Effect on the optical properties and surface morphology of cubic GaN grown by metalorganic chemical vapor deposition using isoelectronic indium surfactant doping


Autoria(s): Feng ZH; Yang H; Zhang SM; Duan LH; Wang H; Wang YT
Data(s)

2002

Resumo

The surfactant effect of isoelectronic indium doping during metalorganic chemical vapor deposition growth of cubic GaN on GaAs (1 0 0) substrates was studied. Its influence on the optical properties and surface morphology was investigated by using room-temperature photoluminescence (PL) and atomic force microscopy. It is shown that the sample with small amount of In-doping has a narrower PL linewidth, and a smoother surface than undoped cubic GaN layers. A slight red shift of the near-band-edge emission peak was observed. These results revealed that, for small TMIn flow rates, indium played the role of the surfactant doping and effectively improved the cubic GaN film quality; for large TMIn flow rates, the alloying formation of Ga1-xInxN might have occurred. (C) 2002 Elsevier Science B.V. All rights reserved.

Identificador

http://ir.semi.ac.cn/handle/172111/11992

http://www.irgrid.ac.cn/handle/1471x/64966

Idioma(s)

英语

Fonte

Feng ZH; Yang H; Zhang SM; Duan LH; Wang H; Wang YT .Effect on the optical properties and surface morphology of cubic GaN grown by metalorganic chemical vapor deposition using isoelectronic indium surfactant doping ,JOURNAL OF CRYSTAL GROWTH,2002,235 (1-4):207-211

Palavras-Chave #半导体材料 #crystal morphology #doping #surface structure #metalorgamc chemical vapor deposition #nitrides #semiconducting III-V materials #MOLECULAR-BEAM EPITAXY #PHASE EPITAXY #FILMS #CATHODOLUMINESCENCE
Tipo

期刊论文