viewed as a late Soviet reflection of the Western underground in the 1950s-1960s. Unlike the radical-utopian-anarchistic source, it proclaimed a liberalist and democratic ideology in the context of the destruction of the socialist utopia. The historical portrait of the community is built up from the perceptions of its members regarding literature practice and rhetorical approaches, with the aid of which these perceptions are expressed. Taking typewritten publications as source material, four main representations are given: privacy, deviancy, criticism and irrationality. An understanding of literature as a private affair, neo-avant-garde deviancy in social and literary behaviour and the pathos of the critical relationship with officialdom and irrational message of literary work, comprise the basis for the worldview of unofficial authors, as well as the poetic system, genre preferences and dictums. An analysis of irrationality, based on the texts of Khvostenko and Bogdanov, leads to a review of the cultural mythologies that were crucial to the unofficial conception of the absurd. Absurd is an homonym. It contains ideas that are important for the worldview of unofficial authors and the poetics of their works. The irrationality of the Soviet order is reflected in the documentary nature of the satirical prose of Dovlatov. The existential absurd of Camus is perceived here as the pointlessness of social realities and the ontological alienation of man, while existentialist practices for consciousness in the "atmosphere of absurd" remain bracketed off. The third homonym of absurd - the conception of reality as an illusion - is a clear demonstration of religious syncretism, where neo-Christian ideas are interweaved with a modernized version of Hinduism, as taken from Rolland s books on Ramakrishna and Vivekananda. The unofficial community was influenced by the ideology of westernization. Even "the East" arrived here via French retellings and accounts. As a whole, unofficial Leningrad culture can be understood as a neo-modernist phenomenon which, unlike the western neo-modernism of the 1940s and 1950s, arose in the years of the Thaw and ended its existence in the mid-1980s.

Recipient v russkom razgovore : o raspredelenii funkcij mezhdu otvetami da, nu i tak

The study investigates actions by recipients in spontaneous Russian conversations by focusing on DA, NU and TAK, when they are used as responses to the main speaker's larger on-going turn. The database for the study consists of some 7 hours of spontaneous conversations. The participants of the conversations come from different parts of Russia. The use of DA, NU and TAK was analyzed by applying the method of ethnomethodological conversation analysis from the point of view of the type of the context, the sequential placement of the response and its manner of production. The particles were analyzed both in contexts in which they responded to an informing and in affective contexts. The particles NU and TAK were used by the speakers almost exclusively in informing contexts, whereas DA was the central response type in affective contexts. DA was also the most common response to information with affective implications. The information, to which the particle NU provided as response, was often unspesific and projected a spesification or explanation by its speaker as the next action. DA and TAK, by contrast, treated the information as one that could be followed and was sufficient in its local context. As a response to parenthetical information NU responded to information that was only loosely connected with the mainline of talk. The particle DA, by contrast, was used as a response to such parenthetical information, which was more crucial for the larger on-going activity. Only NU was used as a response that invited the main speaker to continue a turn that she or he had offered as possibly complete. NU was also used by the recipient after her or his own contribution as a continuer. In affective contexts, DA expressed, depending on its more spesific context, not only agreement but also other functions, such as giving up arguing or prior knowledge on the topic being discussed. In addition DA responses were used to display empathy and identification with the state of affairs expressed by the co-participant. NU, by contrast, was seldom used as a response to a turn that expressed affect. When it was used in affective contexts, it displayed agreement with the co-participant or just registered an assessment by her or him.

Ivanov-mistik : Okkul'tnye motivy v poèzii i proze Vjačeslava Ivanova (1907-1919)

The subject of this work is the mysticism of Russian poet, critic and philosopher Vjacheslav Ivanov (1866-1949). The approach adopted involves the textual and discourse analysis and findings of the history of ideas. The subject has been considered important because of Ivanov's visions of his dead wife, writer Lydia Zinovieva-Annibal, which were combined with audible messages ("automatic writings"). Several automatic writings and descriptions of the visions from Ivanov's archive collections in St.Petersburg and Moscow are presented in this work. Right after the beginning of his hallucinations in the autumn of 1907, Ivanov was totally captivated by the theosophical ideas of Anna Mintslova, the background figure for this work. Anna Mintslova, a disciple of Rudolf Steiner's Esoteric School, offered Ivanov the theosophical concept of initiation to interpret paranormal phenomena in his intimate life. The work is divided into three main chapters, an introduction and aconclusion. The first chapter is called The Mystical Person: Anthropology of Ivanov and describes the role of the inner "Higher Self" in Ivanov's views on the nature of human consciousness. The political implications of the concepts, "mystical anarchism" and "sobornost" (religious unity) are also examined. The acquaintance and contacts with Anna Mintslova during 1906-1907 gave a framework to Ivanov's search for an organic society and personal religious experience. The second part, Mystics of Initiation and Visionary Aesthetics describes the influence of the initiation concept on Ivanov's aesthetic views (mainly "realistic symbolism"). On the other hand, some connections between the imagery of his visions and symbols in his verses of that period are established. Since Mintslova represented the ideas of Rudolf Steiner in Russia, several symbols shared by Steiner and Ivanov ("rose", "rose and cross") have been another subject of investigation. The preference for strict verse form in the lyrics of Ivanov's visionary period is interpreted as an attempt to place his own poetic creation within two traditions, a mystical and literary one. The third part of this work, Mystics of Hope and Terror, examines Ivanov's conception of Russia in connection with Mintslova's ideas of occult danger from the East. Ivanov's view of the "Russian idea" and his nationalistic idea during World War I are considered as a representation of the fear of the danger. Ivanov's interpretation of the October revolution is influenced by the theosophical concept of the "keeper of the threshold" which occurs in the context of the discourse of occult danger.

Analiz obraza ženščiny na osnove jazykovogo materiala ”Krest’janka” 1985, 1995 i 2005 gg.

Tämän tutkimuksen tarkoituksena on tutkia Venäjällä ilmestyvän ”Krest’janka”-lehden välittämää naiskuvaa. Tutkimukseen on valittu lehden vuosikerrat 1985, 1995 ja 2005, koska suuret muutokset Venäjällä ajoittuvat tälle aikavälille. Haluamme selvittää, miten naiskuva on muuttunut tänä aikana ja miten se välittyy lehden sivuilta. Tutkimukseemme olemme käyttäneet A.V. Kirilinan työssään käyttämiä metodeja. Keräsimme lehdistä kaikki verbilausekkeet, joiden subjektina on naista tarkoittava sana ja jaoimme ne luokkiin merkityksen mukaan. Jaottelun jälkeen analysoimme kerättyä aineistoa ja pyrimme löytämään kullekin vuosikerralle tyypillisiä verbilausekkeita. Tämän lisäksi keräsimme lehdistä kaikki naista kuvaavat adjektiivit ja vertailimme niiden käyttöä eri vuosina. Tulosten perusteella voidaan sanoa, että vuoden 1985 lehdissä vaikuttaa vielä voimakkaasti sosialismin ihanteet. Nainen kuvataan työnsä kautta aktiivisena ja tavoitteensa ylittävänä kansalaisena. Yksityiselämään ei juuri kiinnitetä huomiota. Vuoden 1995 ja 2005 lehtien naiset ovat keskenään hyvinkin samanlaisia. Naisen elämästä puhutaan nyt jo laajemmin. Työn lisäksi yksityiselämä ja tunteet ovat keskeisiä aiheita. Kun 1985 lehdissä ei puhuttu naisesta negatiiviseen sävyyn, niin 1995 ja 2005 vuosien lehdissä naista kuvataan myös negatiivisessa valossa. Myös yhteiskunnan epäkohtiin kiinnitetään huomiota naisen näkökulmasta.

Slovo lider i ego upotreblenie v sovremennoj rossijskoj presse

Venäjän kieleen on kautta historian lainautunut sanoja muista kielistä. Historian tapahtumat ovat vaikuttaneet siihen, mistä kielistä sanoja on lainautunut eri aikakausina. Viime vuosikymmeninä venäjän kieleen on tulvinut lainasanoja englannin kielestä yhteiskunnan eri alueille. Tiiviit poliittiset, taloudelliset ja kulttuurisuhteet maiden ja kansojen välillä ovat ulkoisia, ei-kielellisiä syitä sanojen lainaamiseen. Kielen osa-alueista sanasto on kaikista avoimin ulkoisille vaikutteille ja samalla se on alue, johon heijastuvat yhteiskunnassa tapahtuvat muutokset. Lainasanojen ilmaantumiselle kieleen on myös sisäisiä, kielellisiä syitä. Lainasanojen ilmaantumisessa kirjallisessa muodossa venäjän kieleen voidaan erottaa kolme tapaa: transplantaatio eli sitaattilaina, translitteraatio sekä käytännöllinen transkriptio, jossa jokainen vieraskielinen foneemi pyritään esittämään vastaavalla venäjän foneemilla, jolloin vieraskielisen sanan ääntämys säilyy mahdollisimman alkuperäisenä. Lider-sana on esimerkki käytännöllisestä transkriptiosta, jossa venäläinen kirjoitusasu vastaa englannin kielen ääntämystä. Tutkimuksen kohteena on englanninkielinen lainasana lider, joka on ilmaantunut venäjän kieleen jo 1800-luvun puolivälissä. Sana on johdettu verbistä lead, merkityksessä ’johtaa, olla johdossa’, ja siinä on muodostunut substantiivi leader, ’johtaja’. Tutkimusaineistoa varten on poimittu 100 poliittiseen kielenkäyttöön liittyvää lider-sanaa sähköisessä tietokannassa Integrumissa olevassa Izvestija-lehdestä kahtena eri ajanjaksona, vuoden 1994 alusta alkaen sekä vuoden 2004 alusta alkaen. Tutkimuksessa keskityttiin lider-sanan käyttöön poliittisessa kielenkäytössä, mutta tutkimusaineiston keräysvaiheessa kirjattiin ylös myös muilla aihealueilla esiintyneet lider-sanat niidenkin käytön tarkastelua varten. Tutkimusta varten tarkasteltiin, millaisia määrityksiä lider-sanalle löytyy erilaisista nykykielen sanakirjoista eri vuosikymmeniltä. Vanhin mukana oleva sanakirja on venäläis-suomalainen sanakirja vuodelta 1912, jossa lider-sana määritellään yhdellä sanalla, ’puolueenjohtaja’. Aineisto jaettiin myös kolmeen ryhmään maantieteellisen sijainnin mukaan: Venäjä, entiset neuvostotasavallat ja ulkomaat. Tällä haluttiin selvittää, käytetäänkö lider-sanaa enemmän ulkomaisten vai venäläisten tapahtumin yhteydessä. Tutkimuksessa ilmeni, että suurin osa lider-sanoista liittyi Venäjän tapahtumiin molempina tarkasteluajanjaksoina – v. 1994 osuus oli 54 % ja v. 2004 50 %. Tähän tulokseen vaikuttavat varmaankin v. 1993 joulukuussa pidetyt ensimmäiset parlamenttivaalit sekä vuoden 2003 joulukuussa pidetyt duuman vaalit. Tutkimuksessa lider-sana jaettiin seitsemään eri kategoriaan käyttöyhteytensä mukaan ja saatujen tulosten perusteella suuri9n osa sanoista kuului kategoriaan ”puolueen johtaja”, v. 1994 osuus oli 47 % ja v. 2004 oli 40 %. Lider-sanan käyttö on levinnyt myös monelle muulle alueelle: urheilu, liike-elämä, kulttuuri, taide, tiede ja tekniikka. Venäjän kieleen ilmaantuu koko ajan vieraskielisiä sanoja, mutta kaikki niistä eivät sopeudu eivätkä juurru kieleen. Lainasanan on täytettävä tiettyjä edellytyksiä, jotta sitä voitaisiin pitää kieleen sopeutuneena: mukautumien kielen foneettiseen järjestelmään, sopeutuminen kielen graafiseen järjestelmään, sopeutuminen kieliopilliseen ympäristöön, semanttinen vakiintuminen sekä vakiintuminen vähintään kahdelle temaattiselle alueelle. Lainasanan juurtumisesta ja sopeutumisesta ovat todisteena myös siitä johdetut sanat. Lider-sana täyttää kaikki em. ehdot, joten sitä voidaan pitää venäjän kieleen sopeutuneena ja juurtuneena.