Ta2O5/SiO2 insulating acoustic mirrors for AlN-based X-band BAW resonators

This work describes the performance of AlN-based bulk acoustic wave resonators built on top of insulating acoustic reflectors and operating at around 8 GHz. The acoustic reflectors are composed of alternate layers of amorphous Ta2O5and SiO2 deposited at room temperature by pulsed-DC reactive sputtering in Ar/O2 atmospheres. SiO2 layers have a porous structure that provides a low acoustic impedance of only 9.5 MRayl. Ta2O5 films exhibit an acoustic impedance of around 39.5 MRayl that was assessed by the picoseconds acoustic technique These values allow to design acoustic mirrors with transmission coefficients in the centre of the band lower than -40 dB (99.998 % of reflectance) with only seven layers. The resonators were fabricated by depositing a very thin AlN film onto an iridium bottom electrode 180 nm-thick and by using Ir or Mo layers as top electrode. Resonators with effective electromechanical coupling factors of 5.7% and quality factors at the antiresonant frequency around 600 are achieved.

Growth of AlN oriented films on insulating substrates.

This work describes the structural and piezoelectric assessment of aluminum nitride (AlN) thin films deposited by pulsed-DC reactive sputtering on insulating substrates. We investigate the effect of different insulating seed layers on AlN properties (crystallinity, residual stress and piezoelectric activity). The seed layers investigated, silicon nitride (Si3N4), silicon dioxide (SiO2), amorphous tantalum oxide (Ta2O5), and amorphous or nano-crystalline titanium oxide (TiO2) are deposited on glass plates to a thickness lower than 100 nm. Before AlN films deposition, their surface is pre-treated with a soft ionic cleaning, either with argon or nitrogen ions. Only AlN films grown of TiO2 seed layers exhibit a significant piezoelectric activity to be used in acoustic device applications. Pure c-axis oriented films, with FWHM of rocking curve of 6º, stress below 500 MPa, and electromechanical coupling factors measured in SAW devices of 1.25% are obtained. The best AlN films are achieved on amorphous TiO2 seed layers deposited at high target power and low sputtering pressure. On the other hand, AlN films deposited on Si3N4, SiO2 and TaOx exhibit a mixed orientation, high stress and very low piezoelectric activity, which invalidate their use in acoustic devices.

The scenario of two-dimensional instabilities of the cylinder wake under EHD forcing: A linear stability analysis

We propose to study the stability properties of an air flow wake forced by a dielectric barrier discharge (DBD) actuator, which is a type of electrohydrodynamic (EHD) actuator. These actuators add momentum to the flow around a cylinder in regions close to the wall and, in our case, are symmetrically disposed near the boundary layer separation point. Since the forcing frequencies, typical of DBD, are much higher than the natural shedding frequency of the flow, we will be considering the forcing actuation as stationary. In the first part, the flow around a circular cylinder modified by EHD actuators will be experimentally studied by means of particle image velocimetry (PIV). In the second part, the EHD actuators have been numerically implemented as a boundary condition on the cylinder surface. Using this boundary condition, the computationally obtained base flow is then compared with the experimental one in order to relate the control parameters from both methodologies. After validating the obtained agreement, we study the Hopf bifurcation that appears once the flow starts the vortex shedding through experimental and computational approaches. For the base flow derived from experimentally obtained snapshots, we monitor the evolution of the velocity amplitude oscillations. As to the computationally obtained base flow, its stability is analyzed by solving a global eigenvalue problem obtained from the linearized Navier–Stokes equations. Finally, the critical parameters obtained from both approaches are compared.

Airborne ultrasonic vortex generation using flexible ferroelectrets

Cellular ferroelectrets exhibit interesting electromechanical- acoustical characteristics. Their recent appearance and remarkable properties open up new possibilities for the design and development of ultrasonic transducers. In particular, the feasibility of fabricating ultrasonic vortex generators using ferroelectret films is demonstrated in this work. To this end, a transducer prototype was built by gluing the material onto a tangential-helical surface (outer diameter: 40 mm, pitch: 3.45 mm). Experimental results agree well with the theoretical estimation of the pressure and phase of the acoustic field in the near field and far field, which corroborates the potential of ferroelectrets to customize special acoustic fields. Furthermore, the proposed fabrication procedure is inexpensive and represents a new alternative for exploring and analyzing the special characteristics of acoustical helical wavefronts

Bending continuous structures with SMAs: a novel robotic fish design

In this paper, we describe our research on bio-inspired locomotion systems using deformable structures and smart materials, concretely shape memory alloys (SMAs). These types of materials allow us to explore the possibility of building motor-less and gear-less robots. A swimming underwater fish-like robot has been developed whose movements are generated using SMAs. These actuators are suitable for bending the continuous backbone of the fish, which in turn causes a change in the curvature of the body. This type of structural arrangement is inspired by fish red muscles, which are mainly recruited during steady swimming for the bending of a flexible but nearly incompressible structure such as the fishbone. This paper reviews the design process of these bio-inspired structures, from the motivations and physiological inspiration to the mechatronics design, control and simulations, leading to actual experimental trials and results. The focus of this work is to present the mechanisms by which standard swimming patterns can be reproduced with the proposed design. Moreover, the performance of the SMA-based actuators’ control in terms of actuation speed and position accuracy is also addressed.

SMA-Based Muscle-Like Actuation in Biologically Inspired Robots: A State of the Art Review

New actuation technology in functional or "smart" materials has opened new horizons in robotics actuation systems. Materials such as piezo-electric fiber composites, electro-active polymers and shape memory alloys (SMA) are being investigated as promising alternatives to standard servomotor technology [52]. This paper focuses on the use of SMAs for building muscle-like actuators. SMAs are extremely cheap, easily available commercially and have the advantage of working at low voltages. The use of SMA provides a very interesting alternative to the mechanisms used by conventional actuators. SMAs allow to drastically reduce the size, weight and complexity of robotic systems. In fact, their large force-weight ratio, large life cycles, negligible volume, sensing capability and noise-free operation make possible the use of this technology for building a new class of actuation devices. Nonetheless, high power consumption and low bandwidth limit this technology for certain kind of applications. This presents a challenge that must be addressed from both materials and control perspectives in order to overcome these drawbacks. Here, the latter is tackled. It has been demonstrated that suitable control strategies and proper mechanical arrangements can dramatically improve on SMA performance, mostly in terms of actuation speed and limit cycles.

Autonomous vehicle control systems for safe crossroads

This article presents a cooperative manoeuvre among three dual mode cars – vehicles equipped with sensors and actuators, and that can be driven either manually or autonomously. One vehicle is driven autonomously and the other two are driven manually. The main objective is to test two decision algorithms for priority conflict resolution at intersections so that a vehicle autonomously driven can take their own decision about crossing an intersection mingling with manually driven cars without the need for infrastructure modifications. To do this, the system needs the position, speeds, and turning intentions of the rest of the cars involved in the manoeuvre. This information is acquired via communications, but other methods are also viable, such as artificial vision. The idea of the experiments was to adjust the speed of the manually driven vehicles to force a situation where all three vehicles arrive at an intersection at the same time.

On the biomimetic design of agile-robot legs

The development of functional legged robots has encountered its limits in human-made actuation technology. This paper describes research on the biomimetic design of legs for agile quadrupeds. A biomimetic leg concept that extracts key principles from horse legs which are responsible for the agile and powerful locomotion of these animals is presented. The proposed biomimetic leg model defines the effective leg length, leg kinematics, limb mass distribution, actuator power, and elastic energy recovery as determinants of agile locomotion, and values for these five key elements are given. The transfer of the extracted principles to technological instantiations is analyzed in detail, considering the availability of current materials, structures and actuators. A real leg prototype has been developed following the biomimetic leg concept proposed. The actuation system is based on the hybrid use of series elasticity and magneto-rheological dampers which provides variable compliance for natural motion. From the experimental evaluation of this prototype, conclusions on the current technological barriers to achieve real functional legged robots to walk dynamically in agile locomotion are presented.

Applications for wireless sensor networks : tracking with binary proximity sensors

El interés cada vez mayor por las redes de sensores inalámbricos pueden ser entendido simplemente pensando en lo que esencialmente son: un gran número de pequeños nodos sensores autoalimentados que recogen información o detectan eventos especiales y se comunican de manera inalámbrica, con el objetivo final de entregar sus datos procesados a una estación base. Los nodos sensores están densamente desplegados dentro del área de interés, se pueden desplegar al azar y tienen capacidad de cooperación. Por lo general, estos dispositivos son pequeños y de bajo costo, de modo que pueden ser producidos y desplegados en gran numero aunque sus recursos en términos de energía, memoria, velocidad de cálculo y ancho de banda están enormemente limitados. Detección, tratamiento y comunicación son tres elementos clave cuya combinación en un pequeño dispositivo permite lograr un gran número de aplicaciones. Las redes de sensores proporcionan oportunidades sin fin, pero al mismo tiempo plantean retos formidables, tales como lograr el máximo rendimiento de una energía que es escasa y por lo general un recurso no renovable. Sin embargo, los recientes avances en la integración a gran escala, integrado de hardware de computación, comunicaciones, y en general, la convergencia de la informática y las comunicaciones, están haciendo de esta tecnología emergente una realidad. Del mismo modo, los avances en la nanotecnología están empezando a hacer que todo gire entorno a las redes de pequeños sensores y actuadores distribuidos. Hay diferentes tipos de sensores tales como sensores de presión, acelerómetros, cámaras, sensores térmicos o un simple micrófono. Supervisan las condiciones presentes en diferentes lugares tales como la temperatura, humedad, el movimiento, la luminosidad, presión, composición del suelo, los niveles de ruido, la presencia o ausencia de ciertos tipos de objetos, los niveles de tensión mecánica sobre objetos adheridos y las características momentáneas tales como la velocidad , la dirección y el tamaño de un objeto, etc. Se comprobara el estado de las Redes Inalámbricas de Sensores y se revisaran los protocolos más famosos. Así mismo, se examinara la identificación por radiofrecuencia (RFID) ya que se está convirtiendo en algo actual y su presencia importante. La RFID tiene un papel crucial que desempeñar en el futuro en el mundo de los negocios y los individuos por igual. El impacto mundial que ha tenido la identificación sin cables está ejerciendo fuertes presiones en la tecnología RFID, los servicios de investigación y desarrollo, desarrollo de normas, el cumplimiento de la seguridad y la privacidad y muchos más. Su potencial económico se ha demostrado en algunos países mientras que otros están simplemente en etapas de planificación o en etapas piloto, pero aun tiene que afianzarse o desarrollarse a través de la modernización de los modelos de negocio y aplicaciones para poder tener un mayor impacto en la sociedad. Las posibles aplicaciones de redes de sensores son de interés para la mayoría de campos. La monitorización ambiental, la guerra, la educación infantil, la vigilancia, la micro-cirugía y la agricultura son solo unos pocos ejemplos de los muchísimos campos en los que tienen cabida las redes mencionadas anteriormente. Estados Unidos de América es probablemente el país que más ha investigado en esta área por lo que veremos muchas soluciones propuestas provenientes de ese país. Universidades como Berkeley, UCLA (Universidad de California, Los Ángeles) Harvard y empresas como Intel lideran dichas investigaciones. Pero no solo EE.UU. usa e investiga las redes de sensores inalámbricos. La Universidad de Southampton, por ejemplo, está desarrollando una tecnología para monitorear el comportamiento de los glaciares mediante redes de sensores que contribuyen a la investigación fundamental en glaciología y de las redes de sensores inalámbricos. Así mismo, Coalesenses GmbH (Alemania) y Zurich ETH están trabajando en diversas aplicaciones para redes de sensores inalámbricos en numerosas áreas. Una solución española será la elegida para ser examinada más a fondo por ser innovadora, adaptable y polivalente. Este estudio del sensor se ha centrado principalmente en aplicaciones de tráfico, pero no se puede olvidar la lista de más de 50 aplicaciones diferentes que ha sido publicada por la firma creadora de este sensor específico. En la actualidad hay muchas tecnologías de vigilancia de vehículos, incluidos los sensores de bucle, cámaras de video, sensores de imagen, sensores infrarrojos, radares de microondas, GPS, etc. El rendimiento es aceptable, pero no suficiente, debido a su limitada cobertura y caros costos de implementación y mantenimiento, especialmente este ultimo. Tienen defectos tales como: línea de visión, baja exactitud, dependen mucho del ambiente y del clima, no se puede realizar trabajos de mantenimiento sin interrumpir las mediciones, la noche puede condicionar muchos de ellos, tienen altos costos de instalación y mantenimiento, etc. Por consiguiente, en las aplicaciones reales de circulación, los datos recibidos son insuficientes o malos en términos de tiempo real debido al escaso número de detectores y su costo. Con el aumento de vehículos en las redes viales urbanas las tecnologías de detección de vehículos se enfrentan a nuevas exigencias. Las redes de sensores inalámbricos son actualmente una de las tecnologías más avanzadas y una revolución en la detección de información remota y en las aplicaciones de recogida. Las perspectivas de aplicación en el sistema inteligente de transporte son muy amplias. Con este fin se ha desarrollado un programa de localización de objetivos y recuento utilizando una red de sensores binarios. Esto permite que el sensor necesite mucha menos energía durante la transmisión de información y que los dispositivos sean más independientes con el fin de tener un mejor control de tráfico. La aplicación se centra en la eficacia de la colaboración de los sensores en el seguimiento más que en los protocolos de comunicación utilizados por los nodos sensores. Las operaciones de salida y retorno en las vacaciones son un buen ejemplo de por qué es necesario llevar la cuenta de los coches en las carreteras. Para ello se ha desarrollado una simulación en Matlab con el objetivo localizar objetivos y contarlos con una red de sensores binarios. Dicho programa se podría implementar en el sensor que Libelium, la empresa creadora del sensor que se examinara concienzudamente, ha desarrollado. Esto permitiría que el aparato necesitase mucha menos energía durante la transmisión de información y los dispositivos sean más independientes. Los prometedores resultados obtenidos indican que los sensores de proximidad binarios pueden formar la base de una arquitectura robusta para la vigilancia de áreas amplias y para el seguimiento de objetivos. Cuando el movimiento de dichos objetivos es suficientemente suave, no tiene cambios bruscos de trayectoria, el algoritmo ClusterTrack proporciona un rendimiento excelente en términos de identificación y seguimiento de trayectorias los objetos designados como blancos. Este algoritmo podría, por supuesto, ser utilizado para numerosas aplicaciones y se podría seguir esta línea de trabajo para futuras investigaciones. No es sorprendente que las redes de sensores de binarios de proximidad hayan atraído mucha atención últimamente ya que, a pesar de la información mínima de un sensor de proximidad binario proporciona, las redes de este tipo pueden realizar un seguimiento de todo tipo de objetivos con la precisión suficiente. Abstract The increasing interest in wireless sensor networks can be promptly understood simply by thinking about what they essentially are: a large number of small sensing self-powered nodes which gather information or detect special events and communicate in a wireless fashion, with the end goal of handing their processed data to a base station. The sensor nodes are densely deployed inside the phenomenon, they deploy random and have cooperative capabilities. Usually these devices are small and inexpensive, so that they can be produced and deployed in large numbers, and so their resources in terms of energy, memory, computational speed and bandwidth are severely constrained. Sensing, processing and communication are three key elements whose combination in one tiny device gives rise to a vast number of applications. Sensor networks provide endless opportunities, but at the same time pose formidable challenges, such as the fact that energy is a scarce and usually non-renewable resource. However, recent advances in low power Very Large Scale Integration, embedded computing, communication hardware, and in general, the convergence of computing and communications, are making this emerging technology a reality. Likewise, advances in nanotechnology and Micro Electro-Mechanical Systems are pushing toward networks of tiny distributed sensors and actuators. There are different sensors such as pressure, accelerometer, camera, thermal, and microphone. They monitor conditions at different locations, such as temperature, humidity, vehicular movement, lightning condition, pressure, soil makeup, noise levels, the presence or absence of certain kinds of objects, mechanical stress levels on attached objects, the current characteristics such as speed, direction and size of an object, etc. The state of Wireless Sensor Networks will be checked and the most famous protocols reviewed. As Radio Frequency Identification (RFID) is becoming extremely present and important nowadays, it will be examined as well. RFID has a crucial role to play in business and for individuals alike going forward. The impact of ‘wireless’ identification is exerting strong pressures in RFID technology and services research and development, standards development, security compliance and privacy, and many more. The economic value is proven in some countries while others are just on the verge of planning or in pilot stages, but the wider spread of usage has yet to take hold or unfold through the modernisation of business models and applications. Possible applications of sensor networks are of interest to the most diverse fields. Environmental monitoring, warfare, child education, surveillance, micro-surgery, and agriculture are only a few examples. Some real hardware applications in the United States of America will be checked as it is probably the country that has investigated most in this area. Universities like Berkeley, UCLA (University of California, Los Angeles) Harvard and enterprises such as Intel are leading those investigations. But not just USA has been using and investigating wireless sensor networks. University of Southampton e.g. is to develop technology to monitor glacier behaviour using sensor networks contributing to fundamental research in glaciology and wireless sensor networks. Coalesenses GmbH (Germany) and ETH Zurich are working in applying wireless sensor networks in many different areas too. A Spanish solution will be the one examined more thoroughly for being innovative, adaptable and multipurpose. This study of the sensor has been focused mainly to traffic applications but it cannot be forgotten the more than 50 different application compilation that has been published by this specific sensor’s firm. Currently there are many vehicle surveillance technologies including loop sensors, video cameras, image sensors, infrared sensors, microwave radar, GPS, etc. The performance is acceptable but not sufficient because of their limited coverage and expensive costs of implementation and maintenance, specially the last one. They have defects such as: line-ofsight, low exactness, depending on environment and weather, cannot perform no-stop work whether daytime or night, high costs for installation and maintenance, etc. Consequently, in actual traffic applications the received data is insufficient or bad in terms of real-time owed to detector quantity and cost. With the increase of vehicle in urban road networks, the vehicle detection technologies are confronted with new requirements. Wireless sensor network is the state of the art technology and a revolution in remote information sensing and collection applications. It has broad prospect of application in intelligent transportation system. An application for target tracking and counting using a network of binary sensors has been developed. This would allow the appliance to spend much less energy when transmitting information and to make more independent devices in order to have a better traffic control. The application is focused on the efficacy of collaborative tracking rather than on the communication protocols used by the sensor nodes. Holiday crowds are a good case in which it is necessary to keep count of the cars on the roads. To this end a Matlab simulation has been produced for target tracking and counting using a network of binary sensors that e.g. could be implemented in Libelium’s solution. Libelium is the enterprise that has developed the sensor that will be deeply examined. This would allow the appliance to spend much less energy when transmitting information and to make more independent devices. The promising results obtained indicate that binary proximity sensors can form the basis for a robust architecture for wide area surveillance and tracking. When the target paths are smooth enough ClusterTrack particle filter algorithm gives excellent performance in terms of identifying and tracking different target trajectories. This algorithm could, of course, be used for different applications and that could be done in future researches. It is not surprising that binary proximity sensor networks have attracted a lot of attention lately. Despite the minimal information a binary proximity sensor provides, networks of these sensing modalities can track all kinds of different targets classes accurate enough.

BaTboT: a biologically inspired flapping and morphing bat robot actuated by SMA-based artificial muscles

Bats are animals that posses high maneuvering capabilities. Their wings contain dozens of articulations that allow the animal to perform aggressive maneuvers by means of controlling the wing shape during flight (morphing-wings). There is no other flying creature in nature with this level of wing dexterity and there is biological evidence that the inertial forces produced by the wings have a key role in the attitude movements of the animal. This can inspire the design of highly articulated morphing-wing micro air vehicles (not necessarily bat-like) with a significant wing-to-body mass ratio. This thesis presents the development of a novel bat-like micro air vehicle (BaTboT) inspired by the morphing-wing mechanism of bats. BaTboT’s morphology is alike in proportion compared to its biological counterpart Cynopterus brachyotis, which provides the biological foundations for developing accurate mathematical models and methods that allow for mimicking bat flight. In nature bats can achieve an amazing level of maneuverability by combining flapping and morphing wingstrokes. Attempting to reproduce the biological wing actuation system that provides that kind of motion using an artificial counterpart requires the analysis of alternative actuation technologies more likely muscle fiber arrays instead of standard servomotor actuators. Thus, NiTinol Shape Memory Alloys (SMAs) acting as artificial biceps and triceps muscles are used for mimicking the morphing wing mechanism of the bat flight apparatus. This antagonistic configuration of SMA-muscles response to an electrical heating power signal to operate. This heating power is regulated by a proper controller that allows for accurate and fast SMA actuation. Morphing-wings will enable to change wings geometry with the unique purpose of enhancing aerodynamics performance. During the downstroke phase of the wingbeat motion both wings are fully extended aimed at increasing the area surface to properly generate lift forces. Contrary during the upstroke phase of the wingbeat motion both wings are retracted to minimize the area and thus reducing drag forces. Morphing-wings do not only improve on aerodynamics but also on the inertial forces that are key to maneuver. Thus, a modeling framework is introduced for analyzing how BaTboT should maneuver by means of changing wing morphology. This allows the definition of requirements for achieving forward and turning flight according to the kinematics of the wing modulation. Motivated by the biological fact about the influence of wing inertia on the production of body accelerations, an attitude controller is proposed. The attitude control law incorporates wing inertia information to produce desired roll (φ) and pitch (θ) acceleration commands. This novel flight control approach is aimed at incrementing net body forces (Fnet) that generate propulsion. Mimicking the way how bats take advantage of inertial and aerodynamical forces produced by the wings in order to both increase lift and maneuver is a promising way to design more efficient flapping/morphing wings MAVs. The novel wing modulation strategy and attitude control methodology proposed in this thesis provide a totally new way of controlling flying robots, that eliminates the need of appendices such as flaps and rudders, and would allow performing more efficient maneuvers, especially useful in confined spaces. As a whole, the BaTboT project consists of five major stages of development: - Study and analysis of biological bat flight data reported in specialized literature aimed at defining design and control criteria. - Formulation of mathematical models for: i) wing kinematics, ii) dynamics, iii) aerodynamics, and iv) SMA muscle-like actuation. It is aimed at modeling the effects of modulating wing inertia into the production of net body forces for maneuvering. - Bio-inspired design and fabrication of: i) skeletal structure of wings and body, ii) SMA muscle-like mechanisms, iii) the wing-membrane, and iv) electronics onboard. It is aimed at developing the bat-like platform (BaTboT) that allows for testing the methods proposed. - The flight controller: i) control of SMA-muscles (morphing-wing modulation) and ii) flight control (attitude regulation). It is aimed at formulating the proper control methods that allow for the proper modulation of BaTboT’s wings. - Experiments: it is aimed at quantifying the effects of properly wing modulation into aerodynamics and inertial production for maneuvering. It is also aimed at demonstrating and validating the hypothesis of improving flight efficiency thanks to the novel control methods presented in this thesis. This thesis introduces the challenges and methods to address these stages. Windtunnel experiments will be oriented to discuss and demonstrate how the wings can considerably affect the dynamics/aerodynamics of flight and how to take advantage of wing inertia modulation that the morphing-wings enable to properly change wings’ geometry during flapping. Resumen: Los murciélagos son mamíferos con una alta capacidad de maniobra. Sus alas están conformadas por docenas de articulaciones que permiten al animal maniobrar gracias al cambio geométrico de las alas durante el vuelo. Esta característica es conocida como (alas mórficas). En la naturaleza, no existe ningún especimen volador con semejante grado de dexteridad de vuelo, y se ha demostrado, que las fuerzas inerciales producidas por el batir de las alas juega un papel fundamental en los movimientos que orientan al animal en vuelo. Estas características pueden inspirar el diseño de un micro vehículo aéreo compuesto por alas mórficas con redundantes grados de libertad, y cuya proporción entre la masa de sus alas y el cuerpo del robot sea significativa. Esta tesis doctoral presenta el desarrollo de un novedoso robot aéreo inspirado en el mecanismo de ala mórfica de los murciélagos. El robot, llamado BaTboT, ha sido diseñado con parámetros morfológicos muy similares a los descritos por su símil biológico Cynopterus brachyotis. El estudio biológico de este especimen ha permitido la definición de criterios de diseño y modelos matemáticos que representan el comportamiento del robot, con el objetivo de imitar lo mejor posible la biomecánica de vuelo de los murciélagos. La biomecánica de vuelo está definida por dos tipos de movimiento de las alas: aleteo y cambio de forma. Intentar imitar como los murciélagos cambian la forma de sus alas con un prototipo artificial, requiere el análisis de métodos alternativos de actuación que se asemejen a la biomecánica de los músculos que actúan las alas, y evitar el uso de sistemas convencionales de actuación como servomotores ó motores DC. En este sentido, las aleaciones con memoria de forma, ó por sus siglas en inglés (SMA), las cuales son fibras de NiTinol que se contraen y expanden ante estímulos térmicos, han sido usados en este proyecto como músculos artificiales que actúan como bíceps y tríceps de las alas, proporcionando la funcionalidad de ala mórfica previamente descrita. De esta manera, los músculos de SMA son mecánicamente posicionados en una configuración antagonista que permite la rotación de las articulaciones del robot. Los actuadores son accionados mediante una señal de potencia la cual es regulada por un sistema de control encargado que los músculos de SMA respondan con la precisión y velocidad deseada. Este sistema de control mórfico de las alas permitirá al robot cambiar la forma de las mismas con el único propósito de mejorar el desempeño aerodinámico. Durante la fase de bajada del aleteo, las alas deben estar extendidas para incrementar la producción de fuerzas de sustentación. Al contrario, durante el ciclo de subida del aleteo, las alas deben contraerse para minimizar el área y reducir las fuerzas de fricción aerodinámica. El control de alas mórficas no solo mejora el desempeño aerodinámico, también impacta la generación de fuerzas inerciales las cuales son esenciales para maniobrar durante el vuelo. Con el objetivo de analizar como el cambio de geometría de las alas influye en la definición de maniobras y su efecto en la producción de fuerzas netas, simulaciones y experimentos han sido llevados a cabo para medir cómo distintos patrones de modulación de las alas influyen en la producción de aceleraciones lineales y angulares. Gracias a estas mediciones, se propone un control de vuelo, ó control de actitud, el cual incorpora información inercial de las alas para la definición de referencias de aceleración angular. El objetivo de esta novedosa estrategia de control radica en el incremento de fuerzas netas para la adecuada generación de movimiento (Fnet). Imitar como los murciélagos ajustan sus alas con el propósito de incrementar las fuerzas de sustentación y mejorar la maniobra en vuelo es definitivamente un tópico de mucho interés para el diseño de robots aéros mas eficientes. La propuesta de control de vuelo definida en este trabajo de investigación podría dar paso a una nueva forma de control de vuelo de robots aéreos que no necesitan del uso de partes mecánicas tales como alerones, etc. Este control también permitiría el desarrollo de vehículos con mayor capacidad de maniobra. El desarrollo de esta investigación se centra en cinco etapas: - Estudiar y analizar el vuelo de los murciélagos con el propósito de definir criterios de diseño y control. - Formular modelos matemáticos que describan la: i) cinemática de las alas, ii) dinámica, iii) aerodinámica, y iv) actuación usando SMA. Estos modelos permiten estimar la influencia de modular las alas en la producción de fuerzas netas. - Diseño y fabricación de BaTboT: i) estructura de las alas y el cuerpo, ii) mecanismo de actuación mórfico basado en SMA, iii) membrana de las alas, y iv) electrónica abordo. - Contro de vuelo compuesto por: i) control de la SMA (modulación de las alas) y ii) regulación de maniobra (actitud). - Experimentos: están enfocados en poder cuantificar cuales son los efectos que ejercen distintos perfiles de modulación del ala en el comportamiento aerodinámico e inercial. El objetivo es demostrar y validar la hipótesis planteada al inicio de esta investigación: mejorar eficiencia de vuelo gracias al novedoso control de orientación (actitud) propuesto en este trabajo. A lo largo del desarrollo de cada una de las cinco etapas, se irán presentando los retos, problemáticas y soluciones a abordar. Los experimentos son realizados utilizando un túnel de viento con la instrumentación necesaria para llevar a cabo las mediciones de desempeño respectivas. En los resultados se discutirá y demostrará que la inercia producida por las alas juega un papel considerable en el comportamiento dinámico y aerodinámico del sistema y como poder tomar ventaja de dicha característica para regular patrones de modulación de las alas que conduzcan a mejorar la eficiencia del robot en futuros vuelos.

Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators

We investigate the sputter growth of very thin aluminum nitride (AlN) films on iridium electrodes for electroacoustic devices operating in the super high frequency range. Superior crystal quality and low stress films with thicknesses as low as 160 nm are achieved after a radio frequency plasma treatment of the iridium electrode followed by a two-step alternating current reactive magnetron sputtering of an aluminum target, which promotes better conditions for the nucleation of well textured AlN films in the very first stages of growth. Solidly mounted resonators tuned around 8 GHz with effective electromechanical coupling factors of 5.8% and quality factors Q up to 900 are achieved.

Influence of Crystal Quality on the Excitation and Propagation of Surface and Bulk Acoustic Waves in Polycrystalline AlN Films

We investigate the excitation and propagation of acoustic waves in polycrystalline aluminum nitride films along the directions parallel and normal to the c-axis. Longitudinal and transverse propagations are assessed through the frequency response of surface acoustic wave and bulk acoustic wave devices fabricated on films of different crystal qualities. The crystalline properties significantly affect the electromechanical coupling factors and acoustic properties of the piezoelectric layers. The presence of misoriented grains produces an overall decrease of the piezoelectric activity, degrading more severely the excitation and propagation of waves traveling transversally to the c-axis. It is suggested that the presence of such crystalline defects in c-axis-oriented films reduces the mechanical coherence between grains and hinders the transverse deformation of the film when the electric field is applied parallel to the surface.

Investigation of AlInN barrier ISFET structures with GaN capping for pH detection

The pH response of GaN/AlInN/AlN/GaN ion-sensitive field effect transistor (ISFET) on Si substrates has been characterized. We analyzed the variation of the surface potential (ΔVsp/ΔpH) and current (ΔIds/ΔpH) with solution pH in devices with the same indium content (17%, in-plane lattice-matched to GaN) and different AlInN thickness (6 nm and 10 nm), and compared with the literature. The shrinkage of the barrier, that has the effect to increase the transconductance of the device, makes the 2-dimensional electron density (2DEG) at the interface very sensitive to changes in the surface. Although the surface potential sensitivity to pH is similar in the two devices, the current change with pH (ΔIds/ΔpH), when biasing the ISFET by a Ag/AgCl reference electrode, is almost 50% higher in the device with 6 nm AlInN barrier, compared to the device with 10 nm barrier. When measuring the current response (ΔIds/ΔpH) without reference electrode, the device with thinner AlInN layer has a larger response than the thicker one, of a factor of 140%, and that current response without reference electrode is only 22% lower than its maximum response obtained using reference electrode.

High precision pressure sensors based on SAW devices in the GHz range

In this paper, an AlN/free-standing nanocrystalline diamond (NCD) system is proposed in order to process high frequency surface acoustic wave (SAW) resonators for sensing applications. The main problem of synthetic diamond is its high surface roughness that worsens the sputtered AlN quality and hence the device response. In order to study the feasibility of this structure, AlN films from 150 nm up to 1200 nm thick have been deposited on free-standing NCD. We have then analysed the influence of the AlN layer thickness on its crystal quality and device response. Optimized thin films of 300 nm have been used to fabricate of one-port SAW resonators operating in the 10–14 GHz frequency range. A SAW based sensor pressure with a sensibility of 0.33 MHz/bar has been fabricated.

Efficient design and optimization of bio-photonic sensing cells (BICELLs) for label free biosensing

In previous works we demonstrated the benefits of using micro–nano patterning materials to be used as bio-photonic sensing cells (BICELLs), referred as micro–nano photonic structures having immobilized bioreceptors on its surface with the capability of recognizing the molecular binding by optical transduction. Gestrinone/anti-gestrinone and BSA/anti-BSA pairs were proven under different optical configurations to experimentally validate the biosensing capability of these bio-sensitive photonic architectures. Moreover, Three-Dimensional Finite Difference Time Domain (FDTD) models were employed for simulating the optical response of these structures. For this article, we have developed an effective analytical simulation methodology capable of simulating complex biophotonic sensing architectures. This simulation method has been tested and compared with previous experimental results and FDTD models. Moreover, this effective simulation methodology can be used for efficiently design and optimize any structure as BICELL. In particular for this article, six different BICELL's types have been optimized. To carry out this optimization we have considered three figures of merit: optical sensitivity, Q-factor and signal amplitude. The final objective of this paper is not only validating a suitable and efficient optical simulation methodology but also demonstrating the capability of this method for analyzing the performance of a given number of BICELLs for label-free biosensing.