Recubrimientos autolubricantes cuasicristalinos tipo composite depositados mediante proyección térmica para aplicaciones espaciales y de alta temperatura

Los recubrimientos lubricantes sólidos son requeridos para reducir la fricción y prevenir el desgaste en componentes que operan a altas temperaturas o en vacío (vehículos espaciales, industria química, motores diésel, turbinas aeronáuticas y de generación de energía…). Los lubricantes líquidos pierden sus características cuando las condiciones de presión, temperatura o ambientales son severas (oxidación, inestabilidad térmica, volatilidad,…), por ejemplo los aceites minerales convencionales se descomponen a temperaturas próximas a 200 ºC. Por tanto, la única manera de poder conseguir una adecuada lubricación a temperaturas extremas es por medio de sólidos, que cada vez más, se aplican en forma de recubrimientos. Estos recubrimientos podrían ser empleados en componentes de vehículos espaciales reutilizables, donde se pueden alcanzar, en la reentrada en la atmósfera, temperaturas de 700 ºC (bisagras, rodamientos, articulaciones y zonas de sellado en las superficies de control, y rodamientos de las turbobombas y las cajas de engranajes). Dichos recubrimientos también deberían ser capaces de proporcionar una lubricación efectiva a bajas temperaturas para las operaciones en tierra, para las operaciones de arranque en frío, incluso en el espacio. El conjunto de requisitos que tendrían que satisfacer las capas tribológicas relacionadas con estas condiciones extremas es muy diverso, lo que hace que el concepto de capas tipo composite (aquéllas constituidas por varios componentes) sea, en principio, muy adecuado para estas aplicaciones. Recubrimientos composite proyectados térmicamente constituidos por una matriz dura y conteniendo lubricantes sólidos pueden ser una buena solución desde el punto de vista tribológico. El “Lewis Research Centre” de la NASA ha estado desarrollando recubrimientos autolubricantes tipo composite, constituidos por la combinación de materiales duros como el carburo de cromo, junto con lubricantes sólidos como plata o la eutéctica de fluoruros de calcio y bario, en una matriz de NiCr, para su uso en aplicaciones terrestres a alta temperatura. Estos recubrimientos han sido aplicados mediante proyección térmica, siendo denominados como series PS100, PS200, PS300 y PS400, reduciendo de forma significativa el coeficiente de fricción y mejorando la resistencia al desgaste en un amplio margen de temperaturas. Otra nueva familia de materiales con comportamiento tribológico prometedor son las aleaciones cuasicristalinas (QC). Presentan características muy atractivas: alta dureza, baja fricción, alto límite elástico de compresión... Son muy frágiles como materiales másicos, por lo que se intentan aplicar en forma de recubrimientos. Se pueden depositar mediante proyección térmica. Algunos de estos materiales cuasicristalinos, como AlCoFeCr, poseen coeficientes de dilatación próximos al de los materiales metálicos, alta estabilidad térmica, baja conductividad térmica y una elevada resistencia a la oxidación y a la corrosión en caliente. En esta tesis se han desarrollado recubrimientos tipo composite conteniendo cuasicristales como componente antidesgaste, NiCr como componente tenaz, y Ag y la eutéctica de BaF2-CaF2, como lubricantes sólidos. Estos recubrimientos han sido depositados con diferentes composiciones (denominadas TH100, TH103, TH200, TH400, TH600…) mediante distintos procesos de proyección térmica: plasma en aire (PS), plasma en baja presión (LPPS) y combustión a alta velocidad (HVOF). Los recubrimientos se han generado sobre el sustrato X-750, una superaleación base níquel, endurecible por precipitación, con muy buena resistencia mecánica y a la oxidación hasta temperaturas de 870 ºC y, además, es empleada en aplicaciones aeroespaciales e industriales. Los recubrimientos han sido caracterizados microestructuralmente en INTA (Instituto Nacional de Técnica Aeroespacial), mediante SEM-EDS (Scanning Electronic Microscopy-Energy Dispersive Spectroscopy) y XRD (X-Ray Diffraction), y tribológicamente mediante medidas de microdureza y ensayos en tribómetro POD (Pin On Disc) para determinar los coeficientes de fricción y de desgaste. Los recubrimientos han sido ensayados tribológicamente a alta temperatura en INTA y en vacío en AMTTARC (Aerospace and Space Materials Technology Testhouse – Austrian Research Centres), en Seibersdorf (Austria). Se ha estudiado la influencia de la carga normal aplicada, la velocidad lineal y el material del pin. De entre las diferentes series de recubrimientos cuasicristalinos tipo composite desarrolladas, dos de ellas, TH100 y TH103 han presentado una excelente calidad microestructural (baja porosidad, distribución uniforme de fases…) y se han mostrado como excelentes recubrimientos antidesgaste. Sin embargo, estas capas presentan un pobre comportamiento como autolubricantes a temperatura ambiente, aunque mejoran mucho a alta temperatura o en vacío. Los resultados del trabajo presentado en esta tesis han proporcionado nuevo conocimiento respecto al comportamiento tribológico de recubrimientos autolubricantes cuasicristalinos tipo composite depositados por proyección térmica. Sin embargo, dichos resultados, aunque son muy prometedores, no han puesto de manifiesto el adecuado comportamiento autolubricante que se pretendía y, además, como ocurre en cualquier trabajo de investigación, durante el desarrollo del mismo siempre aparecen nuevas dudas por resolver. Se proponen nuevas líneas de trabajo futuro que complementen los resultados obtenidos y que puedan encaminar hacia la obtención de un recubrimiento que mejore su comportamiento autolubricante. ABSTRACT Solid lubricant coatings are required to reduce friction and prevent wear in components that operate at high temperatures or under vacuum (space vehicles, chemical industry, diesel engines, power generation turbines and aeronautical turbines, for instance). In these cases neither greases nor liquid lubricants can be employed and the only practicable approach to lubrication in such conditions is by means of solids. These are increasingly applied in the form of coatings which should exhibit low shear strength, whilst maintaining their chemical stability at extremes temperatures and in the space environment. In the space field, these coatings would be employed in re-usable space plane applications, such as elevon hinges, where temperatures of 700 ºC are reached during re-entry into the Earth’s atmosphere. These coatings should also be capable of providing effective lubrication at lower temperatures since “cold start” operation may be necessary, even in the space environment. The diverse and sometimes conflictive requirements in high temperature and space-related tribological coatings make the concept of composite coatings highly suitable for these applications. Thermal-sprayed composites containing solid lubricants in a hard matrix perform well tribologically. NASA‘s Lewis Research Centre had developed self-lubricating composite coatings for terrestrial use, comprising hard materials like chromium carbide as well as solid lubricant additives such as silver and BaF2-CaF2 eutectic on a Ni-Cr matrix. These coatings series, named PS100, PS200, PS300 and PS400, are applied by thermal spray and significantly reduce friction coefficients, improving wear resistance over a wide temperature range. Quasicrystalline alloys (QC) constitute a new family of materials with promising tribological behaviour. Some QC materials exhibit a combination of adequate antifriction properties: low friction coefficient, high hardness and high yield strength under compression, and can be easily produced as coatings on top of metallic and non-metallic materials. Among these QC alloys, AlCoFeCr has high hardness (700 HV0.1), a thermal expansion coefficient close to that of metals, high thermal stability, low thermal conductivity and good oxidation and hot corrosion resistance. However most QC materials have the disadvantage of being very brittle. In order to take advantage of the excellent tribological properties of QCs, thick composite lubricant coatings were prepared containing them as the hard phase for wear resistance, Ag and BaF2-CaF2 eutectic as lubricating materials and NiCr as the tough component. These coatings were deposited in different composition mixtures (named TH100, TH103, TH200, TH400, TH600…) by different thermal spray processes: air plasma spray (PS), low pressure plasma spray (LPPS) and high velocity oxy-fuel (HVOF), on X-750 substrates. X-750 is an age-hardenable nickel-base superalloy with very good strength and a good resistance to oxidising combustion gas environments at temperatures up to about 870 ºC and it is widely used in aerospace and industrial applications. Coatings have been characterized microstructurally, at INTA (National Institute for Aerospace Technology), by means of SEM-EDS (Scanning Electronic Microscopy- Energy Dispersive Spectroscopy) and XRD (X-Ray Diffraction), and tribologically by microhardness measurements and pin-on-disc testing to determine friction coefficients as well as wear resistance. The coatings were tested tribologically at high temperature at INTA and under vacuum at AMTT-ARC (Aerospace and Space Materials Technology Testhouse – Austrian Research Centres), in Seibersdorf (Austria). Different loads, linear speeds and pin materials were studied. TH100 and TH103 QC alloy matrix composite coatings were deposited by HVOF with excellent microstructural quality (low porosity, uniform phase distribution) and showed to be excellent wear resistant coatings. However these QC alloy matrix composite coatings are poor as a self-lubricant at room temperature but much better at high temperature or in vacuum. The results from the work performed within the scope of this thesis have provided new knowledge concerning the tribological behavior of self-lubricating quasicrystalline composite coatings deposited by thermal spraying. Although these results are very promising, they have not shown an adequate self-lubricating behavior as was intended, and also, as in any research, the results have in addition raised new questions. Future work is suggested to complement the results of this thesis in order to improve the selflubricating behaviour of the coatings.

Numerical Simulation of the Aerodynamic Behavior of High Velocity Trains under Synthetic Crosswinds of Different Shear and Turbulence Characteristics

A numerical simulation of the aerodynamic behavior of high-speed trains under synthetic crosswinds at a 90º yaw angle is presented. The train geometry is the aerodynamic train model (ATM). Flow description based on numerical simulations is obtained using large eddy simulation (LES) and the commercial code ANSYSFluent V14.5. A crosswind whose averaged velocity and turbulence characteristics change with distance to the ground is imposed. Turbulent fluctuations that vary temporally and spatially are simulated with TurbSim code. The crosswind boundary condition is calculated for the distance the train runs during a simulation period. The inlet streamwise velocity boundary condition is generated using Taylor?s frozen turbulence hypothesis. The model gives a time history of the force and moments acting on the train; this includes averaged values, standard deviations and extreme values. Of particular interest are the spectra of the forces and moments, and the admittance spectra. For comparison, results obtained with LES and a uniform wind velocity fluctuating in time, and results obtained with Reynolds averaged Navier Stokes equations (RANS), and the averaged wind conditions, are also presented.

High fidelity simulations of failure in fiber-reinforced composites

Los ensayos virtuales de materiales compuestos han aparecido como un nuevo concepto dentro de la industria aeroespacial, y disponen de un vasto potencial para reducir los enormes costes de certificación y desarrollo asociados con las tediosas campañas experimentales, que incluyen un gran número de paneles, subcomponentes y componentes. El objetivo de los ensayos virtuales es sustituir algunos ensayos por simulaciones computacionales con alta fidelidad. Esta tesis es una contribución a la aproximación multiescala desarrollada en el Instituto IMDEA Materiales para predecir el comportamiento mecánico de un laminado de material compuesto dadas las propiedades de la lámina y la intercara. La mecánica de daño continuo (CDM) formula el daño intralaminar a nivel constitutivo de material. El modelo de daño intralaminar se combina con elementos cohesivos para representar daño interlaminar. Se desarrolló e implementó un modelo de daño continuo, y se aplicó a configuraciones simples de ensayos en laminados: impactos de baja y alta velocidad, ensayos de tracción, tests a cortadura. El análisis del método y la correlación con experimentos sugiere que los métodos son razonablemente adecuados para los test de impacto, pero insuficientes para el resto de ensayos. Para superar estas limitaciones de CDM, se ha mejorado la aproximación discreta de elementos finitos enriqueciendo la cinemática para incluir discontinuidades embebidas: el método extendido de los elementos finitos (X-FEM). Se adaptó X-FEM para un esquema explícito de integración temporal. El método es capaz de representar cualitativamente los mecanismos de fallo detallados en laminados. Sin embargo, los resultados muestran inconsistencias en la formulación que producen resultados cuantitativos erróneos. Por último, se ha revisado el método tradicional de X-FEM, y se ha desarrollado un nuevo método para superar sus limitaciones: el método cohesivo X-FEM estable. Las propiedades del nuevo método se estudiaron en detalle, y se concluyó que el método es robusto para implementación en códigos explícitos dinámicos escalables, resultando una nueva herramienta útil para la simulación de daño en composites. Virtual testing of composite materials has emerged as a new concept within the aerospace industry. It presents a very large potential to reduce the large certification costs and the long development times associated with the experimental campaigns, involving the testing of a large number of panels, sub-components and components. The aim of virtual testing is to replace some experimental tests by high-fidelity numerical simulations. This work is a contribution to the multiscale approach developed in Institute IMDEA Materials to predict the mechanical behavior of a composite laminate from the properties of the ply and the interply. Continuum Damage Mechanics (CDM) formulates intraply damage at the the material constitutive level. Intraply CDM is combined with cohesive elements to model interply damage. A CDM model was developed, implemented, and applied to simple mechanical tests of laminates: low and high velocity impact, tension of coupons, and shear deformation. The analysis of the results and the comparison with experiments indicated that the performance was reasonably good for the impact tests, but insuficient in the other cases. To overcome the limitations of CDM, the kinematics of the discrete finite element approximation was enhanced to include mesh embedded discontinuities, the eXtended Finite Element Method (X-FEM). The X-FEM was adapted to an explicit time integration scheme and was able to reproduce qualitatively the physical failure mechanisms in a composite laminate. However, the results revealed an inconsistency in the formulation that leads to erroneous quantitative results. Finally, the traditional X-FEM was reviewed, and a new method was developed to overcome its limitations, the stable cohesive X-FEM. The properties of the new method were studied in detail, and it was demonstrated that the new method was robust and can be implemented in a explicit finite element formulation, providing a new tool for damage simulation in composite materials.

Flamelet structures in spray ignition

In typical liquid-fueled burners the fuel is injected as a high-velocity liquid jet that breaks up to form the spray. The initial heating and vaporization of the liquid fuel rely on the relatively large temperatures of the sourrounding gas, which may include hot combustion products and preheated air. The heat exchange between the liquid and the gas phases is enhanced by droplet dispersion arising from the turbulent motion. Chemical reaction takes place once molecular mixing between the fuel vapor and the oxidizer has occurred in mixing layers separating the spray flow from the hot air stream. Since in most applications the injection velocities are much larger than the premixed-flame propagation velocity, combustion stabilization relies on autoignition of the fuel-oxygen mixture, with the combustion stand-off distance being controlled by the interaction of turbulent transport, droplet heating and vaporization, and gas-phase chemical reactions. In this study, conditions are identified under which analyses of laminar flamelets canshed light on aspects of turbulent spray ignition. This study extends earlier fundamental work by Liñan & Crespo (1976) on ignition in gaseous mixing layers to ignition of sprays. Studies of laminar mixing layers have been found to be instrumental in developing un-derstanding of turbulent combustion (Peters 2000), including the ignition of turbulent gaseous diffusion flames (Mastorakos 2009). For the spray problem at hand, the configuration selected, shown in Figure 1, involves a coflow mixing layer formed between a stream of hot air moving at velocity UA and a monodisperse spray moving at velocity USUA. The boundary-layer approximation will be used below to describe the resulting sl ender flow, which exhibits different igniting behaviors depending on the characteristics of t he fuel. In this approximation, consideration of the case U A = U S enables laminar ignition distances to be related to ignition times of unstrained spray flamelets, thereby pro viding quantitative information of direct applicability in regions of low scala r dissipation-rate in turbulent reactive flows (see the discussion in pp. 181–186 of Peters (2000)) . This report is organized as follows. Effects of droplet dispersion dynamics on ignition of sprays in turbulent mixing layers are discussed in Section 2. The formulation f or ignition in laminar mixing layers is outlined in Sections 3 and 4. The results are presented in Section 5. In Section 6, the mixture-fraction field and associated scalar dissipat ion rates for spray ignition are discussed. Finally, some brief conclusions are drawn in Section 7.

Impact Behavior of Hybrid Glass/Carbon Epoxy Composites

The high velocity impact performance in hybrid woven carbon and S2 and E glass fabric laminates manufactured by resin transfer molding (RTM) was studied. Specimens with different thicknesses and glass-fiber content were tested against 5.5 mm spherical projectiles with impact velocities ranging from 300 to 700 m/s to obtain the ballistic limit. The resulting deformation and fracture micromechanisms were studied. Several impacts were performed on the same specimens to identify the multihit behavior of such laminates. The results of the fracture analysis, in conjunction with those of the impact tests, were used to describe the role played by glass-fiber hybridization on the fracture micromechanisms and on the overall laminate performance under high velocity impact.

State of the Art and Future Trends in Grid Codes Applicable to Isolated Electrical Systems

Isolated electrical systems lack electrical interconnection to other networks and are usually placed in geographically isolated areas—mainly islands or locations in developing countries. Until recently, only diesel generators were able to assure a safe and reliable supply in exchange for very high costs for fuel transportation and system operation. Transmission system operators (TSOs) are increasingly seeking to replace traditional energy models based on large groups of conventional generation units with mixed solutions where diesel groups are held as backup generation and important advantages are provided by renewable energy sources. The grid codes determine the technical requirements to be fulfilled by the generators connected in any electrical network, but regulations applied to isolated grids are more demanding. In technical literature it is rather easy to find and compare grid codes for interconnected electrical systems. However, the existing literature is incomplete and sparse regarding isolated grids. This paper aims to review the current state of isolated systems and grid codes applicable to them, specifying points of comparison and defining the guidelines to be followed by the upcoming regulations.

Ab initio Methodology for Calculating Elastic Constant and Sound Velocity for Hydrogen and Deuterium in Molecular Solid Phase

Hydrogen isotopes play a critical role both in inertial and magnetic confinement Nuclear Fusion. Since the preferent fuel needed for this technology is a mixture of deuterium and tritium. The study of these isotopes particularly at very low temperatures carries a technological interest in other applications. The present line promotes a deep study on the structural configuration that hydrogen and deuterium adopt at cryogenic temperatures and at high pressures. Typical conditions occurring in present Inertial Fusion target designs. Our approach is aims to determine the crystal structure characteristics, phase transitions and other parameters strongly correlated to variations of temperature and pressure. With this results is possible calculated the elastic constant and sound velocity for hydrogen and deuterium in molecular solid phase.

Co2 capture in power plants-using the oxy-combustion principle

In the C02 capture from power generation, the energy penalties for the capture are one of the main challenges. Nowadays, the post-combustion methods have energy penalties 10wer than the oxy combustion and pre-combustion technologies. One of the main disadvantages of the post combustion method is the fact that the capture ofC02at atmospheric pressure requires quite big equipment for the high flow rates of flue gas, and the 10w partial pressure of the CO2generates an important 10ss of energy. The A1lam cyc1e presented for NETPOWER gives high efficiencies in the power production and 10w energy penalties. A simulation of this cyc1e is made together with a simulation of power plants with pre-combustion and post-combustion capture and without capture for natural gas and forcoa1. The simulations give 10wer efficiencies than the proposed for NETPOWER For natural gas the efficiency is 52% instead of the 59% presented, and 33% instead of51% in the case of using coal as fuel. Are brought to light problems in the CO2compressor due the high flow ofC02that is compressed unti1300 bar to be recyc1ed into the combustor.

Numerical simulation of the upward propagation of a flame in a vertical tube filled with a very lean mixture.

Upwardpropagation of a premixed flame in averticaltubefilled with a very leanmixture is simulated numerically using a single irreversible Arrhenius reaction model with infinitely high activation energy. In the absence of heat losses and preferential diffusion effects, a curved flame with stationary shape and velocity close to those of an open bubble ascending in the same tube is found for values of the fuel mass fraction above a certain minimum that increases with the radius of the tube, while the numerical computations cease to converge to a stationary solution below this minimum mass fraction. The vortical flow of the gas behind the flame and in its transport region is described for tubes of different radii. It is argued that this flow may become unstable when the fuel mass fraction is decreased, and that this instability, together with the flame stretch due to the strong curvature of the flame tip in narrow tubes, may be responsible for the minimum fuel mass fraction. Radiation losses and a Lewis number of the fuel slightly above unity decrease the final combustion temperature at the flame tip and increase the minimum fuel mass fraction, while a Lewis number slightly below unity has the opposite effect.

Propagation of nuclear data uncertainties in fuel cycle calculations using MONTE-CARLO Technique

The uncertainty propagation in fuel cycle calculations due to Nuclear Data (ND) is a important important issue for : issue for : • Present fuel cycles (e.g. high burnup fuel programme) • New fuel cycles designs (e.g. fast breeder reactors and ADS) Different error propagation techniques can be used: • Sensitivity analysis • Response Response Surface Method Surface Method • Monte Carlo technique Then, p p , , in this paper, it is assessed the imp y pact of ND uncertainties on the decay heat and radiotoxicity in two applications: • Fission Pulse Decay ( y Heat calculation (FPDH) • Conceptual design of European Facility for Industrial Transmutation (EFIT)

Isotopic uncertainty assessment due to nuclear data uncertainties in high-burnup samples.

The accurate prediction of the spent nuclear fuel content is essential for its safe and optimized transportation, storage and management. This isotopic evolution can be predicted using powerful codes and methodologies throughout irradiation as well as cooling time periods. However, in order to have a realistic confidence level in the prediction of spent fuel isotopic content, it is desirable to determine how uncertainties affect isotopic prediction calculations by quantifying their associated uncertainties.

Fabrication and characterization at high temperature of AlGaN/GaN enhancement HEMTs

Enhancement-mode (E-mode) high electron mobility transistors (HEMTs) based on a standard AlGaN/GaN heterostructure have been fabricated using two different methods: 19F implantation and fluorine-based plasma treatment. The need of a thermal annealing after both treatments has been proven in order to restore the ID and gm levels. DC characterization at high temperature has demonstrated that ID and gm decrease reversibly due to the reduction of the electron mobility and the drift velocity. Pulsed measurements (state period and variable pulse width) have been performed to study the self-heating effects.

High Performance Algorithms and Implementations Using Sparse and Parallelization Techniques on MBS

In this paper we will see how the efficiency of the MBS simulations can be improved in two different ways, by considering both an explicit and implicit semi-recursive formulation. The explicit method is based on a double velocity transformation that involves the solution of a redundant but compatible system of equations. The high computational cost of this operation has been drastically reduced by taking into account the sparsity pattern of the system. Regarding this, the goal of this method is the introduction of MA48, a high performance mathematical library provided by Harwell Subroutine Library. The second method proposed in this paper has the particularity that, depending on the case, between 70 and 85% of the computation time is devoted to the evaluation of forces derivatives with respect to the relative position and velocity vectors. Keeping in mind that evaluating these derivatives can be decomposed into concurrent tasks, the main goal of this paper lies on a successful and straightforward parallel implementation that have led to a substantial improvement with a speedup of 3.2 by keeping all the cores busy in a quad-core processor and distributing the workload between them, achieving on this way a huge time reduction by doing an ideal CPU usage

High-Acoustic-Impedance Tantalum Oxide Layers for Insulating Acoustic Reflectors

This work describes the assessment of the acoustic properties of sputtered tantalum oxide films intended for use as high-impedance films of acoustic reflectors for solidly mounted resonators operating in the gigahertz frequency range. The films are grown by sputtering a metallic tantalum target under different oxygen and argon gas mixtures, total pressures, pulsed dc powers, and substrate biases. The structural properties of the films are assessed through infrared absorption spectroscopy and X-ray diffraction measurements. Their acoustic impedance is assessed by deriving the mass density from X-ray reflectometry measurements and the acoustic velocity from picosecond acoustic spectroscopy and the analysis of the frequency response of the test resonators.

Ultra high frequency thin film saw devices

Durante los últimos años el flujo de datos en la transmisión que tiene lugar en los sistemas de comunicación ha aumentado considerablemente de forma que día a día se requieren más aplicaciones trabajando en un rango de frecuencias muy alto (3-30 GHz). Muchos de estos sistemas de comunicación incluyen dispositivos de onda acústica superficial (SAW) y por tanto se hace necesario el aumento de frecuencia a la que éstos trabajan. Pero este incremento de frecuencia de los dispositivos SAW no sólo es utilizado en los sistemas de comunicación, varios tipos de sensores, por ejemplo, aumentan su sensibilidad cuando la frecuencia a la que trabajan también lo hace. Tradicionalmente los dispositivos SAW se han fabricado sobre cuarzo, LiNbO3 y LiTaO3 principalmente. Sin embargo la principal limitación de estos materiales es su velocidad SAW. Además, debido a la alta temperatura a la que se depositan no pueden ser integrados en la tecnología de fabricación CMOS. El uso de la tecnología de capa delgada, en la que un material piezoeléctrico es depositado sobre un substrato, se está utilizando en las últimas décadas para incrementar la velocidad SAW de la estructura y poder obtener dispositivos trabajando en el rango de frecuencias requerido en la actualidad. Por otra parte, esta tecnología podría ser integrada en el proceso de fabricación CMOS. Durante esta tesis nos hemos centrado en la fabricación de dispositivos SAW trabajando a muy alta frecuencia. Para ello, utilizando la tecnología de capa delgada, hemos utilizado la estructura nitruro de aluminio (AlN) sobre diamante que permite conseguir velocidades SAW del sustrato que no se pueden alcanzar con otros materiales. El depósito de AlN se realizó mediante sputtering reactivo. Durante esta tesis se han realizado diferentes experimentos para optimizar dicho depósito de forma que se han obtenido los parámetros óptimos para los cuales se pueden obtener capas de AlN de alta calidad sobre cualquier tipo de sustrato. Además todo el proceso se realizó a baja temperatura para que el procesado de estos dispositivos pueda ser compatible con la tecnología CMOS. Una vez optimizada la estructura AlN/diamante, mediante litografía por haz de electrones se fabricaron resonadores SAW de tamaño nanométrico que sumado a la alta velocidad resultante de la combinación AlN/diamante nos ha permitido obtener dispositivos trabajando en el rango de 10-28 GHz con un alto factor de calidad y rechazo fuera de la banda. Estás frecuencias y prestaciones no han sido alcanzadas por el momento en resonadores de este tipo. Por otra parte, se han utilizado estos dispositivos para fabricar sensores de presión de alta sensibilidad. Estos dispositivos son afectados altamente por los cambios de temperatura. Se realizó también un exhaustivo estudio de cómo se comportan en temperatura estos resonadores, entre -250ºC y 250ºC (rango de temperaturas no estudiado hasta el momento) diferenciándose dos regiones una a muy baja temperatura en la que el dispositivo muestra un coeficiente de retraso en frecuencia (TCF) relativamente bajo y otra a partir de los -100ºC en la que el TCF es similar al observado en la bibliografía. Por tanto, durante esta tesis se ha optimizado el depósito de AlN sobre diamante para que sea compatible con la tecnología CMOS y permita el procesado de dispositivos trabajando a muy alta frecuencia con altas prestaciones para comunicaciones y sensores. ABSTRACT The increasing volume of information in data transmission systems results in a growing demand of applications working in the super-high-frequency band (3–30 GHz). Most of these systems work with surface acoustic wave (SAW) devices and thus there is a necessity of increasing their resonance frequency. Moreover, sensor application includes this kind of devices. The sensitivity of them is proportional with its frequency. Traditionally, quartz, LiNbO3 and LiTaO3 have been used in the fabrication of SAW devices. These materials suffer from a variety of limitations and in particular they have low SAW velocity as well as being incompatible with the CMOS technology. In order to overcome these problems, thin film technology, where a piezoelectric material is deposited on top of a substrate, has been used during the last decades. The piezoelectric/substrate structure allows to reach the frequencies required nowadays and could be compatible with the mass electronic production CMOS technology. This thesis work focuses on the fabrication of SAW devices working in the super-high-frequency range. Thin film technology has been used in order to get it, especially aluminum nitride (AlN) deposited by reactive sputtering on diamond has been used to increase the SAW velocity. Different experiments were carried out to optimize the parameters for the deposit of high quality AlN on any kind of substrates. In addition, the system was optimized under low temperature and thus this process is CMOS compatible. Once the AlN/diamond was optimized, thanks to the used e-beam lithography, nanometric SAW resonators were fabricated. The combination of the structure and the size of the devices allow the fabrication of devices working in the range of 10-28 GHz with a high quality factor and out of band rejection. These high performances and frequencies have not been reached so far for this kind of devices. Moreover, these devices have been used as high sensitivity pressure sensors. They are affected by temperature changes and thus a wide temperature range (-250ºC to 250ºC) study was done. From this study two regions were observed. At very low temperature, the temperature coefficient of frequency (TCF) is low. From -100ºC upwards the TCF is similar to the one appearing in the literature. Therefore, during this thesis work, the sputtering of AlN on diamond substrates was optimized for the CMOS compatible fabrication of high frequency and high performance SAW devices for communication and sensor application.