Semiconductor measurement technology : techniques for measuring the integrity of passivation overcoats on integrated circuits /


Autoria(s): Kern, Werner, 1925-; Comizzoli, Robert B. jt. auth.; Radio Corporation of America. Laboratories Division.; United States. Defense Advanced Research Projects Agency.; United States. National Bureau of Standards.
Data(s)

29/12/1977

Resumo

Mode of access: Internet.

Formato

bib

bib

bib

bib

Identificador

http://hdl.handle.net/2027/uc1.31210023555749

http://hdl.handle.net/2027/uiug.30112104130718

http://hdl.handle.net/2027/mdp.39015077585282

http://hdl.handle.net/2027/mdp.39015086500058

Idioma(s)

eng

Publicador

Washington : Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.,

Direitos

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Palavras-Chave #Microelectronics #Protective coatings #Integrated circuits
Tipo

text