2 resultados para HOT-WALL CVD
em Universidad Politécnica de Madrid
Resumo:
This work aims at a deeper understanding of the energy loss phenomenon in polysilicon production reactors by the so-called Siemens process. Contributions to the energy consumption of the polysilicon deposition step are studied in this paper, focusing on the radiation heat loss phenomenon. A theoretical model for radiation heat loss calculations is experimentally validated with the help of a laboratory CVD prototype. Following the results of the model, relevant parameters that directly affect the amount of radiation heat losses are put forward. Numerical results of the model applied to a state-of-the-art industrial reactor show the influence of these parameters on energy consumption due to radiation per kilogram of silicon produced; the radiation heat loss can be reduced by 3.8% when the reactor inner wall radius is reduced from 0.78 to 0.70 m, by 25% when the wall emissivity is reduced from 0.5 to 0.3, and by 12% when the final rod diameter is increased from 12 to 15 cm.
Resumo:
A body with a shape similar to a hot wire with its sheath, but no prongs, has been placed close to the wall of a turbulent channel at Re_tau = 600. The results of the channel flow, without the wire, agree with previous published ones, despite the modest resolution and domain size. A simplified, two-dimensional version of the wire at the same Reynolds number has been studied to compare the dynamic response of cold and hot wires, where a slightly bigger perturbation is seen in the hot case, but an almost identical dynamic response. The cold wire seems to be able to measure instantaneous velocity with total drag after proper calibration. Being a DNS, the complete description of the flow field around the wire is obtained.