Pattern formation in polymer films under the mask


Autoria(s): Peng J; Han YC; Yang YM; Li BY
Data(s)

2003

Resumo

This paper presents a straightforward method for patterning thin films of polymers, i.e. a prepatterned mask is used to induce self-assembly of polymers and the resulting pattern is the same as the lateral structures in the mask on a submicrometre length scale, The patterns can be formed at above T-g + 30 degreesC in a short time and the external electric field is not crucial. Electrostatic force is assumed to be the driving force for the pattern transfer. Viscous fingering and novel stress-relief lateral morphology induced under the featureless mask are also observed and the formation mechanisms are discussed.

Identificador

http://ir.ciac.jl.cn/handle/322003/17425

http://www.irgrid.ac.cn/handle/1471x/152953

Idioma(s)

英语

Fonte

Peng J;Han YC;Yang YM;Li BY.Pattern formation in polymer films under the mask,POLYMER ,2003,44(8 ):2379-2384

Palavras-Chave #BENARD CONVECTION #SURFACE #MICROSTRUCTURES #ARRAYS #MICROFABRICATION #LITHOGRAPHY #FABRICATION #MONOLAYERS #FEATURES #BINDING
Tipo

期刊论文