Numerical Study on Flow Field and Temperature Distribution in Growth Process of 200 mm Czochralski Silicon Crystals

The melt flow and temperature distribution in a 200 mm silicon Czochralski furnace with a cusp magnetic field was modeled and simulated by using a finite-volume based FLUTRAPP ( Fluid Flow and Transport Phenomena Program) code. The melt flow in the crucible was focused, which is a result of the competition of buoyancy, the centrifugal forces caused by the rotations of the crucible and crystal, the thermocapillary force on the free surfaces and the Lorentz force induced by the cusp magnetic field. The zonal method for radiative heat transfer was used in the growth chamber, which was confined by the crystal surface, melt surface, crucible, heat shield, and pull chamber. It was found that the cusp magnetic field could strength the dominant counter-rotating swirling flow cell in the crucible and reduce the flow oscillation and the pulling-rate fluctuation. The fluctuation of dopant and oxygen concentration in the growing crystal could thus be smoothed.

A novel oblique detonation structure and its stability

Oblique detonation structures induced by the wedge in the supersonic combustible gas mixtures are simulated numerically. The results show that the stationary oblique detonation structures are influenced by the gas flow Mach number, and a novel critical oblique detonation structure, which is characterized by a more complicated wave system, appears in the low Mach number cases. By introducing the inflow disturbance, its nonstationary evolution process is illustrated and its stability is verified.