Classical correlated imaging from the perspective of coherent-mode representation

We use coherent-mode representation of partially coherent fields to analyze correlated imaging with classical light sources. This formalism is very useful to study the imaging quality. By decomposing the unknown object as the superposition of different coherent modes, the components corresponding to small eigenvalues cannot be well imaged. The generated images depend crucially on the distribution of the eigenvalues of the coherent-mode representation of the source and the decomposition coefficients of the objects. Three kinds of correlated imaging schemes are analyzed numerically.

Method for measuring the lateral aberrations of a lithographic projection system with mirror-symmetric FOCAL marks

A novel method for measuring the imaging quality of a projection system with mirror-symmetric FOCAL marks is proposed, and the principle of the method is described. Through experiments, it is demonstrated that not only the axial aberrations but also the lateral aberrations can be measured with high accuracy by the method. The advantages of the method include obtaining more aberrations than the FOCAL technique and making it much simpler to perform a full-scale measurement of the imaging quality of a lithographic projection system. (C) 2006 Society of Photo-Optical Instrumentation Engineers.

Method for measuring the lateral aberrations of a lithographic projection system with mirror-symmetric FOCAL marks

A novel method for measuring the imaging quality of a projection system with mirror-symmetric FOCAL marks is proposed, and the principle of the method is described. Through experiments, it is demonstrated that not only the axial aberrations but also the lateral aberrations can be measured with high accuracy by the method. The advantages of the method include obtaining more aberrations than the FOCAL technique and making it much simpler to perform a full-scale measurement of the imaging quality of a lithographic projection system. (C) 2006 Society of Photo-Optical Instrumentation Engineers.

Design and application of three-zone annular filters

We design three-zone annular filters to be applied to optical storage system. The designed filters extend the depth of focus and realize transverse superresolution simultaneously, which will improve the performance of optical storage system greatly. And we propose two feasible schemes to improve imaging resolution of three-dimensional imaging system. One scheme depends on a complex filter formed by cascading of a three-zone phase filter and a three-zone amplitude filter. The complex filter converge the optimized transverse superresolution and the optimized axial superresolution of two different filters onto a single filter. It can improve the three-dimensional imaging performances greatly. Another scheme depends on a single three-zone complex filter. We propose a three-zone complex filter with phase shift 0.8 pi, which presents bigger design margin, better imaging quality and stronger three-dimensional superresolution capability. (c) 2006 Elsevier GmbH. All rights reserved.

Multimode Interference Couplers with Different Background Refractive Index *

A novel structure of MMI coupler with different background refractive index has been designed. With stronger optical confinement in multimode waveguides, more guided modes are excited to improve imaging quality. Two-dimensional finite difference beam propagation method (2-D FDBPM) was used to simulate this new structure and had proven that its imaging quality, in terms of power uniformity and excess loss, is much better than conventional structure. This structure can be applied in SOI rib waveguides by deep etching method.

地球介质非线性与各向异性的地震波响应及其成像效应

The practice of geophysical prospecting shows us the complex interior earth. The studies of the complexity play an important role and practical guide for the subsurface structure. At present, the complexity of the earth mainly means lateral and vertical homogeneity, anisotropy and non-linear quality. And the anisotropy and non-linear media studies become the frontier in seismology and exploration seismology. This paper summarizes the development of complexities and presents the forward and inverse in the non-linear and anisotropic media. Firstly, the paper introduces the theory of seismic wave propagation in the non-linear and anisotropic media, the theoretical basis for simulation and inversion research. Secondly, high quality numerical simulation method with little dispersion has been developed to investigate the influence of complexity including anisotropy and non-linear multi-component seismograms. Because most real data in seismology have a single component, we developed two aspects work on anisotropic multi-component imaging. One is prestack reflection migration. The result show that distorted images are obtained if data from anisotropic media are migrated using isotropic extrapolation. Moreover, image quality will be improved greatly after considering anisotropy in subsurface layers. The other one is the we take advantage of multi-component data to inversion of the anisotropic parameters jointly seimic reflection travel time and polarization information. Based on these research works, we get the following results: 1.Combing numerical simulation, systematical studies indicate that anisotropy and non-linear seismograms characters are significant to detect cracked belts in the earth and to understand deformation field and mechanism. 2.Based on anisotropic media models, we developed an efficient prestack migration method for subsurface structure and different observation methods seismic data, which improving the imaging quality with VSP, seismograms and real data. 3.Jointly seismic inversion combining seismic anisotropic reflection traveltimes and polarizations data show that the complete wrong inversion and the following explanation will be resulted by ignoring anisotropy.

Resolution and noise in ghost imaging with classical thermal light

The resolution and classical noise in ghost imaging with a classical thermal light are investigated theoretically. For ghost imaging with a Gaussian Schell model source, the dependences of the resolution and noise on the spatial coherence of the source and the aperture in the imaging system are discussed and demonstrated by using numerical simulations. The results show that an incoherent source and a large aperture will lead to a good image quality and small noise.

Impact of polarized illumination on high NA imaging in ArF immersion lithography at 45 nm node

Immersion lithography has been considered as the mainstream technology to extend the feasibility of optical lithography to further technology nodes. Using proper polarized illumination in an immersion lithographic tool is a powerful means to enhance the image quality and process capability for high numerical aperture (NA) imaging. In this paper, the impact of polarized illumination on high NA imaging in ArF immersion lithography for 45 nm dense lines and semi-dense lines is studied by PROLITH simulation. The normalized image log slope (NILS) and exposure defocus (ED) window are simulated under various polarized illumination modes, and the impact of polarized illumination on image quality and process latitude is analyzed. (C) 2007 Elsevier GmbH. All rights reserved.