Behavior of ar plasma formed in a high-density plasma source - an ecr reactor

In order to develop the ultra-large scale integration(ULSI), low pressure and high density plasma apparatus are required for etching and deposit of thin films. To understand critical parameters such as the pressure, temperature, electrostatic potential and energy distribution of ions impacting on the wafer, it is necessary to understand how these parameters are influenced by the power input and neutral gas pressure. In the present work, a 2-D hybrid electron fluid-particle ion model has been developed to simulate one of the high density plasma sources-an Electron Cyclotron Resonance (ECR) plasma system with various pressures and power inputs in a non-uniform magnetic field. By means of numerical simulation, the energy distributions of argon ion impacting on the wafer are obtained and the plasma density, electron temperature and plasma electrostatic potential are plotted in 3-D. It is concluded that the plasma density depends mainly on both the power input and neutral gas pressure. However, the plasma potential and electron temperature can hardly be affected by the power input, they seem to be primarily dependent on the neutral gas pressure. The comparison shows that the simulation results are qualitatively in good agreement with the experiment measurements.

Influence of liquid bridge volume on the onset of oscillation in floating-zone convection .2. Numerical-simulation

The onset of oscillation in the floating zone convection driven by the gradient of surface tension was studied numerically for an unsteady and two-dimensional model, and studies were concentrated on the influence of liquid bridge volume on the onset of oscillation in comparison with the experimental results in the Paper I. The numerical results agree with the experimental ones presented in the previous paper, in which the distributions of critical applied temperature difference depending on the volume of liquid bridge and a gap range of liquid volume in marginal stability curve were obtained.

Numerical-simulation of low supersonic-flow around a sphere

The controlled equations defined in a physical plane are changed into those in a computational plane with coordinate transformations suitable for different Mach number M(infinity). The computational area is limited in the body surface and in the vicinities of detached shock wave and sonic line. Thus the area can be greatly cut down when the shock wave moves away from the body surface as M(infinity) --> 1. Highly accurate, total variation diminishing (TVD) finite-difference schemes are used to calculate the low supersonic flowfield around a sphere. The stand-off distance, location of sonic line, etc. are well comparable with experimental data. The long pending problem concerning a flow passing a sphere at 1.3 greater-than-or-equal-to M(infinity) > 1 has been settled, and some new results on M(infinity) = 1.05 have been presented.

Numerical Simulation of R-M Instability

In order to capture shock waves and contact discontinuities in the field and easy to program with parallel computation a new algorithm is developed to solve the N-S equations for simulation of R-M instability problems. The method with group velocity control is used to suppress numerical oscillations, and an adaptive non-uniform mesh is used to get fine resolution. Numerical results for cylindrical shock-cylindrical interface interaction with a shock Mach number Ms=1.2 and Atwood number A=0.818, 0.961, 0.980 (the interior density of the interface/outer density p(1)/p(2) = 10, 50, 100, respectively), and for the planar shock-spherical interface interaction with Ms=1.2 and p(1)/p(2) = 14.28are presented. The effect of Atwood number and multi-mode initial perturbation on the R-M instability are studied. Multi-collisions of the reflected shock with the interface is a main reason of nonlinear development of the interface instability and formation of the spike-bubble structures In simulation with double mode perturbation vortex merging and second instability are found. After second instability the small vortex structures near the interface produced. It is important factor for turbulent mixing.

Computation of flow over a rotating body on unstructured Chimera mesh

Flow around moving boundary is ubiquitous in engineering applications. To increse the efficienly of the algorithm to handle moving boundaries is still a major challenge in Computational Fluid Dynamics (CFD). The Chimera grid method is one type of method to handle moving boundaries. A concept of domain de-composition has been proposed in this paper. In this method, sub-domains are meshed independently and governing equations are also solved separately on them. The Chimera grid method was originally used only on structured (curvilinear) meshes. However, in a problem which involves both moving boundary and complex geometry, the number of sub-domains required in a traditional (structured) Chimera method becomes fairly large. Thus the time required in the interior boundary locating, link-building and data exchanging also increases. The use of unstructured Chimera grid can reduce the time consumption significantly by the reduction of domain(block) number. Generally speaking, unstructured Chimera grid method has not been developed. In this paper, a well-known pressure correction scheme - SIMPLEC is modified and implemented on unstructured Chimera mesh. A new interpolation scheme regarding the pressure correction is proposed to prevent the possible decoupling of pressure. A moving-mesh finite volume approach is implemented in an inertial reference frame. This approach is then used to compute incompressible flow around a rotating circular and elliptic cylinder. These numerical examples demonstrate the capability of the proposed scheme in handling moving boundaries. The numerical results are in good agreement with other experimental and computational data in literature. The method proposed in this paper can be efficiently applied to more challenge cases such as free-falling objects or heavy particles in fluid.

若干流体力学问题的数学性质研究

该文利用高智的扩散抛物化方程组理论及流体力学基本方程组的特征次特征理论,流体大小尺度（LSS）方程组理论以及摄动有限差分（PFD）方法,研究若干流体力学问题的数学性质.该文得到的主要结论有：1.利用湍流大小尺度（LSS）方程组推导出湍流大小尺度涡量（LSSV）方程组,并证明两个关于湍流大小尺度涡量的命题,从而得到湍流封闭大小尺度涡量（CLSSV）方程组,并对已有的近程相互作用命题进行推广.2.根据扩散抛物化方程组理论和流体力学层次结构方程组的特征和次特征方法,研究了抛物化稳定性方程组（PSE）的特征和次特征以及消除PSE的剩余椭圆特性的问题.3.利用摄动有限差分（PFD）方法得到对流扩散反应方程的变步长摄动有限差分格式,是等步长摄动有限差分格式的推广.

Prevalence Of Shear Banding In Compression Of Zr41Ti14Cu12.5Ni10Be22.5 Pillars As Small As 150 Nm In Diameter

Recently, the size dependence of mechanical behaviors, particularly the yield strength and plastic deformation mode, of bulk metallic glasses (BMG) has created a great deal of interest. Contradicting conclusions have been drawn by different research groups, based on various experiments on different BMG systems. Based on in situ compression transmission electron microscopy (TEM) experiments on Zr41Ti14Cu12.5Ni10Be22.5 (Vit 1) nanopillars, this paper provides strong evidence that shear banding still prevails at specimen length scales as small as 150 nm in diameter. This is supported by in situ and ex situ images of shear bands, and by the carefully recorded displacement bursts under load control its well as load drops under displacement control. Finite element modeling of the stress state within the pillar shows that the unavoidable geometry constraints accompanying such experiments impart a strong effect on the experimental results, including non-uniform stress distributions and high level hydrostatic pressures. The seemingly improved compressive ductility is believed to be due to such geometry constraints. Observations underscore the notion that the mechanical behavior of metallic glasses, including strength and plastic deformation mode, is size independent at least in Vit 1. (C) 2009 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

The analysis of the transient temperature distribution of double-slab Nd:YAG laser medium

A novel double-slab Nd:YAG laser, which uses face-pumped slab medium cooled by liquid with different temperatures on both sides, is proposed. The thermal distortion of wavefront caused by the non-uniform temperature distribution in the laser gain media can be self-compensated. According to the method of operation, the models of the temperature distribution and stress are presented, and the analytic solutions for the model are derived. Furthermore, the numerical simulations with pulse pumping energy of 10 J and repetition frequencies of 500 and 1000 Hz are calculated respectively for Nd:YAG laser medium. The simulation results show that the temperature gradient remains the approximative linearity, and the heat stress is within the extreme range. Then the absorption coefficient is also discussed. The result indicates that the doping concentration cannot be too large for the high repetition frequency laser. It has been proved that the high repetition frequency, high laser beam quality, and high average output power of the order of kilowatt of Nd: YAG slab laser can be achieved in this structure.

新型板条激光器的离轴混合腔模场计算

报道了一种新型双板条离轴混合腔激光器。这种激光器结构通过改变传统的冷却方式和采用特殊的谐振腔设计，将使从第一块介质板条高温一侧出射的激光对称地进入另一块板条的低温一侧，从而可对由于温度分布不均匀造成的波面畸变进行一定程度的自校正，减少热效应的影响，可望提高激光器的输出功率和光束质量。利用快速傅里叶变换（FFT）对这种激光器的近场、远场以及相位等模场特性进行了数值计算。分析了波面畸变对输出光束质量的影响，并与常规双板条激光器进行了比较，结果表明这种新型双板条离轴混合腔激光器可以实现一定程度的波面畸变自补偿，

硬边非稳腔平面波导激光器的光束特性

基于衍射理论和坐标变换,采用数值模拟的方法分析了硬边非稳腔平面波导激光器的光束特性,研究了存在非均匀抽运和增益饱和时,输出激光的光束质量.在端面抽运和边缘抽运时,比较了正支和负支非稳腔的输出光束特性.结果表明：利用优化的离轴硬边非稳腔可以得到近衍射极限的输出.在相同的抽运不均匀性情况下,对于边缘抽运和端面抽运,正支非稳腔的光束质量因子M^2分别为3.9和2.3,而相同条件下负支非稳腔的M^2因子为1.8和1.7.

Single-mode condition for silicon rib waveguides with trapezoidal cross-section

Single-mode condition for silicon rib waveguides with trapezoidal cross-section was obtained using a numerical method based on imaginary-distance beam propagation method with non-uniform discretization. Both quasi-transverse-electric and quasi-transverse-magnetic modes were investigated. Simulated single-mode condition is given by a modified equation. Comparison with reported results shows that the Marcatili's method is in a better agreement with our results. (C) 2003 Elsevier B.V. All rights reserved.

Performing Fast Addition and Multiplication by Transferring Single Electrons

This paper proposes novel fast addition and multiplication circuits that are based on non-binary redundant number systems and single electron (SE) devices. The circuits consist of MOSFET-based single-electron (SE) turnstiles. We use the number of electrons to represent discrete multiple-valued logic states and we finish arithmetic operations by controlling the number of electrons transferred. We construct a compact PD2,3 adder and a 12x12bit multiplier using the PD2,3 adder. The speed of the adder can be as high as 600MHz with 400nW power dissipation. The speed of the adder is regardless of its operand length. The proposed circuits have much smaller transistors than conventional circuits.

Thermocapillary migrations of drops and bubbles

The transport phenomenon of drops or bubbles is a very important topic in fundamental hydrodynamics research and practical applications such as material processing and the chemical engineering. In microgravity environment, if drops or bubbles stay in a continuous phase with non-uniform temperature ¯eld, they will start to move as a result of the variance of the interface tension. This kind of movement is called the Marangoni migration. This review tries to sum up the main results in this ¯eld on theoretical analysis, numerical simulations and experiments. So far the theoretical analysis is still limited to the linear or weak nonlinear steady questions, while the current numerical simulations can already obtain the time- dependent process of the bubble/drop migration when the e®ect of heat convection is small. For strong heat convection problem, or when the Marangoni number is bigger than 100, no numerical result is in consistence with those of experiments so far. Some of the lastest numerical results are shown when heat convection is strong, and the main di®erence between strong and weak heat convection is analyzed. Finally, we also discuss the main unresolved problems in this ¯eld and some possible directions in the future.

Multi-mode Vortex-induced Vibration of Slender Cable Experiencing Shear Flow

The dynamic characteristics of slender cable often present serried modes with low frequencies due to large structure flexibility resulted from high aspect ratio (ratio of length to diameter of cable), while the flow velocity distributes non-uniformly along the cable span actually in practical engineering. Therefore, the prediction of the vertex-induce vibration of slender cable suffered from multi-mode and high-mode motions becomes a challenging problem. In this paper a prediction approach based on modal energy is developed to deal with multi-mode lock-in. Then it is applied to the modified wake-oscillator model to predict the VIV displacement and stress responses of cable in non-uniform flow field. At last, illustrative examples are given of which the VIV response of flexible cable in nonlinear shear flow field is analyzed. The effects of flow velocity on VIV are explored. Our results show that both displacement and stress responses become larger as the flow velocity increasing; especially higher stress response companied with higher frequency vibration should be paid enough attention in practical design of SFT because of its remarkable influence on structure fatigue life.