A NEW METHOD FOR DETECTING SUBTLE CHANGES IN SI-H BONDS OF A-SI-H


Autoria(s): KONG GL; ZHANG GL; ZHAO YP; SUN GS; PAN GQ; LIAO XB
Data(s)

1993

Resumo

A new method developed for detecting possible subtle changes in Si-H bonds of a-Si:H after light soaking is described in detail. The method promises a sensitivity orders of magnitude higher than that reached by the usual IR spectrometer. Some preliminary results on phosphorus doped a-Si:H are given.

Identificador

http://ir.semi.ac.cn/handle/172111/14023

http://www.irgrid.ac.cn/handle/1471x/101046

Idioma(s)

英语

Fonte

KONG GL; ZHANG GL; ZHAO YP; SUN GS; PAN GQ; LIAO XB.A NEW METHOD FOR DETECTING SUBTLE CHANGES IN SI-H BONDS OF A-SI-H,JOURNAL OF NON-CRYSTALLINE SOLIDS,1993,166(0):211-214

Palavras-Chave #半导体材料 #HYDROGENATED AMORPHOUS-SILICON #METASTABILITY
Tipo

期刊论文