A novel method for measuring the coma of a lithographic projection system by use of mirror-symmetry marks

A novel method for measuring the coma of a lithographic projection system is proposed and the principle of the method is described. By utilizing mirror-symmetry marks, the adverse effects of axial aberrations on the coma measurement are avoided. Experimental results demonstrated that the method has high accuracy. Compared with TAMIS, the conventional technique used for coma measurement, the method is more reliable because the influences of the process factors on the lateral displacements have been considered. (c) 2006 Elsevier Ltd. All rights reserved.

Even aberration measurement of lithographic projection system based on optimized phase-shifting marks

In the present paper, we propose a novel method for measuring the even aberrations of lithographic projection optics by use of optimized phase-shifting marks on the test mask. The line/space ratio of the phase-shifting marks is optimized to obtain the maximum sensitivities of Zernike coefficients corresponding to even aberrations. Spherical aberration and astigmatism can be calculated from the focus shifts of phase-shifting gratings oriented at 0 degrees, 45 degrees, 90 degrees and 135 degrees at multiple illumination settings. The PROLITH simulation results show that, the measurement accuracy of spherical aberration and astigmatism obviously increase, after the optimization of the measurement mark. (C) 2008 Elsevier B.V. All rights reserved.

Design and fabrication of color filters for projection display system

Color filters are key components in an optical engine projection display system. In this paper, a new admittance-matching method for designing and fabricating the high performance filters is described, in which the optimized layers are limited to the interfaces between the stack (each combination of quarter-wave-optical-thickness film layers is called a stack) and stack, or between stack and substrate, or between stack and incident medium. This method works well in designing filters containing multiple stacks such as UV-IR cut and broadband filters. The tolerance and angle sensitivity for the designed film stacks are analyzed. The thermal stability of the sample color filters was measured. A good result in optical performance and thermal stability was obtained through the new design approach. (c) 2006 Society of Photo-Optical Instrumentation Engineers.

Design and fabrication of color filters for projection display system

Color filters are key components in an optical engine projection display system. In this paper, a new admittance-matching method for designing and fabricating the high performance filters is described, in which the optimized layers are limited to the interfaces between the stack (each combination of quarter-wave-optical-thickness film layers is called a stack) and stack, or between stack and substrate, or between stack and incident medium. This method works well in designing filters containing multiple stacks such as UV-IR cut and broadband filters. The tolerance and angle sensitivity for the designed film stacks are analyzed. The thermal stability of the sample color filters was measured. A good result in optical performance and thermal stability was obtained through the new design approach. (c) 2006 Society of Photo-Optical Instrumentation Engineers.

Los servicios de los ecosistemas del Anillo Verde de Vitoria-Gasteiz: un enfoque multidimensional

Los espacios verdes son proveedores naturales de un gran número de beneficios medioambientales y sociales. La Infraestructura Verde favorece la naturalidad de estos espacios, constituyendo una alternativa sostenible a la planificación urbana tradicional. En el presente estudio se analizan los ecosistemas del Anillo Verde de Vitoria/Gasteiz y los servicios de los ecosistemas que genera, así como la percepción de las personas sobre los bienes que esta infraestructura genera para el bienestar de la población. Se ha comparado la potencialidad ecológica para el aporte de servicios con la percepción de los mismos por parte de la población en parques de distintas características ecológicas. Los resultados muestran que la mayoría de las personas perciben los beneficios que proporcionan los ecosistemas, sobre todo los culturales (recreo y disfrute del paisaje), junto con la regulación de la calidad del aire y la conservación de la Biodiversidad. Las zonas más naturales son consideradas más importantes para la biodiversidad y los servicios de regulación. Además hay una valoración mayor una vez conocida la potencialidad real de los ecosistemas, sobre todo para los servicios de regulación. Se concluye que el marco conceptual de los servicios de los ecosistemas puede promover la concienciación sobre la importancia de los ecosistemas urbanos y periurbanos para el bienestar social, así como aportar nuevas pautas de gestión en dichas zonas.