Behavior of ar plasma formed in a high-density plasma source - an ecr reactor

In order to develop the ultra-large scale integration(ULSI), low pressure and high density plasma apparatus are required for etching and deposit of thin films. To understand critical parameters such as the pressure, temperature, electrostatic potential and energy distribution of ions impacting on the wafer, it is necessary to understand how these parameters are influenced by the power input and neutral gas pressure. In the present work, a 2-D hybrid electron fluid-particle ion model has been developed to simulate one of the high density plasma sources-an Electron Cyclotron Resonance (ECR) plasma system with various pressures and power inputs in a non-uniform magnetic field. By means of numerical simulation, the energy distributions of argon ion impacting on the wafer are obtained and the plasma density, electron temperature and plasma electrostatic potential are plotted in 3-D. It is concluded that the plasma density depends mainly on both the power input and neutral gas pressure. However, the plasma potential and electron temperature can hardly be affected by the power input, they seem to be primarily dependent on the neutral gas pressure. The comparison shows that the simulation results are qualitatively in good agreement with the experiment measurements.

The induction plasma chemical reactor: Part I. Equilibrium model

A mathematical model is presented for the numerical simulation of the flow, temperature, and concentration fields in an rf plasma chemical reactor. The simulation is performed assuming chemical equilibrium. The extent of validity of this assumption is discussed. The system considered is the reaction of SiCl4 and NH3 for the production of Si3N4.

The induction plasma chemical reactor: Part II. Kinetic model

A kinetic model has been developed for the prediction of the concentration gelds in an rf plasma reactor. A sample calculation for a SiCl4/H2 system is then performed. The model considers the mixing processes along with the kinetics of seven reactions involving the decomposition of these reactants. The results obtained are compared to those assuming chemical equilibrium. The predictions indicate that an equilibrium assumption will result in lower predicted temperature fields in the reactor. Furthermore, for the chemical system considered here, while differences exist between the concentration fields obtained by the two models, the differences are not substantial.

Destruction of Chemical Agents in a Plasma Reactor with Working Gas of Hydrogen

Optimization of RP-HPLC analysis of low molecular weight organic acids in soil

RP-HPLC analysis for low molecular weight organic acids in soil solution has been optimized. An Atlantis (TM) C-18 column was used for the analyses. An optimal determination for eleven organic acids in soil solution was found at room temperature (25 degrees C) and 220 nm detection wavelength, with a mobile phase of 10 mM KH2PO4 -CH3OH (955, pH 2.7), a flow rate of 0.8 mL/min and 10 mu L sample size. The detection limits ranged 3.2-619 ng/mL, the coefficients of variation ranged 1.3-4.6%, and the recoveries ranged 95.6-106.3% for soil solution with standard addition on the optimal conditions proposed.

藏药独一味RP-HPLC色谱指纹图谱的建立及其质量评价

[目的]建立独一味药材HPLC指纹图谱，研究不同地区独一味药材的质量，为其质量控制提供有效的方法。[方法]采用RP-HPLC方法梯度洗脱，测定10批不同地区的独一味样品。[色谱备件]Kromasil C18柱（250mm×4．60mm，5μm），流动相为甲醇-0．4％的磷酸水溶液（55：45），梯度洗脱程序为0～70min，甲醇的体积分数由1％线性增加至15％；70～100min内，甲醇由15％线性增加至17％；100～130min内，甲醇由17％线性增加至20％；130～150min，甲醇由20％线性增加至100％；流速为1ml/min，检测波长为254n／n，柱温为30℃。[结果]确定了独一味药材中的7个共有峰。根据聚类分析结果，将独一味药材分为3类。[结论]该研究建立的方法重复性好，可用于不同地区独一味药材的质量评价，结合含量测定可用于独一味药材的质量的全面控制。

Partial oxidation of ethane to syngas in an oxygen-permeable membrane reactor

A perovskite-type oxide of Ba0.5Sr0.5Co0.8Fe0.2O3-delta (BSCFO) with mixed electronic and oxygen ionic conductivity at high temperatures was used as an oxygen-permeable membrane. A tubular membrane of BSCFO made by extrusion method has been used in the membrane reactor to exclusively transport oxygen for the partial oxidation of ethane (POE) to syngas with catalyst of LiLaNiO/gamma-Al2O3 at temperatures of 800-900 degreesC. After only 30 min POE reaction in the membrane reactor, the oxygen permeation flux reached at 8.2 ml cm(-2) min(-1). After that, the oxygen permeation flux increased slowly and it took 12 h to reach at 11.0 ml cm(-2) min(-1). SEM and EDS analysis showed that Sr and Ba segregations occurred on the used membrane surface exposed to air while Co slightly enriched on the membrane surface exposed to ethane. The oxygen permeation flux increased with increasing of concentration of C2H6, which was attributed to increasing of the driving force resulting from the more reducing conditions produced with an increase of concentration of C2H6 in the feed gas. The tubular membrane reactor was successfully operated for POE reaction at 875 degreesC for more than 100 h without failure, with ethane conversion of similar to 100%, CO selectivity of >91% and oxygen permeation fluxes of 10-11 ml cm(-2) min(-1). (C) 2002 Elsevier Science B.V. All rights reserved.

Performance of a mixed-conducting ceramic membrane reactor with high oxygen permeability for methane conversion

A mixed-conducting perovskite-type Ba0.5Sr0.5Co0.8Fe0.2O3-delta (BSCFO) ceramic membrane reactor with high oxygen permeability was applied for the activation of methane. The membrane reactor has intrinsic catalytic activities for methane conversion to ethane and ethylene. C-2 selectivity up to 40-70% was achieved, albeit that conversion rate were low, typically 0.5-3.5% at 800-900 degreesC with a 50% helium diluted methane inlet stream at a flow rate of 34 ml/min. Large amount of unreacted molecular oxygen was detected in the eluted gas and the oxygen permeation flux improved only slightly compared with that under non-reactive air/He experiments. The partial oxidation of methane to syngas in a BSCFO membrane reactor was also performed by packing LiLaNiO/gamma -Al2O3 with 10% Ni loading as the catalyst. At the initial stage, oxygen permeation flux, methane conversion and CO selectivity were closely related with the state of the catalyst. Less than 21 h was needed for the oxygen permeation flux to reach its steady state. 98.5% CH4 conversion, 93.0% CO selectivity and 10.45 ml/cm(2) min oxygen permeation flux were achieved under steady state at 850 degreesC. Methane conversion and oxygen permeation flux increased with increasing temperature, No fracture of the membrane reactor was observed during syngas production. However, H-2-TPR investigation demonstrated that the BSCFO was unstable under reducing atmosphere, yet the material was found to have excellent phase reversibility. A membrane reactor made from BSCFO was successfully operated for the POM reaction at 875 degreesC for more than 500h without failure, with a stable oxygen permeation flux of about 11.5 ml/cm(2) min. (C) 2001 Elsevier Science B.V. All rights reserved.

Gas phase catalytic partial oxidation of toluene in a microchannel reactor

Gas phase partial oxidation of toluene over V/Ti oxide catalysts has been successfully performed in a microchannel reactor, which provides very good mass and heat transfer conditions. With the elimination of hot spots, which are known as the most negative factors for partial oxidation of hydrocarbons, steady and uniform reaction conditions can be achieved in the catalyst bed by using, the microreactor. Since the best performance of the catalysts might be exploited, the selectivity of partial oxidation products of toluene has remarkably increased compared to the traditional packed fixed-bed reactor, even without the bother of modifying the catalysts, diluting the reactants or catalysts with inert contents to avoid hot spots or improve the diffusion and mixing. Furthermore, in virtue of its inherent safety features, when using pure oxygen as oxidant, the reactions were handled safety within the explosion limits in the microreactor. With TiO2 carried V2O5 as catalysts, the total selectivity of benzaldehyde and benzoic acid reaches around 60%, and the toluene conversion is about 10%. The conversion can go up without violent decline of selectivity, unlike most fixed bed reactors. Space time yield of 3.12 kg h(-1) L-1 calculated on the basis of the channel volume has been achieved. The influence of operating conditions has been investigated in detail in the microreactor. (c) 2005 Elsevier B.V. All rights reserved.

Structural Evolution and Property Changes in Nd_{60}Al_{10}Fe_{20}Co_{10} Bulk Metallic Glass During Crystallization

The structural evolution and property changes in Nd60Al10Fe20Co10 bulk metallic glass (BMG) upon crystallization are investigated by the ultrasonic method, x-ray diffraction, density measurement, and differential scanning calorimetry. The elastic constants and Debye temperature of the BMG are obtained as a function of annealing temperature. Anomalous changes in ultrasonic velocities, elastic constants, and density are observed between 600–750 K, corresponding to the formation of metastable phases as an intermediate product in the crystallization process. The changes in acoustic velocities, elastic constants, density, and Debye temperature of the BMG relative to its fully crystallized state are much smaller, compared with those of other known BMGs, the differences being attributed to the microstructural feature of the BMG.

Nd_(60)Al_(10)Fe_(20)Co_(10)金属玻璃的变形行为

利用材料测试系统(MTS)、X-Ray 衍射(XRD)和扫描电镜(SEM)等手段研究了Nd 基大块金属玻璃的变形行为和断裂特征。Nd 基大块金属玻璃样品在室温下是脆性断裂,大约在500 K 时变形模式从非均匀变形转变为均匀变形,在523 K 以上表现出显著的塑性变形。在5×10-4 m/s 的应变速率下,这种Nd 基大块金属玻璃材料在523 K~600 K 之间出现明显的屈服应力下降现象,随后进入1 种稳定的粘性流动状态,而且这种屈服下降现象与温度和应变速率有关。这种在过冷液相区的变形行为与其他大块金属玻璃变形特征相似。合金的这种塑性变形行为表明了其存在稳定的过冷液相区,同时对其变形行为的研究有助于进一步了解Nd 基大块金属玻璃的反常热稳定性。

大庆RP-3航空煤油热物性分析

针对广泛应用于超燃冲压发动机的吸热碳氢燃料,简要介绍了用于模拟燃料热物理特性的替代燃料方法和广义对应状态法则.以大庆RP-3航空煤油为例,选择了一个由49%（摩尔比）正十烷,44%1,3,5-三甲基环己烷以及7%正丙基苯组成的替代煤油用来模拟RP-3航空煤油进行热物理特性研究,并采用广义对应状态法则对替代煤油热力学和输运特性进行了数值研究.在此基础上,提出了预测超临界态流体通过音速喷管流量的新方法并得到了实验验证.