Micro-fabrication of bio-MEMS based force sensor to measure the force response of living cells

Understanding how a living cell behaves has become a very important topic in today’s research field. Hence, different sensors and testing devices have been designed to test the mechanical properties of these living cells. This thesis presents a method of micro-fabricating a bio-MEMS based force sensor which is used to measure the force response of living cells. Initially, the basic concepts of MEMS have been discussed and the different micro-fabrication techniques used to manufacture various MEMS devices have been described. There have been many MEMS based devices manufactured and employed for testing many nano-materials and bio-materials. Each of the MEMS based devices described in this thesis use a novel concept of testing the specimens. The different specimens tested are nano-tubes, nano-wires, thin film membranes and biological living cells. Hence, these different devices used for material testing and cell mechanics have been explained. The micro-fabrication techniques used to fabricate this force sensor has been described and the experiments preformed to successfully characterize each step in the fabrication have been explained. The fabrication of this force sensor is based on the facilities available at Michigan Technological University. There are some interesting and uncommon concepts in MEMS which have been observed during this fabrication. These concepts in MEMS which have been observed are shown in multiple SEM images.

Using the Own Flexibility of a Climbing Robot as a Double Force Sensor

Force sensors are used when interaction tasks are carried out by robots in general, and by climbing robots in particular. If the mechanics and electronics systems are contained inside the own robot, the robot becomes portable without external control. Commercial force sensors cannot be used due to limited space and weight. By selecting the links material with appropriate stiffness and placing strain gauges on the structure, the own robot flexibility can be used such as force sensor. Thus, forces applied on the robot tip can be measured without additional external devices. Only gauges and small internal electronic converters are necessary. This paper illustrates the proposed algorithm to achieve these measurements. Additionally, experimental results are presented.

Force sensor of a climbing robot derived from its own flexible structure

One of the most important design constraints of a climbing robot is its own weight. When links or legs are used as a locomotion system they tend to be composed of special lightweight materials, or four-bars-linkage mechanisms are designed to reduce the weight with small rigidity looses. In these cases, flexibility appears and undesirable effects, such as dynamics vibrations, must be avoided at least when the robot moves at low speeds. The knowledge of the real tip position requires the computation of its compliance or stiffness matrix and the external forces applied to the structure. Gravitational forces can be estimated, but external tip forces need to be measured. This paper proposes a strain gauge system which achieves the following tasks: (i) measurement of the external tip forces, and (ii) estimation of the real tip position (including flexibility effects). The main advantages of the proposed system are: (a) the use of external force sensors is avoided, and (b) a substantial reduction of the robot weight is achieved in comparison with other external force measurement systems. The proposed method is applied to a real symmetric climbing robot and experimental results are presented.

Force Sensor Characterization Under Sinusoidal Excitations

The aim in the current work is the development of a method to characterize force sensors under sinusoidal excitations using a primary standard as the source of traceability. During this work the influence factors have been studied and a method to minimise their contributions, as well as the corrections to be performed under dynamic conditions have been established. These results will allow the realization of an adequate characterization of force sensors under sinusoidal excitations, which will be essential for its further proper use under dynamic conditions. The traceability of the sensor characterization is based in the direct definition of force as mass multiplied by acceleration. To do so, the sensor is loaded with different calibrated loads and is maint ained under different sinusoidal accelerations by means of a vibration shaker system that is able to generate accelerations up to 100 m/s2 with frequencies from 5 Hz up to 2400 Hz. The acceleration is measured by means of a laser vibrometer with traceabili ty to the units of time and length. A multiple channel data acquisition system is also required to simultaneously acquire the electrical output signals of the involved instrument in real time.

Sensor Fusion of Proprioception, Force and Vision in Estimation and Robot

Sensor-based robot control allows manipulation in dynamic environments with uncertainties. Vision is a versatile low-cost sensory modality, but low sample rate, high sensor delay and uncertain measurements limit its usability, especially in strongly dynamic environments. Force is a complementary sensory modality allowing accurate measurements of local object shape when a tooltip is in contact with the object. In multimodal sensor fusion, several sensors measuring different modalities are combined to give a more accurate estimate of the environment. As force and vision are fundamentally different sensory modalities not sharing a common representation, combining the information from these sensors is not straightforward. In this thesis, methods for fusing proprioception, force and vision together are proposed. Making assumptions of object shape and modeling the uncertainties of the sensors, the measurements can be fused together in an extended Kalman filter. The fusion of force and visual measurements makes it possible to estimate the pose of a moving target with an end-effector mounted moving camera at high rate and accuracy. The proposed approach takes the latency of the vision system into account explicitly, to provide high sample rate estimates. The estimates also allow a smooth transition from vision-based motion control to force control. The velocity of the end-effector can be controlled by estimating the distance to the target by vision and determining the velocity profile giving rapid approach and minimal force overshoot. Experiments with a 5-degree-of-freedom parallel hydraulic manipulator and a 6-degree-of-freedom serial manipulator show that integration of several sensor modalities can increase the accuracy of the measurements significantly.

Novel force control methods in a teleoperation system of a hydraulic slider

The objective of the this research project is to develop a novel force control scheme for the teleoperation of a hydraulically driven manipulator, and to implement an ideal transparent mapping between human and machine interaction, and machine and task environment interaction. This master‘s thesis provides a preparatory study for the present research project. The research is limited into a single degree of freedom hydraulic slider with 6-DOF Phantom haptic device. The key contribution of the thesis is to set up the experimental rig including electromechanical haptic device, hydraulic servo and 6-DOF force sensor. The slider is firstly tested as a position servo by using previously developed intelligent switching control algorithm. Subsequently the teleoperated system is set up and the preliminary experiments are carried out. In addition to development of the single DOF experimental set up, methods such as passivity control in teleoperation are reviewed. The thesis also contains review of modeling of the servo slider in particular reference to the servo valve. Markov Chain Monte Carlo method is utilized in developing the robustness of the model in presence of noise.

Trajectory and Force Control of a Direct Drive Arm

Using the MIT Serial Link Direct Drive Arm as the main experimental device, various issues in trajectory and force control of manipulators were studied in this thesis. Since accurate modeling is important for any controller, issues of estimating the dynamic model of a manipulator and its load were addressed first. Practical and effective algorithms were developed fro the Newton-Euler equations to estimate the inertial parameters of manipulator rigid-body loads and links. Load estimation was implemented both on PUMA 600 robot and on the MIT Serial Link Direct Drive Arm. With the link estimation algorithm, the inertial parameters of the direct drive arm were obtained. For both load and link estimation results, the estimated parameters are good models of the actual system for control purposes since torques and forces can be predicted accurately from these estimated parameters. The estimated model of the direct drive arm was them used to evaluate trajectory following performance by feedforward and computed torque control algorithms. The experimental evaluations showed that the dynamic compensation can greatly improve trajectory following accuracy. Various stability issues of force control were studied next. It was determined that there are two types of instability in force control. Dynamic instability, present in all of the previous force control algorithms discussed in this thesis, is caused by the interaction of a manipulator with a stiff environment. Kinematics instability is present only in the hybrid control algorithm of Raibert and Craig, and is caused by the interaction of the inertia matrix with the Jacobian inverse coordinate transformation in the feedback path. Several methods were suggested and demonstrated experimentally to solve these stability problems. The result of the stability analyses were then incorporated in implementing a stable force/position controller on the direct drive arm by the modified resolved acceleration method using both joint torque and wrist force sensor feedbacks.

A strain gauge tactile sensor for finger-mounted applications

This paper describes a strain gauge-based sensor used for measuring finger force. The theory, design, and sensor construction details are presented. It was constructed using metallic strain gauges and a carefully designed structure which has a protection de-vice that impedes the sensor damage when forces higher than 100 N are applied. Its dimensions are suitable for measuring thumb force, but the same design can be used for constructing smaller sensors for other fingers. It is rugged, presents linear response, good repeatability, resolution of 0.3 N, low hysteresis, and sensitivity of 0.12 V/N. It can be useful in rehabilitation engineering, biomechanics, robotics, and medicine.

A new method for extending the range of conductive polymer sensors for contact force

This paper describes a technique for extending the force range of thin conductive polymer force sensors used for measuring contact force. These sensors are conventionally used for measuring force by changing electrical resistance when they are compressed. The new method involves measuring change in electrical resistance when the flexible sensor, which is sensitive to both compression and bending, is sandwiched between two layers of spring steel, and the structure is supported on a thin metal ring. When external force is applied, the stiffened sensor inside the spring steel is deformed within the annular center of the ring, causing the sensor to bend in proportion to the applied force. This method effectively increases the usable force range, while adding little in the way of thickness and weight. Average error for loads between 10 N and 100 N was 2.2 N (SD = 1.7) for a conventional conductive polymer sensor, and 0.9 N (SD = 0.4) using the new approach. Although this method permits measurement of greater loads with an error less than 1 N, it is limited since the modified sensor is insensitive to loads less than 5 N. These modified sensors are nevertheless useful for directly measuring normal force applied against handles and tools and other situations involving forceful manual work activities, such as grasp, push, pull, or press that could not otherwise be measured in actual work situations.

DESIGN AND APPLICATION OF WIRELESS PASSIVE MAGNETOELASTIC RESONANCE AND MAGNETOHARMONIC FORCE SENSORS

The objective of the work described in this dissertation is the development of new wireless passive force monitoring platforms for applications in the medical field, specifically monitoring lower limb prosthetics. The developed sensors consist of stress sensitive, magnetically soft amorphous metallic glass materials. The first technology is based on magnetoelastic resonance. Specifically, when exposed to an AC excitation field along with a constant DC bias field, the magnetoelastic material mechanically vibrates, and may reaches resonance if the field frequency matches the mechanical resonant frequency of the material. The presented work illustrates that an applied loading pins portions of the strip, effectively decreasing the strip length, which results in an increase in the frequency of the resonance. The developed technology is deployed in a prototype lower limb prosthetic sleeve for monitoring forces experienced by the distal end of the residuum. This work also reports on the development of a magnetoharmonic force sensor comprised of the same material. According to the Villari effect, an applied loading to the material results in a change in the permeability of the magnetic sensor which is visualized as an increase in the higher-order harmonic fields of the material. Specifically, by applying a constant low frequency AC field and sweeping the applied DC biasing field, the higher-order harmonic components of the magnetic response can be visualized. This sensor technology was also instrumented onto a lower limb prosthetic for proof of deployment; however, the magnetoharmonic sensor illustrated complications with sensor positioning and a necessity to tailor the interface mechanics between the sensing material and the surface being monitored. The novelty of these two technologies is in their wireless passive nature which allows for long term monitoring over the life time of a given device. Additionally, the developed technologies are low cost. Recommendations for future works include improving the system for real-time monitoring, useful for data collection outside of a clinical setting.

Effect of ethylene vinyl acetate (EVA) closed cell foam on transmitted forces in mouthguard material

Objectives: To compare transmitted forces through ethylene vinyl acetate (EVA) mouthguard material and the same EVA material with gas inclusions in the form of a closed cell foam. Method: EVA mouthguard materials with and without foam gas inclusions and 4 mm thick were impacted with a constant force from an impact pendulum. Various porosity levels in the foam materials were produced by 1%, 5%, and 10% by weight foaming agent. The forces transmitted through the EVA after energy absorption by the test materials were measured with a force sensor and compared. Results: Only minor non-significant differences in transmitted forces through the EVA with and without foam were shown. Conclusions: The inclusion of gas in the form of a closed cell foam in 4 mm thick EVA mouthguard materials did not improve the impact performance of the EVA mouthguard material.

Solução de navegação inercial para o sistema plasys

Neste trabalho faz-se uma pesquisa e análise dos conceitos associados à navegação inercial para estimar a distância percorrida por uma pessoa. Foi desenvolvida uma plataforma de hardware para implementar os algoritmos de navegação inercial e estudar a marcha humana. Os testes efetuados permitiram adaptar os algoritmos de navegação inercial para humanos e testar várias técnicas para reduzir o erro na estimativa da distância percorrida. O sistema desenvolvido é um sistema modular que permite estudar o efeito da inserção de novos sensores. Desta forma foram adaptados os algoritmos de navegação para permitir a utilização da informação dos sensores de força colocados na planta do pé do utilizador. A partir desta arquitetura foram efetuadas duas abordagens para o cálculo da distância percorrida por uma pessoa. A primeira abordagem estima a distância percorrida considerando o número de passos. A segunda abordagem faz uma estimação da distância percorrida com base nos algoritmos de navegação inercial. Foram realizados um conjunto de testes para comparar os erros na estimativa da distância percorrida pelas abordagens efetuadas. A primeira abordagem obteve um erro médio de 4,103% em várias cadências de passo. Este erro foi obtido após sintonia para o utilizador em questão. A segunda abordagem obteve um erro de 9,423%. De forma a reduzir o erro recorreu-se ao filtro de Kalman o que levou a uma redução do erro para 9,192%. Por fim, recorreu-se aos sensores de força que permitiram uma redução para 8,172%. A segunda abordagem apesar de ter um erro maior não depende do utilizador pois não necessita de sintonia dos parâmetros para estimar a distância para cada pessoa. Os testes efetuados permitiram, através dos sensores de força, testar a importância da força sentida pela planta do pé para aferir a fase do ciclo de marcha. Esta capacidade permite reduzir os erros na estimativa da distância percorrida e obter uma maior robustez neste tipo de sistemas.

Estudi per a un sistema de mesura de pes per a marmota alpina

Aquest projecte tracta sobre la viabilitat de la construcció d’un sistema per al seguiment del pes d’una població de marmotes en alta muntanya. Bàsicament, es construeix una bàscula amb un sensor de força i un sensor de temperatura. Aquestes sortides analògiques es connecten a un microcontrolador ATmega8 que, mitjançant un algorisme desenvolupat en aquest projecte, està contínuament en escolta fins a detectar un canvi sobtat en el pes. Aleshores les dades s’enregistren i es guarden en una memòria SRAM per a, posteriorment, poder ser descarregades a un ordinador i analitzades per un programa que s’ha creat per a tal finalitat.

Kokeellisen moodianalyysin hyödyntäminen sääriluun lujuuden määrittämisessä

Diplomityö tehtiin Lappeenrannan teknillisen yliopiston konetekniikan laitokselle. Diplomityö on osa teknillisen yliopiston biomekaanista tutkimusta, jonka tarkoituksena on mallintaa ihmisen tuki- ja liikuntaelimistön toimintaa. Työssä pyrittiin selvittämään, voitaisiinko sääriluuhun kohdistetun mekaanisen herätteen aiheuttamaa värähtelyvastetta analysoimalla saada tietoa luun ominaistaajuuksista ja lujuudesta. Tietoa voitaisiin käyttää esimerkiksi ostoporoosiriskin arvioinnissa sekä ihmiskehon osien toimintaa kuvaavien simulointimallien verifioinnissa. Mittauslaitteistona käytettiin Brüel & Kjær-moodianalyysilaitteistoa. Laitteistokokonaisuuteen kuuluivat herätevasara, elektromagneettinen täristin, voima-anturi, kaksi kiihtyvyysmitta-anturia sekä PulseLab 2.0 –ohjelmistolla varustettu PC-laitteisto. Tulosten jatkoanalyysi suoritettiin MathWorks yhtiön MatLab v 4.0 -ohjelmistolla. Työssä esitellyn mittaustavan ja -laitteiston todettiin soveltuvan sääriluun värähtelyvasteen mittaamiseen. Mittaustulokset eri mittauskertojen välillä samalla henkilöllä ovat yhtenevät. Tutkimuksen tulosten perusteella ei voida osoittaa luun värähtelyvasteen ja lujuuden välistä suoraa korrelaatiota.

Comparison between dSPACE and NI systems based on real-time intelligent control of a teleoperated hydraulic servo system

The Laboratory of Intelligent Machine researches and develops energy-efficient power transmissions and automation for mobile construction machines and industrial processes. The laboratory's particular areas of expertise include mechatronic machine design using virtual technologies and simulators and demanding industrial robotics. The laboratory has collaborated extensively with industrial actors and it has participated in significant international research projects, particularly in the field of robotics. For years, dSPACE tools were the lonely hardware which was used in the lab to develop different control algorithms in real-time. dSPACE's hardware systems are in widespread use in the automotive industry and are also employed in drives, aerospace, and industrial automation. But new competitors are developing new sophisticated systems and their features convinced the laboratory to test new products. One of these competitors is National Instrument (NI). In order to get to know the specifications and capabilities of NI tools, an agreement was made to test a NI evolutionary system. This system is used to control a 1-D hydraulic slider. The objective of this research project is to develop a control scheme for the teleoperation of a hydraulically driven manipulator, and to implement a control algorithm between human and machine interaction, and machine and task environment interaction both on NI and dSPACE systems simultaneously and to compare the results.