Pattern formation in polymer films under the mask
Data(s) |
2003
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Resumo |
This paper presents a straightforward method for patterning thin films of polymers, i.e. a prepatterned mask is used to induce self-assembly of polymers and the resulting pattern is the same as the lateral structures in the mask on a submicrometre length scale, The patterns can be formed at above T-g + 30 degreesC in a short time and the external electric field is not crucial. Electrostatic force is assumed to be the driving force for the pattern transfer. Viscous fingering and novel stress-relief lateral morphology induced under the featureless mask are also observed and the formation mechanisms are discussed. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
Peng J;Han YC;Yang YM;Li BY.Pattern formation in polymer films under the mask,POLYMER ,2003,44(8 ):2379-2384 |
Palavras-Chave | #BENARD CONVECTION #SURFACE #MICROSTRUCTURES #ARRAYS #MICROFABRICATION #LITHOGRAPHY #FABRICATION #MONOLAYERS #FEATURES #BINDING |
Tipo |
期刊论文 |