A packaging technique for silicon MEMS strain sensors on steel

A packaging technique suited to applying MEMS strain sensors realized on a silicon chip to a steel flat surface is described. The method is based on adhesive bonding of the silicon chip rear surface on steel using two types of glue normally used for standard piezoresistive strain sensors (Mbond200/ 600), using direct wire bonding of the chip to a Printed Circuit Board, also fixed on steel. In order to protect the sensor from the external environment, and to improve the MEMS performance, the silicon chip is encapsulated with a metal cap hermetically sealed-off under vacuum condition with a vacuum adhesive in which the bonding wires are also protected from possible damage. In order to evaluate the mechanical coupling of the silicon chip with the bar and thestress transfer extent to the silicon surface, commercial strain sensors have been applied on the chip glued on a steel bar in alaboratory setup able to generate strain by inflection, yielding a stress transfer around 70% from steel to silicon. © 2008 IEEE.

Laminar to turbulent flow transition measurements using an array of SOI-CMOS MEMS wall shear stress sensors

The successful utilization of an array of silicon on insulator complementary metal oxide semiconductor (SOICMOS) micro thermal shear stress sensors for flow measurements at macro-scale is demonstrated. The sensors use CMOS aluminum metallization as the sensing material and are embedded in low thermal conductivity silicon oxide membranes. They have been fabricated using a commercial 1 μm SOI-CMOS process and a post-CMOS DRIE back etch. The sensors with two different sizes were evaluated. The small sensors (18.5 ×18.5 μm2 sensing area on 266 × 266 μm2 oxide membrane) have an ultra low power (100 °C temperature rise at 6mW) and a small time constant of only 5.46 μs which corresponds to a cut-off frequency of 122 kHz. The large sensors (130 × 130 μm2 sensing area on 500 × 500 μm2 membrane) have a time constant of 9.82 μs (cut-off frequency of 67.9 kHz). The sensors' performance has proven to be robust under transonic and supersonic flow conditions. Also, they have successfully identified laminar, separated, transitional and turbulent boundary layers in a low speed flow. © 2008 IEEE.

Towards jet flow LES of conceptual nozzles for acoustic predictions

Progress in simulating chevron nozzle jet flows using ILES/RANS-ILES approaches and using the Ffowcs Williams and Hawkings (FW-H) surface integral method to predict the radiated far field sound is presented in this paper. With the focus on the realistic chevron geometries, SMC001 and SMC006, coarse and fine meshes are generated in the range of 3∼13 million mesh cells. Throughout this work, to minimize numerical dissipation introduced by mesh quality issues, the hexahedral cell type is used. Numerical simulations are then carried out with cell-vertex and cell-centered codes. Despite the modest grids, mean velocities and turbulent statistics are found to be in reasonable accord with measurements. Also, far field sound levels predicted by the FW-H post processor are encouraging. Copyright © 2008 by the American Institute of Aeronautics and Astronautics, Inc.

Flexible array sensors based on zinc oxide nanowires for touch displays

Recent efforts towards the fabrication of touch sensing systems are presented, in which zinc oxide nanowire arrays are embedded in a polymer matrix to produce an engineered composite material. In the future, these sensor systems will be fully flexible and multi-touch as intended for Nokia's 'Morph' concept device.

On a classical problem of acoustic wave scattering by a free vortex: Numerical modelling

The scattering of sound from a point source by a Rankine vortex is investigated numerically by solving the Euler equations with the novel high-resolution CABARET method. For several Mach numbers of the vortex, the time-average amplitudes of the scattered field obtained from the numerical modeling are compared with the theoretical scaling laws' predictions. Copyright © 2009 by Sergey Karabasov.

Investigation of the effect of combustor cooling geometry on acoustic energy absorption

To control combustion instabilities occurring in LPP gas turbine combustors, several active and passive systems have been developed in recent years. The combustion chamber cooling geometry has the potential to influence instability feedback loops by absorbing acoustical energy inside the combustor. The design of the cooling liner and the geometry of the cooling plenum and the cooling air flow rate have a significant influence on the absorption characteristics of the system. This paper presents the results of a cold flow study which was carried out in the course of a comprehensive study on the influence of the cooling geometry on combustor thermoacoustics. Absorption characteristics of three different cooling liner geometries and non-perforated plates were determined over a frequency range from 50 Hz to 600 Hz for different cooling flow rates and different cooling plenum volumes. The experimental results compared well with results from a low order thermoacoustic network model. The acoustic energy absorption spectrum of a cooling liner with 90°-hole configuration was found to be strongly dependent on cooling flow rate and cooling plenum volume, whereas the absorption spectrum of cooling liners with 25°-holes were found to be strongly dependent on the cooling plenum volume, but less dependent on the cooling air flow rate. All cooling liner setups with perforations were capable of increased acoustic absorption over a broad band of frequencies compared to the case of non-perforated combustor walls. © 2010 by Johannes Schmidt.

Thermal characterization of SOI CMOS micro hot-plate gas sensors

This work reports on thermal characterization of SOI (silicon on insulator) CMOS (complementary metal oxide semiconductor) MEMS (micro electro mechanical system) gas sensors using a thermoreflectance (TR) thermography system. The sensors were fabricated in a CMOS foundry and the micro hot-plate structures were created by back-etching the CMOS processed wafers in a MEMS foundry using DRIE (deep reactive ion etch) process. The calibration and experimental details of the thermoreflectance based thermal imaging setup, used for these micro hot-plate gas sensor structures, are presented. Experimentally determined temperature of a micro hot-plate sensor, using TR thermography and built-in silicon resistive temperature sensor, is compared with that estimated using numerical simulations. The results confirm that TR based thermal imaging technique can be used to determine surface temperature of CMOS MEMS devices with a high accuracy. © 2010 EDA Publishing/THERMINIC.

Investigation of acoustic units for LVCSR systems

One important issue in designing state-of-the-art LVCSR systems is the choice of acoustic units. Context dependent (CD) phones remain the dominant form of acoustic units. They can capture the co-articulatory effect in speech via explicit modelling. However, for other more complicated phonological processes, they rely on the implicit modelling ability of the underlying statistical models. Alternatively, it is possible to construct acoustic models based on higher level linguistic units, for example, syllables, to explicitly capture these complex patterns. When sufficient training data is available, this approach may show an advantage over implicit acoustic modelling. In this paper a wide range of acoustic units are investigated to improve LVCSR system performance. Significant error rate gains up to 7.1% relative (0.8% abs.) were obtained on a state-of-the-art Mandarin Chinese broadcast audio recognition task using word and syllable position dependent triphone and quinphone models. © 2011 IEEE.

Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors

A novel type of linear extensometer with exceptionally high resolution of 4 nm based on MEMS resonant strain sensors bonded on steel and operating in a vacuum package is presented. The tool is implemented by means of a steel thin bar that can be pre-stressed in tension within two fixing anchors. The extension of the bar is detected by using two vacuum-packaged resonant MEMS double- ended tuning fork (DETF) sensors bonded on the bar with epoxy glue, one of which is utilized for temperature compensation. Both sensors are driven by a closed loop self-oscillating transresistance amplifier feedback scheme implemented on a PCB (Printed Circuit Board). On the same board, a microcontroller-based frequency measurement circuit is also implemented, which is able to count the square wave fronts of the MEMS oscillator output with a resolution of 20 nsec. The system provides a frequency noise of 0.2 Hz corresponding to an extension resolution of 4 nm for the extensometer. Nearly perfect temperature compensation of the frequency output is achieved in the temperature range 20-35 C using the reference sensor. © 2011 IEEE.

Probing biomolecular interaction forces using an anharmonic acoustic technique for selective detection of bacterial spores

Receptor-based detection of pathogens often suffers from non-specific interactions, and as most detection techniques cannot distinguish between affinities of interactions, false positive responses remain a plaguing reality. Here, we report an anharmonic acoustic based method of detection that addresses the inherent weakness of current ligand dependant assays. Spores of Bacillus subtilis (Bacillus anthracis simulant) were immobilized on a thickness-shear mode AT-cut quartz crystal functionalized with anti-spore antibody and the sensor was driven by a pure sinusoidal oscillation at increasing amplitude. Biomolecular interaction forces between the coupled spores and the accelerating surface caused a nonlinear modulation of the acoustic response of the crystal. In particular, the deviation in the third harmonic of the transduced electrical response versus oscillation amplitude of the sensor (signal) was found to be significant. Signals from the specifically-bound spores were clearly distinguishable in shape from those of the physisorbed streptavidin-coated polystyrene microbeads. The analytical model presented here enables estimation of the biomolecular interaction forces from the measured response. Thus, probing biomolecular interaction forces using the described technique can quantitatively detect pathogens and distinguish specific from non-specific interactions, with potential applicability to rapid point-of-care detection. This also serves as a potential tool for rapid force-spectroscopy, affinity-based biomolecular screening and mapping of molecular interaction networks. © 2011 Elsevier B.V.

Deposition and characterisation of ultralow-stress ZnO thin films for application in FBAR-based gravimetric biosensors

Zinc oxide (ZnO) thin films were deposited at high rates ( > 50 nm min-1) using a unique technique known as high target utilisation sputtering (HiTUS). The films obtained possess good crystallographic orientation, low surface roughness, very low stress and excellent piezoelectric properties. We have utilised the films to develop highly sensitive biosensors based on thickness longitudinal mode (TLM) thin film bulk acoustic resonators (FBARs). The FBARs have the fundamental TLM at a frequency near 1.5 GHz and quality factor Q higher than 1,000, which is one of the largest values ever reported for ZnO-based FBARs. Bovine Serum Albumin (BSA) solutions with different concentrations were placed on the top of different sets of identical FBARs and their responses to mass-loading from physically adsorbed protein coatings were investigated. These resonators demonstrated a high sensitivity and thus have a great potential as gravimetric sensors for biomedical applications. © 2011 Inderscience Enterprises Ltd.