Interface tailoring for adhesion enhancement of diamond-like carbon thin films
| Contribuinte(s) |
UNIVERSIDADE DE SÃO PAULO |
|---|---|
| Data(s) |
20/08/2013
20/08/2013
01/05/2012
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| Resumo |
We have explored the suitability and characteristics of interface tailoring as a tool for enhancing the adhesion of hydrogen-free diamond-like carbon (DLC) thin films to silicon substrates. DLC films were deposited on silicon with and without application of an initial high energy carbon ion bombardment phase that formed a broad Si-C interface of gradually changing Si:C composition. The interface depth profile was calculated using the TRIDYN simulation program, revealing a gradient of carbon concentration including a region with the stoichiometry of silicon carbide. DLC films on silicon, with and without interface tailoring, were characterized using Raman spectroscopy, scanning electron microscopy, atomic force microscopy and scratch tests. The Raman spectroscopy results indicated sp3-type carbon bonding content of up to 80%. Formation of a broadened Si:C interface as formed here significantly enhances the adhesion of DLC films to the underlying silicon substrate. (C) 2012 Elsevier B.V. All rights reserved. NUS NUS [R284000087112] |
| Identificador |
DIAMOND AND RELATED MATERIALS, LAUSANNE, v. 25, n. 5, supl. 1, Part 1, pp. 8-12, MAY, 2012 0925-9635 http://www.producao.usp.br/handle/BDPI/32625 10.1016/j.diamond.2012.02.005 |
| Idioma(s) |
eng |
| Publicador |
ELSEVIER SCIENCE SA LAUSANNE |
| Relação |
DIAMOND AND RELATED MATERIALS |
| Direitos |
restrictedAccess Copyright ELSEVIER SCIENCE SA |
| Palavras-Chave | #DIAMOND-LIKE CARBON #INTERFACE TAILORING #ENHANCED ADHESION #ION BOMBARDMENT #DYNAMIC COMPOSITION CHANGES #IMMERSION ION-IMPLANTATION #AMORPHOUS-CARBON #ARC DEPOSITION #SIMULATION #SCRATCH #VACUUM #STRESS #GROWTH #TRIDYN #MATERIALS SCIENCE, MULTIDISCIPLINARY |
| Tipo |
article original article publishedVersion |
