Talbot-SNOM method for non-contact evaluation of high-density gratings

A Talbot scanning near-field optical microscopy (SNOM) method for non-contact evaluating of high-density gratings was described. This method combines the Talbot self-imaging effect of the gratings and the conventional SNOM technique without damage. The significant advantages of this method are its simple structure, reliable and fast measurement for the surface quality of the tested gratings. Experimental results of three different kinds of gratings were demonstrated to indicate that this method is effective for evaluation surface quality of high-density gratings. (c) 2004 Elsevier B.V. All rights reserved.

Combined effect of surface tension, gravity and van der Waals force induced by a non-contact probe tip on the shape of liquid surface

Aiming at understanding how a liquid film on a substrate affects the atomic force microscopic image in experiments, we present an analytical representation of the shape of liquid surface under van der Waals interaction induced by a non-contact probe tip. The analytical expression shows good consistence with the corresponding numerical results. According to the expression, we find that the vertical scale of the liquid dome is mainly governed by a combination of van der Waals force, surface tension and probe tip radius, and is weekly related to gravity. However, its horizontal extension is determined by the capillary length.

非接触式机器人直线轨迹测量系统

本文给出了一种基于视觉的、造价低廉实用的非接触式机器人直线轨迹测量系统 .该测量系统由结构光视觉传感器、测量轨道、主控计算机及相关软件组成 .视觉传感器可固定于机器人末端 .当机器人末端带动视觉传感器沿测量轨道做直线运动时 ,通过传感器测量相对测量轨道的连续位姿关系 ,就可间接描述机器人末端的运动轨迹 .当重复同一直线运动时 ,可检测出机器人的轨迹重复性 .本文综述了机器人直线轨迹测量设备的研究现状 ,介绍了轨迹检测系统的测量原理 ,重点讨论了该测量系统的两个关键技术 :空间特征点的图象提取技术和三维坐标计算方法 ,并描述了该系统的结构、性能指标和测量试验结果 .

Experimental-study of free-surface oscillations of a liquid bridge by optical diagnostics

A non-contact optical method, consisting of a projecting grating technique for the relative measurement of a surface, and a technique of absolute measurement at a fixed point on the surface, are applied to measure the free surface vibration in a liquid bridge of half floating zone with small typical scale of a few of mm for emphasizing the thermocapillary effect in comparison with the effect of buoyancy. The radii variations in both longitudinal and azimuthal directions are obtained, and, then, the feature of surface wave could be analyzed in detail. The results show that there are values of principal oscillatory frequencies at different positions of free surface. The amplitudes of surface waves in longitudinal and azimuthal directions are several mum and several tenths of mum in order of magnitude. The phase of two-dimensional surface waves is different at different height for fixed cross section or at different azimuthal angle for fixed height. The wave features are discussed for the cases of typical parameter ranges.

Preparation of 50mm 3C-SiC/Si(111) as Substrates Suited for Ⅲ-Nitrides

50mm SiC films with high electrical uniformity are grown on Si(111) by a newly developed vertical low-pressure chemical vapor deposition (LPCVD) reactor.Both in-situ n- and p-type doping of 3C-SiC are achieved by intentional introduction of ammonia and boron into the precursor gases.The dependence of growth rate and surface morphology on the C/Si ratio and optimized growth conditions is obtained.The best electrical uniformity of 50mm 3C-SiC films obtained by non-contact sheet resistance measurement is ±2.58%.GaN films are grown atop the as-grown 3C-SiC/Si(111) layers using molecular beam epitaxy (MBE).The data of both X-ray diffraction and low temperature photoluminescence of GaN/3C-SiC/Si(111) show that 3C-SiC is an appropriate substrate or buffer layer for the growth of Ⅲ-nitrides on Si substrates with no cracks.

自由曲面透明体的非接触厚度测量

针对自由曲面透明体厚度测量,提出一种基于结构光机理的3D 视觉测量方法和系统结构,介绍了该方法的基本原理和测量系统实现技术,并给出了部分实验,证实了该方法的有效性。

LW-1型机器人重复位姿精度检测系统

本文介绍了一种非接触式（ＬＷ－１型）机器人重复位姿精度检测系统．该系统采用电涡流传感器作为位置信息传感器．以这种传感器的检测性能为基础，研究设计了相应的传感器测量结构、数学模型和坐标变换求解方法，使系统技术指标及使用性能达到了检测机器人重复位姿精度的实用要求．该系统具有鲁棒性强、设计合理、结构简单、造价低廉等特点，可以满足我国现阶段在机器人学研究和机器人开发应用方面的需求

一种步进扫描投影光刻机承片台不平度检测新技术

提出一种步进扫描投影光刻机承片台不平度检测新技术。在晶圆与承片台存在不同偏移量时,利用线性差分传感器在线测量晶圆上不同点的局部高度;通过建立临时边界条件,以递推法消除晶圆面形影响,并逐行计算出承片台的相对不平度;通过逐行计算的结果递推相邻行之间的高度差,并将该高度差叠加到每一行,以消除临时边界条件的限制,得到处于同一高度上的承片台不平度;将计算的结果作为初始值,根据最小二乘原理,以邻近的四个测量点作为参考,逐步逼近得到承片台的真实不平度。计算机仿真结果验证了该检测方法的正确性,计算结果逐步收敛并逼近真实值

一种测量光刻机工件台方镜不平度的新方法

提出一种新的步进扫描投影光刻机工件台方镜不平度测量方法。以方镜平移补偿量与旋转补偿量为测量目标,使用两个双频激光干涉仪分别测量工件台在x和y方向的位置和旋转量；将方镜不平度的测量按照一定的偏移量分成若干个序列,每一个序列包括对方镜有效区域的若干次往返测量；根据所有序列的测量结果计算出方镜的旋转补偿量；为每一个序列建立临时边界条件,并据此计算出每一序列所测得的方镜粗略平移补偿量；采用三次样条插值与最小二乘法建立每一个序列间的关系,以平滑连接所有测量序列得到精确的方镜平移补偿量。结果表明,该方法用于测量方镜平

非拦截式束流强度测量方法的研究

本文全面地论述了在HIRFL束流诊断系统中，利用测量束流相宽和中心相位的圆柱形容性感应式相位探针，进行非拦截式束流强度测量方法的研制开发及这一系统的软硬件结构。论文阐述了目前国际国内加速器以及HIRFL的束流诊断技术的发展现状和本论文的研究工作及其意义；简要概述了常见的几种束流强度的测量方法，详细地介绍了相位探针感应束流信号原理和几种束团开矿感应信号的模拟计算，并从该感应信号中撮束流强度等信息；介绍了测量仪表及其测量原理和性能；同时阐述了系统软件的设计方法，并介绍了测控系统中的软件模块设计以及虚拟仪器系统技术在本测量系统中的应用。通过GPIB接口总线技术的应用，编写基于Windows操作系统的测量控制软件，实现了对几种可编程测量方法的实验结果分析和作者对未来HIRFL束流诊断系统进一步工作的设想。该课题的研究取得了较为满意的结果，目前系统已经投入HIRFL调束运行中，与HIRFL中原有的法拉第筒测量束流强度的系统相比，该系统具有操作方便、可以在不阻挡束流的工作状态下测量和控制，在线获取参数等优点。

激光诱导等离子体光谱法检测合金钢组分的实验研究

激光诱导击穿光谱技术(LIBS)具有无需样品制备,原位快速分析,可进行实时控制的特点使其在钢铁冶炼控制中具有巨大的实际应用价值。本文以波长为1 064 nm的Nd∶YAG调Q固体激光器为激发光源,CCD为探测器,高合金钢GBW01605—01609系列为样品,在建立的LIBS实验装置上研究激光与合金钢之间的相互作用。系统地研究了观测距离、激光能量对高合金钢样品中激光诱导击穿谱特性的影响,并分析了LIBS信号的时间分辨特性,确定了将LIBS用于合金钢微量元素定量分析时的最佳实验条件。

基于软粘土微观特性的非线性固结理论研究

The land subsidence of soft clay is including natural and man-made content, which leads to the research on the mechanism of land subsidence constituted by two different aspects, which are studied by geological engineers and geologist. The main major research is focused on the effects of engineering. The land subsidence engineering of soil mechanics is caused by the consolidation and compression of soft clay, the content of which is including the micro-structural characteristics, the stress - strain constitutive relation, porous law, and consolidation theory. In this paper, it is discussed the nonlinear consolidation and compression theory of soft clay. The main studies and conclusions of this thesis are as follows. （1）The micro-structure and its stability are closely related to the engineering characters of soft clay. The stiffness and force connection status of micro-structure plays a controlling influence to its stability. （2）Under saturated state, clay particles remain in a non-full contact or non-contact status, so it is needed to modify the Terzaghi effective stress principle. With the discharge of pore water, the effective stress is increasing, and part of weakly bound-water begins flow, while the porosity and permeability are became lower. （3）It exist non-linear flow in soft clay, which is caused by the shear flow situation of weakly bounded-water. In this case, permeability coefficient is a nonlinear function of hydraulic gradient. （4）In the initial consolidation stage of soft clay in the initial stage, the porous flow is mainly caused by the excretion of free water. With the decrease of free water content, combined bonded-water start to supply free water. At the later stage of consolidation, the flow of fluid is mainly consisted by weakly bounded-water. The exchange between bonded-water and free water is played a role, which slows down the consolidation process.

Generalized Maugis-Dugdale Model of an Elastic Cylinder in Non-Slipping Adhesive Contact with a Stretched Substrate

We have recently developed a generalized JKR model for non-slipping adhesive contact between an elastic cylinder and a stretched substrate where both tangential and normal tractions are transmitted across the contact interface. Here we extend this model to a generalized Maugis-Dugdale model by adopting a Dugdale-type adhesive interaction law to eliminate the stress singularity near the edge of the contact zone. The non-slipping Maugis-Dugdale model is expected to have a broader range of validity in comparison with the non-slipping JKR model. The solution shares a number of common features with experimentally observed behaviors of cell reorientation on a cyclically stretched substrate.

Non-slipping Adhesive Contact between Mismatched Elastic Cylinders

要: We have recently proposed a generalized JKR model for non-slipping adhesive contact between two elastic spheres subjected to a pair of pulling forces and a mismatch strain (Chen, S., Gao, H., 2006c. Non-slipping adhesive contact between mismatched elastic spheres: a model of adhesion mediated deformation sensor. J. Mech. Phys. Solids 54, 1548-1567). Here we extend this model to adhesion between two mismatched elastic cylinders. The attention is focused on how the mismatch strain affects the contact area and the pull-off force. It is found that there exists a critical mismatch strain at which the contact spontaneously dissociates. The analysis suggests possible mechanisms by which mechanical deformation can affect binding between cells and molecules in biology.

Bio-inspired mechanics of reversible adhesion: Orientation-dependent adhesion strength for non-slipping adhesive contact with transversely isotropic elastic materials

Geckos and many insects have evolved elastically anisotropic adhesive tissues with hierarchical structures that allow these animals not only to adhere robustly to rough surfaces but also to detach easily upon movement. In order to improve Our understanding of the role of elastic anisotropy in reversible adhesion, here we extend the classical JKR model of adhesive contact mechanics to anisotropic materials. In particular, we consider the plane strain problem of a rigid cylinder in non-slipping adhesive contact with a transversely isotropic elastic half space with the axis of symmetry oriented at an angle inclined to the surface. The cylinder is then subjected to an arbitrarily oriented pulling force. The critical force and contact width at pull-off are calculated as a function of the pulling angle. The analysis shows that elastic anisotropy leads to an orientation-dependent adhesion strength which can vary strongly with the direction of pulling. This study may suggest possible mechanisms by which reversible adhesion devices can be designed for engineering applications. (C) 2006 Elsevier Ltd. All rights reserved.