Uncertainty analysis to minimise risk in designing micro-electronics manufacturing processes

A design methodology based on numerical modelling, integrated with optimisation techniques and statistical methods, to aid the process control of micro and nano-electronics based manufacturing processes is presented in this paper. The design methodology is demonstrated for a micro-machining process called Focused Ion Beam (FIB). This process has been modelled to help understand how a pre-defined geometry of micro- and nano- structures can be achieved using this technology. The process performance is characterised on the basis of developed Reduced Order Models (ROM) and are generated using results from a mathematical model of the Focused Ion Beam and Design of Experiment (DoE) methods. Two ion beam sources, Argon and Gallium ions, have been used to compare and quantify the process variable uncertainties that can be observed during the milling process. The evaluations of the process performance takes into account the uncertainties and variations of the process variables and are used to identify their impact on the reliability and quality of the fabricated structure. An optimisation based design task is to identify the optimal process conditions, by varying the process variables, so that certain quality objectives and requirements are achieved and imposed constraints are satisfied. The software tools used and developed to demonstrate the design methodology are also presented.

Probabilistic approach in weighted Markov branching processes

This note provides a new probabilistic approach in discussing the weighted Markov branching process (WMBP) which is a natural generalisation of the ordinary Markov branching process. Using this approach, some important characteristics regarding the hitting times of such processes can be easily obtained. In particular, the closed forms for the mean extinction time and conditional mean extinction time are presented. The explosion behaviour of the process is investigated and the mean explosion time is derived. The mean global holding time and the mean total survival time are also obtained. The close link between these newly developed processes and the well-known compound Poisson processes is investigated. It is revealed that any weighted Markov branching process (WMBP) is a random time change of a compound Poisson process.

Choosing the appropriate level of coupling in multi-physics modeling of metallurgical processes

A computational model for the interrelated phenomena in the process of vacuum arc remelting is analyzed and adjusted of optimal accuracy and computation time. The decision steps in this case study are offered as an example how the coupling in models of similar processes can be addressed. Results show dominance of the electromagnetic forces over buoyancy and inertia for the investigated process conditions.

Current status and perspectives of accelerated carbonation processes on municipal waste combustion residues

The increasing volumes of municipal solid waste produced worldwide are encouraging the development of processes to reduce the environmental impact of this waste stream. Combustion technology can facilitate volume reduction of up to 90%, with the inorganic contaminants being captured in furnace bottom ash, and fly ash/APC residues. The disposal or reuse of these residues is however governed by the potential release of constituent contaminants into the environment. Accelerated carbonation has been shown to have a potential for improving the chemical stability and leaching behaviour of both bottom ash and fly ash/APC residues. However, the efficacy of carbonation depends on whether the method of gas application is direct or indirect. Also important are the mineralogy, chemistry and physical properties of the fresh ash, the carbonation reaction conditions such as temperature, contact time, CO2 partial pressure and relative humidity. This paper reviews the main issues pertaining to the application of accelerated carbonation to municipal waste combustion residues to elucidate the potential benefits on the stabilization of such residues and for reducing CO2 emissions. In particular, the modification of ash properties that occur upon carbonation and the CO2 sequestration potential possible under different conditions are discussed. Although accelerated carbonation is a developing technology, it could be introduced in new incinerator facilities as a "finishing step" for both ash treatment and reduction of CO2 emissions.

The Application Of Radioisotopes In The Study Of Estuarine Sedimentary Processes

The spatial and temporal distributions of some radionuclides in effluents originating from the British Nuclear Fuels Ltd (BNFL) reprocessing plant at Windscale, which are released into the Irish Sea, have been studied in sediments at 16 sites in the salt marsh region near Newbiggin on the Esk estuary Cumbria, England. The concentration of non-conservative radionuclides in surface sediments of the area cannot be described by a single parameter, but there is a high correlation with organic C, Cu, Al and the Si : Al ratio with particle size. The preservation of the historical record of the BNFL effluents in the Esk sediments is dependent on the hydrology of the area, as it effects such processes as accretion, erosion and remixing. From the 106Ru and 210Po concentrations and the 137Cs : 134Cs ratio in the sediment profiles with depth, we have identified these processes. Sedimentation rates at sites of accretion vary between 0·5 and 3 cm year−1. However, at some sites they appear to be much higher, approximately 6 cm year−1 in the top 10 cm, but they are not consistent throughout the depth profiles. This may be a true reflection of variable accretion related to sediment type, or one which is influenced by surficial mixing. Some cores showed evidence of continuous accretion but no significant radioactivity was detected at depths below 35–40 cm, indicating an overall sedimentation rate of approximately 1·5 cm year−1 for the 25–30-year period since BNFL effluents first entered the Irish Sea.

Laboratory Simulation Of Chemical Processes Induced By Estuarine Mixing - The Behavior Of Iron And Phosphate In Estuaries

A series of well stirred tank reactors has been shown to provide an adaptable laboratory analogue of a one-dimensional estuarine mixing profile which can be applied dynamically to the study of the chemistry of estuarine mixing. Simulations of the behaviour of iron and phosphate in the low salinity region of an estuary have been achieved with this system. The well documented general features of iron removal, involving rapid aggregation of river-borne colloids, were reproduced. Phosphate removal is attributable in part to the coagulation process, although specific adsorption of phosphate by colloids also appears to be significant.