Molecular beam epitaxy of GaSb on GaAs substrates with AlSb/GaSb compound buffer layers


Autoria(s): Hao RT (Hao Ruiting); Deng SK (Deng Shukang); Shen LX (Shen Lanxian); Yang PZ (Yang Peizhi); Tu JL (Tu Jielei); Liao H (Liao Hua); Xu YQ (Xu Yingqiang); Niu ZC (Niu Zhichuan)
Data(s)

2010

Resumo

GaSb films with AlSb/GaSb compound buffer layers were grown by molecular beam epitaxy on GaAs (001) substrates. The crystal quality and optical properties were studied by high resolution transition electron microscopy and low temperature photoluminescence spectra (PL), respectively. It was found that the AlSb/GaSb compound buffer layers can restrict the dislocations into GaSb epilayers. The intensity of PL spectra of GaSb layer becomes large with the increasing the periods of AlSb/GaSb superlattices, indicating that the optical quality of GaSb films is improved.

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This work is supported by the National Natural Science Foundation of China (Grant Nos.: 60607016, 60625405), the National Basic Research Program of China (Grant No.: 2007CB936304) and the Natural Science Foundation of Yunnan Province (Grant Nos.: 2009CD045 2007E197M).

其它

This work is supported by the National Natural Science Foundation of China (Grant Nos.: 60607016, 60625405), the National Basic Research Program of China (Grant No.: 2007CB936304) and the Natural Science Foundation of Yunnan Province (Grant Nos.: 2009CD045 2007E197M).

Identificador

http://ir.semi.ac.cn/handle/172111/20681

http://www.irgrid.ac.cn/handle/1471x/100933

Idioma(s)

英语

Fonte

Hao RT (Hao Ruiting), Deng SK (Deng Shukang), Shen LX (Shen Lanxian), Yang PZ (Yang Peizhi), Tu JL (Tu Jielei), Liao H (Liao Hua), Xu YQ (Xu Yingqiang), Niu ZC (Niu Zhichuan).Molecular beam epitaxy of GaSb on GaAs substrates with AlSb/GaSb compound buffer layers.THIN SOLID FILMS,2010,519(1):228-230

Palavras-Chave #半导体材料 #Gallium Arsenide #Gallium antimonide #Gallium antimonide/Aluminum antimonide #Superlattices #Molecular Beam Epitaxy #VAPOR-PHASE EPITAXY #SURFACE-MORPHOLOGY #GROWTH #SUPERLATTICES #TEMPERATURE #RELAXATION #DETECTORS #GAAS(001) #MOCVD #FILMS
Tipo

期刊论文