Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges

An efficient method for solving the spatially inhomogeneous Boltzmann equation in a two-term approximation for low-pressure inductively coupled plasmas has been developed. The electron distribution function (EDF), a function of total electron energy and two spatial coordinates, is found self-consistently with the static space-charge potential which is computed from a 2D fluid model, and the rf electric field profile which is calculated from the Maxwell equations. The EDF and the spatial distributions of the electron density, potential, temperature, ionization rate, and the inductive electric field are calculated and discussed. (C) 1996 American Institute of Physics.

Effects of high-frequency vibration on critical marangoni number

The influence of vibration on thermocapillary convection and critical Marangoni number in liquid bridge of half floating zone was discussed for the low frequency range 0.4-1.5 Hz and the intermediate frequency range 2.5-15 Hz in our previous papers. This paper extends the study to high frequency range 15-100Hz. This ground based experiment was completed on the deck of an electromagnetic vibration machine. The results of our experiment shows when the frequency of the applied acceleration is high enough, the amplitude of the time varying part of the temperature response is disappear and the shape of the free surface of the liquid bridge exhibits no fluctuations due to inertia. The critical Marangoni number which is defined to describe the transitions from a peroidical convection in response to vibration to an oscillatory convection due to internal instability is nearly the same as the critical Marangoni number for oscillatory flow in the absence of vibration.

G-jitter effects on half floating-zone convection in intermediate-frequency range

The g-jitter influence on thermocapillary convection and critical Marangoni number in a liquid bridge of half-floating rone was discussed in the low frequency range of 0.4 to 1.5 Hz in a previous paper. This paper extended the experiments to the intermediate frequency range of 2 to 18 Hz, which htrs often been recorded as vibration environment of spacecrafts. The experiment was completed on the deck of a vibration machine, which gave a periodical applied acceleration to simulate the effects of g-jitter. The experimental results in the intermediate frequency range are different from that in the low frequency range. The velocity field and the shape of the free surface have periodical fluctuations in response to g-jitter. The amplitude of the periodical varying part of the temperature response decreases obviously with increasing frequency of g-jitter and vanishes almost when the frequency of g-jitter is high enough. The critical Marangoni number is defined to describe the transition from a periodical convection in response to g-jitter to an oscillatory convection due to internal instability, and will increase with increasing g-jitter frequency. According to the spectral analysis, it can be found that the oscillatory part of temperature is a superposition of two harmonic waves if the Marangoni number is larger than a critical value.