Optimization of the Mechanical and Optical Properties of Tunable Optical Sensor Arrays (TOSA) for a Nanospectrometer in the Visible and Near Infrared Spectral Range

Tunable Optical Sensor Arrays (TOSA) based on Fabry-Pérot (FP) filters, for high quality spectroscopic applications in the visible and near infrared spectral range are investigated within this work. The optical performance of the FP filters is improved by using ion beam sputtered niobium pentoxide (Nb2O5) and silicon dioxide (SiO2) Distributed Bragg Reflectors (DBRs) as mirrors. Due to their high refractive index contrast, only a few alternating pairs of Nb2O5 and SiO2 films can achieve DBRs with high reflectivity in a wide spectral range, while ion beam sputter deposition (IBSD) is utilized due to its ability to produce films with high optical purity. However, IBSD films are highly stressed; resulting in stress induced mirror curvature and suspension bending in the free standing filter suspensions of the MEMS (Micro-Electro-Mechanical Systems) FP filters. Stress induced mirror curvature results in filter transmission line degradation, while suspension bending results in high required filter tuning voltages. Moreover, stress induced suspension bending results in higher order mode filter operation which in turn degrades the optical resolution of the filter. Therefore, the deposition process is optimized to achieve both near zero absorption and low residual stress. High energy ion bombardment during film deposition is utilized to reduce the film density, and hence the film compressive stress. Utilizing this technique, the compressive stress of Nb2O5 is reduced by ~43%, while that for SiO2 is reduced by ~40%. Filters fabricated with stress reduced films show curvatures as low as 100 nm for 70 μm mirrors. To reduce the stress induced bending in the free standing filter suspensions, a stress optimized multi-layer suspension design is presented; with a tensile stressed metal sandwiched between two compressively stressed films. The stress in Physical Vapor Deposited (PVD) metals is therefore characterized for use as filter top-electrode and stress compensating layer. Surface micromachining is used to fabricate tunable FP filters in the visible spectral range using the above mentioned design. The upward bending of the suspensions is reduced from several micrometers to less than 100 nm and 250 nm for two different suspension layer combinations. Mechanical tuning of up to 188 nm is obtained by applying 40 V of actuation voltage. Alternatively, a filter line with transmission of 65.5%, Full Width at Half Maximum (FWHM) of 10.5 nm and a stopband of 170 nm (at an output wavelength of 594 nm) is achieved. Numerical model simulations are also performed to study the validity of the stress optimized suspension design for the near infrared spectral range, wherein membrane displacement and suspension deformation due to material residual stress is studied. Two bandpass filter designs based on quarter-wave and non-quarter-wave layers are presented as integral components of the TOSA. With a filter passband of 135 nm and a broad stopband of over 650 nm, high average filter transmission of 88% is achieved inside the passband, while maximum filter transmission of less than 1.6% outside the passband is achieved.

Magneto-optische Oberflächenplasmonresonanzeffekte in austauschverschobenen Dünnschichtsystemen

Die Wechselwirkungen zwischen Biomolekülen spielen eine zentrale Rolle in der biochemischen und pharmazeutischen Forschung. In der biomolekularen Interaktionsanalyse sind dabei Biosensoren auf Basis des Oberflächenplasmonresonanzeffekts (SPR-Effekt) weitverbreitet. Seit Einführung der ersten kommerziellen SPR-Biosensoren Anfang der 1990er Jahre wurden verschiedenste Messanordnungen sowie Materialsysteme mit dem Ziel einer möglichst hohen Empfindlichkeit getestet. Eine Möglichkeit zur Steigerung der Empfindlichkeit klassischer SPR-Systeme bieten sogenannte magneto-optische SPR-Biosensoren (MOSPR-Biosensoren). Grundlage der Empfindlichkeitssteigerung ist die gleichzeitige Messung des SPR-Effekts und des transversalen magneto-optischen KERR-Effekts (tMOKE). Bisherige Untersuchungen haben sich meist auf den Einfluss der Magnetisierung freier ferromagnetischer Schichten beschränkt. Im Rahmen dieser Arbeit wurden erstmals austauschverschobene Dünnschichtsysteme (EB-Systeme), eine Kombination aus Ferromagnet und Antiferromagnet, hinsichtlich ihrer Eignung für SPR- und MOSPR-basierte biosensorische Anwendungen untersucht. Aufgrund der remanenten Magnetisierung der ferromagnetischen Schicht und ihrer magnetischen Strukturierbarkeit sind EB-Systeme eine hochinteressante Plattform zur Realisierung neuer Biosensorkonzepte. Zur Reduzierung der stark dämpfendenden Wirkung magnetischer Materialien wurde das hier betrachtete IrMn/Co EB-System zwischen zwei Goldschichten eingebettet. Eine Gegenüberstellung optimierter Au/ IrMn/Co/Au-Systeme mit einem reinen Au-System, wie es typischerweise in kommerziellen SPR-basierten Biosensoren eingesetzt wird, demonstriert, dass mit den entwickelten EB-Systemen vergleichbare Empfindlichkeiten in SPR-Sensor-Anwendungen erreicht werden können. Die magneto-optische Aktivität der untersuchten Dünnschichtsysteme liegt im Bereich der Literaturwerte für Au/Co/Au-Systeme, mit denen erhöhte Empfindlichkeiten gegenüber Standard-SPR-Biosensoren realisiert wurden. Auf Grundlage magnetisch strukturierter Au/IrMn/Co/Au-Systeme wurden neue Biosensorkonzepte entwickelt und getestet. Erste Experimente belegen, dass mit diesen Schichtsystemen eine gleichzeitige Detektion der magnetisierungsabhängigen Reflektivitäten in ortsauflösenden MOSPR-Messungen möglich ist. Eine solche Messanordnung profitiert von der erhöhten Empfindlichkeit MOSPR-basierter Biosensoren, hohen Messgeschwindigkeiten und einem verbesserten Signal-Rausch-Verhältnis. Weiterhin wurde der domänenwandassistierte Transport (DOWMAT) superparamagnetischer Partikel über der Oberfläche eines exemplarischen EB-Systems, zur Sensorintegration von Misch-, Reinigungs- und Aufkonzentrationsfunktionen erfolgreich getestet. Die Ergebnisse demonstrieren, dass ein Transport von Partikelreihen mit hohen Geschwindigkeiten bei moderaten externen Magnetfeldern über den entwickelten Schichtsystemen möglich ist. Die Agglomeration der Partikel wird dabei intrinsisch vermieden. Diese Beobachtungen verdeutlichen die Vorzüge des DOWMAT-Mechanismus für biosensorische Anwendungen. Die präsentierten Untersuchungen bilden die Grundlage auf dem Weg zur Umsetzung neuer vielversprechender Biosensorkonzepte, die eine Schlüsselfunktion in der medizinischen point-of-care-Diagnostik bei der Detektion kleinster Konzentrationen krankheitsrelevanter Biomarker einnehmen können.

A Government-Binding Based Parser for Warlpiri, a Free-Word Order Language

Free-word order languages have long posed significant problems for standard parsing algorithms. This thesis presents an implemented parser, based on Government-Binding (GB) theory, for a particular free-word order language, Warlpiri, an aboriginal language of central Australia. The words in a sentence of a free-word order language may swap about relatively freely with little effect on meaning: the permutations of a sentence mean essentially the same thing. It is assumed that this similarity in meaning is directly reflected in the syntax. The parser presented here properly processes free word order because it assigns the same syntactic structure to the permutations of a single sentence. The parser also handles fixed word order, as well as other phenomena. On the view presented here, there is no such thing as a "configurational" or "non-configurational" language. Rather, there is a spectrum of languages that are more or less ordered. The operation of this parsing system is quite different in character from that of more traditional rule-based parsing systems, e.g., context-free parsers. In this system, parsing is carried out via the construction of two different structures, one encoding precedence information and one encoding hierarchical information. This bipartite representation is the key to handling both free- and fixed-order phenomena. This thesis first presents an overview of the portion of Warlpiri that can be parsed. Following this is a description of the linguistic theory on which the parser is based. The chapter after that describes the representations and algorithms of the parser. In conclusion, the parser is compared to related work. The appendix contains a substantial list of test cases ??th grammatical and ungrammatical ??at the parser has actually processed.

Oblique Angle Deposition of Germanium Film on Silicon Substrate

The effect of flux angle, substrate temperature and deposition rate on obliquely deposited germanium (Ge) films has been investigated. By carrying out deposition with the vapor flux inclined at 87° to the substrate normal at substrate temperatures of 250°C or 300°C, it may be possible to obtain isolated Ge nanowires. The Ge nanowires are crystalline as shown by Raman Spectroscopy.

Poly-Si₁₋xGex Film Growth for Ni Germanosilicided Metal Gate

Scaling down of the CMOS technology requires thinner gate dielectric to maintain high performance. However, due to the depletion of poly-Si gate, it is difficult to reduce the gate thickness further especially for sub-65 nm CMOS generation. Fully silicidation metal gate (FUSI) is one of the most promising solutions. Furthermore, FUSI metal gate reduces gate-line sheet resistance, prevents boron penetration to channels, and has good process compatibility with high-k gate dielectric. Poly-SiGe gate technology is another solution because of its enhancement of boron activation and compatibility with the conventional CMOS process. Combination of these two technologies for the formation of fully germanosilicided metal gate makes the approach very attractive. In this paper, the deposition of undoped Poly-Si₁₋xGex (0 < x < 30% ) films onto SiO₂ in a low pressure chemical vapor deposition (LPCVD) system is described. Detailed growth conditions and the characterization of the grown films are presented.

Plasma polymerization of C[subscript 4]F[subscript 8] thin film on high aspect ratio silicon molds

High aspect ratio polymeric micro-patterns are ubiquitous in many fields ranging from sensors, actuators, optics, fluidics and medical. Second generation PDMS molds are replicated against first generation silicon molds created by deep reactive ion etching. In order to ensure successful demolding, the silicon molds are coated with a thin layer of C[subscript 4]F[subscript 8] plasma polymer to reduce the adhesion force. Peel force and demolding status are used to determine if delamination is successful. Response surface method is employed to provide insights on how changes in coil power, passivating time and gas flow conditions affect plasma polymerization of C[subscript 4]F[subscript 8].

Picnik - free online photo editing

Need to edit an image but don't have any software? No problem - you can do it all online for free at this website - and no annoying adverts either.

Ethics primer : A free download

Aimed at secondary school science classrooms, but a useful for a basic introduction

VADS: free art and design images for education

VADS is the online resource for visual arts. It has provided services to the academic community for 12 years and has built up a considerable portfolio of visual art collections comprising over 100,000 images that are freely available and copyright cleared for use in learning, teaching and research in the UK.

Copyright Free Images - Physical Chemistry

These images have been created for use in Physical Chemistry slides to overcome copyright issues when recording lectures. They are free to use without restrictions, although we do not accept responsibility for any errors in the images. Please let us know if you spot any errors, though! Please view the catalogue document for a description of the images. We intend to add to this collection on an ongoing basis. Check back for updates. Current content - 43 images. Last update: August 31st 2011

Data Protection Act links to film, slides, quesions; overview notes

Published on Jun 7, 2012 by icocomms This ICO training video helps answer questions about the Data Protection Act, its impact on the working environment and how to handle and protect people's information. (Produced by Central Office of Information, Crown Copyright 2006)

RTS-3 Task: Free writing inspirations

Warm up thinking exercise

The Phenomenology of the Political: Cavell on Film

A lengthy defense of Cavell on film and politics in response to an article by Joshua Dienstag

Evaluación de la exposición a solventes orgánicos en pintores de carros de la ciudad de Bogotá

Introducción. Los pintores de vehículos automotores están expuestos a solventes puros o mezclas de estos, los cuales se han asociado con efectos neurológicos y mutacarcinogénicos. Materiales y Métodos. Se realizó un estudio descriptivo de corte transversal para caracterizar las condiciones de salud y trabajo de individuos expuestos a solventes orgánicos en talleres de lámina y pintura en Bogotá. Se comparó un grupo de expuestos a solventes orgánicos con un grupo no expuestos. Se determinaron concentraciones de benceno, tolueno y xileno (BTX) en aire, se aplicó una encuesta individual y se midieron en orina, los ácidos fenil mercaptúrico, hipúrico, orto-para metilhipúrico como metabolitos de benceno, tolueno y xileno. Los resultados de las mediciones y de la encuesta se correlacionaron para establecer el panorama de exposición. Resultados: hubo diferencias estadísticamente significativas entre la población expuesta y la población no expuesta a solventes (p = 0,00) para los tres metabolitos de BTX. Se encontraron correlaciones positivas entre el tolueno en aire y ácido hipúrico en orina de los expuestos, (Spearman de 0,82) y entre el xileno en aire y el ácido o-metilhipúrico (Spearman de 0,76). Se encontraron valores de ácido hipúrico por encima de los límites permisibles en 11 2 trabajadores y de ácido p-metilhipúrico en 8 de ellos. No hubo valores para ácido fenilmercapturico fuera de límite. Discusión: los pintores de carros se encuentran expuestos a niveles altos de solventes orgánicos en sus sitios de trabajo y no cuentan con condiciones adecuadas de higiene y seguridad industrial para realizar sus labores.