Parameter-estimation of a spherical top inductively-coupled plasma source with global-model

Using spatially averaged global model, we succeed in obtaining some plasma parameters for a low pressure inductively coupled plasma source of our laboratory. As far as the global balance is concerned, the models can give reasonable results of the parameters, such as the global electron temperature and the ion impacting energy, etc. It is found that the ion flow is hardly affected by the neutral gas pressure. Finally, the magnetic effects are calculated by means of the method. The magnetic field can play an important role to increase plasma density and ion current.

Behavior of ar plasma formed in a high-density plasma source - an ecr reactor

In order to develop the ultra-large scale integration(ULSI), low pressure and high density plasma apparatus are required for etching and deposit of thin films. To understand critical parameters such as the pressure, temperature, electrostatic potential and energy distribution of ions impacting on the wafer, it is necessary to understand how these parameters are influenced by the power input and neutral gas pressure. In the present work, a 2-D hybrid electron fluid-particle ion model has been developed to simulate one of the high density plasma sources-an Electron Cyclotron Resonance (ECR) plasma system with various pressures and power inputs in a non-uniform magnetic field. By means of numerical simulation, the energy distributions of argon ion impacting on the wafer are obtained and the plasma density, electron temperature and plasma electrostatic potential are plotted in 3-D. It is concluded that the plasma density depends mainly on both the power input and neutral gas pressure. However, the plasma potential and electron temperature can hardly be affected by the power input, they seem to be primarily dependent on the neutral gas pressure. The comparison shows that the simulation results are qualitatively in good agreement with the experiment measurements.

Magnetic field configurations of radio jets in the double source of radio galaxy

As an improvement of resolution of observations, more and more radio galaxies with radiojets have been identified and many fine structures in the radio jets yielded. In the presentpaper, the two-dimensional magnetohydrodynamical theory is applied to the analysis of themagnetic field configurations in the radio jefs. Two-dimensional results not only are con-sistent theoretically, but also explain the fine structures of observations. One of the theo-retical models is discussed in detail, and is in good agreement as compared with the observedradio jets of NGC6251. The results of the present paper also show that the magneticfields in the radio jets are mainly longitudinal ones and associate with the double sources ofQSOs if the magnetic field of the central object is stronger; the fields in the radio jets aremainly transverse ones and associate with the double sources of radio galaxies if the fieldof the central object is weaker. The magnetic field has great influence on the morphol-ogy and dynamic process.

The magnetic jet theory of double source in radio galaxy

The two-dimensional accelerating theory about solar wind is applied to the study of theaccelerating process of jet beam in the radio galaxy. The flowing features are given with theanalytic method, and the basic flow is along the direction of the jet beam. The mechanism ofacceleration from subsonic to supersonic flow is discussed. At the same time, some fine struc-tures about the double sources in the radio galaxy are explained.

Soundings: the Newsletter of the Monterey Bay Chapter of the American Cetacean Society. 1980

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