Phase-locking of superimposed diffractive gratings in photoresists

The superposition of optical interference patterns in a photoresist film can produce a rich variety of diffractive structures. In particular, a periodic non-sinusoidal surface relief profile can be synthesized by adding the Fourier components (sinusoidal gratings) of the desired profile. In order to control the shape of the grooves it is very important an accurate adjustment of the relative spatial shift between the recorded sinusoidal components. We describe the implementation of an opto-electronic feedback loop to select and lock such spatial shift at any desired position, thus allowing the synthesis of structures varying from symmetrical to asymmetrical relief profiles in a continuous range. To demonstrate the feasibility of the technique, the Fourier synthesis of two spatial harmonics is accomplished. The superposed sinusoidal gratings were recorded in positive photoresist films using a holographic setup operating at the line lambda = 457.9 run of an argon-ion laser. A detailed description of the procedure as well as the resulting profiles recorded in the photoresist is presented. (C) 2002 Elsevier B.V. B.V. All rights reserved.

Estudo da decomposição fotoquímica por exposição à luz UV de fotorresinas positivas

Positive photoresists are widely used in lithographic process in microelectronics and in optics for the fabrication of relief components. With the aim of identifying molecular modifications among positive photoresists unexposed and previously exposed to ultraviolet light the electron stimulated ion desorption technique coupled to time-of-flight mass spectrometry was employed in the study of the AZ-1518 photoresist. Mass spectra were obtained as a function of the electron beam energy, showing specific changes related to the photochemical decomposition of the photoresist. This reinforces the applicability of the technique to investigate and characterize structural changes in photosensitive materials.

Solid-state compounds of 2-methoxybenzylidenepyruvate with some bivalent metal ions - Synthesis, characterization and thermal behavior studies

Solid-state M-2-MeO-BP compounds, where M represents bivalent Mn, Fe, Co, Ni, Cu, Zn and 2-MeO-BP is 2-methoxybenzylidenepyruvate have been synthesized. Simultaneous thermogravinietry-differential thermal analysis (TG-DTA), differential scanning calorimetry (DSC), X-ray powder diffractometry, infrared spectroscopy, elemental analysis and complexometry were used to characterize and to study the thermal stability and thermal decomposition of these compounds. The results led to information about the composition, dehydration, crystallinity and thermal decomposition of the isolated compounds.

Synthese und Reaktivität styrylsubstituierter p-Benzochinone

Synthese und Reaktivität styrylsubstituierter p-Benzochinone Oligo- und Poly(1,4-phenylenvinylene) (OPV, PPV) stellen eine für die Materialwissenschaft äußerst interessante Verbindungsklasse dar, die in Form von Halbleitern, Photoleitern, elektrolumineszierenden Systemen und negativen Photoresists breitgefächerte Anwendung findet. Allerdings stellt die Alterung dieser Materialien in Gegenwart von Sauerstoff und anderen Oxidationsmitteln ein signifikantes Problem dar. So wird z. B. die technische Anwendung von Leuchtdioden auf Polymerbasis durch ihre geringe Betriebsdauer eingeschränkt. Als Beitrag zur Untersuchung des oxidativen Abbaus von Poly- bzw. Oligo(p-phenylenvinylenen) [PPV, OPV] wurden verschiedene 2-Styryl-1,4-benzochinone - sowie höhere Oligomere - synthetisiert, die das Strukturelement einer hoch oxidierten Form von OPV's aufweisen. Durch Einführung einer Cyanogruppe an der olefinischen Doppelbindung wurde die Reaktivität der Modellsysteme gezielt beeinflußt. Die 2-Styryl-1,4-benzochinone mit unsubstituierter Doppelbindung dimerisieren in Lösung quantitativ im Sinne von Diels-Alder-Reaktionen zu den entsprechenden Cycloaddukten. Die Dimerisierungen verlaufen chemo-, regio- und stereoselektiv, was sich anhand von Grenzorbital-Betrachtungen erklären läßt.An der Oberfläche von Kieselgel erfolgt eine vollständige Umwandlung der Dimere, deren zwei Hauptprodukte identifiziert werden konnten: Neben Verbindungen, die durch eine intramolekulare [4+2]-Cycloaddition nach erfolgter Dehydrierung / Oxidation gebildet werden, entstehen verschiedene Additionsprodukte der Dimere mit Nucleophilen (Wasser, Ethanol). Cyanosubstitution führt bereits bei den als Vorstufe dienenden Stilbenen zu einer erleichterten (E/Z)-Photoisomerisierung in Lösung, die zu einem photostationären Gleichgewicht führt, welches sich durch einen hohen Anteil der (E)-Konfiguration auszeichnet. Nach erfolgter Oxidation kann ebenfalls eine Dimerisierung beobachtet werden. Bei direkter Nachbarschaft der Cyanogruppe zum Chinonring erfolgt stattdessen ein intramolekularer Ringschluß unter Ausbildung eines Benzofuranderivats.Die beobachtete Reaktivität der synthetisierten Chinonsysteme steht in Einklang mit einem möglichen sekundären Abbaumechanismus, der nach primärer Oxidation zu der Alterung von PPV's beitragen kann.

Magnetic multilayer fabrication technology with selective activation of SU-8 films

Developing magnetic multilayers are essential for reducing the core eddy current losses in the integrated power magnetic components (inductors/transformers). PVD based processes are typically used to achieve the multilayers with thin dielectric spacers. However, those processes are costly, and can be difficult to integrate. It is evident that cost effective alternative is needed. In recent years, electrochemical processes have been investigated to address these issues. One such method would be to successive metallization of insulating photoresists acting as spacer layer (such as SU-8) with soft magnetic films (such as Ni-Fe-Co alloys). This paper describes an experimental procedure to fabricate magnetic multilayers with a thin variant of SU-8 2 (< 1.5 µm) as inter-layers for integrated micro-inductors/transformers for power conversion applications.

Fabrication of 2D and 3D microelectrode arrays for amperometric dopamine sensing: towards a metal free approach to bioelectronics

Dopamine is a neurotransmitter which has a role in several psychiatric and neurological disorders. In-vivo detection of its concentration at the microscopic scale would benefit the study of these conditions and help in the development of therapies. The ideal sensor would be biocompatible, able to probe concentrations in microscopic volumes and sensitive to the small physiological concentrations of this molecule (10 nM - 1 μM). The ease of oxidation of dopamine makes it possible to detect it by electrochemical methods. An additional requirement in this kind of experiments when run in water, though, is to have a large potential window inside which no redox reactions with water take place. A promising class of materials which are being explored is the one of pyrolyzed photoresists. Photoresists can be lithographically patterned with micrometric resolution and after pyrolysis leave a glassy carbon material which is conductive, biocompatible and has a large electrochemical water window. In this work I developed a fabrication procedure for microelectrode arrays with three dimensional electrodes, making the whole device using just a negative photoresist called SU8. Making 3D electrodes could be a way to enhance the sensitivity of the electrodes without occupying a bigger footprint on the device. I characterized the electrical, morphological, and electrochemical properties of these electrodes, in particular their sensitivity to dopamine. I also fabricated and tested a two dimensional device for comparison. The three dimensional devices fabricated showed inferior properties to their two dimensional counter parts. I found a possible explanation and suggested some ways in which the fabrication could be improved.