In-situ Boron-doped Low-stress LPCVD Polysilicon for Micromechanical Disk Resonator

Polycrystalline silicon (polysilicon) has been used as an important structural material for microelectro-mechnical systems (MEMS) because of its compatibility with standard integrated circuit (IC) processes. As the structural layer of micromechanical high resonance frequency (high-f) and high quality factor (high-Q) disk resonators, the low residual stress and low resistivity are desired for the polysilicon thin films. In the present work, we investigate the effect of deposition and annealing conditions on the residual stress and resistivity for in-situ deposited low pressure chemical vapor deposition (LPCVD) polysilicon films. Low residual stress (-100 MPa) was achieved in in-situ boron-doped polysilicon films deposited at 570 degrees C and annealed at 1000 degrees C for 4 hr. The as-deposited amorphous polysilicon films were crystallized by the rapid thermal annealing and have the (111)-preferred orientation, the low tensile residual stress is expected for this annealed film, the detailed description on this work will be reported soon. The controllable residual stress and resistivity make these films suitable for high-Q and bigh-f micro-mechanical disk resonators.

High-quality-factor EH modes in microcylinder resonators predicted by 3D FDTD simulation

The mode characteristis of a microcylinders with center layer thickness 0.2 mu m and radius 1 mu m are investigated by the three-dimensional (31)) finite-difference time-domain (FDTD) technique and the Pade approximation. The mode quality factor (Q-factor) of the EH71 mode obtained by 3D FDTD increase with the increase of the refractive index of the cladding layer n(2) as n(2) smaller than 3.17, and can be as large as 2.4 x 10(4) as the vertical refractive index distribution is 3.17/3.4/3.17, which is much larger than that of the HE71 mode with the same vertical refractive index distribution.

an improved smart card based password authentication scheme with provable security

Password authentication has been adopted as one of the most commonly used solutions in network environment to protect resources from unauthorized access. Recently, Lee–Kim–Yoo [S.W. Lee, H.S. Kim, K.Y. Yoo, Improvement of Chien et al.'s remote user authentication scheme using smart cards, Computer Standards & Interfaces 27 (2) (2005) 181–183] and Lee-Chiu [N.Y. Lee, Y.C. Chiu, Improved remote authentication scheme with smart card, Computer Standards & Interfaces 27 (2) (2005) 177–180] respectively proposed a smart card based password authentication scheme. We show that these two schemes are both subject to forgery attacks provided that the information stored in the smart card is disclosed by the adversary. We also propose an improved scheme with formal security proof.

gcs-ma: a group communication system for mobile agents

Reliable messaging is a key component necessary for mobile agent systems. Current researches focus on reliable one-to-one message delivery to mobile agents. But how to implement a group communication system for mobile agents remains an open issue, which is a powerful block that facilitates the development of fault-tolerant mobile agent systems. In this paper, we propose a group communication system for mobile agents (GCS-MA), which includes totally ordered multicast and membership management functions. We divide a group of mobile agents into several agent clusters,and each agent cluster consists of all mobile agents residing in the same sub-network and is managed by a special module, named coordinator. Then, all coordinators form a ring-based overlay for interchanging messages between clusters. We present a token-based algorithm, an intra-cluster messaging algorithm and an inter-cluster migration algorithm to achieve atomicity and total ordering properties of multicast messages, by building a membership protocol on top of the clustering and failure detection mechanisms. Performance issues of the proposed system have been analysed through simulations. We also describe the application of the proposed system in the context of the service cooperation middleware (SCM) project.

pessimistic predicate/transform model for long running business processes

Many business processes in enterprise applications are both long running and transactional in nature. However, no current transaction model can provide full transaction support for such long running business processes. This paper proposes a new transaction model, the pessimistic predicate/transform (PP/T) model, which can provide full transaction support for long running business processes. A framework was proposed on the enterprise JavaBeans platform to implement the PP/T model. The framework enables application developers to focus on the business logic, with the underlying platform providing the required transactional semantics. The development and maintenance effort are therefore greatly reduced. Simulations show that the model has a sound concurrency management ability for long running business processes.

A shortest path algorithm for moving objects in spatial network databases

One of the most important kinds of queries in Spatial Network Databases (SNDB) to support location-based services (LBS) is the shortest path query. Given an object in a network, e.g. a location of a car on a road network, and a set of objects of interests, e.g. hotels,gas station, and car, the shortest path query returns the shortest path from the query object to interested objects. The studies of shortest path query have two kinds of ways, online processing and preprocessing. The studies of preprocessing suppose that the interest objects are static. This paper proposes a shortest path algorithm with a set of index structures to support the situation of moving objects. This algorithm can transform a dynamic problem to a static problem. In this paper we focus on road networks. However, our algorithms do not use any domain specific information, and therefore can be applied to any network. This algorithm’s complexity is O(klog2 i), and traditional Dijkstra’s complexity is O((i + k)2).

a shortest path algorithm for moving objects in spatial network databases

中国计算机学会