Growth and characterization of GaN on LiGaO2


Autoria(s): Duan SK; Teng XG; Han PD; Lu DC
Data(s)

1998

Resumo

The nearly lattice-matched (0 0 1)LiGaO2 substrates have been used for the growth of GaN by LP-MOVPE, GaN epilayers have been grown on both domains at very low input partial pressure of hydrogen and relatively low growth temperature. The differences in the growth rate, crystal and optical qualities of hexagonal GaN epilayers grown on LiGaO2 substrate with two polar domains are investigated. LiGaO2 single crystal with a single domain structure and an adequate surface plane is a promising substrate for the growth of high quality of hexagonal GaN thin films. (C) 1998 Published by Elsevier Science B.V. All rights reserved.

Identificador

http://ir.semi.ac.cn/handle/172111/13020

http://www.irgrid.ac.cn/handle/1471x/65480

Idioma(s)

英语

Fonte

Duan SK; Teng XG; Han PD; Lu DC .Growth and characterization of GaN on LiGaO2 ,JOURNAL OF CRYSTAL GROWTH ,1998,195(1-4):304-308

Palavras-Chave #半导体材料 #MOVPE #GaN #substrate #DIODES
Tipo

期刊论文