Behavior of ar plasma formed in a high-density plasma source - an ecr reactor

In order to develop the ultra-large scale integration(ULSI), low pressure and high density plasma apparatus are required for etching and deposit of thin films. To understand critical parameters such as the pressure, temperature, electrostatic potential and energy distribution of ions impacting on the wafer, it is necessary to understand how these parameters are influenced by the power input and neutral gas pressure. In the present work, a 2-D hybrid electron fluid-particle ion model has been developed to simulate one of the high density plasma sources-an Electron Cyclotron Resonance (ECR) plasma system with various pressures and power inputs in a non-uniform magnetic field. By means of numerical simulation, the energy distributions of argon ion impacting on the wafer are obtained and the plasma density, electron temperature and plasma electrostatic potential are plotted in 3-D. It is concluded that the plasma density depends mainly on both the power input and neutral gas pressure. However, the plasma potential and electron temperature can hardly be affected by the power input, they seem to be primarily dependent on the neutral gas pressure. The comparison shows that the simulation results are qualitatively in good agreement with the experiment measurements.

Kinetic theory for particle concentration distribution in two phase flow

The results of experiments in open channels and closed pipelines show two kinds of patterns for the vertical distribution of particle concentration (i.e., pattern I and pattern II). The former shows a pattern of maximum concentration at some location above the bottom and the downward decay of the concentration below the location. The latter always shows an increase of the particle concentration downward over the whole vertical, with the maximum value at the bottom. Many investigations were made on the pattern II, but few were made on pattern I. In this paper, a particle velocity distribution function is first obtained in the equilibrium state or in dilute steady state for the particle in two-phase flows, then a theoretical model for the particle concentration distribution is derived from the kinetic theory. More attention is paid to the predictions of the concentration distribution of pattern I and comparisons of the present model are made with the data measured by means of laser doppler anemometry (LDA). Very good agreements are obtained between the measured and calculated results.

Influence of suspended particles and particle cover over the density interface

The effect of the particle cover over the density interface between two layers of fluids and of the suspended solid particles in the upper turbulcnt layer on the turbulent entrainment has been studied experimentally. The entrainment distance D is a function of the time of power: D=kt, where =0.200-0.130p. For suspended particles in the upper layer and pure 2-layer fluid is equal to 0.200, but the value of k for the suspended particles is smaller than that for the pure 2-layer fluid. The non-dimensional entrainment velocity is E=KRiln, where n=1.50+0.93 p. It is shown that the particle cover over the interface changes the power of Ril in the entrainment and hinders the turbulent entrainment. The variation rule of E for the suspended particles is the same as that for the pure 2-layer fluid, but the K value of the former is smaller than that of the latter. The turbulent mixing mechanism has been discussed.

Stratification by solid particle suspensions

Turbulence was generated by an oscillating grid above a bed of sediment of spherical glass beads. As expected, part of the sediment was lifted up by the grid action and a suspension layer of depth D formed above the grid. This depth was found remaining independent of grid action but varying with the sediment layer depth when the grid action was kept constant. Volume concentration measurements show the existence of only weak concentration gradients over the layer depth with a rapid fall off in concentration at the outer edge. The theoretical analysis based on a concentration flux model is in good qualitative agreement with observations.