Investigation of some critical aspects of on-line surface measurement by a wavelength-division-multiplexing technique

Some critical aspects of a new kind of on-line measurement technique for micro and nanoscale surface measurements are described. This attempts to use spatial light-wave scanning to replace mechanical stylus scanning, and an optical fibre interferometer to replace optically bulky interferometers for measuring the surfaces. The basic principle is based on measuring the phase shift of a reflected optical signal. Wavelength-division-multiplexing and fibre Bragg grating techniques are used to carry out wavelength-to-field transformation and phase-to-depth detection, allowing a large dynamic measurement ratio (range/resolution) and high signal-to-noise ratio with remote access. In effect the paper consists of two parts: multiplexed fibre interferometry and remote on-machine surface detection sensor (an optical dispersive probe). This paper aims to investigate the metrology properties of a multiplexed fibre interferometer and to verify its feasibility by both theoretical and experimental studies. Two types of optical probes, using a dispersive prism and a blazed grating, respectively, are introduced to realize wavelength-to-spatial scanning.

Fiberised set-up for eye length measurement

We describe a configuration consisting of two fiberised Michelson interferometers and show that, with an optical balanced technique and suitable electronics, the signal corresponding to coherent interference in the first interferometer can be sufficiently attenuated in the channel processing the signal from the second interferometer. In this way it is possible to display simultaneous reflectograms of two different regions in the eye (e.g. cornea and retina) and infer the eye length from these measurements.

Simultaneous interrogation of interferometric and Bragg grating sensors

We propose a new method for the simultaneous interrogation of conventional two-beam interferometers and Bragg grating sensors. The technique employs an unbalanced Mach-Zehnder interferometer illuminated by a single low-coherence source, which acts as a wavelength-tunable source for the grating and as a path-matched f ilter for the Fizeau interferometer, thus providing a high phase resolution output for each sensor. The grating sensor demonstrates a dynamic strain resolution of ~0.05 µe/vHz at 20 Hz, while the interferometric phase resolution is better than 1 mrad/vHz at 20 Hz, corresponding to an rms mirror displacement of 0.08 nm.

Grating and interferometric devices in POF

To date, much of the development work associated with polymer optical fibre (POF) applications has been aimed at exploiting the potential of the technology to provide low cost solutions. Here we argue that, in the sensing area at least, POF offers a number of other, more relevant advantages. In this paper we describe work on a range of devices based on photoinscribed gratings and on fibre interferometers, which are designed to take advantage of the unique properties of POF.

High stability multiplexed fibre interferometer and its application on absolute displacement measurement and on-line surface metrology

We propose a self-reference multiplexed fibre interferometer (MFI) by using a tunable laser and fibre Bragg grating (FBG). The optical measurement system multiplexes two Michelson fibre interferometers with shared optical path in the main part of optical system. One fibre optic interferometer is used as a reference interferometer to monitor and control the high accuracy of the measurement system under environmental perturbations. The other is used as a measurement interferometer to obtain information from the target. An active phase tracking homodyne (APTH) technique is applied for signal processing to achieve high resolution. MFI can be utilised for high precision absolute displacement measurement with different combination of wavelengths from the tuneable laser. By means of Wavelength-Division-Multiplexing (WDM) technique, MFI is also capable of realising on-line surface measurement, in which traditional stylus scanning is replaced by spatial light-wave scanning so as to greatly improve the measurement speed and robustness. © 2004 Optical Society of America.

Low-linewidth and tunable single frequency 1x2 multimode-interferometer-Fabry-Perot laser diode

In this paper, we present a novel 1x2 multi-mode-interferometer-Fabry-Perot (MMI-FP) laser diode, which demonstrated tunable single frequency operation with more than 30dB side mode suppression ratio (SMSR) and a tuning range of 25nm in the C and L bands, as well as a 750 kHz linewidth. These lasers do not require material regrowth and high resolution gratings; resulting in a simpler process that can significantly increase the yield and reduce the cost.

New design of electrostatic mirror actuators for application in high-precision interferometry

We describe a new geometry for electrostatic actuators to be used in sensitive laser interferometers, suited for prototype and table top experiments related to gravitational wave detection with mirrors of 100 g or less. The arrangement consists of two plates at the sides of the mirror (test mass), and therefore does not reduce its clear aperture as a conventional electrostatic drive (ESD) would do. Using the sample case of the AEI-10 m prototype interferometer, we investigate the actuation range and the influence of the relative misalignment of the ESD plates with respect to the test mass. We find that in the case of the AEI-10 m prototype interferometer, this new kind of ESD could provide a range of 0.28 mu m when operated at a voltage of 1 kV. In addition, the geometry presented is shown to provide a reduction factor of about 100 in the magnitude of the actuator motion coupling to the test mass displacement. We show that therefore in the specific case of the AEI-10 m interferometer, it is possible to mount the ESD actuators directly on the optical table without spoiling the seismic isolation performance of the triple stage suspension of the main test masses.

Towards a gravitational wave observatory designer: sensitivity limits of spaceborne detectors

The most promising concept for low frequency (millihertz to hertz) gravitational wave observatories are laser interferometric detectors in space. It is usually assumed that the noise floor for such a detector is dominated by optical shot noise in the signal readout. For this to be true, a careful balance of mission parameters is crucial to keep all other parasitic disturbances below shot noise. We developed a web application that uses over 30 input parameters and considers many important technical noise sources and noise suppression techniques to derive a realistic position noise budget. It optimizes free parameters automatically and generates a detailed report on all individual noise contributions. Thus one can easily explore the entire parameter space and design a realistic gravitational wave observatory. In this document we describe the different parameters, present all underlying calculations, and compare the final observatory's sensitivity with astrophysical sources of gravitational waves. We use as an example parameters currently assumed to be likely applied to a space mission proposed to be launched in 2034 by the European Space Agency. The web application itself is publicly available on the Internet at http://spacegravity.org/designer. Future versions of the web application will incorporate the frequency dependence of different noise sources and include a more detailed model of the observatory's residual acceleration noise.

A brief comparison of optical pathlength difference and various definitions for the interferometric phase

To this paper we discuss that the phase readout in low noise laser interferometers can significantly deviate from the underlying optical pathlength difference (OPD). The cross coupling of beam tilt to the interferometric phase readout is compared to the OPD. For such a system it is shown that the amount of tilt to phase readout coupling depends strongly on the involved beams and their parameters, as well as on the detector properties and the precise definition of the phase. The unique single element photodiode phase is therefore compared to three common phase definitions for quadrant diodes. It is shown that neither phase definition globally shows the least amount of cross coupling of angular it

Topographic optical profilometry of steep slope micro-optical transparent surfaces

Optical profilometers based on light reflection may fail at surfaces presenting steep slopes and highly curved features. Missed light, interference and diffraction at steps, peaks and valleys are some of the reasons. Consequently, blind areas or profile artifacts may be observed when using common reflection micro-optical profilometers (confocal, scanning interferometers, etc…). The Topographic Optical Profilometry by Absorption in Fluids (TOPAF) essentially avoids these limitations. In this technique an absorbing fluid fills the gap between a reference surface and the surface to profile. By comparing transmission images at two different spectral bands we obtain a reliable topographic map of the surface. In this contribution we develop a model to obtain the profile under micro-optical observation, where high numerical aperture (NA) objectives are mandatory. We present several analytical and experimental results, validating the technique’s capabilities for profiling steep slopes and highly curved micro-optical surfaces with nanometric height resolution.

A practical MEMS gravimeter

The ability to measure tiny variations in the local gravitational acceleration allows – amongst other applications – the detection of hidden hydrocarbon reserves, magma build-up before volcanic eruptions, and subterranean tunnels. Several technologies are available that achieve the sensitivities required (tens of μGal/√Hz), and stabilities required (periods of days to weeks) for such applications: free-fall gravimeters, spring-based gravimeters, superconducting gravimeters, and atom interferometers. All of these devices can observe the Earth tides; the elastic deformation of the Earth’s crust as a result of tidal forces. This is a universally predictable gravitational signal that requires both high sensitivity and high stability over timescales of several days to measure. All present gravimeters, however, have limitations of excessive cost (£70 k) and high mass (<8 kg). In this thesis, the building of a microelectromechanical system (MEMS) gravimeter with a sensitivity of 40 μGal/√Hz in a package size of only a few cubic centimetres is discussed. MEMS accelerometers – found in most smart phones – can be mass-produced remarkably cheaply, but most are not sensitive enough, and none have been stable enough to be called a ‘gravimeter’. The remarkable stability and sensitivity of the device is demonstrated with a measurement of the Earth tides. Such a measurement has never been undertaken with a MEMS device, and proves the long term stability of the instrument compared to any other MEMS device, making it the first MEMS accelerometer that can be classed as a gravimeter. This heralds a transformative step in MEMS accelerometer technology. Due to their small size and low cost, MEMS gravimeters could create a new paradigm in gravity mapping: exploration surveys could be carried out with drones instead of low-flying aircraft; they could be used for distributed land surveys in exploration settings, for the monitoring of volcanoes; or built into multi-pixel density contrast imaging arrays.