A NEW METHOD FOR DETECTING SUBTLE CHANGES IN SI-H BONDS OF A-SI-H
Data(s) |
1993
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Resumo |
A new method developed for detecting possible subtle changes in Si-H bonds of a-Si:H after light soaking is described in detail. The method promises a sensitivity orders of magnitude higher than that reached by the usual IR spectrometer. Some preliminary results on phosphorus doped a-Si:H are given. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
KONG GL; ZHANG GL; ZHAO YP; SUN GS; PAN GQ; LIAO XB.A NEW METHOD FOR DETECTING SUBTLE CHANGES IN SI-H BONDS OF A-SI-H,JOURNAL OF NON-CRYSTALLINE SOLIDS,1993,166(0):211-214 |
Palavras-Chave | #半导体材料 #HYDROGENATED AMORPHOUS-SILICON #METASTABILITY |
Tipo |
期刊论文 |