Fracture Properties of LPCVD Silicon Nitride and Thermally Grown Silicon Oxide Thin Films From the Load-Deflection of Long Si3N4 and SiO2/Si3N4 Diaphragms

The bulge test is successfully extended to the determination of the fracture properties of silicon nitride and oxide thin films. This is achieved by using long diaphragms made of silicon nitride single layers and oxide/nitride bilayers, and applying comprehensive mechanical model that describes the mechanical response of the diaphragms under uniform differential pressure. The model is valid for thin films with arbitrary z-dependent plane-strain modulus and prestress, where z denotes the coordinate perpendicular to the diaphragm. It takes into account the bending rigidity and stretching stiffness of the layered materials and the compliance of the supporting edges. This enables the accurate computation of the load-deflection response and stress distribution throughout the composite diaphragm as a function of the load, in particular at the critical pressure leading to the fracture of the diaphragms. The method is applied to diaphragms made of single layers of 300-nm-thick silicon nitride deposited by low-pressure chemical vapor deposition and composite diaphragms of silicon nitride grown on top of thermal silicon oxide films produced by wet thermal oxidation at 950 degrees C and 1050 degrees C with target thicknesses of 500, 750, and 1000 mn. All films characterized have an amorphous structure. Plane-strain moduli E-ps and prestress levels sigma(0) of 304.8 +/- 12.2 GPa and 1132.3 +/- 34.4 MPa, respectively, are extracted for Si3N4, whereas E-ps = 49.1 +/- 7.4 GPa and sigma(0) = -258.6 +/- 23.1 MPa are obtained for SiO2 films. The fracture data are analyzed using the standardized form of the Weibull distribution. The Si3N4 films present relatively high values of maximum stress at fracture and Weibull moduli, i.e., sigma(max) = 7.89 +/- 0.23 GPa and m = 50.0 +/- 3.6, respectively, when compared to the thermal oxides (sigma(max) = 0.89 +/- 0.07 GPa and m = 12.1 +/- 0.5 for 507-nm-thick 950 degrees C layers). A marginal decrease of sigma(max) with thickness is observed for SiO2, with no significant differences between the films grown at 950 degrees C and 1050 degrees C. Weibull moduli of oxide thin films are found to lie between 4.5 +/- 1.2 and 19.8 +/- 4.2, depending on the oxidation temperature and film thickness.

Effects of disk rotation rate on the growth of ZnO films by low-pressure metal-organic chemical vapor deposition

ZnO films were grown at low pressure in a vertical metal-organic vapor deposition (MOCVD) reactor with a rotating disk. The structural and morphological properties of the ZnO films grown at different disk rotation rate (DRR) were investigated. The growth rate increases with the increase of DRR. The ZnO film grown at the DRR of 450 revolutions per minute (rpm) has the lowest X-ray rocking curve full width at half maximum and shows the best crystalline quality and morphology. In addition, the crystalline quality and morphology are improved as the DRR increased but both are degraded when the DRR is higher than 450 rpm. These results can help improve in understanding the rotation effects on the ZnO films grown by MOCVD. (C) 2007 Elsevier B.V. All rights reserved.

FBG pressure sensor based on the double shell cylinder with temperature compensation

A novel fiber Bragg grating (FBG) pressure sensor based on the double shell cylinder with temperature compensation is presented. in the sensing scheme, a sensing FBG is affixed in the tangential direction on the outer surface of the inner cylinder, and another FBG is affixed in the axial direction to compensate the temperature fluctuation. Based on the theory of elasticity, the theoretical analysis of the strain distribution of the sensing shell is presented. Experiments are carried out to test the performance of the sensor. A pressure sensitivity of 0.0937 nm/MPa has been achieved. The experimental results also demonstrate that the two FBGs have the same temperature sensitivity, which can be utilized to compensate the temperature induced wavelength shift during the pressure measurement. (C) 2008 Elsevier Ltd. All rights reserved.

Investigation on a pressure-gradient fiber laser hydrophone

In this paper, a pressure-gradient fiber laser hydrophone is demonstrated. Two brass diaphragms are installed at the end of a metal cylinder as sensing elements. A distributed feedback fiber laser, fixed at the center of the two diaphragms, is elongated or shortened due to the acoustic wave. There are two orifices at the middle of the cylinder. So this structure can work as a pressure-gradient microphone in the acoustic field. Furthermore, the hydrostatic pressure is self-compensated and an ultra-thin dimension is achieved. Theoretical analysis is given based on the electro-acoustic theory. Field trials are carried out to test the performance of the hydrophone. A sensitivity of 100 nm MPa-1 has been achieved. Due to the small dimensions, no directivity is found in the test.

Partial oxidation reforming of biomass fuel gas over nickel-based monolithic catalyst with naphthalene as model compound

With naphthalene as biomass tar model compound, partial oxidation reforming (with addition of O-2) and dry reforming of biomass fuel gas were investigated over nickel-based monoliths at the same conditions. The results showed that both processes had excellent performance in upgrading biomass raw fuel gas. Above 99% of naphthalene was converted into synthesis gases (H-2+CO). About 2.8 wt% of coke deposition was detected on the catalyst surface for dry reforming process at 750 degrees C during 108 h lifetime test. However, no Coke deposition was detected for partial oxidation reforming process, which indicated that addition of O-2 can effectively prohibit the coke formation. O-2 Can also increase the CH4 conversion and H-2/CO ratio of the producer gas. The average conversion of CH4 in dry and partial oxidation reforming process was 92% and 95%, respectively. The average H-2/CO ratio increased from 0.95 to 1.1 with the addition of O-2, which was suitable to be used as synthesis gas for dimethyl ether (DME) synthesis.

Fast plasma sintering deposition of nano-structured silicon carbide coatings

Fast plasma sintering deposition of SiC nano-structured coatings was achieved using a specially designed non-transferred dc plasma torch operated at reduced pressure. Employing the Taguchi method, the deposition parameters were optimized and verified. With the optimized combination of deposition parameters, homogeneous SiC coatings were deposited on relatively large area substrates of Φ50 mm and 50×50 mm with a deposition rate as high as 20 μm/min. Ablation test showed that such coatings can be used as oxidation resistance coatings in high temperature oxidizing environment.

Effects of treatment in different atmosphere on Pt3Sn/C electrocatalysts for ethanol electro-oxidation

Pt3Sn/C catalyst was prepared by a modified polyol process and treated in air, H-2/Ar, and Ar atmosphere, respectively. XRD analyses indicate that all of these catalysts have face-centered cubic (fcc) crystal structure. Temperature-programmed reduction (TPR) experiments show that more Sn exists in zero-valence in the Ar-treated PtSn catalyst than in the others. Cyclic voltammetry (CV), chronoamperometry (CA) experiments, and the performance tests of direct ethanol fuel cell (DEFC) indicate that the catalytic activity of PtSn/C for ethanol oxidation was affected significantly by the chemical state of Sn in catalyst particles. The as-prepared PtSn/C gives the higher power density, while Ar-treated PtSn/C shows the lower cell performance. It seems that the multivalence Sn rather than the zero-valence Sn in the PtSn catalyst is the favorable form for ethanol oxidation. Energy dispersion X-ray analysis (EDX) of the PtSn/C-as prepared and PtSn/C (after stability test) shows the active species (platinum, tin, and oxygen) composition changed to a different extent. Further attempt to improve the catalyst stability is needed.

Effects of reaction conditions on the selective oxidation of propane to acrylic acid on Mo-V-Te-Nb oxides

An effective Mo-1 V(0.3)Te(0.23)Nb(0.12)Ox catalysts for the selective oxidation of propane to acrylic acid was successfully prepared by using rotavap method. The catalyst was characterized by XRD and shown to contain (V0.07Mo0.93)(5)O-14, (Nb0.09Mo0.91)O-2.8,3MoO(2)(.)Nb(2)O(5), Mo5TeO16 and/or TeMo4O13, Te4Nb2O13 and a new TeMO (TeVMoO or TeVNbMoO; M = Mo, V and Nb) crystalline phase as the major phase. Regardless of the intrinsic catalytic characteristics of the catalyst, the external reaction conditions would have strong effects on the catalytic performance for propane oxidation. So in this paper, the effects of reaction conditions were investigated and discussed, including temperature, space velocity, V(air)/V(C3H8) ratio and V(steam)/V(C3H8) ratio. A stability test was also carried out on Mo1V0.3Te0.23Nb0.12Ox catalyst. The experimental run was performed during 100 h under the optimized reaction conditions. During the 100 h of operation, propane conversion and acrylic acid selectivity remained at about 59 and 64%, respectively. (C) 2004 Elsevier B.V. All rights reserved.

Shape selectivity in methane dehydroaromatization over Mo/MCM-22 catalysts during a lifetime experiment

Dehydroaromatization of CH4 with 2% CO2 on 6Mo/MCM-22 in a 100-h lifetime test was carried out at 993 K, atmospheric pressure and 1500 mL/gh. The duration of the lifetime test can be divided into an induction stage, stable stage and deactivation stage on the basis of the selectivities of hydrocarbons and coke. The characteristics of deposited coke with different time onstream were studied using TPO and TG techniques. There were two peaks corresponding to two kinds of coke recorded in TPO profiles, and the oxidation temperature of coke shifted to higher values with less hydrogen content with the increase of coke deposits. BET and Benzene-TPD techniques were employed to study the variation of specific surface area of the external and micropore surface versus time onstream. With the accumulation of coke deposits, although the pores became partially blocked and the internal surface decreased, methane could still enter the channel and was converted to benzene with shape selectivity until a critical value of coke deposition was reached.

Green synthesis of highly stable platinum nanoparticles stabilized by amino-terminated ionic liquid and its electrocatalysts for dioxygen reduction and methanol oxidation

Preparation of monodispersed platinum nanoparticles with average size 2.0 nm stabilized by amino-terminated ionic liquid was demonstrated. The resulting platinum nanoparticles (Pt-IL) retained long-term stability without special protection. The Pt-IL nanoparticles exhibited high electrocatalytic activity toward reduction of oxygen and oxidation of methanol. Rotating disk electrode voltammetry and rotating ring-disk electrode voltammetry confirmed that the Pt-IL films could catalyze an almost four-electron reduction of dioxygen to water.

Preparation and evaluation of a proton exchange membrane based on oxidation and water stable sulfonated polyimides

A series of novel oxidation and water stable sulfonated polyimides (SPIs) were synthesized from 4,4'-binaphthyl-1,1',8,8'-tetracarboxylic dianhydride (BTDA), and wholly aromatic diamine 2,2'-bis(3-sulfobenzoyl) benzidine (2,2'-BSBB) for proton exchange membrane fuel cells. These polyimides could be cast into flexible and tough membranes from m-cresol solutions. The copolymer membranes exhibited excellent oxidative stability and mechanical properties due to their fully aromatic structure extending through the backbone and pendant groups. Moreover, all BTDA-based SPI membranes exhibited much better water stability than those based on the conventional 1,4,5,8-naphthalenecarboxylic dianhydride. The improved water stability of BTDA-based polyimides was attributed to its unique binaphthalimide structure. The SPI membranes with ion exchange capacity (IEC) of 1.36-1.90 mequiv g(-1) had proton conductivity in the range of 0.41 x 10(-1) to 1. 12 x 10(-1) S cm(-1) at 20 degrees C. The membrane with IEC value of 1.90 mequiv g(-1) displayed reasonably higher proton conductivity than Nafion((R)) 117 (0.9 x 10(-1) S cm(-1)) under the same test condition and the high conductivity of 0.184 S cm(-1) was obtained at 80 degrees C. Microscopic analyses revealed that well-dispersed hydrophilic domains contribute to better proton conducting properties. These results showed that the synthesized materials might have the potential to be applied as the proton exchange membranes for PEMFCs.

Platinum-macrocycle co-catalyst for electro-oxidation of formic acid

In this work, a new promoter, tetrasulfophthalocyanine (FeTSPc), one kind of environmental friendly material, was found to be very effective in both inhibiting self-poisoning and improving the intrinsic catalysis activity, consequently enhancing the electro-oxidation current during the electro-oxidation of formic acid. The cyclic voltammograms test showed that the formic acid oxidation peak current density has been increased about 10 times compared with that of the Pt electrode without FeTSPc. The electrochemical double potential step chronoamperometry measurements revealed that the apparent activity energy decreases from 20.64 kJ mol(-1) to 17.38 kJ mol(-1) after Pt electrode promoted by FeTSPc. The promoting effect of FeTSPc may be owed to the specific structure and abundant electrons of FeTSPc resulting in both the steric hindrance of the formation of poisoning species (CO) and intrinsic kinetic enhancement. In the single cell test, the performance of DFAFC increased from 80 mW cm(-2) mg(-1) (Pt) to 130 mW cm(-2) mg(-1) after the anode electrode adsorbed FeTSPc.

The electrocatalytic oxidation of ascorbic acid on polyaniline film synthesized in the presence of camphorsulfonic acid

Polyaniline-camphorsulfonic acid (PAN-CSA) composite film on platinum electrode surface has been synthesized via the electrochemical polymerization of aniline in the presence of camphorsulfonic acid (CSA). It was found that the doping of polyaniline (PAN) with CSA extends the electroactivity of PAN in neutral and even in alkaline media. The PAN-CSA composite film coated platinum electrodes are shown to be good electrocatalytic surfaces for the oxidation of ascorbic acid (AA) in phosphate buffer solution (PBS) of pH 7.0. The anodic peak potential of AA shifts from 0.63 V at the bare platinum electrode to 0.34 V at the PAN-CSA composite modified platinum electrode with a greatly enhanced current response. A linear calibration graph is obtained over the AA concentration range of 5-50 mM using cyclic voltammetry. The kinetics of the catalytic reaction are investigated using rotating disk electrode voltammetry and chronoamperometry. The results are explained using the theory of electrocatalytic reactions at chemically modified electrodes. The PAN-CSA composite on the electrode surface shows good reproducibility and stability.

Effects of a surfactant on the electrocatalytic activity of cobalt hexacyanoferrate modified glassy carbon electrode towards the oxidation of dopamine

The cobalt hexacyanoferrate film (CoHCF) was deposited on the surface of a glassy carbon (GC) electrode with a potential cycling procedure in the presence and absence of the cationic surfactant, cetyl trimethylammonium bromide (CTAB), to form CoHCF modified GC (CoHCF/GC) electrode. It was found that CTAB would affect the growth of the CoHCF film, the electrochemical behavior of the CoHCF film and the electrocatalytic activity of the CoHCF/GC electrode towards the electrochemical oxidation of dopamine (DA). The reasons of the electrochemical behavior of CoHCF/GC electrode influenced by CTAB were investigated using FTIR and scanning electron microscope (SEM) techniques. The apparent rate constant of electrocatalytic oxidation of DA catalyzed by CoHCF was determined using the rotating disk electrode measurements.

Electrocatalytic oxidation of dopamine at a cobalt hexacyanoferrate modified glassy carbon electrode prepared by a new method

A stable electroactive thin film of cobalt hexacyanoferrate (CoHCF) was electrochemically deposited on the surface of a glassy carbon (GC) electrode with a new and simple method. The cyclic voltammograms of the CoHCF Film modified GC (CoHCF/GC) electrode prepared by this method exhibit two pairs of well-defined redox peaks, at scan rates up to 200 mV s(-1). The advantage of this method is that it is easy to manipulate and to control the surface coverage of CoHCF on the electrode surface. The modified electrode shows good electrocatalytic activity towards the electrochemical reaction of dopamine (DA) in a 0.1 mol dm (3) KNO3 + phosphate buffer solution (pH 7.0). The rate constant of the electrocatalytic oxidation of DA at the CoHCF/GC electrode is determined by employing rotating disk electrode measurements.