Image Denoising Using Sure-Based Adaptive Thresholding In Directionlet Domain

The standard separable two dimensional wavelet transform has achieved a great success in image denoising applications due to its sparse representation of images. However it fails to capture efficiently the anisotropic geometric structures like edges and contours in images as they intersect too many wavelet basis functions and lead to a non-sparse representation. In this paper a novel de-noising scheme based on multi directional and anisotropic wavelet transform called directionlet is presented. The image denoising in wavelet domain has been extended to the directionlet domain to make the image features to concentrate on fewer coefficients so that more effective thresholding is possible. The image is first segmented and the dominant direction of each segment is identified to make a directional map. Then according to the directional map, the directionlet transform is taken along the dominant direction of the selected segment. The decomposed images with directional energy are used for scale dependent subband adaptive optimal threshold computation based on SURE risk. This threshold is then applied to the sub-bands except the LLL subband. The threshold corrected sub-bands with the unprocessed first sub-band (LLL) are given as input to the inverse directionlet algorithm for getting the de-noised image. Experimental results show that the proposed method outperforms the standard wavelet-based denoising methods in terms of numeric and visual quality

Development of Directionally Adaptive Techniques for Single Image Super-Resolution

Super Resolution problem is an inverse problem and refers to the process of producing a High resolution (HR) image, making use of one or more Low Resolution (LR) observations. It includes up sampling the image, thereby, increasing the maximum spatial frequency and removing degradations that arise during the image capture namely aliasing and blurring. The work presented in this thesis is based on learning based single image super-resolution. In learning based super-resolution algorithms, a training set or database of available HR images are used to construct the HR image of an image captured using a LR camera. In the training set, images are stored as patches or coefficients of feature representations like wavelet transform, DCT, etc. Single frame image super-resolution can be used in applications where database of HR images are available. The advantage of this method is that by skilfully creating a database of suitable training images, one can improve the quality of the super-resolved image. A new super resolution method based on wavelet transform is developed and it is better than conventional wavelet transform based methods and standard interpolation methods. Super-resolution techniques based on skewed anisotropic transform called directionlet transform are developed to convert a low resolution image which is of small size into a high resolution image of large size. Super-resolution algorithm not only increases the size, but also reduces the degradations occurred during the process of capturing image. This method outperforms the standard interpolation methods and the wavelet methods, both visually and in terms of SNR values. Artifacts like aliasing and ringing effects are also eliminated in this method. The super-resolution methods are implemented using, both critically sampled and over sampled directionlets. The conventional directionlet transform is computationally complex. Hence lifting scheme is used for implementation of directionlets. The new single image super-resolution method based on lifting scheme reduces computational complexity and thereby reduces computation time. The quality of the super resolved image depends on the type of wavelet basis used. A study is conducted to find the effect of different wavelets on the single image super-resolution method. Finally this new method implemented on grey images is extended to colour images and noisy images

Electrochemical studies of tamsulosin hydrochloride using multiwalled carbon nanotube-modified glassy carbon sensor

A differential pulse voltammetric sensor for the determination of tamsulosin hydrochloride (TAM) using multiwalled carbon nanotubes (MWNTs)–Nafion-modified glassy carbon electrode (GCE) has been developed. MWNTs were dispersed in water with the help of Nafion and were used to modify the surface of GCE via solvent evaporation. At MWNT-modified electrode, TAM gave a well-defined oxidation peak at a potential of 1084 mV in 0.1 M acetate buffer solution of pH 5. Compared to the bare electrode, the peak current of TAM showed a marked increase and the peak potential showed a negative deviation. The determination conditions, such as the amount of MWNT–Nafion suspension, pH of the supporting electrolyte and scan rate, were optimised. Under optimum conditions, the oxidation peak current was proportional to the concentration of TAM in the range 1 × 1023 M–3 × 1027 M with a detection limit of 9.8 × 1028 M. The developed sensor showed good stability, selectivity and was successfully used for the determination of TAM in pharmaceutical formulations and urine samples

Development of 2-D MRT based Image Compression Techniques

The thesis explores the area of still image compression. The image compression techniques can be broadly classified into lossless and lossy compression. The most common lossy compression techniques are based on Transform coding, Vector Quantization and Fractals. Transform coding is the simplest of the above and generally employs reversible transforms like, DCT, DWT, etc. Mapped Real Transform (MRT) is an evolving integer transform, based on real additions alone. The present research work aims at developing new image compression techniques based on MRT. Most of the transform coding techniques employ fixed block size image segmentation, usually 8×8. Hence, a fixed block size transform coding is implemented using MRT and the merits and demerits are analyzed for both 8×8 and 4×4 blocks. The N2 unique MRT coefficients, for each block, are computed using templates. Considering the merits and demerits of fixed block size transform coding techniques, a hybrid form of these techniques is implemented to improve the performance of compression. The performance of the hybrid coder is found to be better compared to the fixed block size coders. Thus, if the block size is made adaptive, the performance can be further improved. In adaptive block size coding, the block size may vary from the size of the image to 2×2. Hence, the computation of MRT using templates is impractical due to memory requirements. So, an adaptive transform coder based on Unique MRT (UMRT), a compact form of MRT, is implemented to get better performance in terms of PSNR and HVS The suitability of MRT in vector quantization of images is then experimented. The UMRT based Classified Vector Quantization (CVQ) is implemented subsequently. The edges in the images are identified and classified by employing a UMRT based criteria. Based on the above experiments, a new technique named “MRT based Adaptive Transform Coder with Classified Vector Quantization (MATC-CVQ)”is developed. Its performance is evaluated and compared against existing techniques. A comparison with standard JPEG & the well-known Shapiro’s Embedded Zero-tree Wavelet (EZW) is done and found that the proposed technique gives better performance for majority of images

Spatially Adaptive Image Denoising Techniques Using Directionlets

The aim of the thesis was to design and develop spatially adaptive denoising techniques with edge and feature preservation, for images corrupted with additive white Gaussian noise and SAR images affected with speckle noise. Image denoising is a well researched topic. It has found multifaceted applications in our day to day life. Image denoising based on multi resolution analysis using wavelet transform has received considerable attention in recent years. The directionlet based denoising schemes presented in this thesis are effective in preserving the image specific features like edges and contours in denoising. Scope of this research is still open in areas like further optimization in terms of speed and extension of the techniques to other related areas like colour and video image denoising. Such studies would further augment the practical use of these techniques.

Image compression predicated on recurrent iterated function systems

Recurrent iterated function systems (RIFSs) are improvements of iterated function systems (IFSs) using elements of the theory of Marcovian stochastic processes which can produce more natural looking images. We construct new RIFSs consisting substantially of a vertical contraction factor function and nonlinear transformations. These RIFSs are applied to image compression.

A study on resident landscape perception through landscape image

Aiming at consensus building in environmental management with democratic procedure, a communication tool for mutual understanding is profoundly needed. The main purpose of this research is the establishment of a practical methodology to understand vernacular meanings of the environment in terms of resident landscape perception as a precondition for environmental discussion.

Digital image analysis as a tool to estimate legume contributions in legume-grass swards

Summary: Productivity and forage quality of legume-grass swards are important factors for successful arable farming in both organic and conventional farming systems. For these objectives the botanical composition of the swards is of particular importance, especially, the content of legumes due to their ability to fix airborne nitrogen. As it can vary considerably within a field, a non-destructive detection method while doing other tasks would facilitate a more targeted sward management and could predict the nitrogen supply of the soil for the subsequent crop. This study was undertaken to explore the potential of digital image analysis (DIA) for a non destructive prediction of legume dry matter (DM) contribution of legume-grass mixtures. For this purpose an experiment was conducted in a greenhouse, comprising a sample size of 64 experimental swards such as pure swards of red clover (Trifolium pratense L.), white clover (Trifolium repens L.) and lucerne (Medicago sativa L.) as well as binary mixtures of each legume with perennial ryegrass (Lolium perenne L.). Growth stages ranged from tillering to heading and the proportion of legumes from 0 to 80 %. Based on digital sward images three steps were considered in order to estimate the legume contribution (% of DM): i) The development of a digital image analysis (DIA) procedure in order to estimate legume coverage (% of area). ii) The description of the relationship between legume coverage (% area) and legume contribution (% of DM) derived from digital analysis of legume coverage related to the green area in a digital image. iii) The estimation of the legume DM contribution with the findings of i) and ii). i) In order to evaluate the most suitable approach for the estimation of legume coverage by means of DIA different tools were tested. Morphological operators such as erode and dilate support the differentiation of objects of different shape by shrinking and dilating objects (Soille, 1999). When applied to digital images of legume-grass mixtures thin grass leaves were removed whereas rounder clover leaves were left. After this process legume leaves were identified by threshold segmentation. The segmentation of greyscale images turned out to be not applicable since the segmentation between legumes and bare soil failed. The advanced procedure comprising morphological operators and HSL colour information could determine bare soil areas in young and open swards very accurately. Also legume specific HSL thresholds allowed for precise estimations of legume coverage across a wide range from 11.8 - 72.4 %. Based on this legume specific DIA procedure estimated legume coverage showed good correlations with the measured values across the whole range of sward ages (R2 0.96, SE 4.7 %). A wide range of form parameters (i.e. size, breadth, rectangularity, and circularity of areas) was tested across all sward types, but none did improve prediction accuracy of legume coverage significantly. ii) Using measured reference data of legume coverage and contribution, in a first approach a common relationship based on all three legumes and sward ages of 35, 49 and 63 days was found with R2 0.90. This relationship was improved by a legume-specific approach of only 49- and 63-d old swards (R2 0.94, 0.96 and 0.97 for red clover, white clover, and lucerne, respectively) since differing structural attributes of the legume species influence the relationship between these two parameters. In a second approach biomass was included in the model in order to allow for different structures of swards of different ages. Hence, a model was developed, providing a close look on the relationship between legume coverage in binary legume-ryegrass communities and the legume contribution: At the same level of legume coverage, legume contribution decreased with increased total biomass. This phenomenon may be caused by more non-leguminous biomass covered by legume leaves at high levels of total biomass. Additionally, values of legume contribution and coverage were transformed to the logit-scale in order to avoid problems with heteroscedasticity and negative predictions. The resulting relationships between the measured legume contribution and the calculated legume contribution indicated a high model accuracy for all legume species (R2 0.93, 0.97, 0.98 with SE 4.81, 3.22, 3.07 % of DM for red clover, white clover, and lucerne swards, respectively). The validation of the model by using digital images collected over field grown swards with biomass ranges considering the scope of the model shows, that the model is able to predict legume contribution for most common legume-grass swards (Frame, 1992; Ledgard and Steele, 1992; Loges, 1998). iii) An advanced procedure for the determination of legume DM contribution by DIA is suggested, which comprises the inclusion of morphological operators and HSL colour information in the analysis of images and which applies an advanced function to predict legume DM contribution from legume coverage by considering total sward biomass. Low residuals between measured and calculated values of legume dry matter contribution were found for the separate legume species (R2 0.90, 0.94, 0.93 with SE 5.89, 4.31, 5.52 % of DM for red clover, white clover, and lucerne swards, respectively). The introduced DIA procedure provides a rapid and precise estimation of legume DM contribution for different legume species across a wide range of sward ages. Further research is needed in order to adapt the procedure to field scale, dealing with differing light effects and potentially higher swards. The integration of total biomass into the model for determining legume contribution does not necessarily reduce its applicability in practice as a combined estimation of total biomass and legume coverage by field spectroscopy (Biewer et al. 2009) and DIA, respectively, may allow for an accurate prediction of the legume contribution in legume-grass mixtures.

Patent DE10 2004 037 519 B4 “Sensor Process and Device for Determining a Physical Value“. A Proof of Concept

At present, a fraction of 0.1 - 0.2% of the patients undergoing surgery become aware during the process. The situation is referred to as anesthesia awareness and is obviously very traumatic for the person experiencing it. The reason for its occurrence is mostly an insufficient dosage of the narcotic Propofol combined with the incapability of the technology monitoring the depth of the patient’s anesthetic state to notice the patient becoming aware. A solution can be a highly sensitive and selective real time monitoring device for Propofol based on optical absorption spectroscopy. Its working principle has been postulated by Prof. Dr. habil. H. Hillmer and formulated in DE10 2004 037 519 B4, filed on Aug 30th, 2004. It consists of the exploitation of Intra Cavity Absorption effects in a two mode laser system. In this Dissertation, a two mode external cavity semiconductor laser, which has been developed previously to this work is enhanced and optimized to a functional sensor. Enhancements include the implementation of variable couplers into the system and the implementation of a collimator arrangement into which samples can be introduced. A sample holder and cells are developed and characterized with a focus on compatibility with the measurement approach. Further optimization concerns the overall performance of the system: scattering sources are reduced by re-splicing all fiber-to-fiber connections, parasitic cavities are eliminated by suppressing the Fresnel reflexes of all one fiber ends by means of optical isolators and wavelength stability of the system is improved by the implementation of thermal insulation to the Fiber Bragg Gratings (FBG). The final laser sensor is characterized in detail thermally and optically. Two separate modes are obtained at 1542.0 and 1542.5 nm, tunable in a range of 1nm each. Mode Full Width at Half Maximum (FWHM) is 0.06nm and Signal to Noise Ratio (SNR) is as high as 55 dB. Independent of tuning the two modes of the system can always be equalized in intensity, which is important as the delicacy of the intensity equilibrium is one of the main sensitivity enhancing effects formulated in DE10 2004 037 519 B4. For the proof of concept (POC) measurements the target substance Propofol is diluted in the solvents Acetone and DiChloroMethane (DCM), which have been investigated for compatibility with Propofol beforehand. Eight measurement series (two solvents, two cell lengths and two different mode spacings) are taken, which draw a uniform picture: mode intensity ratio responds linearly to an increase of Propofol in all cases. The slope of the linear response indicates the sensitivity of the system. The eight series are split up into two groups: measurements taken in long cells and measurements taken in short cells.

Highly Sensitive Sensor Based On Intracavity Laser Absorption Spectroscopy By Means of Relative Intensity Noise

This thesis concerns with the main aspects of medical trace molecules detection by means of intracavity laser absorption spectroscopy (ICLAS), namely with the equirements for highly sensitive, highly selective, low price, and compact size sensor. A novel two modes semiconductor laser sensor is demonstrated. Its operation principle is based on the competition between these two modes. The sensor sensitivity is improved when the sample is placed inside the two modes laser cavity, and the competition between the two modes exists. The effects of the mode competition in ICLAS are discussed theoretically and experimentally. The sensor selectivity is enhanced using external cavity diode laser (ECDL) configuration, where the tuning range only depends on the external cavity configuration. In order to considerably reduce the sensor cost, relative intensity noise (RIN) is chosen for monitoring the intensity ratio of the two modes. RIN is found to be an excellent indicator for the two modes intensity ratio variations which strongly supports the sensor methodology. On the other hand, it has been found that, wavelength tuning has no effect on the RIN spectrum which is very beneficial for the proposed detection principle. In order to use the sensor for medical applications, the absorption line of an anesthetic sample, propofol, is measured. Propofol has been dissolved in various solvents. RIN has been chosen to monitor the sensor response. From the measured spectra, the sensor sensitivity enhancement factor is found to be of the order of 10^(3) times of the conventional laser spectroscopy.

Analyse selbsterregter Strömungsfelder im Verdichter-Leitrad durch Kopplung von Particle Image Velocimetry und Hitzdrahtanemometrie mittels Fast Fourier Transformation

Der Einsatz der Particle Image Velocimetry (PIV) zur Analyse selbsterregter Strömungsphänomene und das dafür notwendige Auswerteverfahren werden in dieser Arbeit beschrieben. Zur Untersuchung von solchen Mechanismen, die in Turbo-Verdichtern als Rotierende Instabilitäten in Erscheinung treten, wird auf Datensätze zurückgegriffen, die anhand experimenteller Untersuchungen an einem ringförmigen Verdichter-Leitrad gewonnen wurden. Die Rotierenden Instabilitäten sind zeitabhängige Strömungsphänomene, die bei hohen aerodynamischen Belastungen in Verdichtergittern auftreten können. Aufgrund der fehlenden Phaseninformation kann diese instationäre Strömung mit konventionellen PIV-Systemen nicht erfasst werden. Die Kármánsche Wirbelstraße und Rotierende Instabilitäten stellen beide selbsterregte Strömungsvorgänge dar. Die Ähnlichkeit wird genutzt um die Funktionalität des Verfahrens anhand der Kármánschen Wirbelstraße nachzuweisen. Der mittels PIV zu visualisierende Wirbeltransport erfordert ein besonderes Verfahren, da ein externes Signal zur Festlegung des Phasenwinkels dieser selbsterregten Strömung nicht zur Verfügung steht. Die Methodik basiert auf der Kopplung der PIV-Technik mit der Hitzdrahtanemometrie. Die gleichzeitige Messung mittels einer zeitlich hochaufgelösten Hitzdraht-Messung ermöglicht den Zeitpunkten der PIV-Bilder einen Phasenwinkel zuzuordnen. Hierzu wird das Hitzdrahtsignal mit einem FFT-Verfahren analysiert, um die PIV-Bilder entsprechend ihrer Phasenwinkel zu gruppieren. Dafür werden die aufgenommenen Bilder auf der Zeitachse der Hitzdrahtmessungen markiert. Eine systematische Analyse des Hitzdrahtsignals in der Umgebung der PIV-Messung liefert Daten zur Festlegung der Grundfrequenz und erlaubt es, der markierten PIV-Position einen Phasenwinkel zuzuordnen. Die sich aus den PIV-Bildern einer Klasse ergebenden Geschwindigkeitskomponenten werden anschließend gemittelt. Aus den resultierenden Bildern jeder Klasse ergibt sich das zweidimensionale zeitabhängige Geschwindigkeitsfeld, in dem die Wirbelwanderung der Kármánschen Wirbelstraße ersichtlich wird. In hierauf aufbauenden Untersuchungen werden Zeitsignale aus Messungen in einem Verdichterringgitter analysiert. Dabei zeigt sich, dass zusätzlich Filterfunktionen erforderlich sind. Im Ergebnis wird schließlich deutlich, dass die Übertragung der anhand der Kármánschen Wirbelstraße entwickelten Methode nur teilweise gelingt und weitere Forschungsarbeiten erforderlich sind.

Development of thermo-analytical prediction and classification models for food in thermal devices using a multi sensor system and artificial neural networks

Die thermische Verarbeitung von Lebensmitteln beeinflusst deren Qualität und ernährungsphysiologischen Eigenschaften. Im Haushalt ist die Überwachung der Temperatur innerhalb des Lebensmittels sehr schwierig. Zudem ist das Wissen über optimale Temperatur- und Zeitparameter für die verschiedenen Speisen oft unzureichend. Die optimale Steuerung der thermischen Zubereitung ist maßgeblich abhängig von der Art des Lebensmittels und der äußeren und inneren Temperatureinwirkung während des Garvorgangs. Das Ziel der Arbeiten war die Entwicklung eines automatischen Backofens, der in der Lage ist, die Art des Lebensmittels zu erkennen und die Temperatur im Inneren des Lebensmittels während des Backens zu errechnen. Die für die Temperaturberechnung benötigten Daten wurden mit mehreren Sensoren erfasst. Hierzu kam ein Infrarotthermometer, ein Infrarotabstandssensor, eine Kamera, ein Temperatursensor und ein Lambdasonde innerhalb des Ofens zum Einsatz. Ferner wurden eine Wägezelle, ein Strom- sowie Spannungs-Sensor und ein Temperatursensor außerhalb des Ofens genutzt. Die während der Aufheizphase aufgenommen Datensätze ermöglichten das Training mehrerer künstlicher neuronaler Netze, die die verschiedenen Lebensmittel in die entsprechenden Kategorien einordnen konnten, um so das optimale Backprogram auszuwählen. Zur Abschätzung der thermische Diffusivität der Nahrung, die von der Zusammensetzung (Kohlenhydrate, Fett, Protein, Wasser) abhängt, wurden mehrere künstliche neuronale Netze trainiert. Mit Ausnahme des Fettanteils der Lebensmittel konnten alle Komponenten durch verschiedene KNNs mit einem Maximum von 8 versteckten Neuronen ausreichend genau abgeschätzt werden um auf deren Grundlage die Temperatur im inneren des Lebensmittels zu berechnen. Die durchgeführte Arbeit zeigt, dass mit Hilfe verschiedenster Sensoren zur direkten beziehungsweise indirekten Messung der äußeren Eigenschaften der Lebensmittel sowie KNNs für die Kategorisierung und Abschätzung der Lebensmittelzusammensetzung die automatische Erkennung und Berechnung der inneren Temperatur von verschiedensten Lebensmitteln möglich ist.

Sensor-based Control of Chewing and Rumination Behavior of Dairy Cows

The measurement of feed intake, feeding time and rumination time, summarized by the term feeding behavior, are helpful indicators for early recognition of animals which show deviations in their behavior. The overall objective of this work was the development of an early warning system for inadequate feeding rations and digestive and metabolic disorders, which prevention constitutes the basis for health, performance, and reproduction. In a literature review, the current state of the art and the suitability of different measurement tools to determine feeding behavior of ruminants was discussed. Five measurement methods based on different methodological approaches (visual observance, pressure transducer, electrical switches, electrical deformation sensors and acoustic biotelemetry), and three selected measurement techniques (the IGER Behavior Recorder, the Hi-Tag rumination monitoring system and RumiWatchSystem) were described, assessed and compared to each other within this review. In the second study, the new system for measuring feeding behavior of dairy cows was evaluated. The measurement of feeding behavior ensues through electromyography (EMG). For validation, the feeding behavior of 14 cows was determined by both the EMG system and by visual observation. The high correlation coefficients indicate that the current system is a reliable and suitable tool for monitoring the feeding behavior of dairy cows. The aim of a further study was to compare the DairyCheck (DC) system and two additional measurement systems for measuring rumination behavior in relation to efficiency, reliability and reproducibility, with respect to each other. The two additional systems were labeled as the Lely Qwes HR (HR) sensor, and the RumiWatchSystem (RW). Results of accordance of RW and DC to each other were high. The last study examined whether rumination time (RT) is affected by the onset of calving and if it might be a useful indicator for the prediction of imminent birth. Data analysis referred to the final 72h before the onset of calving, which were divided into twelve 6h-blocks. The results showed that RT was significantly reduced in the final 6h before imminent birth.

Optimization of the Mechanical and Optical Properties of Tunable Optical Sensor Arrays (TOSA) for a Nanospectrometer in the Visible and Near Infrared Spectral Range

Tunable Optical Sensor Arrays (TOSA) based on Fabry-Pérot (FP) filters, for high quality spectroscopic applications in the visible and near infrared spectral range are investigated within this work. The optical performance of the FP filters is improved by using ion beam sputtered niobium pentoxide (Nb2O5) and silicon dioxide (SiO2) Distributed Bragg Reflectors (DBRs) as mirrors. Due to their high refractive index contrast, only a few alternating pairs of Nb2O5 and SiO2 films can achieve DBRs with high reflectivity in a wide spectral range, while ion beam sputter deposition (IBSD) is utilized due to its ability to produce films with high optical purity. However, IBSD films are highly stressed; resulting in stress induced mirror curvature and suspension bending in the free standing filter suspensions of the MEMS (Micro-Electro-Mechanical Systems) FP filters. Stress induced mirror curvature results in filter transmission line degradation, while suspension bending results in high required filter tuning voltages. Moreover, stress induced suspension bending results in higher order mode filter operation which in turn degrades the optical resolution of the filter. Therefore, the deposition process is optimized to achieve both near zero absorption and low residual stress. High energy ion bombardment during film deposition is utilized to reduce the film density, and hence the film compressive stress. Utilizing this technique, the compressive stress of Nb2O5 is reduced by ~43%, while that for SiO2 is reduced by ~40%. Filters fabricated with stress reduced films show curvatures as low as 100 nm for 70 μm mirrors. To reduce the stress induced bending in the free standing filter suspensions, a stress optimized multi-layer suspension design is presented; with a tensile stressed metal sandwiched between two compressively stressed films. The stress in Physical Vapor Deposited (PVD) metals is therefore characterized for use as filter top-electrode and stress compensating layer. Surface micromachining is used to fabricate tunable FP filters in the visible spectral range using the above mentioned design. The upward bending of the suspensions is reduced from several micrometers to less than 100 nm and 250 nm for two different suspension layer combinations. Mechanical tuning of up to 188 nm is obtained by applying 40 V of actuation voltage. Alternatively, a filter line with transmission of 65.5%, Full Width at Half Maximum (FWHM) of 10.5 nm and a stopband of 170 nm (at an output wavelength of 594 nm) is achieved. Numerical model simulations are also performed to study the validity of the stress optimized suspension design for the near infrared spectral range, wherein membrane displacement and suspension deformation due to material residual stress is studied. Two bandpass filter designs based on quarter-wave and non-quarter-wave layers are presented as integral components of the TOSA. With a filter passband of 135 nm and a broad stopband of over 650 nm, high average filter transmission of 88% is achieved inside the passband, while maximum filter transmission of less than 1.6% outside the passband is achieved.

Interferometrisch messender faseroptischer Sensor mit mechanisch oszillierender Sonde

Punktförmig messende optische Sensoren zum Erfassen von Oberflächentopografien im Nanometerbereich werden in der Forschung und Industrie benötigt. Dennoch ist die Auswahl unterschiedlicher Technologien und kommerziell verfügbarer Sensoren gering. In dieser Dissertationsschrift werden die wesentlichen Aspekte eines Messsystems untersucht das über das Potenzial verfügt, zu den künftigen Standardmessmethoden zu gehören. Das Messprinzip beruht auf einem Common-Path-Interferometer. In einer mikrooptischen Sonde wird das Laserlicht auf die zu untersuchende Oberfläche gerichtet. Das vom Messobjekt reflektierte Licht interferiert sondenintern mit einem Referenzreflex. Die kompakte Bauweise bewirkt kurze optische Wege und eine gewisse Robustheit gegen Störeinflüsse. Die Abstandsinformation wird durch eine mechanische Oszillation in eine Phasenmodulation überführt. Die Phasenmodulation ermöglicht eine robuste Auswertung des Interferenzsignals, auch wenn eine zusätzliche Amplitudenmodulation vorhanden ist. Dies bietet den Vorteil, unterschiedlich geartete Oberflächen messen zu können, z. B. raue, teilweise transparente und geneigte Oberflächen. Es können wiederholbar Messungen mit einer Standardabweichung unter einem Nanometer erzielt werden. Die beschriebene mechanische Oszillation wird durch ein periodisches elektrisches Signal an einem piezoelektrischen Aktor hervorgerufen, der in einem Biegebalken integriert ist. Die Bauform des Balkens gestattet eine Hybridisierung von optischen und mechanischen Komponenten zu einer Einheit, welche den Weg zur weiteren Miniaturisierung aufzeigt. Im Rahmen dieser Arbeit konnte so u. a. eine Sonde mit einer Bauhöhe unter 10 mm gefertigt werden. Durch eine zweite optische Wellenlänge lässt sich der eingeschränkte Eindeutigkeitsbereich des Laserinterferometers nachweislich vergrößern. Die hierfür eingesetzte Methode, die Stand der Technik ist, konnte erfolgreich problemspezifisch angepasst werden. Um das volle Potenzial des Sensors nutzen zu können, wurden zudem zahlreiche Algorithmen entworfen und erfolgreich getestet. Anhand von hier dokumentierten Messergebnissen können die Möglichkeiten, als auch die Schwächen des Messsystems abgeschätzt werden.