Parylene-C as a new piezoelectric material

The goal of this thesis is to develop a proper microelectromechanical systems (MEMS) process to manufacture piezoelectric Parylene-C (PA-C), which is famous for its chemical inertness, mechanical and thermal properties and electrical insulation. Furthermore, piezoelectric PA-C is used to build miniature, inexpensive, non-biased piezoelectric microphones.

These piezoelectric PA-C MEMS microphones are to be used in any application where a conventional piezoelectric and electret microphone can be used, such as in cell phones and hearing aids. However, they have the advantage of a simplified fabrication process compared with existing technology. In addition, as a piezoelectric polymer, PA-C has varieties of applications due to its low dielectric constant, low elastic stiffness, low density, high voltage sensitivity, high temperature stability and low acoustic and mechanical impedance. Furthermore, PA-C is an FDA approved biocompatible material and is able to maintain operate at a high temperature.

To accomplish piezoelectric PA-C, a MEMS-compatible poling technology has been developed. The PA-C film is poled by applying electrical field during heating. The piezoelectric coefficient, -3.75pC/N, is obtained without film stretching.

The millimeter-scale piezoelectric PA-C microphone is fabricated with an in-plane spiral arrangement of two electrodes. The dynamic range is from less than 30 dB to above 110 dB SPL (referenced 20 µPa) and the open-circuit sensitivities are from 0.001 – 0.11 mV/Pa over a frequency range of 1 - 10 kHz. The total harmonic distortion of the device is less than 20% at 110 dB SPL and 1 kHz.

Earthquake geology of Myanmar

This thesis describes the active structures of Myanmar and its surrounding regions, and the earthquake geology of the major active structures. Such investigation is needed urgently for this rapidly developing country that has suffered from destructive earthquakes in its long history. To archive a better understanding of the regional active tectonics and the seismic potential in the future, we utilized a global digital elevation model and optical satellite imagery to describe geomorphologic evidence for the principal neotectonic features of the western half of the Southeast Asia mainland. Our investigation shows three distinct active structural systems that accommodate the oblique convergence between the Indian plate and Southeast Asia and the extrusion of Asian territory around the eastern syntaxis of the Himalayan mountain range. Each of these active deformation belts can be further separated into several neotectonic domains, in which structures show distinctive active behaviors from one to another.

In order to better understand the behaviors of active structures, we focused on the active characteristics of the right-lateral Sagaing fault and the oblique subducting northern Sunda megathrust in the second part of this thesis. The detailed geomorphic investigations along these two major plate-interface faults revealed the recent slip behavior of these structures, and plausible recurrence intervals of major seismic events. We also documented the ground deformation of the 2011 Tarlay earthquake in remote eastern Myanmar from remote sensing datasets and post-earthquake field investigations. The field observation and the remote sensing measurements of surface ruptures of the Tarlay earthquake are the first study of this kind in the Myanmar region.