Experimental investigation of interface states and photovoltaic effects on the scanning capacitance microscopy measurement for p-n junction dopant profiling

Controlled polishing procedures were used to produce both uniformly doped and p-n junction silicon samples with different interface state densities but identical oxide thicknesses. Using these samples, the effects of interface states on scanning capacitance microscopy (SCM) measurements could be singled out. SCM measurements on the junction samples were performed with and without illumination from the atomic force microscopy laser. Both the interface charges and the illumination were seen to affect the SCM signal near p-n junctions significantly. SCM p-n junction dopant profiling can be achieved by avoiding or correctly modeling these two factors in the experiment and in the simulation. (c) 2005 American Institute of Physics.

Characteristics of low temperature PECVD silicon nitride for MEMS structural materials

Materials and mechanical characteristics of the low temperature PECVD silicon nitrides have been investigated using various analytical and testing techniques. TEM and SEM examinations reveal that there is no distinct microstructural difference existing between the films deposited under different conditions. However, their mechanical properties determined by nanoindentation indicate otherwise. The variations in mechanical properties with deposition conditions are found to be strongly correlated to the change in silicon-to-nitrogen ratio in the film.

Effect of deposition conditions on mechanical properties of low-temperature PECVD silicon nitride films

The effect of deposition conditions on characteristic mechanical properties - elastic modulus and hardness - of low-temperature PECVD silicon nitrides is investigated using nanoindentation. lt is found that increase in substrate temperature, increase in plasma power and decrease in chamber gas pressure all result in increases in elastic modulus and hardness. Strong correlations between the mechanical properties and film density are demonstrated. The silicon nitride density in turn is shown to be related to the chemical composition of the films, particularly the silicon/nitrogen ratio. (c) 2006 Elsevier B.V. All rights reserved.

Preparation and characterization of mesoporous Ni/Zr-laponite for the catalytic deoxygenation of vegetable oils into liquid hydrocarbons

The deoxygenation of vegetable oils was studied over a Ni/Zr-laponite catalyst in various nickel loading composition. Stearic acid has been used as a model compounds. The liquid and gas products were analyzed using gas chromatograph equipped with thermal conductivity detector and flame ionization detector. From product distribution it was determined the effect of catalyst composition on reaction conditions

Silica membrane reactors for hydrogen production from water gas shift

This paper presents an analysis of membrane reactor (MR) operation and design for enhanced hydrogen production from the water gas shift (WGS) reaction. It has been established that membrane reactors can enhance an equilibrium limited reaction through product separation. However, the detailed effects of reactor setup, membrane configuration and catalyst volume have yet to be properly analysed for this reaction. This paper investigates new ideas for membrane reactors such as the development of new catalytic films, for improved interaction between the reaction and separation zones. Current membrane reactors utilise a packed bed of catalyst within the membrane tube, utilising a large volume of catalyst to drive reaction. This is still inefficient and provides only limited benefits over conventional WGS reactors. New reactor configurations look to optimise the interactive effects between reaction and separation to provide improved operation. In this paper, thin film catalysts were produced using dip coating and spray coating techniques. This technique produced catalyst coatings with good thickness, though the abrasion strength of the dip coated catalyst was quite low. The catalyst was tested in a packed bed reactor for temperature activity at low temperatures and catalyst activity at varying levels of excess water

Use of electronic travel diaries and vehicle instrumentation packages in the year 2000 : Atlanta Regional Household Travel Survey

The Georgia Institute of Technology is currently performing research that will result in the development and deployment of three instrumentation packages that allow for automated capture of personal travel-related data for a given time period (up to 10 days). These three packages include: A handheld electronic travel diary (ETD) with Global Positioning System (GPS) capabilities to capture trip information for all modes of travel; A comprehensive electronic travel monitoring system (CETMS), which includes an ETD, a rugged laptop computer, a GPS receiver and antenna, and an onboard engine monitoring system, to capture all trip and vehicle information; and a passive GPS receiver, antenna, and data logger to capture vehicle trips only.