Aberration measurement of projection optics in lithographic tools based on two-beam interference theory

The degradation of image quality caused by aberrations of projection optics in lithographic tools is a serious problem in optical lithography. We propose what we believe to be a novel technique for measuring aberrations of projection optics based on two-beam interference theory. By utilizing the partial coherent imaging theory, a novel model that accurately characterizes the relative image displacement of a fine grating pattern to a large pattern induced by aberrations is derived. Both even and odd aberrations are extracted independently from the relative image displacements of the printed patterns by two-beam interference imaging of the zeroth and positive first orders. The simulation results show that by using this technique we can measure the aberrations present in the lithographic tool with higher accuracy. (c) 2006 Optical Society of America.

Aberration measurement of projection optics in lithographic tools by use of an alternating phase-shifting mask

As a critical dimension shrinks, the degradation in image quality caused by wavefront aberrations of projection optics in lithographic tools becomes a serious problem. It is necessary to establish a technique for a fast and accurate in situ aberration measurement. We introduce what we believe to be a novel technique for characterizing the aberrations of projection optics by using an alternating phase-shifting mask. The even aberrations, such as spherical aberration and astigmatism, and the odd aberrations, such as coma, are extracted from focus shifts and image displacements of the phase-shifted pattern, respectively. The focus shifts and the image displacements are measured by a transmission image sensor. The simulation results show that, compared with the accuracy of the previous straightforward measurement technique, the accuracy of the coma measurement increases by more than 30% and the accuracy of the spherical-aberration measurement increases by approximately 20%. (c) 2006 Optical Society of America.

Measurement technique for in situ characterizing aberrations of projection optics in lithographic tools

As the feature size decreases, degradation of image quality caused by wavefront aberrations of projection optics in lithographic tools has become a serious problem in the low-k1 process. We propose a novel measurement technique for in situ characterizing aberrations of projection optics in lithographic tools. Considering the impact of the partial coherence illumination, we introduce a novel algorithm that accurately describes the pattern displacement and focus shift induced by aberrations. Employing the algorithm, the measurement condition is extended from three-beam interference to two-, three-, and hybrid-beam interferences. The experiments are performed to measure the aberrations of projection optics in an ArF scanner. (C) 2006 Optical Society of America.

Coma measurement of projection optics in lithographic tools based on relative image displacements at multiple illumination settings

In this paper, we propose a novel method for measuring the coma aberrations of lithographic projection optics based on relative image displacements at multiple illumination settings. The measurement accuracy of coma can be improved because the phase-shifting gratings are more sensitive to the aberrations than the binary gratings used in the TAMIS technique, and the impact of distortion on displacements of aerial image can be eliminated when the relative image displacements are measured. The PROLITH simulation results show that, the measurement accuracy of coma increases by more than 25% under conventional illumination, and the measurement accuracy of primary coma increases by more than 20% under annular illumination, compared with the TAMIS technique. (c) 2007 Optical Society of America.

Differential selection on gene translation efficiency between the filamentous fungus Ashbya gossypii and yeasts

Background: The filamentous fungus Ashbya gossypii grows into a multicellular mycelium that is distinct from the unicellular morphology of its closely related yeast species. It has been proposed that genes important for cell cycle regulation play central

The topological configuration and conformational analysis of mRNA in translation

The theoretical model construction of mRNA hairpin structure and single-stranded structure as well as the simulation studies on RNA structure determined by the X-ray crystal diffraction and nuclear magnetic resonance revealed that in translation, after mRNA being unfolded into single-stranded structure, its topological configuration was closely correlative with the original hairpin structure. The conformational features of single-stranded mRNA appeared as helical regions alternating with curly regions to different extents, which might exert the influence on the folding of nascent polypeptide by various regulating effects including different translational rates.

The relation between translation speed and protein secondary structure

Based on the statistical analysis of 119 human and 92 E. coli proteins it was found that for both human and E. coli, the mRNA sequences consisting of tri-codon and tetra-codon with high translation speed preferably code for alpha helices more than for coils. For beta strand, the preference/ avoidance oscillates with the translation speed. Moreover, the non-homogeneous usages of tri-codon and tetra-codon with different translation speeds in a given secondary structure have also been found. These results cannot be simply explained by the effect of stochastic fluctuation.

An algorithm of analysis tools on points distribution in high dimension space: The distance of a point and an infinite sub-space

This paper discusses the algorithm on the distance from a point and an infinite sub-space in high dimensional space With the development of Information Geometry([1]), the analysis tools of points distribution in high dimension space, as a measure of calculability, draw more attention of experts of pattern recognition. By the assistance of these tools, Geometrical properties of sets of samples in high-dimensional structures are studied, under guidance of the established properties and theorems in high-dimensional geometry.

A Structured Prediction Approach for Statistical Machine Translation

We propose a new formally syntax-based method for statistical machine translation. Transductions between parsing trees are transformed into a problem of sequence tagging, which is then tackled by a search- based structured prediction method. This allows us to automatically acquire transla- tion knowledge from a parallel corpus without the need of complex linguistic parsing. This method can achieve compa- rable results with phrase-based method (like Pharaoh), however, only about ten percent number of translation table is used. Experiments show that the structured pre- diction approach for SMT is promising for its strong ability at combining words.

Wear mechanism map of uncoated HSS tools during drilling die-cast magnesium alloy

A wear mechanism map of uncoated high-speed steel (HSS) tools was constructed under the conditions of dry-drilling die-cast magnesium alloys. Three wear mechanisms appear in the map based on the microanalysis of drilled HSS tools by SEM, including adhesive wear, abrasive wear and diffusion wear. In the map, there exists a minor wear region which is called "safety zone". This wear mechanism map will be a good reference for choosing suitable drilling parameters when drilling die-cast magnesium alloys.

Rapid fabrication of Au nanoparticle films with the aid of centrifugal force

In this work, rapid fabrication of Au nanoparticle (Au NP) films has been simply achieved by alternate adsorption of citrate-stabilized Au NPs and poly(diallyldimethylammonium chloride) with the aid of centrifugal force. In contrast to conventional electrostatic assembly, we carried out the assembly process in a centrifuge with a rotating speed of 4000 rpm, where centrifugal force can be imposed on Au NPs. Scanning electron microscopy and cyclic voltammetry were employed to characterize the assembly procedure and the thus-prepared thin solid films. Our results demonstrate that centrifugal force can promote the assembly of Au NPs and therefore enable the rapid fabrication of functional Au NP films.

In vitro selected peptides bind with thymidylate synthase mRNA and inhibit its translation

Thymidylate synthase (TS), an essential enzyme for catalyzing the biosynthesis of thymidylate, is a critical therapeutic target in cancer therapy. Recent studies have shown that TS functions as an RNA-binding protein by interacting with two different sequences on its own mRNA, thus, repressing translational efficiency. In this study, peptides binding TS RNA with high affinity were isolated using mRNA display from a large peptide library (>10(13) different sequences). The randomized library was subjected up to twelve rounds of in vitro selection and amplification. Comparing the amino acid composition of the selected peptides (12th round, R12) with those from the initial random library (round zero, R0), the basic and aromatic residues in the selected peptides were enriched significantly, suggesting that these peptide regions might be important in the peptide-TS mRNA interaction. Categorizing the amino acids at each random position based on their physicochemical properties and comparing the distributions with those of the initial random pool, an obvious basic charge characteristic was found at positions 1, 12, 17 and 18, suggesting that basic side chains participate in RNA binding. Secondary structure prediction showed that the selected peptides of R12 pool represented a helical propensity compared with R0 pool, and the regions were rich in basic residues. The electrophoretic gel mobility shift and in vitro translation assays showed that the peptides selected using mRNA display could bind TS RNA specifically and inhibit the translation of TS mRNA. Our results suggested that the identified peptides could be used as new TS inhibitors and developed to a novel class of anticancer agents.

Global Translation Preferred Active Contour

具有全局平移优先属性的主动轮廓更适于目标跟踪。演化轮廓具有的全局平移优先性可以理解为沿轮廓的速度场具有相等的倾向。根据此思想,通过定义在曲线扰动集合上的新内积空间导出了一种简单,具有平移优先的梯度流。新的内积空间由于是通过向H0主动轮廓对应的內积空间引入曲线扰动的方差获得,所以此主动轮廓称为方差主动轮廓。方差主动轮廓是将H0主动轮廓与其对应的平均梯度流通过加权求和获得,而H1主动轮廓则是通过H0主动轮廓与特定类型的核函数进行卷积得到。因此方差主动轮廓实现时更简单和快速。最后给出了H0,H1和方差主动轮廓在频域与时域的分析。

基于Arc Hydro Tools的流域特征自动提取——以贵州省内乌江流域为例

简要回顾和讨论了基于栅格数字高程模型(DEM)自动提取流域特征的原理和方法，介绍了一个新的基于ArcGIS开发的提取流域特征的工具Arc Hydro Tools，基于Arc Hydro Tools 提取流域特征包括5 个流程：DEM 的预处理、水流流向的确定、汇流栅格图的生成、河网的自动生成、子流域边界的划分。最后以贵州省内乌江流域为研究区进行了试验，试验结果表明：提取结果的精度在总体上是符合要求的，但在地势平坦区或人类活动干扰较大的地区，提取的结果与实际相差较大。从提取的效率和试验结果的精度两方面来看，基于Arc Hydro Tools 的流域特征自动提取是切实可行的。

基于可复制性的独立成分分析——应用于功能磁共振成像数据

This dissertation systematically depicted and improved the application of Independent Component Analysis (ICA) to Functional Magnetic Resonance Imaging (fMRI), following the logic of verification, improvement, extension, and application. The concept of “reproducibility” was the philosophy throughout its four concluded studies. In the “verification” study, ICA was applied to the resting-state fMRI data, verified the resultant components with reproducibility, and examined the consistency of the results from ICA and traditional “seed voxel” method. At the meantime, the limitation of ICA application on fMRI data analysis was presented. In the “improvement” study, an improved ICA algorithm based on reproducibility, RAICAR, was developed to aid some of the limitations of ICA application. RAICAR was able to rank ICA components by reproducibility, determine the number of reliable components, and obtain more stable results. RAICAR provided useful tools for validation and interpretation of ICA results. In the “extension” study, RAICAR as well as the concept of “reproducibility” was extended to multi-subject ICA analysis, and gRAICAR algorithm was developed. gRAICAR allows some variation across subjects, examining common components among subjects. gRAICAR is also capable to detect potential subject grouping on some components. It is a new way for exploratory group analysis on fMRI. In the “application” study, two newly developed methods, RAICAR and gRAICAR, were used to investigate the effect of early music training on the brain mechanism of memory and learning. The results showed brain mechanism difference in memory retrieval and learning process between two groups of subjects. This study also verified the usefulness and importance of the new methods.