I. Reactively sputtered Ti-Si-N thin films for diffusion barrier applications. II. Oxidation, diffusion and crystallization of an amorphous Zr_(60)Al_(15)Ni_(25) alloy.

Films of Ti-Si-N obtained by reactively sputtering a TiSi_2, a Ti_5Si_3, or a Ti_3Si target are either amorphous or nanocrystalline in structure. The atomic density of some films exceeds 10^23 at./cm^3. The room-temperature resistivity of the films increases with the Si and the N content. A thermal treatment in vacuum at 700 °C for 1 hour decreases the resistivity of the Ti-rich films deposited from the Ti_5Si_3 or the Ti_3Si target, but increases that of the Si-rich films deposited from the TiSi_2 target when the nitrogen content exceeds about 30 at. %.

Ti_(34)Si_(23)N_(43) deposited from the Ti_5Si_3 target is an excellent diffusion barrier between Si and Cu. This film is a mixture of nanocrystalline TiN and amorphous SiN_x. Resistivity measurement from 80 K to 1073 K reveals that this film is electrically semiconductor-like as-deposited, and that it becomes metal-like after an hour annealing at 1000 °C in vacuum. A film of about 100 nm thick, with a resistivity of 660 µΩcm, maintains the stability of Si n+p shallow junction diodes with a 400 nm Cu overlayer up to 850 °C upon 30 min vacuum annealing. When used between Si and Al, the maximum temperature of stability is 550 °C for 30 min. This film can be etched in a CF_4/O_2 plasma.

The amorphous ternary metallic alloy Zr_(60)Al_(15)Ni_(25) was oxidized in dry oxygen in the temperature range 310 °C to 410 °C. Rutherford backscattering and cross-sectional transmission electron microscopy studies suggest that during this treatment an amorphous layer of zirconium-aluminum-oxide is formed at the surface. Nickel is depleted from the oxide and enriched in the amorphous alloy below the oxide/alloy interface. The oxide layer thickness grows parabolically with the annealing duration, with a transport constant of 2.8x10^(-5) m^2/s x exp(-1.7 eV/kT). The oxidation rate is most likely controlled by the Ni diffusion in the amorphous alloy.

At later stages of the oxidation process, precipitates of nanocrystalline ZrO_2 appear in the oxide near the interface. Finally, two intermetallic phases nucleate and grow simultaneously in the alloy, one at the interface and one within the alloy.

Interpretation of lunar topography : impact cratering and surface roughness

This work seeks to understand past and present surface conditions on the Moon using two different but complementary approaches: topographic analysis using high-resolution elevation data from recent spacecraft missions and forward modeling of the dominant agent of lunar surface modification, impact cratering. The first investigation focuses on global surface roughness of the Moon, using a variety of statistical parameters to explore slopes at different scales and their relation to competing geological processes. We find that highlands topography behaves as a nearly self-similar fractal system on scales of order 100 meters, and there is a distinct change in this behavior above and below approximately 1 km. Chapter 2 focuses this analysis on two localized regions: the lunar south pole, including Shackleton crater, and the large mare-filled basins on the nearside of the Moon. In particular, we find that differential slope, a statistical measure of roughness related to the curvature of a topographic profile, is extremely useful in distinguishing between geologic units. Chapter 3 introduces a numerical model that simulates a cratered terrain by emplacing features of characteristic shape geometrically, allowing for tracking of both the topography and surviving rim fragments over time. The power spectral density of cratered terrains is estimated numerically from model results and benchmarked against a 1-dimensional analytic model. The power spectral slope is observed to vary predictably with the size-frequency distribution of craters, as well as the crater shape. The final chapter employs the rim-tracking feature of the cratered terrain model to analyze the evolving size-frequency distribution of craters under different criteria for identifying "visible" craters from surviving rim fragments. A geometric bias exists that systematically over counts large or small craters, depending on the rim fraction required to count a given feature as either visible or erased.