Formation Of Dendritic Nanostructures In Pyrex Glass Anodically Bonded To Silicon Coated With An Aluminum Thin Film

Anodic bonding with thin films of metal or alloy as an intermediate layer, finds increasing applications in micro/nanoelectromechanical systems. At the bonding temperature of 350 degrees C, voltage of 400 V, and 30 min duration, the anodic bonding is completed between Pyrex glass and crystalline silicon coated with an aluminum thin film with a thickness comprised between 50 and 230 nm. Sodium-depleted layers and dendritic nanostructures were observed in Pyrex 7740 glass adjacent to the bonding interface. The sodium depletion width does not increase remarkably with the thickness of aluminum film. The dendritic nanostructures result from aluminum diffusion into the Pyrex glass. This experimental research is expected to enhance the understanding of how the depletion layer and dendritic nanostructures affect the quality of anodic bonding. (C) 2007 Elsevier B.V. All rights reserved.

Experimental Investigation On The Holdup Distribution Of Oil-Water Two-Phase Flow In Horizontal Parallel Tubes

An experimental investigation was conducted to study the holdup distribution of oil and water two-phase flow in two parallel tubes with unequal tube diameter. Tests were performed using white oil (of viscosity 52 mPa s and density 860 kg/m(3)) and tap water as liquid phases at room temperature and atmospheric outlet pressure. Measurements were taken of water flow rates from 0.5 to 12.5 m(3)/h and input oil volume fractions from 3 to 94 %. Results showed that there were different flow pattern maps between the run and bypass tubes when oil-water two-phase flow is found in the parallel tubes. At low input fluid flow rates, a large deviation could be found on the average oil holdup between the bypass and the run tubes. However, with increased input oil fraction at constant water flow rate, the holdup at the bypass tube became close to that at the run tube. Furthermore, experimental data showed that there was no significant variation in flow pattern and holdup between the run and main tubes. In order to calculate the holdup in the form of segregated flow, the drift flux model has been used here.

Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si

Anodic bonding of Pyrex glass/Al/Si is an important bonding technique in micro/nanoelectromechanical systems (MEMS/NEMS) industry. The anodic bonding of Pyrex 7740 glass/Aluminum film/Silicon is completed at the temperature from 300 degrees C to 375 degrees C with a bonding voltage between 150 V and 450 V. The fractal patterns are formed in the intermediate Al thin film. This pattern has the fractal dimension of the typical two-dimensional diffusion-limited aggregation (2D DLA) process, and the fractal dimension is around 1.7. The fractal patterns consist of Al and Si crystalline grains, and their occurrences are due to the limited diffusion, aggregation, and crystallization of Si and Al atoms in the intermediate Al layers. The formation of the fractal pattern is helpful to enhance the bonding strength between the Pyrex 7740 glass and the aluminum thin film coated on the crystal silicon substrates.

Hydrodynamic interaction between two vertical cylinders in water waves

The hydrodynamic interaction between two vertical cylinders in water waves is investigated based on the linearized potential flow theory. One of the two cylinders is fixed at the bottom while the other is articulated at the bottom and oscillates with small amplitudes in the direction of the incident wave. Both the diffracted wave and the radiation wave are studied in the present paper. A simple analytical expression for the velocity potential on the surface of each cylinder is obtained by means of Graf's addition theorem. The wave-excited forces and moments on the cylinders, the added masses and the radiation damping coefficients of the oscillating cylinder are all expressed explicitly in series form. The coefficients of the series are determined by solving algebraic equations. Several numerical examples are given to illustrate the effects of various parameters, such as the separation distance, the relative size of the cylinders, and the incident angle, on the first-order and steady second-order forces, the added masses and radiation-damping coefficients as well as the response of the oscillating cylinder.

Pressure Drop Studies of Gas-Liquid Bubbly Flow in Vertical Upward Pipeline

This paper describes the experimental and theoretical studies of gas-liquid bubbly flow in vertical upward pipeline carried out at Institute of Mechanics, Chinese Academy of Sciences. Bubbly flow in a vertical pipe with a 3 m long and 5 cm inner diameter plexiglass pipe was experimentally investigated, and studies carried out on the relationship between superficial velocities of the liquid and gas phases and pressure gradient is described. The developed drift-flux model applied to gas-liquid bubbly flow is presented, and the results are compared against the experimental data measured by ours in air/water vertical pipes.

Formation of dendritic nanostructures in Pyrex glass anodically bonded to silicon coated with an aluminum thin film

Anodic bonding with thin films of metal or alloy as an intermediate layer, finds increasing applications in micro/nanoelectromechanical systems. At the bonding temperature of 350 degrees C, voltage of 400 V, and 30 min duration, the anodic bonding is completed between Pyrex glass and crystalline silicon coated with an aluminum thin film with a thickness comprised between 50 and 230 nm. Sodium-depleted layers and dendritic nanostructures were observed in Pyrex 7740 glass adjacent to the bonding interface. The sodium depletion width does not increase remarkably with the thickness of aluminum film. The dendritic nanostructures result from aluminum diffusion into the Pyrex glass. This experimental research is expected to enhance the understanding of how the depletion layer and dendritic nanostructures affect the quality of anodic bonding. (C) 2007 Elsevier B.V. All rights reserved.

Flow similariy applied in convection-based tilt sensor

The environment temperature has inevitable effects on property of the convect ion-based tilt sensors. It not only redefines the application, but also prevents the improvement of the sensor performance. Numerical simulation of the fluid flow in the chamber of a sensor was performed and the influence of the environment temperature was studied in this paper. At zero tilt angle, the temperature distribution along the perpendicular line cross the heat source at various environment temperatures was presented. It was found that the flow varied dramatically at different environment temperatures, which would cause the output signal vary accordingly, even when the tilt angle was kept at a constant, because this device works by sensing the change of flow. At the same condition, we present the numerical results when the temperature difference across the heat source and the environment was kept at the same, in those results, it was found that the temperature difference at every point along the perpendicular line cross the heat source keep the same, this result confirms the similarity principle of nature convection. Second, A method of eliminating environment temperature infect on property of convect ion-based tilt sensor, which is based on the theory of flow similarity, is proposed. It was found that a thermal transistance can be piped on the circuit of heat source to compensate the temperature of the heat source. A compensative circuit was specially designed which can keep flow similarity by changing heat source temperature in order to eliminate the influence of environment temperature. The experiment results show that above 70% temperature drift can be eliminated by this compensative circuit.

A Simple Model For Predicting The Void Fraction Of Gas/Non-Newtonian Fluid Intermittent Flows In Upward Inclined Pipes

In this work, a simple correlation, which incorporates the mixture velocity, drift velocity, and the correction factor of Farooqi and Richardson, was proposed to predict the void fraction of gas/non-Newtonian intermittent flow in upward inclined pipes. The correlation was based on 352 data points covering a wide range of flow rates for different CMC solutions at diverse angles. A good agreement was obtained between the predicted and experimental results. These results substantiated the general validity of the model presented for gas/non-Newtonian two-phase intermittent flows.

一种新的光刻机像质参数热漂移检测技术

提出了一种新的光刻机像质参数热漂移原位检测技术（TDFM）。详细分析了该技术利用镜像测试标记检测投影物镜最佳焦面热漂移与放大倍率热漂移的基本原理。实验结果表明TDFM技术可同时实现最佳焦面热漂移（FFT）与放大倍率热漂移（MFT）的精确测量。与现有的放大倍率热漂移检测技术相比，该技术有效地解决了放大倍率热漂移技术中放大倍率热漂移受最佳焦面热漂移影响的问题，简化了光刻机像质参数前馈校正的测试过程，测试成本与耗时均减少50％。

光谱稳定性对直接探测多普勒测风激光雷达的影响研究

The wind error of the double-edge technique Doppler lidar due to the instability of injection-seeding solid laser and the drift of interferometer s spectrum was analyzed. Corresponding numerical simulation indicated that if the wind error of 1 m/s was achieved, the unsuccessful injection-seeding pulses should be less than 0.06% in integration time of 5 min. (30000 pulses). In the respect of spectrum drift of the interferometer, double temperature control systems were used and the accuracy of minus or plus 0.002°C was obtained, corresponding to the wind error of minus or plus 0.226 m/s. Monitoring of buildup time of the injection-seeding laser and temperature of the interferometer was significantly to improve the invertion accuracy of wind error by rejecting the data with frequency jumping and drifting. Researches of injection-seeding and spectrum stability of the interferometer were practical for the development of double-edge wind lidar.}

用于多普勒测风雷达的单频全固态激光器稳频

采用Pound-Drever-Hall技术，对用于多普勒测风雷达的种子注入激光器的主动激光器进行稳频，将其频率锁定在一个特殊设计的法珀腔上。该法珀腔总体采用零膨胀微晶玻璃材料制成，具有极高的温度稳定性。使用计算机采集鉴频信号并且进行处理。锁定后，1秒内激光器的相对频率漂移为±25kHz，一小时内的相对频率漂移为±55kHz，满足多普勒测风雷达的要求。

Efficient tunable diode-pumped Yb : LYSO laser

We demonstrated efficient laser action of a new ytterbium-doped oxyorthosilicate crystal Yb:LuYSiO5 ( Yb: LYSO) under high-power diode-pumping. The spectroscopic features and laser performance of the alloyed oxyorthosilicate crystal are compared with those of ytterbium-doped lutetium and yttrium oxyorthosilicates. In the continuous-wave laser operation of Yb: LYSO, a maximal slope efficiency of 96% and output power of 7.8 W were respectively achieved with different pump sources. The Yb: LYSO laser exhibits not only little sensitivity to the pump wavelength drift but also a broad tunability. By using a dispersive prism as the intracavity tuning element, we demonstrated that the continuous-wave Yb: LYSO laser exhibit a continuous tunability in the spectral range of 1014-1091 nm. (c) 2006 Optical Society of America.