A novel method to measure coma aberration of projection system

A novel method to measure coma aberration by pattern displacements at different defocus positions is proposed in this paper. The effect of defocus on coma-induced pattern displacement is analyzed. The measuring principle of the method is described in detail. Using the simulation program PROLITH, the proportionality factors between pattern displacement and coma aberration at different defocus positions are calculated. It is proved that the method is simple to perform and the measurement accuracy of coma can increase approximately by 25% by this novel method. (c) 2006 Elsevier GmbH. All rights reserved.

Coma measurement using a PSM and transmission image sensor

As feature size decreases, especially with the use of resolution enhancement technique, requirements for the coma aberrations in the projection lenses of the lithographic tools have become extremely severe. So, fast and accurate in situ measurement of coma is necessary. In the present paper, we present a new method for characterizing the coma aberrations in the projection lens using a phase-shifting mask and a transmission image sensor. By measuring the image positions at multiple NA and partial coherence settings, we are able to extract the coma aberration. The simulation results show that the accuracy of coma measurement increases approximately 20% compared to the previous straightforward measurement technique. (c) 2005 Elsevier GmbH. All rights reserved.

Study of oscillatory behavior of recording process arising from electron-hole competition in strongly oxidized LiNbO3 : Ce : Cu

We have investigated ultraviolet (UV) photorefractive effect of lithium niobate doubly doped with Ce and Cu. It is found the diffraction efficiency shows oscillating behavior Under UV-1ight-recording. A model in which electrons and holes can be excited from impurity centers in the UV region is proposed to study the oscillatory behavior of the diffraction efficiency. Oil the basis of the material equations and the coupled-wave equations, we found that the oscillatory behavior is due to the oscillation of the relative spatial phase shift Phi. And the electron-hole competition may cause the oscillation of the relative spatial phase shift. A switch point from electron grating to hole grating is chosen to realize nonvolatile readout by a red light with high sensitivity (0.4 cm/J). (c) 2005 Elsevier GmbH. All rights reserved.

Role of absorption in grating erasure

In this paper, we have investigated the grating erasure of a reduced LiNbO3:Fe crystal with different erasing wavelengths. The overall hologram evolution in the process of grating erasure is nonexponential due to strong absorption which is contrary to the mono-exponential law. The hologram in the rear part of the crystal can persist for a long time in the grating erasure due to weak erasing light intensity by strong absorption, which can enlarge the erasure time constant. From the erasure experiments, the global absorption ad 5 can be taken as the optimum absorption to acquire a good trade-off between the sensitivity and hologram strength in the crystal. (c) 2006 Elsevier GmbH. All rights reserved.

Anisotropic diffraction of stratified volume holographic grating in photorefractive media

We have studied the anisotropic diffraction properties of the stratified volume holographic gratings recorded in photorefractive media using the anisotropic coupled wave theory. It is shown that the diffraction efficiency of such system exhibit the uniform periodic Bragg selectivity properties. In addition the dependence of the stratified volume holographic optical elements (SVHOEs) diffraction properties on the buffer-layer thickness, grating-layer thickness, number of modulation layers, and total thickness of system are discussed in detail. (c) 2005 Elsevier GrnbH. All rights reserved.

A novel FOCAL technique based on BP-ANN

In this paper, the feed-forward back-propagation artificial neural network (BP-ANN) algorithm is introduced in the traditional Focus Calibration using Alignment procedure (FOCAL) technique, and a novel FOCAL technique based on BP-ANN is proposed. The effects of the parameters, such as the number of neurons on the hidden-layer and the number of training epochs, on the measurement accuracy are analyzed in detail. It is proved that the novel FOCAL technique based on BP-ANN is more reliable and it is a better choice for measurement of the image quality parameters. (c) 2005 Elsevier GmbH. All rights reserved.

Laser ranging based on electro-optic switch

Based on electro-optic switch effect in crystal, a novel laser ranging method is proposed. CW-laser emitted by laser transmitter propagates forward to the measured target, after being reflected by the target, and then goes back to the transmitter. Close to the transmitter, a special mono-block LiNbO3 crystal is added into the round-trip light beams. High-voltage pulses with the sharp enough changes in rising edges are loaded on the crystal. Based on electro-optic effect, double refraction and internal double reflection effect in crystal, the crystal cuts off the round-trip light beams, and reflects a light pulse cut out by the crystal to a detector aside from the original beam path. The pulse width T is the period that laser propagates forward and back between the crystal and the target. The feasibility of the new idea is proved by our experiments and a brand-new way for the laser ranging is provided. (c) 2005 Elsevier GmbH. All rights reserved.

Effect of wavelength of sensitizing light on holographic storage properties in LiNbO3 : Fe : Ni crystal

By sensitizing with 514 nm green light, 488 nm blue light and 390 nm ultraviolet light, respectively, recording with 633 nm red light, effect of wavelength of sensitizing light on holographic storage properties in LiNbO3:Fe:Ni crystal is investigated in detail. It is shown that by shortening the wavelength of sensitizing light gradually, nonvolatile holographic recording properties of oxidized LiNbO3:Fe:Ni crystal is optimized gradually, 390 nm ultraviolet light is the best as the sensitizing light. Considering the absorption of sensitizing light, to obtain the best performance in two-center holographic recording we must choose a sensitizing wavelength that is long enough to prevent unwanted absorptions (band-to-band, etc.) and short enough to result in efficient sensitization from the deep traps. So in practice a trade-off is always needed. Explanation is presented theoretically. (c) 2005 Elsevier GmbH. All rights reserved.

Design and application of three-zone annular filters

We design three-zone annular filters to be applied to optical storage system. The designed filters extend the depth of focus and realize transverse superresolution simultaneously, which will improve the performance of optical storage system greatly. And we propose two feasible schemes to improve imaging resolution of three-dimensional imaging system. One scheme depends on a complex filter formed by cascading of a three-zone phase filter and a three-zone amplitude filter. The complex filter converge the optimized transverse superresolution and the optimized axial superresolution of two different filters onto a single filter. It can improve the three-dimensional imaging performances greatly. Another scheme depends on a single three-zone complex filter. We propose a three-zone complex filter with phase shift 0.8 pi, which presents bigger design margin, better imaging quality and stronger three-dimensional superresolution capability. (c) 2006 Elsevier GmbH. All rights reserved.

Collimation testing using axial intensity

We proposed a new method of measuring the degree of collimation of laser beam using axial intensity information near paraxial focus. Preceding methods for collimation testing are mainly either based on self-imaging or interferometric techniques. The new method is to employ the diffraction behavior of noncollimated wave in circular aperture diaphragm. The principle of the proposed method and experiment results are presented. Due to simplicity of the method and its low cost, it is a promising method for checking the collimation of laser beam. (c) 2005 Published by Elsevier GmbH.

Simple ABCD matrix method for evaluating optical coupling system of laser diode to single-mode fiber with a lensed-tip

In this paper, we present a simple technique to determine the coupling efficiency between a laser diode and a lensed-tip based on the ABCD transformation matrix method. We have compared our analysis technique to that of previous work and have found that the presented method is reliable in predicting the coupling efficiency of lensed-tip and has the advantage of simplicity of coupling efficiency calculation even by a pocket calculator. The results can be useful for designing coupling optics. (c) 2005 Elsevier GmbH. All rights reserved.

Analytic expression of the diffraction of a circular aperture

Recurring to the characteristic of Bessel function, we give the analytic expression or the Fresnel diffraction by a circular aperture, thus the diffractions on the propagation axis and along the boundary of the geometrical shadow are discussed conveniently. Since it is difficult to embody intuitively the physical meaning from this series expression of the Fresnel diffraction, after weighing the diffractions on the axis and along the boundary of the geometrical shadow, we propose a simple approximate expression of the circular diffraction, which is equivalent to the rigorous solution in the further propagation distance. It is important for the measurement of the parameter or the beam, such as the quantitative analysis of the relationship of the wave error and the divergence of the beam, In this paper, the relationship of the fluctuation of the transverse diffraction profile and the position of the axial point is discussed too. (c) 2005 Elsevier GrnbH. All rights reserved.

Radius of curvature measurements for laser beams: A simple method

A simple method for measuring the radius of curvature of laser beams is introduced. It has been developed to estimate the astigmatic aberration of a diode laser. Compared with the interferornetry, this method is convenient and straightforward. (c) 2005 Elsevier GmbH. All rights reserved.

Transverse superresolution with the radial continuous transmittance filter

The radial continuous transmittance filter is presented to realize transverse superresolution. It consists of two parallel polarizers and a radial birefringent element sandwiched between of them. By adjusting the angle between optical axis of the radial birefringent element and the polarization direction of the polarizers, transverse superresolution can be realized. But transverse superresolution is obtained at the cost of the axial resolution and the increase of the side-lobes in strength. So we then mend such filter, with it not only enhance the transverse resolution but also suppress the influence of the side-lobes and the reduction of the axial resolution. At the same time, the Strehl ratio increases. The advantage of such a filter used in superresolution technique is that it is easy to fabricate because its fabrication does not deal with the variation of the phase. (c) 2005 Elsevier GmbH. All rights reserved.

Electro-optic modulation of light propagating near the optic axis with any polarization in uniaxial crystals

The electro-optic effect in uniaxial crystals for light propagating near the optic axis with any polarization has been analyzed. The passive and the electrically induced birefringences and the rotation of polarization direction in crystals have been calculated, and the conoscopic interference figures under orthogonal polariscopes for different polarizer directions have been plotted. The extinction areas caused by the rotation of polarization direction in crystals change with the polarizer direction, but the two heads of the induced optical axes do not vary, which are always on the induced principal axis with bigger refractive index. The directions of polariscopes are always extinction, and the +/- 45 degrees directions with polarizer are always complete transmission. The conoscopic interference figures for LiNbO3 crystals have been demonstrated experimentally by rotating polariscopes directions, which accord with the theoretically calculating plots. (c) 2006 Elsevier GmbH. All rights reserved.