935 resultados para Step and flash imprint lithography


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Currently the data storage industry is facing huge challenges with respect to the conventional method of recording data known as longitudinal magnetic recording. This technology is fast approaching a fundamental physical limit, known as the superparamagnetic limit. A unique way of deferring the superparamagnetic limit incorporates the patterning of magnetic media. This method exploits the use of lithography tools to predetermine the areal density. Various nanofabrication schemes are employed to pattern the magnetic material are Focus Ion Beam (FIB), E-beam Lithography (EBL), UV-Optical Lithography (UVL), Self-assembled Media Synthesis and Nanoimprint Lithography (NIL). Although there are many challenges to manufacturing patterned media, the large potential gains offered in terms of areal density make it one of the most promising new technologies on the horizon for future hard disk drives. Thus, this dissertation contributes to the development of future alternative data storage devices and deferring the superparamagnetic limit by designing and characterizing patterned magnetic media using a novel nanoimprint replication process called "Step and Flash Imprint lithography". As opposed to hot embossing and other high temperature-low pressure processes, SFIL can be performed at low pressure and room temperature. Initial experiments carried out, consisted of process flow design for the patterned structures on sputtered Ni-Fe thin films. The main one being the defectivity analysis for the SFIL process conducted by fabricating and testing devices of varying feature sizes (50 nm to 1 μm) and inspecting them optically as well as testing them electrically. Once the SFIL process was optimized, a number of Ni-Fe coated wafers were imprinted with a template having the patterned topography. A minimum feature size of 40 nm was obtained with varying pitch (1:1, 1:1.5, 1:2, and 1:3). The Characterization steps involved extensive SEM study at each processing step as well as Atomic Force Microscopy (AFM) and Magnetic Force Microscopy (MFM) analysis.

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The single electron transistor (SET) is a charge-based device that may complement the dominant metal-oxide-semiconductor field effect transistor (MOSFET) technology. As the cost of scaling MOSFET to smaller dimensions are rising and the the basic functionality of MOSFET is encountering numerous challenges at dimensions smaller than 10nm, the SET has shown the potential to become the next generation device which operates based on the tunneling of electrons. Since the electron transfer mechanism of a SET device is based on the non-dissipative electron tunneling effect, the power consumption of a SET device is extremely low, estimated to be on the order of 10^-18J. The objectives of this research are to demonstrate technologies that would enable the mass produce of SET devices that are operational at room temperature and to integrate these devices on top of an active complementary-MOSFET (CMOS) substrate. To achieve these goals, two fabrication techniques are considered in this work. The Focus Ion Beam (FIB) technique is used to fabricate the islands and the tunnel junctions of the SET device. A Ultra-Violet (UV) light based Nano-Imprint Lithography (NIL) call Step-and-Flash- Imprint Lithography (SFIL) is used to fabricate the interconnections of the SET devices. Combining these two techniques, a full array of SET devices are fabricated on a planar substrate. Test and characterization of the SET devices has shown consistent Coulomb blockade effect, an important single electron characteristic. To realize a room temperature operational SET device that function as a logic device to work along CMOS, it is important to know the device behavior at different temperatures. Based on the theory developed for a single island SET device, a thermal analysis is carried out on the multi-island SET device and the observation of changes in Coulomb blockade effect is presented. The results show that the multi-island SET device operation highly depends on temperature. The important parameters that determine the SET operation is the effective capacitance Ceff and tunneling resistance Rt . These two parameters lead to the tunneling rate of an electron in the SET device, Γ. To obtain an accurate model for SET operation, the effects of the deviation in dimensions, the trap states in the insulation, and the background charge effect have to be taken into consideration. The theoretical and experimental evidence for these non-ideal effects are presented in this work.

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Selbstbestimmung und -gestaltung des eigenen Alltages gewinnen immer mehr an Bedeutung, insbesondere für ältere Mitmenschen in ländlichen Regionen, die auf ärztliche Versorgung angewiesen sind. Die Schaffung sogenannter smart personal environments mittels einer Vielzahl von, nahezu unsichtbar installierten Sensoren im gewohnten Lebensraum liefert dem Anwender (lebens-) notwendige Informationen über seine Umgebung oder seinen eigenen Körper. Dabei gilt es nicht den Anwender mit technischen Daten, wie Spektren, zu überfordern. Vielmehr sollte die Handhabung so einfach wie möglich gestaltet werden und die ausgewertete Information als Indikationsmittel zum weiteren Handeln dienen. Die Anforderungen an moderne Technologien sind folglich eine starke Miniaturisierung, zur optimalen Integration und Mobilität, bei gleichzeitig hoher Auflösung und Stabilität. Die Zielsetzung der vorliegenden Arbeit ist die Miniaturisierung eines spektroskopischen Systems bei gleichzeitig hohem Auflösungsvermögen für die Detektion im sichtbaren Spektralbereich. Eine Möglichkeit für die Herstellung eines konkurrenzfähigen „Mini-„ oder „Mikrospektrometers“ basiert auf Fabry-Pérot (FP) Filtersystemen, da hierbei die Miniaturisierung nicht wie üblich auf Gittersysteme limitiert ist. Der maßgebliche Faktor für das spektrale Auflösungsvermögen des Spektrometers ist die vertikale Präzision und Homogenität der einzelnen 3D Filterkavitäten, die die unterschiedlichen Transmissionswellenlängen der einzelnen Filter festlegen. Die wirtschaftliche Konkurrenzfähigkeit des am INA entwickelten Nanospektremeters wurde durch die maximale Reduzierung der Prozessschritte, nämlich auf einen einzigen Schritt, erreicht. Erstmalig wird eine neuartige Nanoimprint Technologie, die sog. Substrate Conformal Imprint Lithography, für die Herstellung von wellenlängen-selektierenden Filterkavitäten von stark miniaturisierten Spektrometern eingesetzt. Im Zuge dieser Arbeit wird das Design des FP Filtersystems entwickelt und technologisch mittels Dünnschichtdeposition und der Nanoimprinttechnologie realisiert. Ein besonderer Schwerpunkt liegt hierbei in der Untersuchung des Prägematerials, dessen optische Eigenschaften maßgeblich über die Performance des Filtersystems entscheiden. Mit Hilfe eines speziell gefertigten Mikroskopspektrometers werden die gefertigten Filterfelder hinsichtlich ihrer Transmissionseigenschaften und ihres Auflösungsvermögens hin untersucht. Im Hinblick auf publizierte Arbeiten konkurrierender Arbeitsgruppen konnte eine deutliche Verbesserung des miniaturisierten Spektrometers erreicht werden. Die Minimierung der Prozessschritte auf einen einzigen Prägeschritt sorgt gleichzeitig für eine schnelle und zuverlässige Replikation der wellenlängenselektierenden Filterkavitäten. Im Rahmen dieser Arbeit wurde aufgezeigt, dass das angestrebte Nanospektrometer, trotz der sehr geringen Größe, eine hohe Auflösung liefern kann und gerade wegen der starken Miniaturisierung mit kommerziellen Mini- und Mikro-spektrometern konkurrenzfähig ist.

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High quality MSS membranes were synthesised by a single-step and two-step catalysed hydrolyses employing tetraethylorthosilicate (TEOS), absolute ethanol (EtOH), I M nitric acid (HNO3) and distilled water (H2O). The Si-29 NMR results showed that the two-step xerogels consistently had more contribution of silanol groups (Q(3) and Q(2)) than the single-step xerogel. According to the fractal theory, high contribution of Q(2) and Q(3) species are responsible for the formation of weakly branched systems leading to low pore volume of microporous dimension. The transport of diffusing gases in these membranes is shown to be activated as the permeance increased with temperature. Albeit the permeance of He for both single-step and two-step membranes are very similar, the two-step membranes permselectivity (ideal separation factor) for He/CO2 (69-319) and He/CH4 (585-958) are one to two orders of magnitude higher than the single-step membranes results of 2-7 and 69, respectively. The two-step membranes have high activation energy for He and H-2 permeance, in excess of 16 kJ mol(-1). The mobility energy for He permeance is three to six-fold higher for the two-step than the single-step membranes. As the mobility energy is higher for small pores than large pores and coupled with the permselectivity results, the two-step catalysed hydrolysis sol-gel process resulted in the formation of pore sizes in the region of 3 Angstrom while the single-step process tended to produce slightly larger pores. (C) 2002 Elsevier Science B.V. All rights reserved.

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Divorce and remarriage usually imply a redefinition of family boundaries, with consequences for the production and availability of social capital. This research shows that bonding and bridging social capitals are differentially made available by families. It first hypothesizes that bridging social capital is more likely to be developed in stepfamilies, and bonding social capital in first-time families. Second, the boundaries of family configurations are expected to vary within stepfamilies and within first-time families creating a diversity of family configurations within both structures. Third, in both cases, social capital is expected to depend on the ways in which their family boundaries are set up by individuals by including or excluding ex-partners, new partner's children, siblings, and other family ties. The study is based on a sample of 300 female respondents who have at least one child of their own between 5 and 13 years, 150 from a stepfamily structure and 150 from a first-time family structure. Social capital is empirically operationalized as perceived emotional support in family networks. The results show that individuals in first-time families more often develop bonding social capital and individuals in stepfamilies bridging social capital. In both cases, however, individuals in family configurations based on close blood and conjugal ties more frequently develop bonding social capital, whereas individuals in family configurations based on in-law, stepfamily or friendship ties are more likely to develop bridging social capital.

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Mitigation pays. It includes any activities that prevent an emergency, reduce the chance of an emergency happening, or lessen the damaging effects of unavoidable emergencies. Investing in mitigation steps now such as constructing barriers such as levees and purchasing flood insurance will help reduce the amount of structural damage to your home and financial loss from building and crop damage should a flood or flash flood occur.

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Mitigation pays. It includes any activities that prevent an emergency, reduce the chance of an emergency happening, or lessen the damaging effects of unavoidable emergencies. Investing in mitigation steps now such as constructing barriers such as levees and purchasing flood insurance will help reduce the amount of structural damage to your home and financial loss from building and crop damage should a flood or flash flood occur.

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A 50 kyr-long exceptionally well-dated and highly resolved stalagmite oxygen (δ 18O) and carbon (δ 13C) isotope record from Sofular Cave in northwestern Turkey helps to further improve the dating of Greenland Interstadials (GI) 1, and 3–12. Timing of most GI in the Sofular record is consistent within ±10 to 300 years with the “iconic” Hulu Cave record. Larger divergences (>500 years) between Sofular and Hulu are only observed for GI 4 and 7. The Sofular record differs from the most recent NGRIP chronology by up to several centuries, whereas age offsets do not increase systematically with depth. The Sofular record also reveals a rapid and sensitive climate and ecosystem response in the eastern Mediterranean to GI, whereas a phase lag of ∼100 years between climate and full ecosystem response is evident. Finally, results of spectral analyses of the Sofular isotope records do not support a 1,470-year pacing of GI.

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Length of resin tags yielded by utilization of an one-step conventional adhesive system and self-etching adhesive system on unground enamel was observed. In study Groups I and III, the enamel surface was etched for 60 seconds with 35% phosphoric acid gel and adhesive systems PQ1 (Ultradent Products, Inc) and Adper Prompt L Pop (3M/ESPE) were applied. Adper Prompt L Pop (3M/ESPE) was also applied in Group II in accordance with the manufacturer's recommendations. After application of these adhesive systems to dental enamel, specimens were prepared for light microscopy analysis to ascertain degree of penetration (x400). The results were submitted to an analysis of variance at the 5% level; whenever there was significance, the Tukey test was applied at the 5% level. It was found that acid etching prior to application of conventional and self-etching adhesive materials provided higher penetration of the adhesive into the unground enamel surface compared to that achieved solely by application of self-etching adhesive.

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Boiling points (T-B) of acyclic alkynes are predicted from their boiling point numbers (Y-BP) with the relationship T-B(K) = -16.802Y(BP)(2/3) + 337.377Y(BP)(1/3) - 437.883. In turn, Y-BP values are calculated from structure using the equation Y-BP = 1.726 + A(i) + 2.779C + 1.716M(3) + 1.564M + 4.204E(3) + 3.905E + 5.007P - 0.329D + 0.241G + 0.479V + 0.967T + 0.574S. Here A(i) depends on the substitution pattern of the alkyne and the remainder of the equation is the same as that reported earlier for alkanes. For a data set consisting of 76 acyclic alkynes, the correlation of predicted and literature T-B values had an average absolute deviation of 1.46 K, and the R-2 of the correlation was 0.999. In addition, the calculated Y-BP values can be used to predict the flash points of alkynes.

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Boiling points (T B) of acyclic alkynes are predicted from their boiling point numbers (Y BP) with the relationship T B(K) = -16.802Y BP2/3 + 337.377Y BP1/3 - 437.883. In turn, Y BP values are calculated from structure using the equation Y BP = 1.726 + Ai + 2.779C + 1.716M3 + 1.564M + 4.204E3 + 3.905E + 5.007P - 0.329D + 0.241G + 0.479V + 0.967T + 0.574S. Here Ai depends on the substitution pattern of the alkyne and the remainder of the equation is the same as that reported earlier for alkanes. For a data set consisting of 76 acyclic alkynes, the correlation of predicted and literature T B values had an average absolute deviation of 1.46 K, and the R² of the correlation was 0.999. In addition, the calculated Y BP values can be used to predict the flash points of alkynes.