Effect on the optical properties and surface morphology of cubic GaN grown by metalorganic chemical vapor deposition using isoelectronic indium surfactant doping
Data(s) |
2002
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Resumo |
The surfactant effect of isoelectronic indium doping during metalorganic chemical vapor deposition growth of cubic GaN on GaAs (1 0 0) substrates was studied. Its influence on the optical properties and surface morphology was investigated by using room-temperature photoluminescence (PL) and atomic force microscopy. It is shown that the sample with small amount of In-doping has a narrower PL linewidth, and a smoother surface than undoped cubic GaN layers. A slight red shift of the near-band-edge emission peak was observed. These results revealed that, for small TMIn flow rates, indium played the role of the surfactant doping and effectively improved the cubic GaN film quality; for large TMIn flow rates, the alloying formation of Ga1-xInxN might have occurred. (C) 2002 Elsevier Science B.V. All rights reserved. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
Feng ZH; Yang H; Zhang SM; Duan LH; Wang H; Wang YT .Effect on the optical properties and surface morphology of cubic GaN grown by metalorganic chemical vapor deposition using isoelectronic indium surfactant doping ,JOURNAL OF CRYSTAL GROWTH,2002,235 (1-4):207-211 |
Palavras-Chave | #半导体材料 #crystal morphology #doping #surface structure #metalorgamc chemical vapor deposition #nitrides #semiconducting III-V materials #MOLECULAR-BEAM EPITAXY #PHASE EPITAXY #FILMS #CATHODOLUMINESCENCE |
Tipo |
期刊论文 |