Herstellung von spannungsoptimierten Silizium-Membranen durch den elektrochemischen Ätzstopp an pn-Übergängen

Vielen Sensoren in mikroelektromechanische Systemen (MEMS) liegen Siliziummembranen zu Grunde. Die Membranen werden mit unterschiedlichen Verfahren hergestellt. Zum Teil kann man Opferschichten benutzen. Will man jedoch Membranen aus kristallinem Silizium, so muß man auf Ätzstopptechniken zurückgreifen. Eine gängige Methode verwendet vergrabene p^(+)-Schichten. Die sehr hohe Dotierung des Siliziums führt jedoch zu unüberwindbaren Problemen bei der Schaltkreisintegration. Die Verwendung von pn-Übergängen beim elektrochemischen Ätzen als Ätzstopp scheint eine aussichtsreiche Lösung. Die Dotierstoffkonzentrationen sind unkritisch, da sie die Elektronik nicht beeinflussen. Die Siliziummembranen lassen sich mit den üblichen Standard-IC-Prozessen herstellen. Ein Ziel der vorliegenden Arbeit bestand darin, die physikalisch-chemische Erklärung des elektrochemischen Ätzstopps von Silizium in alkalischen Lösungen zu finden. Dabei sollten Effekte untersucht werden, die einen Einfluß auf das Ätzstoppverhalten haben, wozu insbesondere - die Verarmungszone unterhalb der p-Silizium/Elektrolyt-Phasengrenzfläche - sowie die Raumladungszone des in Sperrichtung geschalteten pn-Übergangs zählen. Ausgangspunkt sind die chemischen Ätzmechanismen des Siliziums respektive des Siliziumdioxids, wobei der Mechanismus des Siliziumätzens in alkalischen Lösungen und die elektrochemischen Effekte ausführlich beschrieben werden. Es zeigt sich ein starker Einfluß der Oberflächenelektronen im Leitungsband des Siliziums und der Hydroxidionen des Elektrolyten auf den Auflösungsmechanismus des Siliziums. Diese Erkenntnisse ermöglichen es, den mittels pn-Übergangs kontrollierten elektrochemischen Ätzstopp vollständig zu beschreiben. Es zeigte sich, daß die Dicke der Membran von den Dotierstoffkonzentrationen des p-Siliziumsubstrats und der n-Siliziumschicht, der Tiefe der n-Dotierung, der Temperatur im Ätzsystem und besonders von der anodischen Sperrspannung abhängig ist. Zur Verifizierung wurden Siliziummembrandicken mit Hilfe von IR-Ellipsometrie vermessen. Im Rahmen dieser Arbeit wurde auch der es Einflusses von starken Dotierungen im Silizium auf dessen elastische Eigenschaften untersucht, im speziellen bei µm-dünnen Membranen, die mittels elektrochemischen Ätzstopps hergestellt wurden. Dabei wird auf den Einfluß der hohen Dotierstoffkonzentrationen ein besonderes Augenmerk gelegt. Der Youngsche Modul läßt sich bei einem Zugversuch durch Messung der Ausdehnung ermitteln. Für eine zerstörungsfreie Messung der sehr dünnen pn-Siliziummembranen wird die Dehnung berührungslos mit Hilfe des Laser-Speckle Extensometers gemessen. Laserakustische Oberflächenwellen wurden eingesetzt, um gezielt den Einfluß der unterschiedlich starken Dotierung mit Phosphor auf den Elastizitätsmodul zu ermitteln.

Mechanical behavior of isolated intervertebral disc

The study on several components of intervertebral joints is essential to understand the spine's degenerative mechanisms and to assess the best method for their treatment. For such study it is necessary to know the mechanical properties of the isolated intervertebral disc (ID) mechanical properties and, it is necessary to evaluate its stresses and strains. In order to assess the ID displacements, a fine, U-shaped blade was developed, over which two extensometers connected in a Wheatstone bridge were placed. The device was then tested on porcine spine ID, where compression loads were applied and the extremities displacements of the blade coupled to the intervertebral disc were measured. Stress/strain diagram, both on the compression and on the decompression phases, evidencing the non-linear nature of such relationship. With the experiment, it was possible to obtain approximate values of the longitudinal elasticity module (E) of the disc material and of the Poisson coefficient (n ). After several tests, E results are compatible with those obtained by others studies, with very simple and low-cost device. This experiments can be used for obtained others mechanical properties of isolated ID with precision and accuracy.

Dinâmica do aparelho locomotor em sujeitos amputados e não-amputados do membro inferior

Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)

Análise da falha do suporte de mancal de um eixo cardan utilizado num veículo pesado

Pós-graduação em Engenharia Mecânica - FEG

Estudo, desenvolvimento e concepção de uma célula de carga

In engineering projects, it’s fundamental to determine the active loads in components in order to guarantee acceptable values of safety and reliability according to project specifications. On the other hand, force measurement methods might be very complex and impracticable in some cases and, so that, load cells with eletric resistance strain gages can be applied as a simple and accurate option to measure the required load. The main purpose of this paper is to present the development of a load cell that measures uniaxial forces using electric resistance strain gages without being influenced by the location of the loading in a cantilever beam. For that, it was taken as basis a secondary purpose which is to present a general study of basic and wide concepts about transducers, load cells and extensometers primarily. Information such as: loading and measurements types, characteristics of the presented devices as well as factors that influence its functioning, the most common kinds of Wheatstone bridge links, the main points of a load cell project, cements used to fix extensometers and, finally, the project itself with the tests of the built transducer are presented. By the end of this paper, all the results are shown and analyzed, concluding about the designed load cell and the work itself

Advanced interpretation of subsidence in Murcia (SE Spain) using A-DInSAR data – modelling and validation

Subsidence is a natural hazard that affects wide areas in the world causing important economic costs annually. This phenomenon has occurred in the metropolitan area of Murcia City (SE Spain) as a result of groundwater overexploitation. In this work aquifer system subsidence is investigated using an advanced differential SAR interferometry remote sensing technique (A-DInSAR) called Stable Point Network (SPN). The SPN derived displacement results, mainly the velocity displacement maps and the time series of the displacement, reveal that in the period 2004–2008 the rate of subsidence in Murcia metropolitan area doubled with respect to the previous period from 1995 to 2005. The acceleration of the deformation phenomenon is explained by the drought period started in 2006. The comparison of the temporal evolution of the displacements measured with the extensometers and the SPN technique shows an average absolute error of 3.9±3.8 mm. Finally, results from a finite element model developed to simulate the recorded time history subsidence from known water table height changes compares well with the SPN displacement time series estimations. This result demonstrates the potential of A-DInSAR techniques to validate subsidence prediction models as an alternative to using instrumental ground based techniques for validation.

Relationship between piezometric level and ground deformations measured by means of DInSAR in the Vega Media of the Segura River (Spain)

Differential SAR Interferometry (DInSAR) is a remote sensing method with the well demonstrated ability to monitor geological hazards like earthquakes, landslides and subsidence. Among all these hazards, subsidence involves the settlement of the ground surface affecting wide areas. Frequently, subsidence is induced by overexploitation of aquifers and constitutes a common problem that affects developed societies. The excessive pumping of underground water decreases the piezometric level in the subsoil and, as a consequence, increases the effective stresses with depth causing a consolidation of the soil column. This consolidation originates a settlement of ground surface that must be withstood by civil structures built on these areas. In this paper we make use of an advanced DInSAR approach - the Coherent Pixels Technique (CPT) [1] - to monitor subsidence induced by aquifer overexploitation in the Vega Media of the Segura River (SE Spain) from 1993 to the present. 28 ERS-1/2 scenes covering a time interval of about 10 years were used to study this phenomenon. The deformation map retrieved with CPT technique shows settlements of up to 80 mm at some points of the studied zone. These values agree with data obtained by means of borehole extensometers, but not with the distribution of damaged buildings, well points and basements, because the occurrence of damages also depends on the structural quality of the buildings and their foundations. The most interesting relationship observed is the one existing between piezometric changes, settlement evolution and local geology. Three main patterns of ground surface and piezometric level behaviour have been distinguished for the study zone during this period: 1) areas where deformation occurs while ground conditions remain altered (recent deformable sediments), 2) areas with no deformation (old and non-deformable materials), and 3) areas where ground deformation mimics piezometric level changes (expansive soils). The temporal relationship between deformation patterns and soil characteristics has been analysed in this work, showing a delay between them. Moreover, this technique has allowed the measurement of ground subsidence for a period (1993-1995) where no instrument information was available.

Performance of TerraSAR-X for urban subsidence monitoring: Murcia case study

This paper presents an analysis of the performance of TerraSAR-X for subsidence monitoring in urban areas. The city of Murcia has been selected as a test-site due to its high deformation rate and the set of extensometers deployed along the city that provide validation data. The obtained results have been compared with those obtained from ERS/ENVISAT data belonging to the same period and validated with the in-situ measurements.

Forensic analysis of buildings affected by mining subsidence based on Differential Interferometry (Part III)

This work presents a forensic analysis of buildings affected by mining subsidence, which is based on deformation data obtained by Differential Interferometry (DInSAR). The proposed test site is La Union village (Murcia, SE Spain) where subsidence was triggered in an industrial area due to the collapse of abandoned underground mining labours occurred in 1998. In the first part of this work the study area was introduced, describing the spatial and temporal evolution of ground subsidence, through the elaboration of a cracks map on the buildings located within the affected area. In the second part, the evolution of the most significant cracks found in the most damaged buildings was monitored using biaxial extensometric units and inclinometers. This article describes the work performed in the third part, where DInSAR processing of satellite radar data, available between 1998 and 2008, has permitted to determine the spatial and temporal evolution of the deformation of all the buildings of the study area in a period when no continuous in situ instrumental data is available. Additionally, the comparison of these results with the forensic data gathered in the 2005–2008 period, reveal that there is a coincidence between damaged buildings, buildings where extensometers register significant movements of cracks, and buildings deformation estimated from radar data. As a result, it has been demonstrated that the integration of DInSAR data into forensic analysis methodologies contributes to improve significantly the assessment of the damages of buildings affected by mining subsidence.

Regional subsidence modelling in Murcia city (SE Spain) using 1-D vertical finite element analysis and 2-D interpolation of ground surface displacements

Subsidence is a hazard that may have natural or anthropogenic origin causing important economic losses. The area of Murcia city (SE Spain) has been affected by subsidence due to groundwater overexploitation since the year 1992. The main observed historical piezometric level declines occurred in the periods 1982–1984, 1992–1995 and 2004–2008 and showed a close correlation with the temporal evolution of ground displacements. Since 2008, the pressure recovery in the aquifer has led to an uplift of the ground surface that has been detected by the extensometers. In the present work an elastic hydro-mechanical finite element code has been used to compute the subsidence time series for 24 geotechnical boreholes, prescribing the measured groundwater table evolution. The achieved results have been compared with the displacements estimated through an advanced DInSAR technique and measured by the extensometers. These spatio-temporal comparisons have showed that, in spite of the limited geomechanical data available, the model has turned out to satisfactorily reproduce the subsidence phenomenon affecting Murcia City. The model will allow the prediction of future induced deformations and the consequences of any piezometric level variation in the study area.

Die load and stresses in press forging

Several axi-symmetric EN3B steel components differing in shape and size were forged on a 100 ton joint knuckle press. A load cell fitted under the lower die inserts recorded the total deformation forces. Job parameters were measured off the billets and the forged parts. Slug temperatures were varied and two lubricants - aqueous colloidal graphite and oil - were used. An industrial study was also conducted to check the results of the laboratory experiments. Loads were measured (with calibrated extensometers attached to the press frames) when adequately heated mild steel slugs were being forged in finishing dies. Geometric parameters relating to the jobs and the dies were obtained from works drawings. All the variables considered in the laboratory study could not, however, be investigated without disrupting production. In spite of this obvious limitation, the study confirmed that parting area is the most significant geometric factor influencing the forging load. Multiple regression analyses of the laboratory and industrial results showed that die loads increase significantly with the weights and parting areas of press forged components, and with the width to thickness ratios of the flashes formed, but diminish with increasing slug temperatures and higher billet diameter to height ratios. The analyses also showed that more complicated parts require greater loads to forge them. Die stresses, due to applied axial loads, were investigated by the photoelastic method. The three dimensional frozen stress technique was employed. Model dies were machined from cast araldite cylinders, and the slug material was simulated with plasticene. Test samples were cut from the centres of the dies after the stress freezing. Examination of the samples, and subsequent calculations, showed that the highest stresses were developed in die outer corners. This observation partly explains why corner cracking occurs frequently in industrial forging dies. Investigation of die contact during the forging operation revealed the development of very high stresses.