GROWTH OF GASB AND GAASSB IN THE SINGLE-PHASE REGION BY MOVPE


Autoria(s): LU DC; LIU XL; WANG D; LIN LY
Data(s)

1992

Resumo

GaSb layers are grown on GaSb substrates; the effects of input partial pressure of trimethylantimony and the V/III ratio are studied. A model of the MOVPE phase diagram for the growth of GaSb and GaAsxSb1-x is developed which assumes thermodynamic equilibrium to be established at the solid-vapor interface.

Identificador

http://ir.semi.ac.cn/handle/172111/14135

http://www.irgrid.ac.cn/handle/1471x/101102

Idioma(s)

英语

Fonte

LU DC; LIU XL; WANG D; LIN LY.GROWTH OF GASB AND GAASSB IN THE SINGLE-PHASE REGION BY MOVPE,JOURNAL OF CRYSTAL GROWTH ,1992,124(0):383-388

Palavras-Chave #半导体材料 #GALLIUM ANTIMONIDE #OMVPE #GAAS1-XSBX #MOCVD
Tipo

期刊论文