The Influence of Adjacent Segment on the Reliability of Cu Dual Damascene Interconnects

Three terminal ‘dotted-I’ interconnect structures, with vias at both ends and an additional via in the middle, were tested under various test conditions. Mortalities (failures) were found in right segments with jL value as low as 1250 A/cm, and the mortality of a dotted-I segment is dependent on the direction and magnitude of the current in the adjacent segment. Some mortalities were also found in the right segments under a test condition where no failure was expected. Cu extrusion along the delaminated Cu/Si₃N₄ interface near the central via region was believed to cause the unexpected failures. From the time-to-failure (TTF), it is possible to quantify the Cu/Si₃N₄ interfacial strength and bonding energy. Hence, the demonstrated test methodology can be used to investigate the integrity of the Cu dual damascene processes. As conventionally determined critical jL values in two-terminal via-terminated lines cannot be directly applied to interconnects with branched segments, this also serves as a good methodology to identify the critical effective jL values for immortality.

Jmodels: Java models of earth system regulation

The JModel suite consists of a number of models of aspects of the Earth System. They can all be run from the JModels website. They are written in the Java language for maximum portability, and are capable of running on most computing platforms including Windows, MacOS and Unix/Linux. The models are controlled via graphical user interfaces (GUI), so no knowledge of computer programming is required to run them. The models currently available from the JModels website are: Ocean phosphorus cycle Ocean nitrogen and phosphorus cycles Ocean silicon and phosphorus cycles Ocean and atmosphere carbon cycle Energy radiation balance model (under development) The main purpose of the models is to investigate how material and energy cycles of the Earth system are regulated and controlled by different feedbacks. While the central focus is on these feedbacks and Earth System stabilisation, the models can also be used in other ways. These resources have been developed by: National Oceanography Centre, Southampton project led by Toby Tyrrell and Andrew Yool, focus on how the Earth system works.