Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition

Thickness and component distributions of large-area thin films are an issue of international concern in the field of material processing. The present work employs experiments and direct simulation Monte Carlo (DSMC) method to investigate three-dimensional low-density, non-equilibrium jets of yttrium and titanium vapor atoms in an electron-beams physical vapor deposition (EBPVD) system furnished with two or three electron-beams, and obtains their deposition thickness and component distributions onto 4-inch and 6-inch mono-crystal silicon wafers. The DSMC results are found in excellent agreement with our measurements, such as evaporation rates of yttrium and titanium measured in-situ by quartz crystal resonators, deposited film thickness distribution measured by Rutherford backscattering spectrometer (RBS) and surface profilometer and deposited film molar ratio distribution measured by RBS and inductively coupled plasma atomic emission spectrometer (ICP-AES). This can be taken as an indication that a combination of DSMC method with elaborate measurements may be satisfactory for predicting and designing accurately the transport process of EBPVD at the atomic level.

Continuous weak measurement and feedback control of a solid-state charge qubit: A physical unravelling of non-Lindblad master equation

Conventional quantum trajectory theory developed in quantum optics is largely based on the physical unravelling of a Lindblad-type master equation, which constitutes the theoretical basis of continuous quantum measurement and feedback control. In this work, in the context of continuous quantum measurement and feedback control of a solid-state charge qubit, we present a physical unravelling scheme of a non-Lindblad-type master equation. Self-consistency and numerical efficiency are well demonstrated. In particular, the control effect is manifested in the detector noise spectrum, and the effect of measurement voltage is discussed.

PHYSICAL VAPOR TRANSPORT AND CRYSTAL-GROWTH OF GESEXTE1-X SOLID-SOLUTIONS

Physical vapor transport studies of GeSe(x)Te1 - x (x = 0.1, 0.2, 0.3, and 0.4) solid solutions demonstrated, that individual, large single crystals of these materials can be grown in closed ampoules. A compositional analysis of the grown crystals revealed, that the mass transport (crystal growth) process under steady-state conditions is pseudo-congruent and controlled by diffusion processes in the source material. From these experiments, the degree of non-stoichiometry (Ge-vacancy concentrations) of GeSe(x)Te1 - x single crystals could be estimated. The effects of the cubic to rhombohedral phase transformation during cooling on the microstructure and morphology of the grown mixed crystals are observed. This work provides the basis for subsequent defect studies and electrical measurements on these crystals.

Morphologies and physical properties of PA1010/HIPS/HIPS-g-MA ternary blends

The effect of the content of a copolymer consisting of high impact polystyrene grafted with maleic anhydride (HIPS-g-MA) on morphological and mechanical properties of PA1010/HIPS blends has been studied. Blend morphologies were controlled by adding HIPS-g-MA during melt processing, thus the dispersion of the HIPS phase and interfacial adhesion between the domains and matrices in these blends were changed obviously. The weight fractions of HIPS-g-MA in the blends increased from 2.5 to 20, then much finer dispersions of discrete HIPS phase with average domain sizes decreased from 6.1 to 0.1 mu m were obtained. It was found that a compatibilizer, a graft copolymer of HIPS-g-MA and PA1010 was synthesized in situ during the melt mixing of the blends. The mechanical properties of compatibilized blends were obviously better than those of uncompatibilized PA1010/HIPS blends. These behaviors could be attributed to the chemical interactions between the two components of PA1010 and HIPS-g-MA and good dispersion in PA1010/HIPS/HIPS-g-MA blends. Evidence of reactions in the blends was seen in the morphology and mechanical behaviour of the solid. The blend containing 5 wt % HIPS-g-MA component exhibited outstanding toughness. (C) 1999 Kluwer Academic Publishers.