Parylene-C as a new piezoelectric material

The goal of this thesis is to develop a proper microelectromechanical systems (MEMS) process to manufacture piezoelectric Parylene-C (PA-C), which is famous for its chemical inertness, mechanical and thermal properties and electrical insulation. Furthermore, piezoelectric PA-C is used to build miniature, inexpensive, non-biased piezoelectric microphones.

These piezoelectric PA-C MEMS microphones are to be used in any application where a conventional piezoelectric and electret microphone can be used, such as in cell phones and hearing aids. However, they have the advantage of a simplified fabrication process compared with existing technology. In addition, as a piezoelectric polymer, PA-C has varieties of applications due to its low dielectric constant, low elastic stiffness, low density, high voltage sensitivity, high temperature stability and low acoustic and mechanical impedance. Furthermore, PA-C is an FDA approved biocompatible material and is able to maintain operate at a high temperature.

To accomplish piezoelectric PA-C, a MEMS-compatible poling technology has been developed. The PA-C film is poled by applying electrical field during heating. The piezoelectric coefficient, -3.75pC/N, is obtained without film stretching.

The millimeter-scale piezoelectric PA-C microphone is fabricated with an in-plane spiral arrangement of two electrodes. The dynamic range is from less than 30 dB to above 110 dB SPL (referenced 20 µPa) and the open-circuit sensitivities are from 0.001 – 0.11 mV/Pa over a frequency range of 1 - 10 kHz. The total harmonic distortion of the device is less than 20% at 110 dB SPL and 1 kHz.

Analog methods of nonlinear vibration analysis

This thesis presents methods by which electrical analogies can be obtained for nonlinear systems. The accuracy of these methods is investigated and several specific types of nonlinear equations are studied in detail.

In Part I a general method is given for obtaining electrical analogs of nonlinear systems with one degree of freedom. Loop and node methods are compared and the stability of the loop analogy is briefly considered.

Parts II and III give a description of the equipment and a discussion of its accuracy. Comparisons are made between experimental and analytic solutions of linear systems.

Part IV is concerned with systems having a nonlinear restoring force. In particular, solutions of Duffing's equation are obtained, both by using the electrical analogy and also by approximate analytical methods.

Systems with nonlinear damping are considered in Part V. Two specific examples are chosen: (1) forced oscillations and (2) self-excited oscillations (van der Pol’s equation). Comparisons are made with approximate analytic solutions.

Part VI gives experimental data for a system obeying Mathieu's equation. Regions of stability are obtained. Examples of subharmonic, ultraharmonic, and ultrasubharmonic oscillat1ons are shown.