Optimization of laser-firing processes for silicon-heterojunction solar-cell back contacts

One of the key steps to achieve high efficiencies in amorphous/crystalline silicon photovoltaic structures is to design low-ohmic-resistance backcontacts with good passivation in the rear part of the cell. A well known approach to achieve this goal is to use laser-fired contact (LFC) processes in which a metal layer is fired through the dielectric to define good contacts with the semiconductor. However, and despite the fact that this approach has demonstrated to be extremely successful, there is still enough room for process improvement with an appropriate optimization. In this paper, a study focused on the optimal adjustment of the irradiation parameters to produce laser-fired contacts in a-Si:H/c-Si heterojunctionsolarcells is presented. We used samples consisting of crystalline-silicon (c-Si) wafers together with a passivation layer of intrinsic hydrogenated amorphous silicon (a-Si:H(i)) deposited by plasma-enhanced chemical deposition (PECVD). Then, an aluminum layer was evaporated on both sides, the thickness of this layer varied from 0.2 to 1 μm in order to identify the optimal amount of Al required to create an appropriate contact. A q-switched Nd:YVO4laser source, λ = 532 nm, was used to locally fire the aluminum through the thin a-Si:H(i)-layers to form the LFC. The effects of laser fluences were analyzed using a comprehensive morphological and electrical characterization.

Influence of laser wavelength on Laser-Fired contacts for crystalline silicon solar cells

In the Laser-Fired Contact (LFC) process, a laser beam fires a metallic layer through a dielectric passivating layer into the silicon wafer to form an electrical contact with the silicon bulk [1]. This laser technique is an interesting alternative for the fabrication of both laboratory and industrial scale high efficiency passivated emitter and rear cell (PERC). One of the principal characteristics of this promising technique is the capability to reduce the recombination losses at the rear surface in crystalline silicon solar cells. Therefore, it is crucial to optimize LFC because this process is one of the most promising concepts to produce rear side point contacts at process speeds compatible with the final industrial application. In that sense, this work investigates the optimization of LFC processing to improve the back contact in silicon solar cells using fully commercial solid state lasers with pulse width in the ns range, thus studying the influence of the wavelength using the three first harmonics (corresponding to wavelengths of 1064 nm, 532 nm and 355 nm). Previous studies of our group focused their attention in other processing parameters as laser fluence, number of pulses, passivating material [2, 3] thickness of the rear metallic contact [4], etc. In addition, the present work completes the parametric optimization by assessing the influence of the laser wavelength on the contact property. In particular we report results on the morphology and electrical behaviour of samples specifically designed to assess the quality of the process. In order to study the influence of the laser wavelength on the contact feature we used as figure of merit the specific contact resistance. In all processes the best results have been obtained using green (532 nm) and UV (355 nm), with excellent values for this magnitude far below 1 mΩcm2.

Invariance of the Glass Transition Temperature of Plant Vitrification Solutions with Cooling Rate

The solutions studied were Plant Vitrification Solutions 1, 2 and 3: (PVS1: Uragami et al. 1989, Plant Cell Rep. 8, 418; PVS2: Sakai et al. 1990, Plant Cell Rep. 9, 30; PVS3: Nishizawa et al. 1993, Plant Sci. 91, 67). Cooling was performed using the calorimeter control (5, 10 and 20°C min-1), or for higher rates, by quenching the closed pan with PVS in LN, either naked (faster - 5580°C min-1) or introduced in cryovials (reduced rate 360°C min-1). Quenched pans were then transferred to the sample chamber, pre-cooled to -196°C. Glass transition temperature was observed by DSC with a TA 2920 instrument, upon warming pans with solution samples from -145°C to room temperature, at standard warming rate10°C min-1.

Physical characterization of laser interaction and shock generation in laser shock processing: coupled theoretical-experimental analysis

Laser Shock Processing is developing as a key technology for the improvement of surface mechanical and corrosion resistance properties of metals due to its ability to introduce intense compressive residual stresses fields into high elastic limit materials by means of an intense laser driven shock wave generated by laser with intensities exceeding the 109 W/cm2 threshold, pulse energies in the range of 1 Joule and interaction times in the range of several ns. However, because of the relatively difficult-to-describe physics of shock wave formation in plasma following laser-matter interaction in solid state, only limited knowledge is available in the way of full comprehension and predictive assessment of the characteristic physical processes and material transformations with a specific consideration of real material properties. In the present paper, an account of the physical issues dominating the development of LSP processes from a moderately high intensity laser-matter interaction point of view is presented along with the theoretical and computational methods developed by the authors for their predictive assessment and new experimental contrast results obtained at laboratory scale.

Physical characterization of laser interaction and shock generation in laser processing: coupled theoretical-experimental analysis

Outline: • Introduction • Fundamental Physics of the Laser-Plasma Interaction in Laser Shock Processing • Theoretical/Computational Model Description • Some Results. Analysis of Interaction Parameters • Experimental Validation. Diagnosis Setup • Discussion and Outlook

Self-similar motion of laser fusion plasmas. Absorption in an unbounded plasma

The one-dimensional motion generated in a cold, infinite, uniform plasma of density na by the absorption, in a certain plane, of a linear pulse of energy per unit time and area = 4>0t/r, 0< t< r, is considered, the analysis allows for thermal conduction and viscosity of ions and electrons, their energy exchange, and an electron heat flux limiter The resulting motion is self-similar and governed by a single nondimensional parameter a«(n0 2T/0)2/3 Detailed asymptotic results are obtained for both a < l and a > l , the general behavior of the solution for arbitrary a is discussed The analysis can be extended to the case of a plasma initially occupying a half-space, and throws light on how to optimize the hydrodynamics of laser fusion plasmas Known approximate results corresponding to motion of a plasma submitted to constant irradiation (<()) are recovered in the present work under appropriate limiting processes

Self-similar motion of laser half-space plasmas. I. Deflagration regime

The one-dimensional self-similar motion of an initially cold, half-space plasma of electron density 0,produced by the (anomalous) absorption of a laser pulse of irradiation = (j>0f/T(0< (< T) at the critical density nc(«c/«0=eoKe)213, where k, m, are Boltzmann's constant and the ion mass, and Ke X (electron temperature)5'2 = heat conductivity. If a >e- 4 ' 3 , a deflagration wave separates an isentropic compression with a shock bounding the undisturbed plasma, and an isentropic expansion flow to the vacuum. The structures of these three regions are completely determined; in particular, the Chapman-Jouguet condition is proved and the density behind the deflagration is found. The deflagration-compression thickness ratio is large (small) for a^e- 5 ' 3(a>e- 5 ' 3 ) . The compression to expansion ratio for both energy and thickness is 0(e"2). For Z,- large, a deflagration exists even if a~e~413. Condition a>e~4'3 may be applied to pulses that are not linear.

Self-similar motion of laser half-space plasmas. II. Thermal waves and intermediate regimes

The one-dimensional self-similar motion of an initially cold, half-space plasma of electron density n,produced by the (anomalous) absorption of a laser pulse of irradiation

€~4'3, a qualitative discussion of how plasma behavior changes with a, is given.

Application of laser-induced plasma spectroscopy to the measurement of transition probabilities of Ca I

We present improved experimental transition probabilities for the optical Ca I 4s4p-4s4d and 4s4p-4p2multiplets. The values were determined with an absolute uncertainty of 10%. Transition probabilities have been determined by the branching ratios from the measurement of relative line intensities emitted by laser-induced plasma (LIP). The line intensities were obtained with the target (leadcalcium) placed in argon atmosphere at 6 Torr, recorded at a 2.5 µs delay from the laser pulse, which provides appropriate measurement conditions, and analysed between 350.0 and 550.0 nm. They are measured when the plasma reaches local thermodynamic equilibrium (LTE). The plasma is characterized by electron temperature (T) of 11400 K and an electron number density (Ne) of 1.1 x 1016 cm-3. The influence self-absorption has been estimated for every line, and plasma homogeneity has been checked. The values obtained were compared with previous experimental values in the literature. The method for measurement of transition probabilities using laser-induced plasma as spectroscopic source has been checked.

Self-similar expansion of laser plasmas with nonlocal heat flux

A previous hydrodynamic model of the expansion of a laser-produced plasma, using classical (Spitzer) heat flux, is reconsidered with a nonlocal heat flux model. The nonlocal law is shown to be valid beyond the range of validity of the classical law, breaking down ultimately, however, in agreement with recent predictions.

Nonuniform irradiation of laser targets

Smoothing of plasma ablated from a laser target under weakly nonuniform irradiation is discussed. Conduction is assumed restricted to a quasisteady layer enclosing the critical surface (large pellet or focal spot, and long, low-intensity, short-wavelength pulse). Light refraction can make the ablated plasma unstable.

Characterisation of laser hybrid welded dissimilar joints

The investigation addresses the over-all performance of dissimilar joints of low carbon steel and stainless steel thin sheets achieved by laser hybrid welding. First, the technological de-velopment of dissimilar laser hybrid welding of thin sheets is briefly pre-sented. Joint characterisation by means of macro and microstructural examination and hardness tests is fur-ther described. Microhardness testing was used as an alternative and effi-cient mean of assessing the changes in mechanical properties of difficult to characterize areas, like HAZ and fu-sion zone of these thin sheets Laser-GMA dissimilar welded joints. The overall tensile performance of the joint is discussed together with the weld metal strength overmatching. The ten-sile tests results indicate that in case of transversally loaded joints, the po-sitive difference in yield strength between the weld metal and the base materials (overmatching welds) may reduce the weight of the structure, without diminishing its strength.