Semi-insulating GaAs grown in outer space
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2000
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Resumo |
A semi-insulating GaAs single crystal ingot was grown in a recoverable satellite, within a specially designed pyrolytic boron nitride crucible, in a power-traveling furnace under microgravity. The characteristics of a compound semiconductor single crystal depends fundamentally on its stoichiometry, i.e. the ration of two types of atoms in the crystal. a practical technique for nondestructive and quantitative measuring stoichiometry in GaAs single crystal was used to analyze the space-grown GaAs single crystal. The distribution of stoichiometry in a GaAs wafer was measured for the first time. The electrical, optical and structural properties of the space-grown GaAs crystal were studied systematically, Device fabricating experiments prove that the quality of field effect transistors fabricated from direct ion-implantation in semi-insulating GaAs wafers has a close correlation with the crystal's stoichiometry. (C) 2000 Elsevier Science S.A. All rights reserved. A semi-insulating GaAs single crystal ingot was grown in a recoverable satellite, within a specially designed pyrolytic boron nitride crucible, in a power-traveling furnace under microgravity. The characteristics of a compound semiconductor single crystal depends fundamentally on its stoichiometry, i.e. the ration of two types of atoms in the crystal. a practical technique for nondestructive and quantitative measuring stoichiometry in GaAs single crystal was used to analyze the space-grown GaAs single crystal. The distribution of stoichiometry in a GaAs wafer was measured for the first time. The electrical, optical and structural properties of the space-grown GaAs crystal were studied systematically, Device fabricating experiments prove that the quality of field effect transistors fabricated from direct ion-implantation in semi-insulating GaAs wafers has a close correlation with the crystal's stoichiometry. (C) 2000 Elsevier Science S.A. All rights reserved. 于2010-11-15批量导入 zhangdi于2010-11-15 17:02:26导入数据到SEMI-IR的IR Made available in DSpace on 2010-11-15T09:02:26Z (GMT). No. of bitstreams: 1 2959.pdf: 162449 bytes, checksum: 3550c8cad372bdea087e0ab4f2ef190b (MD5) Previous issue date: 2000 IUMRS.; Amer Xtal Technol.; SUT Associates.; Univ Calif San Diego.; Shanghai Inst Met. Chinese Acad Sci, Inst Semicond, Lab Semicond Mat Sci, Beijing 100083, Peoples R China; CAST, Lanzhou Inst Phys, Lanzhou 625065, Peoples R China; Hebei Inst Semicond, Shijiazhuang 050002, Hebei, Peoples R China IUMRS.; Amer Xtal Technol.; SUT Associates.; Univ Calif San Diego.; Shanghai Inst Met. |
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Idioma(s) |
英语 |
Publicador |
ELSEVIER SCIENCE SA PO BOX 564, 1001 LAUSANNE, SWITZERLAND |
Fonte |
Chen NF; Zhong XR; Lin LY; Xie X; Zhang M .Semi-insulating GaAs grown in outer space .见:ELSEVIER SCIENCE SA .MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 75 (2-3),PO BOX 564, 1001 LAUSANNE, SWITZERLAND ,2000,134-138 |
Palavras-Chave | #半导体材料 #GaAs #outer space #microgravity #integrated circuit #SEMIINSULATING GALLIUM-ARSENIDE #LEC-GAAS #DEFECTS #STOICHIOMETRY #SEGREGATION #CARBON #BORON |
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会议论文 |