A Hybrid Scheme Based on Finite Element/Volume Methods for Two Immiscible Fluid Flows

We have successfully extended our implicit hybrid finite element/volume (FE/FV) solver to flows involving two immiscible fluids. The solver is based on the segregated pressure correction or projection method on staggered unstructured hybrid meshes. An intermediate velocity field is first obtained by solving the momentum equations with the matrix-free implicit cell-centered FV method. The pressure Poisson equation is solved by the node-based Galerkin FE method for an auxiliary variable. The auxiliary variable is used to update the velocity field and the pressure field. The pressure field is carefully updated by taking into account the velocity divergence field. This updating strategy can be rigorously proven to be able to eliminate the unphysical pressure boundary layer and is crucial for the correct temporal convergence rate. Our current staggered-mesh scheme is distinct from other conventional ones in that we store the velocity components at cell centers and the auxiliary variable at vertices. The fluid interface is captured by solving an advection equation for the volume fraction of one of the fluids. The same matrix-free FV method, as the one used for momentum equations, is used to solve the advection equation. We will focus on the interface sharpening strategy to minimize the smearing of the interface over time. We have developed and implemented a global mass conservation algorithm that enforces the conservation of the mass for each fluid.

飞秒激光微加工：激光精密加工领域的新前沿

飞秒激光微加工技术具有加工精度高、热效应小、损伤阈值低以及能够实现真正的三维微结构加工等优点,这些特性是传统的激光加工技术所无法取代的。首先回顾了激光微加工和超短脉冲激光技术的发展历史,然后介绍超短脉冲激光与金属和介质材料相互作用的机制,接着阐述了飞秒激光直写、干涉和投影制备等各种加工方法的原理,重点讨论飞秒激光在三维光子器件集成、微流体芯片制备及其在生化传感方面的应用等,最后展望了飞秒激光微加工领域所面临的机遇和挑战,指出了未来的研究方向。

狭缝投影位置传感技术及其在精密定位中的应用

提出了一种基于狭缝投影的位置传感技术，阐述了此技术的传感原理及其在精密定位中的应用。准直激光束照明的投影狭缝由一个透镜以掠入射角度投影在被测物体上，狭缝投影经过被测物体表面的反射和另一个透镜的成像在探测双缝上形成投影狭缝像。探测双缝放大成像在双像限探测器上，投影狭缝像透过探测双缝的光强分别被双像限探测器的两个像限所接收，通过检测双像限探测器两个像限上的光强获得被测物体的位置。实验验证了此传感技术的可行性，其位置重复测量偏差小于32nm（1σ）。

Optical intrinsically fuzzy mathematical morphology for gray-scale image processing

Intrinsically fuzzy morphological erosion and dilation are extended to a total of eight operations that have been formulated in terms of a single morphological operation--biased dilation. Based on the spatial coding of a fuzzy variable, a bidirectional projection concept is proposed. Thus, fuzzy logic operations, arithmetic operations, gray-scale dilation, and erosion for the extended intrinsically fuzzy morphological operations can be included in a unified algorithm with only biased dilation and fuzzy logic operations. To execute this image algebra approach we present a cellular two-layer processing architecture that consists of a biased dilation processor and a fuzzy logic processor. (C) 1996 Optical Society of America

Visual pattern recognition network: Its training algorithm and its optoelectronic architecture

A visual pattern recognition network and its training algorithm are proposed. The network constructed of a one-layer morphology network and a two-layer modified Hamming net. This visual network can implement invariant pattern recognition with respect to image translation and size projection. After supervised learning takes place, the visual network extracts image features and classifies patterns much the same as living beings do. Moreover we set up its optoelectronic architecture for real-time pattern recognition. (C) 1996 Optical Society of America

基于光栅成像投影的微位移检测方法

提出了一种基于光栅成像投影的微位移检测方法，利用光学傅里叶变换原理给出了具体的理论分析。准直激光束照明的光栅通过一个4f系统成像投影在被测物体表面上，光栅投影经过被测物体表面反射后由另一个4f系统成像在探测光栅上。探测光栅由一个透镜组成像在光电探测器上，其中采用由起偏器、光弹调制器和检偏器组成的偏振调制单元对探测光强进行调制。通过在4f系统的频谱面上设置滤波光阑，在光电探测器上获得了与被测物体的微位移成正弦关系的光强变化，检测出光电探测器上的光强变化即可以获得被测物体的位移量。实验验证了该检测方法的可行性

基于光学对准的光刻机投影物镜密集线焦深原位检测技术

提出了一种检测光刻机投影物镜密集线焦深（DOF）的新技术。该技术将具有精细结构的测量标记曝光在硅片上，硅片显影后，由光学对准系统获取曝光在硅片上的测量标记图形的对准位置信息，根据对准位置信息计算得到视场中各点的焦深。与传统的FEM焦深测试技术相比，该技术具有测量精度高、速度快、成本低、操作简单等优点，在光刻工艺参数优化及光刻设备性能评价等方面有很好的应用前景。

Coma measurement using a PSM and transmission image sensor

As feature size decreases, especially with the use of resolution enhancement technique, requirements for the coma aberrations in the projection lenses of the lithographic tools have become extremely severe. So, fast and accurate in situ measurement of coma is necessary. In the present paper, we present a new method for characterizing the coma aberrations in the projection lens using a phase-shifting mask and a transmission image sensor. By measuring the image positions at multiple NA and partial coherence settings, we are able to extract the coma aberration. The simulation results show that the accuracy of coma measurement increases approximately 20% compared to the previous straightforward measurement technique. (c) 2005 Elsevier GmbH. All rights reserved.

一种新的光刻机像质参数热漂移检测技术

提出了一种新的光刻机像质参数热漂移原位检测技术（TDFM）。详细分析了该技术利用镜像测试标记检测投影物镜最佳焦面热漂移与放大倍率热漂移的基本原理。实验结果表明TDFM技术可同时实现最佳焦面热漂移（FFT）与放大倍率热漂移（MFT）的精确测量。与现有的放大倍率热漂移检测技术相比，该技术有效地解决了放大倍率热漂移技术中放大倍率热漂移受最佳焦面热漂移影响的问题，简化了光刻机像质参数前馈校正的测试过程，测试成本与耗时均减少50％。

一种步进扫描投影光刻机承片台不平度检测新技术

提出一种步进扫描投影光刻机承片台不平度检测新技术。在晶圆与承片台存在不同偏移量时,利用线性差分传感器在线测量晶圆上不同点的局部高度;通过建立临时边界条件,以递推法消除晶圆面形影响,并逐行计算出承片台的相对不平度;通过逐行计算的结果递推相邻行之间的高度差,并将该高度差叠加到每一行,以消除临时边界条件的限制,得到处于同一高度上的承片台不平度;将计算的结果作为初始值,根据最小二乘原理,以邻近的四个测量点作为参考,逐步逼近得到承片台的真实不平度。计算机仿真结果验证了该检测方法的正确性,计算结果逐步收敛并逼近真实值

Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width

The correlation between the coma sensitivity of the alternating phase-shifting mask (Alt-PSM) mark and the mark's structure is studied based on the Hopkins theory of partially coherent imaging and positive resist optical lithography (PROLITH) simulation. It is found that an optimized Alt-PSM mark with its phase width being two-thirds its pitch has a higher sensitivity to coma than Alt-PSM marks with the same pitch and the different phase widths. The pitch of the Alt-PSM mark is also optimized by PROLITH simulation, and the structure of p - 1.92 lambda/NA and pw = 2p/3 proves to be with the highest sensitivity. The optimized Alt-PSM mark is used as a measurement mark to retrieve coma aberration from the projection optics in lithographic tools. In comparison with an ordinary Alt-PSM mark with its phase width being a half its pitch, the measurement accuracies of Z(7) and Z(14) apparently increase. (C) 2009 Optical Society of America

投影变换方法在光学测量投影仪系统圆度表示中的应用

针对光学测量投影仪测量圆形工件时圆度指标的图形表示,提出了一种几何投影变换方法,将原非单调区间的离散点投影在某单调区间内,在此单调区间内运用插值算法进行曲线拟合后,再对数据进行反向投影,使得原非单调区间内离散点光滑地连接起来,使圆度的图形表示更加合理。几何投影变换方法克服了一些用于连接离散数据点的插值算法不能在非单调区间使用的局限性,拓展了上述算法的应用范围。

背投显示技术及其用光学薄膜

对比了背投领域几种主要技术的原理和性能特点，同时介绍了多媒体投影系统所需要的各类光学薄膜的作用，参数和光学性能；并针对该领域国内外最新研究状况进行了调研，给出了现在所面临的关键技术难题并对其发展前景做了预测。

Disconnection of the hippocampal-prefrontal cortical circuits impairs spatial working memory performance in rats

There is a unidirectional, ipsilateral and monosynaptic projection from the hippocampus to the prefrontal cortex. The cognitive function of hippocampal-prefrontal cortical circuit is not well established. In this paper, we use muscimol treated rats to inv