On the Equivalence of Acoustic Impedance and Squeeze Film Impedance in Micromechanical Resonators

In this work, we address the issue of modeling squeeze film damping in nontrivial geometries that are not amenable to analytical solutions. The design and analysis of microelectromechanical systems (MEMS) resonators, especially those that use platelike two-dimensional structures, require structural dynamic response over the entire range of frequencies of interest. This response calculation typically involves the analysis of squeeze film effects and acoustic radiation losses. The acoustic analysis of vibrating plates is a very well understood problem that is routinely carried out using the equivalent electrical circuits that employ lumped parameters (LP) for acoustic impedance. Here, we present a method to use the same circuit with the same elements to account for the squeeze film effects as well by establishing an equivalence between the parameters of the two domains through a rescaled equivalent relationship between the acoustic impedance and the squeeze film impedance. Our analysis is based on a simple observation that the squeeze film impedance rescaled by a factor of jx, where x is the frequency of oscillation, qualitatively mimics the acoustic impedance over a large frequency range. We present a method to curvefit the numerically simulated stiffness and damping coefficients which are obtained using finite element analysis (FEA) analysis. A significant advantage of the proposed method is that it is applicable to any trivial/nontrivial geometry. It requires very limited finite element method (FEM) runs within the frequency range of interest, hence reducing the computational cost, yet modeling the behavior in the entire range accurately. We demonstrate the method using one trivial and one nontrivial geometry.

Measurement of respiratory acoustic impedance in children by a modified forced oscillation method

An introduction to a modified forced oscillation method, square-wave excitation technique, including fundamentals and methods, as used in respiratory function examination. On the basis of experimental results and theoretical predictions, we suggest that Respiratory Acoustic Impedance (RAI) measurement by spectral analysis can significantly improve estimation of contribution to RAI from different part of respiratory tract. The outcome is of considerable interest in the study of lung disease, such as COPD and asthma in young children.

Wideband measurement of the acoustic impedance of tubular objects

A method is discussed for measuring the acoustic impedance of tubular objects that gives accurate results for a wide range of frequencies. The apparatus that is employed is similar to that used in many previously developed methods; it consists of a cylindrical measurement duct fitted with several microphones, of which two are active in each measurement session, and a driver at one of its ends. The object under study is fitted at the other end. The impedance of the object is determined from the microphone signals obtained during excitation of the air inside the 1 duct by the driver, and from three coefficients that are pre-determined using four calibration measurements with closed cylindrical tubes. The calibration procedure is based on the simple mathematical relationships between the impedances of the calibration tubes, and does not require knowledge of the propagation constant. Measurements with a cylindrical tube yield an estimate of the attenuation constant for plane waves, which is found to differ from the theoretical prediction by less than 1.4% in the frequency range 1 kHz-20 kHz. Impedance measurements of objects with abrupt changes in diameter are found to be in good agreement with multimodal theory.

(Table 1) Sound velocity, wet-bulk density, and acoustic impedance of some indurated sediment from DSDP Leg 64 Holes

The Pliocene-Quaternary sediments that we drilled at eight sites in the Gulf of California consist of silty clays to clayey silts, diatomaceous oozes, and mixtures of both types. In this chapter I have summarized various measurements of their physical properties, relating this information to burial depth and effective overburden pressure. Rapid deposition and frequent intercalations of mud turbidites may cause underconsolidation in some cases; overconsolidation probably can be excluded. General lithification begins at depths between 200 and 300 meters sub-bottom, at porosities between 55 and 60% (for silty clays) and as high as 70% (for diatomaceous ooze). Diatom-rich sediments have low strength and very high porosities (70-90%) and can maintain this state to a depth of nearly 400 meters (where the overburden pressure = 1.4 MPa). The field compressibility curves of all sites are compared to data published earlier. Where sediments are affected by basaltic sills, these curves clearly show the effects of additional loading and thermal stress (diagenesis near the contacts). Strength measurements on well-preserved hydraulic piston cores yielded results similar to those obtained on selected samples from standard drilling. Volumetric shrinkage dropped to low values at 100 to 400 meters burial depth (0.3 to 2.0 MPa overburden pressure). Porosity after shrinkage depends on the composition of sediments.

High-Acoustic-Impedance Tantalum Oxide Layers for Insulating Acoustic Reflectors

This work describes the assessment of the acoustic properties of sputtered tantalum oxide films intended for use as high-impedance films of acoustic reflectors for solidly mounted resonators operating in the gigahertz frequency range. The films are grown by sputtering a metallic tantalum target under different oxygen and argon gas mixtures, total pressures, pulsed dc powers, and substrate biases. The structural properties of the films are assessed through infrared absorption spectroscopy and X-ray diffraction measurements. Their acoustic impedance is assessed by deriving the mass density from X-ray reflectometry measurements and the acoustic velocity from picosecond acoustic spectroscopy and the analysis of the frequency response of the test resonators.

Impedance tube technology for flow acoustics

Acoustic impedance of a termination, or of a passive subsystem, needs to be measured not only for acoustic lining materials but also in the exhaust systems of flow machinery, where mean flow introduces peculiar problems. Out of the various methods of measurement of acoustic impedance, the discrete frequency, steady state, impedance tube method [1] is most reliable, though time consuming, and requires no special instrumentation.

Method for evaluation of the acoustical impedance of a black box, with or without mean flow, measuring pressures at fixed positions

The transmission-line or the impedance-tube method for the measurement of the acoustic impedance of any termination involves a search for various minima and maxima of pressure. For this purpose, arrangement has to be made for the microphone to travel along the length of the impedance tube, and this complicates the design of the tube considerably. The present paper discusses a method which consists in evaluating the tube attenuation factor at any convenient frequency by making use of measured SPL's at two (or more) fixed locations with a rigid termination, calculating the tube attenuation factor and wave number at the required frequency of interest with or without mean flow (as applicable), and finally evaluating the impedance of the given termination by measuring and using SPL's at three (or more) fixed locations. Thus, the required impedance tube is considerably smaller in length, simpler in design, easier to manufacture, cheaper in cost and more convenient to use. The design of the tube is also discussed. Incidentally, it is also possible to evaluate the impedance at any low frequency without having to use a larger impedance tube.

Fabrication of high-Q film bulk acoustic resonator (FBAR) filters withcarbon nanotube (CNT) electrodes

FBAR devices with carbon nanotube (CNT) electrodes have been developed withthe aim of taking advantage of the low density and high acoustic impedance ofthe CNTs compared to other known materials. The influence of the CNTs on thefrequency response of the FBAR devices was studied by comparing two identicalsets of devices, one set comprised FBARs fabricated with chromium/gold bilayerelectrodes, and the second set comprised FBARs fabricated with CNT electrodes.It was found that the CNTs had a significant effect on attenuating travellingwaves at the surface of the FBARs membranes due to their high elastic stiffness.Finite element analysis of the devices fabricated was carried out using COMSOLMultiphysics, and the numerical results confirmed the experimental resultsobtained. © 2010 IEEE.

Test-retest reliability with the Madsen ZO70 electroacoustic impedance bridge

This paper is a review of a study to measure acoustic impedance of the ear using a Madsen ZO70 bridge model.

Characterization of Amorphous Tantalum Oxide for Insulating Acoustic Mirrors

This work describes the assessment of the acoustic properties of sputtered tantalum oxide films intended as high impedance films for the acoustic isolation of bulk acoustic wave devices operating in the GHz frequency range. The films are grown by sputtering a metallic tantalum target under different oxygen and argon gas mixtures, total pressures, pulsed DC powers and substrate bias. The structural properties of the films are assessed through infrared absorption spectroscopy and X-ray diffraction measurements. Their acoustic impedance is obtained after estimating the mass density by X-ray reflectometry measurements and the longitudinal acoustic velocity by analyzing the longitudinal λ/2 resonance induced in a tantalum oxide film inserted between an acoustic reflector and an AlN-based resonator. A second measurement of the sound velocity is achieved through picosecond acoustic spectroscopy.

Ta2O5/SiO2 insulating acoustic mirrors for AlN-based X-band BAW resonators

This work describes the performance of AlN-based bulk acoustic wave resonators built on top of insulating acoustic reflectors and operating at around 8 GHz. The acoustic reflectors are composed of alternate layers of amorphous Ta2O5and SiO2 deposited at room temperature by pulsed-DC reactive sputtering in Ar/O2 atmospheres. SiO2 layers have a porous structure that provides a low acoustic impedance of only 9.5 MRayl. Ta2O5 films exhibit an acoustic impedance of around 39.5 MRayl that was assessed by the picoseconds acoustic technique These values allow to design acoustic mirrors with transmission coefficients in the centre of the band lower than -40 dB (99.998 % of reflectance) with only seven layers. The resonators were fabricated by depositing a very thin AlN film onto an iridium bottom electrode 180 nm-thick and by using Ir or Mo layers as top electrode. Resonators with effective electromechanical coupling factors of 5.7% and quality factors at the antiresonant frequency around 600 are achieved.

Acoustic properties of microperforated panels and their optimizatión by simulated annealing

This thesis investigates the acoustic properties of microperforated panels as an alternative to passive noise control. The first chapters are devoted to the review of analytical models to obtain the acoustic impedance and absorption coefficient of perforated panels. The use of panels perforated with circular holes or with slits is discussed. The theoretical models are presented and some modifications are proposed to improve the modeling of the physical phenomena occurring at the perforations of the panels. The absorption band is widened through the use of multiple layer microperforated panels and/or the combination of a millimetric panel with a porous layer that can be a fibrous material or a nylon mesh. A commercial micrometric mesh downstream a millimetric panel is proposed as a very efficient and low cost solution for controlling noise in reduced spaces. The simulated annealing algorithm is used in order to optimize the panel construction to provide a maximum of absorption in a determined wide band frequency range. Experiments are carried out at normal sound incidence and plane waves. One example is shown for a double layer microperforated panel subjected to grazing flow. A good agreement is achieved between the theory and the experiments. RESUMEN En esta tesis se investigan las propiedades acústicas de paneles micro perforados como una alternativa al control pasivo del ruido. Los primeros capítulos están dedicados a la revisión de los modelos de análisis para obtener la impedancia acústica y el coeficiente de absorción de los paneles perforados. El uso de paneles perforados con agujeros circulares o con ranuras es discutido. Se presentan diferentes modelos y se proponen algunas modificaciones para mejorar la modelización de los fenómenos físicos que ocurren en las perforaciones. La banda de absorción se ensancha a través del uso de capas múltiples de paneles micro perforados y/o la combinación de un panel de perforaciones milimétricas combinado con una capa porosa que puede ser un material fibroso o una malla de nylon. Se propone el uso de una malla micrométrica detrás de un panel milimétrico como una solución económica y eficiente para el control del ruido en espacios reducidos. El algoritmo de recocido simulado se utiliza con el fin de optimizar la construcción de paneles micro perforados para proporcionar un máximo de absorción en una banda determinada frecuencias. Los experimentos se llevan a cabo en la incidencia normal de sonido y ondas planas. Se muestra un ejemplo de panel micro perforado de doble capa sometido a flujo rasante. Se consigue un buen acuerdo entre la teoría y los experimentos.

Simulation, construction and characterization of a piezoelectric transducer using rexolite as acoustic matching

This article describes the simulation and characterization of an ultrasonic transducer using a new material called Rexolite to be used as a matching element. This transducer was simulated using a commercial piezoelectric ceramic PIC255 at 8 MHz. Rexolite, the new material, presents an excellent acoustic matching, specially in terms of the acoustic impedance of water. Finite elements simulations were used in this work. Rexolite was considered as a suitable material in the construction of the transducer due to its malleability and acoustic properties, to validate the simulations a prototype transducer was constructed. Experimental measurements were used to determine the resonance frequency of the prototype transducer. Simulated and experimental results were very similar showing that Rexolite may be an excellent matching, particularly for medical applications.

A model for acoustic absorbent materials derived from coconut fiber

In the present paper, a methodology is proposed for obtaining empirical equations describing the sound absorption characteristics of an absorbing material obtained from natural fibers, specifically from coconut. The method, which was previously applied to other materials, requires performing measurements of air-flow resistivity and of acoustic impedance for samples of the material under study. The equations that govern the acoustic behavior of the material are then derived by means of a least-squares fit of the acoustic impedance and of the propagation constant. These results can be useful since they allow the empirically obtained analytical equations to be easily incorporated in prediction and simulation models of acoustic systems for noise control that incorporate the studied materials.