998 resultados para Piezoelectric signals


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Laser Diodes have been employed many times as light sources on different kinds of optical sensors. Their main function in these applications was the emission of an optical radiation impinging onto a certain object and, according to the characteristics of the reflected light, some information about this object was obtained. Laser diodes were acting, in a certain way, just as passive devices where their only function was to provide the adequate radiation to be later measured and analyzed. The objective of this paper is to report a new concept on the use of laser diodes taking into account their optical bistable properties. As it has been shown in several places, different laser diodes as, for example, DFB lasers and FP lasers, offer bistable characteristics being these characteristics a function of different parameters as wavelength, light polarization or temperature. Laser Bistability is strongly dependent on them and any small variation of above parameters gives rise to a strong change in the characteristics of its non-linear properties. These variations are analyzed and their application in sensing reported. The dependence on wavelength, spectral width, input power and phase variations, mainly for a Fabry-Perot Laser structure as basic configuration, is shown in this paper.

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This work describes an acoustic system that allows the automatic detection and location of mechanical impacts on metallic based structures, which is suitable in robotics and industrial applications. The system is based on the time delays of propagation of the acoustic waves along the metallic based structure and it determines the instant and the position when and were the impact has been produced by piezoelectric sensors and an electronic-computerized system. We have obtained that for distance impact of 40 cm and 50 cm the time delay is 2 s and 72 s respectively.

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In the last years, many analyses from acoustic signal processing have been used for different applications. In most cases, these sensor systems are based on the determination of times of flight for signals from every transducer. This paper presents a flat plate generalization method for impact detection and location over linear links or bars-based structures. The use of three piezoelectric sensors allow to achieve the position and impact time while the use of additional sensors lets cover a larger area of detection and avoid wrong timing difference measurements. An experimental setup and some experimental results are briefly presented.

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Foliage Penetration (FOPEN) radar systems were introduced in 1960, and have been constantly improved by several organizations since that time. The use of Synthetic Aperture Radar (SAR) approaches for this application has important advantages, due to the need for high resolution in two dimensions. The design of this type of systems, however, includes some complications that are not present in standard SAR systems. FOPEN SAR systems need to operate with a low central frequency (VHF or UHF bands) in order to be able to penetrate the foliage. High bandwidth is also required to obtain high resolution. Due to the low central frequency, large integration angles are required during SAR image formation, and therefore the Range Migration Algorithm (RMA) is used. This project thesis identifies the three main complications that arise due to these requirements. First, a high fractional bandwidth makes narrowband propagation models no longer valid. Second, the VHF and UHF bands are used by many communications systems. The transmitted signal spectrum needs to be notched to avoid interfering them. Third, those communications systems cause Radio Frequency Interference (RFI) on the received signal. The thesis carries out a thorough analysis of the three problems, their degrading effects and possible solutions to compensate them. The UWB model is applied to the SAR signal, and the degradation induced by it is derived. The result is tested through simulation of both a single pulse stretch processor and the complete RMA image formation. Both methods show that the degradation is negligible, and therefore the UWB propagation effect does not need compensation. A technique is derived to design a notched transmitted signal. Then, its effect on the SAR image formation is evaluated analytically. It is shown that the stretch processor introduces a processing gain that reduces the degrading effects of the notches. The remaining degrading effect after processing gain is assessed through simulation, and an experimental graph of degradation as a function of percentage of nulled frequencies is obtained. The RFI is characterized and its effect on the SAR processor is derived. Once again, a processing gain is found to be introduced by the receiver. As the RFI power can be much higher than that of the desired signal, an algorithm is proposed to remove the RFI from the received signal before RMA processing. This algorithm is a modification of the Chirp Least Squares Algorithm (CLSA) explained in [4], which adapts it to deramped signals. The algorithm is derived analytically and then its performance is evaluated through simulation, showing that it is effective in removing the RFI and reducing the degradation caused by both RFI and notching. Finally, conclusions are drawn as to the importance of each one of the problems in SAR system design.

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This project reports on a literature review about piezoelectric loudspeakers and on an experimental research about how to improve some features of a particular horned piezoelectric tweeter. The work involves an investigation of the performance and principle of operation of piezoelectric loudspeakers to understand how the sound is generated and what its main parameters are. Also, previous research papers about how to improve this type of speakers are reported. The knowledge gained was used to reconsider and re-purpose a particular piezoelectric transducer. After characterising the original state of the device with acoustical and electroacoustical measurements, some improvements were implemented. Moreover, interesting conclusions were reached based on the results of the tests that were carried out. A structural study with a scanning laser was then completed. These sections demonstrated the need for providing the speaker with a rear suspension that guides the vibration of the membrane. Finally, an inverse filter was designed in order to get a flat output response. After simulating the results with Matlab, validating experiments were run in the anechoic chamber with great success. RESUMEN. Este proyecto consta de un estudio detallado sobre piezoelectricidad y altavoces piezoeléctricos, así como de una parte experimental consistente en mejorar algunas características de un altavoz piezoeléctrico particular: un tweeter de bocina. El estudio profundiza en cuáles son los principios de funcionamiento y los principales parámetros de este tipo de altavoces. Con el conocimiento adquirido a partir de trabajos de previos sobre el tema e investigación bibliográfica se ha llevado a cabo la parte experimental. Esta parte ha requerido de una serie de medidas acústicas y electroacústicas para, primero, caracterizar el altavoz en su estado original y para posteriormente buscar y validar posibles mejoras, principalmente en la respuesta en frecuencia. Además, se ha realizado un estudio estructural del diafragma a partir de medidas tomadas con un vibrómetro laser Doppler. De estos tres procesos se concluyó que el altavoz bajo estudio tiene un problema en el soporte del cristal piezoeléctrico y se demostró la necesidad de equipar el dispositivo de una suspensión trasera que controle el movimiento del diafragma. Finalmente, se ha diseñado e implementado en Matlab un filtro inverso, con el objetivo de conseguir una respuesta plana a la salida del altavoz. Su funcionamiento fue validado en la cámara anecoica satisfactoriamente.

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Durante el proceso de producción de voz, los factores anatómicos, fisiológicos o psicosociales del individuo modifican los órganos resonadores, imprimiendo en la voz características particulares. Los sistemas ASR tratan de encontrar los matices característicos de una voz y asociarlos a un individuo o grupo. La edad y sexo de un hablante son factores intrínsecos que están presentes en la voz. Este trabajo intenta diferenciar esas características, aislarlas y usarlas para detectar el género y la edad de un hablante. Para dicho fin, se ha realizado el estudio y análisis de las características basadas en el pulso glótico y el tracto vocal, evitando usar técnicas clásicas (como pitch y sus derivados) debido a las restricciones propias de dichas técnicas. Los resultados finales de nuestro estudio alcanzan casi un 100% en reconocimiento de género mientras en la tarea de reconocimiento de edad el reconocimiento se encuentra alrededor del 80%. Parece ser que la voz queda afectada por el género del hablante y las hormonas, aunque no se aprecie en la audición. ABSTRACT Particular elements of the voice are printed during the speech production process and are related to anatomical and physiological factors of the phonatory system or psychosocial factors acquired by the speaker. ASR systems attempt to find those peculiar nuances of a voice and associate them to an individual or a group. Age and gender are inherent factors to the speaker which may be represented in voice. This work attempts to differentiate those characteristics, isolate them and use them to detect speaker’s gender and age. Features based on glottal pulse and vocal tract are studied and analyzed in order to achieve good results in both tasks. Classical methodologies (such as pitch and derivates) are avoided since the requirements of those techniques may be too restrictive. The final scores achieve almost 100% in gender recognition whereas in age recognition those scores are around 80%. Factors related to the gender and hormones seem to affect the voice although they are not audible.

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Con esta disertación se pretenden resolver algunos de los problemas encontrados actualmente en la recepción de señales de satélites bajo dos escenarios particularmente exigentes: comunicaciones de Espacio Profundo y en banda Ka. Las comunicaciones con sondas de Espacio Profundo necesitan grandes aperturas en tierra para poder incrementar la velocidad de datos. La opción de usar antennas con diámetro mayor de 35 metros tiene serios problemas, pues antenas tan grandes son caras de mantener, difíciles de apuntar, pueden tener largos tiempo de reparación y además tienen una efeciencia decreciente a medida que se utilizan bandas más altas. Soluciones basadas en agrupaciones de antenas de menor tamaño (12 ó 35 metros) son mas ecónomicas y factibles técnicamente. Las comunicaciones en banda Ka tambien pueden beneficiarse de la combinación de múltiples antennas. Las antenas de menor tamaño son más fáciles de apuntar y además tienen un campo de visión mayor. Además, las técnicas de diversidad espacial pueden ser reemplazadas por una combinación de antenas para así incrementar el margen del enlace. La combinación de antenas muy alejadas sobre grandes anchos de banda, bien por recibir una señal de banda ancha o múltiples de banda estrecha, es complicada técnicamente. En esta disertación se demostrará que el uso de conformador de haz en el dominio de la frecuencia puede ayudar a relajar los requisitos de calibración y, al mismo tiempo, proporcionar un mayor campo de visión y mayores capacidades de ecualización. Para llevar esto a cabo, el trabajo ha girado en torno a tres aspectos fundamentales. El primero es la investigación bibliográfica del trabajo existente en este campo. El segundo es el modelado matemático del proceso de combinación y el desarrollo de nuevos algoritmos de estimación de fase y retardo. Y el tercero es la propuesta de nuevas aplicaciones en las que usar estas técnicas. La investigación bibliográfica se centra principalmente en los capítulos 1, 2, 4 y 5. El capítulo 1 da una breve introducción a la teoría de combinación de antenas de gran apertura. En este capítulo, los principales campos de aplicación son descritos y además se establece la necesidad de compensar retardos en subbandas. La teoría de bancos de filtros se expone en el capítulo 2; se selecciona y simula un banco de filtros modulado uniformemente con fase lineal. Las propiedades de convergencia de varios filtros adaptativos se muestran en el capítulo 4. Y finalmente, las técnicas de estimación de retardo son estudiadas y resumidas en el capítulo 5. Desde el punto de vista matemático, las principales contribución de esta disertación han sido: • Sección 3.1.4. Cálculo de la desviación de haz de un conformador de haz con compensación de retardo en pasos discretos en frecuencia intermedia. • Sección 3.2. Modelo matemático de un conformador de haz en subbandas. • Sección 3.2.2. Cálculo de la desviación de haz de un conformador de haz en subbandas con un buffer de retardo grueso. • Sección 3.2.4. Análisis de la influencia de los alias internos en la compensación en subbandas de retardo y fase. • Sección 3.2.4.2. Cálculo de la desviación de haz de un conformador de haz con compensación de retardo en subbandas. • Sección 3.2.6. Cálculo de la ganancia de relación señal a ruido de la agrupación de antenas en cada una de las subbandas. • Sección 3.3.2. Modelado de la función de transferencia de la agrupación de antenas bajo errores de estimación de retardo. • Sección 3.3.3. Modelado de los efectos de derivas de fase y retardo entre actualizaciones de las estimaciones. • Sección 3.4. Cálculo de la directividad de la agrupación de antenas con y sin compensación de retardos en subbandas. • Sección 5.2.6. Desarrollo de un algorimo para estimar la fase y el retardo entre dos señales a partir de su descomposición de subbandas bajo entornos estacionarios. • Sección 5.5.1. Desarrollo de un algorimo para estimar la fase, el retardo y la deriva de retardo entre dos señales a partir de su descomposición de subbandas bajo entornos no estacionarios. Las aplicaciones que se pueden beneficiar de estas técnicas son descritas en el capítulo 7: • Sección 6.2. Agrupaciones de antenas para comunicaciones de Espacio Profundo con capacidad multihaz y sin requisitos de calibración geométrica o de retardo de grupo. • Sección 6.2.6. Combinación en banda ancha de antenas con separaciones de miles de kilómetros, para recepción de sondas de espacio profundo. • Secciones 6.4 and 6.3. Combinación de estaciones remotas en banda Ka en escenarios de diversidad espacial, para recepción de satélites LEO o GEO. • Sección 6.3. Recepción de satélites GEO colocados con arrays de antenas multihaz. Las publicaciones a las que ha dado lugar esta tesis son las siguientes • A. Torre. Wideband antenna arraying over long distances. Interplanetary Progress Report, 42-194:1–18, 2013. En esta pulicación se resumen los resultados de las secciones 3.2, 3.2.2, 3.3.2, los algoritmos en las secciones 5.2.6, 5.5.1 y la aplicación destacada en 6.2.6. • A. Torre. Reception of wideband signals from geostationary collocated satellites with antenna arrays. IET Communications, Vol. 8, Issue 13:2229–2237, September, 2014. En esta segunda se muestran los resultados de la sección 3.2.4, el algoritmo en la sección 5.2.6.1 , y la aplicación mostrada en 6.3. ABSTRACT This dissertation is an attempt to solve some of the problems found nowadays in the reception of satellite signals under two particular challenging scenarios: Deep Space and Ka-band communications. Deep Space communications require from larger apertures on ground in order to increase the data rate. The option of using single dishes with diameters larger than 35 meters has severe drawbacks. Such antennas are expensive to maintain, prone to long downtimes, difficult to point and have a degraded performance in high frequency bands. The array solution, either with 12 meter or 35 meter antennas is deemed to be the most economically and technically feasible solution. Ka-band communications can also benefit from antenna arraying technology. The smaller aperture antennas that make up the array are easier to point and have a wider field of view allowing multiple simultaneous beams. Besides, site diversity techniques can be replaced by pure combination in order to increase link margin. Combination of far away antennas over a large bandwidth, either because a wideband signal or multiple narrowband signals are received, is a demanding task. This dissertation will show that the use of frequency domain beamformers with subband delay compensation can help to ease calibration requirements and, at the same time, provide with a wider field of view and enhanced equalization capabilities. In order to do so, the work has been focused on three main aspects. The first one is the bibliographic research of previous work on this subject. The second one is the mathematical modeling of the array combination process and the development of new phase/delay estimation algorithms. And the third one is the proposal of new applications in which these techniques can be used. Bibliographic research is mainly done in chapters 1, 2, 4 and 5. Chapter 1 gives a brief introduction to previous work in the field of large aperture antenna arraying. In this chapter, the main fields of application are described and the need for subband delay compensation is established. Filter bank theory is shown in chapter 2; a linear phase uniform modulated filter bank is selected and simulated under diverse conditions. The convergence properties of several adaptive filters are shown in chapter 4. Finally, delay estimation techniques are studied and summarized in chapter 5. From a mathematical point of view, the main contributions of this dissertation have been: • Section 3.1.4. Calculation of beam squint of an IF beamformer with delay compensation at discrete time steps. • Section 3.2. Establishment of a mathematical model of a subband beamformer. • Section 3.2.2. Calculation of beam squint in a subband beamformer with a coarse delay buffer. • Section 3.2.4. Analysis of the influence of internal aliasing on phase and delay subband compensation. • Section 3.2.4.2. Calculation of beam squint of a beamformer with subband delay compensation. • Section 3.2.6. Calculation of the array SNR gain at each of the subbands. • Section 3.3.2. Modeling of the transfer function of an array subject to delay estimation errors. • Section 3.3.3. Modeling of the effects of phase and delay drifts between estimation updates. • Section 3.4. Calculation of array directivity with and without subband delay compensation. • Section 5.2.6. Development of an algorithm to estimate relative delay and phase between two signals from their subband decomposition in stationary environments. • Section 5.5.1. Development of an algorithm to estimate relative delay rate, delay and phase between two signals from their subband decomposition in non stationary environments. The applications that can benefit from these techniques are described in chapter 7: • Section 6.2. Arrays of antennas for Deep Space communications with multibeam capacity and without geometric or group delay calibration requirement. • Section 6.2.6. Wideband antenna arraying over long distances, in the range of thousands of kilometers, for reception of Deep Space probes. • Sections 6.4 y 6.3. Combination of remote stations in Ka-band site diversity scenarios for reception of LEO or GEO satellites. • Section 6.3. Reception of GEO collocated satellites with multibeam antenna arrays. The publications that have been made from the work in this dissertation are • A. Torre. Wideband antenna arraying over long distances. Interplanetary Progress Report, 42-194:1–18, 2013. This article shows the results in sections 3.2, 3.2.2, 3.3.2, the algorithms in sections 5.2.6, 5.5.1 and the application in section 6.2.6. • A. Torre. Reception of wideband signals from geostationary collocated satellites with antenna arrays. IET Communications, Vol. 8, Issue 13:2229–2237, September, 2014. This second article shows among others the results in section 3.2.4, the algorithm in section 5.2.6.1 , and the application in section 6.3.

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The transient response of a system of independent electrodes buried in a semi-infinite conducting medium is studied. Using a simple and versatile numerical scheme written by the authors and based on the Electric Field Integral Equation (EFIE), the effect caused by harmonic signals ranging on frequency from Hz to hundred of MHz, and also by lightning type driving signal striking at a remote point far from the conductors, is extensively studied. The value of the scalar potential appearing on the electrodes as a function of the frequency of the applied signal is one of the variables investigated. Other features such as the input impedance at the injection point of the signal and the Ground Potential Rise (GPR) over the electrode system are also discussed

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Differential Phase Shift Keying (DPSK) modulation format has been shown as a robust solution for next-generation optical transmission systems. One key device enabling such systems is a delay interferometer, converting the phase modulation signal into the intensity modulation signal to be detected by the photodiodes. Usually, a standard Mach-Zehnder interferometer (MZI) is used for demodulating a DPSK signal. In this paper, we develop an MZI which is based on all-fiber Multimode Interference (MI) structure: a multimode fiber (MMF) with a central dip, located between two single-mode fibers (SMFs) without any transition zones. The MI based MZI (MI-MZI) is more stable than the standard MZI as the two arms share the same MMF, reducing the impact of the external effects, such as temperature and others. Performance of this MI-MZI is analyzed theoretically and experimentally from transmission spectrum. Experimental results shows that high interference extinction ratio is obtained, which is far higher than that obtained from a normal graded-index based MI-MZI. Finally, by software simulation, we demonstrate that our proposed MI-MZI can be used for demodulating a 40 Gbps DPSK signal. The performance of the MI-MZI based DPSK receiver is analyzed from the sensitivity. Simulation results show that sensitivity of the proposed receiver is about -22.3 dBm for a BER of 10-15 and about -23.8 dBm for a BER of 10-9.

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The cell wall is a dynamic structure that regulates both constitutive and inducible plant defence responses. Different molecules o DAMPs (damage-associated molecular patterns) can be released from plant cell walls upon pathogen infection or wounding and can trigger immune responses. To further characterize the function of cell wall on the regulation of these immune responses, we have performed a biased resistance screening of putative/well-characterized primary/secondary Arabidopsis thaliana cell wall mutants (cwm). In this screening we have identified more than 20 cwm mutants with altered susceptibility/resistance to at least one of the following pathogens: the necrotrophic fungi Plectosphaerella cucumerina, the vascular bacterium Ralstonia solanacearum, the biotrophic oomycete Hyaloperonospora arabidopsidis and the powdery mildew fungus Erisyphe cruciferarum. We found that cell wall extracts from some of these cwm plants contain novel DAMPs that activate immune responses and conferred enhanced resistance to particular pathogens when they were applied to wild-type plants. Using glycomic profiling we have performed an initial characterization of the active carbohydrate structures present in these cwm wall fractions, and we have determined the signalling pathways regulated by thesse fractions. . The data generated with this collection of wall mutants support the existence of specific correlations between cell wall structure/composition, resistance to particular type of pathogens and plant fitness. Remarkably, we have identified specific cwm mutations that uncoupled resistance to pathogens from plant trade-offs, further indicating the plasticity of wall structures in the regulation of plant immune responses.

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El gran crecimiento de los sistemas MEMS (Micro Electro Mechanical Systems) así como su presencia en la mayoría de los dispositivos que usamos diariamente despertó nuestro interés. Paralelamente, la tecnología CMOS (Complementary Metal Oxide Semiconductor) es la tecnología más utilizada para la fabricación de circuitos integrados. Además de ventajas relacionadas con el funcionamiento electrónico del dispositivo final, la integración de sistemas MEMS en la tecnología CMOS reduce significantemente los costes de fabricación. Algunos de los dispositivos MEMS con mayor variedad de aplicaciones son los microflejes. Estos dispositivos pueden ser utilizados para la extracción de energía, en microscopios de fuerza atómica o en sensores, como por ejemplo, para biodetección. Los materiales piezoeléctricos más comúnmente utilizados en aplicaciones MEMS se sintetizan a altas temperaturas y por lo tanto no son compatibles con la tecnología CMOS. En nuestro caso hemos usado nitruro de alumino (AlN), que se deposita a temperatura ambiente y es compatible con la tecnología CMOS. Además, es biocompatible, y por tanto podría formar parte de un dispositivo que actúe como biosensor. A lo largo de esta tesis hemos prestado especial atención en desarrollar un proceso de fabricación rápido, reproducible y de bajo coste. Para ello, todos los pasos de fabricación han sido minuciosamente optimizados. Los parámetros de sputtering para depositar el AlN, las distintas técnicas y recetas de ataque, los materiales que actúan como electrodos o las capas sacrificiales para liberar los flejes son algunos de los factores clave estudiados en este trabajo. Una vez que la fabricación de los microflejes de AlN ha sido optimizada, fueron medidos para caracterizar sus propiedades piezoeléctricas y finalmente verificar positivamente su viabilidad como dispositivos piezoeléctricos. ABSTRACT The huge growth of MEMS (Micro Electro Mechanical Systems) as well as their presence in most of our daily used devices aroused our interest on them. At the same time, CMOS (Complementary Metal Oxide Semiconductor) technology is the most popular technology for integrated circuits. In addition to advantages related with the electronics operation of the final device, the integration of MEMS with CMOS technology reduces the manufacturing costs significantly. Some of the MEMS devices with a wider variety of applications are the microcantilevers. These devices can be used for energy harvesting, in an atomic force microscopes or as sensors, as for example, for biodetection. Most of the piezoelectric materials used for these MEMS applications are synthesized at high temperature and consequently are not compatible with CMOS technology. In our case we have used aluminum nitride (AlN), which is deposited at room temperature and hence fully compatible with CMOS technology. Otherwise, it is biocompatible and and can be used to compose a biosensing device. During this thesis work we have specially focused our attention in developing a high throughput, reproducible and low cost fabrication process. All the manufacturing process steps of have been thoroughly optimized in order to achieve this goal. Sputtering parameters to synthesize AlN, different techniques and etching recipes, electrode material and sacrificial layers are some of the key factors studied in this work to develop the manufacturing process. Once the AlN microcantilevers fabrication was optimized, they were measured to characterize their piezoelectric properties and to successfully check their viability as piezoelectric devices.

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El presente trabajo tiene como objetivo el desarrollo de un patrón primario para la calibración de sensores de fuerza bajo excitaciones sinusoidales. Con consecuencia de dicho desarrollo se establecerá un método de calibración de sensores de fuerza en condiciones dinámicas que permitirá la caracterización de estos sensores en dichas condiciones y determinar la incertidumbre asociada. Este patrón se basa en la definición directa de fuerza como masa por aceleración. Para ello se carga el sensor con distintas cargas calibradas y se somete a distintas aceleraciones mediante un excitador de vibraciones. Dichas aceleraciones se generan para frecuencias desde 5 Hz a 2400 Hz. La aceleración se mide mediante un vibrómetro láser con trazabilidad a la unidad de longitud (longitud de onda del láser). Al ser una medición completamente dinámica se necesita un sistema de adquisición de datos multicanal para la toma de datos en tiempo real. Este sistema adquiere las señales eléctricas provenientes del vibrómetro láser, del sensor a caracterizar y del acelerómetro para mediciones auxiliares. Se ha dispuesto de cuatro sensores de fuerza para realizar ensayos, un sensor piezoeléctrico y tres sensores resistivos. En este trabajo se han estudiado los factores de influencia y se ha implementado un método de calibración para minimizar los mismos, así como también se han establecido las correcciones a realizar. Para la caracterización dinámica del sensor se ha partido de un modelo de oscilador armónico amortiguado forzado, se ha establecido la metodología para la determinación de sus parámetros de caracterización y se ha estudiado su validez. También se ha realizado una comparación entre los resultados obtenidos para condiciones estáticas y dinámicas. ABSTRACT The aim in the current work is the development of a primary standard for force sensors calibration under sinusoidal excitations. As consequence of this development a method for force sensors calibration under dynamic conditions will be established that will allow these sensors characterization for such conditions and the determination of their associated uncertainty. This standard is based on the direct definition of force as mass multiplied by acceleration. To do so, the sensor is loaded with different calibrated loads and is maintained under different accelerations by means of a vibration shaker. These accelerations are generated with frequencies from 5 Hz up to 2400 Hz. The acceleration is measured by means of a laser vibrometer with traceability to the unit of length (laser wavelength). As the measurement is totally dynamic a multiple channel data acquisition system is required for data acquisition in real time. This system acquires the electrical signals outputs coming from the laser vibrometer, the sensor to be characterised and two accelerometers for additional measurements. Four force sensors, one piezoelectric sensor and three resistive sensors, have been available to perform the tests. During this work the influence factors have been studied and a calibration method to minimise these factors have been implemented as well as the corrections to be performed have been established. As the starting point for the sensor dynamic characterization, a model for a forced damped harmonic oscillator has been used, a method for the characterizing parameters determination has been established and its validity has been studied. A comparison between results for static and dynamic conditions has been performed as well.

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Los sistemas micro electro mecánicos (MEMS) han demostrado ser una exitosa familia de dispositivos que pueden usarse como plataforma para el desarrollo de dispositivos con aplicaciones en óptica, comunicaciones, procesado de señal y sensorización. Los dispositivos MEMS estándar suelen estar fabricados usando tecnología de silicio. Sin embargo, el rendimiento de estos MEMS se puede mejorar si se usan otros materiales. Por ejemplo, el diamante nanocristalino (NCD) ofrece unas excelentes propiedades mecánicas, transparencia y una superficie fácil de funcionalizar. Por otro lado, el sistema de materiales (In; Ga; Al)N, los materiales IIIN, se pueden usar para producir estructuras monocristalinas con alta sensibilidad mecánica y química. Además, el AlN se puede depositar por pulverización catódica reactiva sobre varios substratos, incluyendo NCD, para formar capas policristalinas orientadas con alta respuesta piezoeléctrica. Adicionalmente, tanto el NCD como los materiales III-N muestran una gran estabilidad térmica y química, lo que los hace una elección idónea para desarrollar dispositivos para aplicaciones para alta temperatura, ambientes agresivos e incluso para aplicaciones biocompatibles. En esta tesis se han usado estos materiales para el diseño y medición de demostradores tecnológicos. Se han perseguido tres objetivos principales: _ Desarrollo de unos procesos de fabricación apropiados. _ Medición de las propiedades mecánicas de los materiales y de los factores que limitan el rendimiento de los dispositivos. _ Usar los datos medidos para desarrollar dispositivos demostradores complejos. En la primera parte de esta tesis se han estudiado varias técnicas de fabricación. La estabilidad de estos materiales impide el ataque y dificulta la producción de estructuras suspendidas. Los primeros capítulos de esta disertación se dedican al desarrollo de unos procesos de transferencia de patrones por ataque seco y a la optimización del ataque húmedo sacrificial de varios substratos propuestos. Los resultados de los procedimientos de ataque se presentan y se describe la optimización de las técnicas para la fabricación de estructuras suspendidas de NCD y materiales III-N. En un capítulo posterior se estudia el crecimiento de AlN por pulverización catódica. Como se ha calculado en esta disertación para obtener una actuación eficiente de MEMS, las capas de AlN han de ser finas, típicamente d < 200 nm, lo que supone serias dificultades para la obtención de capas orientadas con respuesta piezoeléctrica. Las condiciones de depósito se han mapeado para identificar las fronteras que proporcionan el crecimiento de material orientado desde los primeros pasos del proceso. Además, durante la optimización de los procesos de ataque se estudió un procedimiento para fabricar películas de GaN nanoporoso. Estas capas porosas pueden servir como capas sacrificiales para la fabricación de estructuras suspendidas de GaN con baja tensión residual o como capas para mejorar la funcionalización superficial de sensores químicos o biológicos. El proceso de inducción de poros se discutirá y también se presentarán experimentos de ataque y funcionalización. En segundo lugar, se han determinado las propiedades mecánicas del NCD y de los materiales III-N. Se han fabricado varias estructuras suspendidas para la medición del módulo de Young y de la tensión residual. Además, las estructuras de NCD se midieron en resonancia para calcular el rendimiento de los dispositivos en términos de frecuencia y factor de calidad. Se identificaron los factores intrínsecos y extrínsecos que limitan ambas figuras de mérito y se han desarrollado modelos para considerar estas imperfecciones en las etapas de diseño de los dispositivos. Por otra parte, los materiales III-N normalmente presentan grandes gradientes de deformación residual que causan la deformación de las estructuras al ser liberadas. Se han medido y modelado estos efectos para los tres materiales binarios del sistema para proporcionar puntos de interpolación que permitan predecir las características de las aleaciones del sistema III-N. Por último, los datos recabados se han usado para desarrollar modelos analíticos y numéricos para el diseño de varios dispositivos. Se han estudiado las propiedades de transducción y se proporcionan topologías optimizadas. En el último capítulo de esta disertación se presentan diseños optimizados de los siguientes dispositivos: _ Traviesas y voladizos de AlN=NCD con actuación piezoeléctrica aplicados a nanoconmutadores de RF para señales de alta potencia. _ Membranas circulares de AlN=NCD con actuación piezoeléctrica aplicadas a lentes sintonizables. _ Filtros ópticos Fabry-Pérot basados en cavidades aéreas y membranas de GaN actuadas electrostáticamente. En resumen, se han desarrollado unos nuevos procedimientos optimizados para la fabricación de estructuras de NCD y materiales III-N. Estas técnicas se han usado para producir estructuras que llevaron a la determinación de las principales propiedades mecánicas y de los parámetros de los dispositivos necesarios para el diseño de MEMS. Finalmente, los datos obtenidos se han usado para el diseño optimizado de varios dispositivos demostradores. ABSTRACT Micro Electro Mechanical Systems (MEMS) have proven to be a successful family of devices that can be used as a platform for the development of devices with applications in optics, communications, signal processing and sensorics. Standard MEMS devices are usually fabricated using silicon based materials. However, the performance of these MEMS can be improved if other material systems are used. For instance, nanocrystalline diamond (NCD) offers excellent mechanical properties, optical transparency and ease of surface functionalization. On the other hand, the (In; Ga; Al)N material system, the III-N materials, can be used to produce single crystal structures with high mechanical and chemical sensitivity. Also, AlN can be deposited by reactive sputtering on various substrates, including NCD, to form oriented polycrystalline layers with high piezoelectric response. In addition, both NCD and III-N materials exhibit high thermal and chemical stability, which makes these material the perfect choice for the development of devices for high temperatures, harsh environments and even biocompatible applications. In this thesis these materials have been used for the design and measurement of technological demonstrators. Three main objectives have been pursued: _ Development of suitable fabrication processes. _ Measurement of the material mechanical properties and device performance limiting factors. _ Use the gathered data to design complex demonstrator devices. In a first part of the thesis several fabrication processes have been addressed. The stability of these materials hinders the etching of the layers and hampers the production of free standing structures. The first chapters of this dissertation are devoted to the development of a dry patterning etching process and to sacrificial etching optimization of several proposed substrates. The results of the etching processes are presented and the optimization of the technique for the manufacturing of NCD and III-N free standing structures is described. In a later chapter, sputtering growth of thin AlN layers is studied. As calculated in this dissertation, for efficient MEMS piezoelectric actuation the AlN layers have to be very thin, typically d < 200 nm, which poses serious difficulties to the production of c-axis oriented material with piezoelectric response. The deposition conditions have been mapped in order to identify the boundaries that give rise to the growth of c-axis oriented material from the first deposition stages. Additionally, during the etching optimization a procedure for fabricating nanoporous GaN layers was also studied. Such porous layers can serve as a sacrificial layer for the release of low stressed GaN devices or as a functionalization enhancement layer for chemical and biological sensors. The pore induction process will be discussed and etching and functionalization trials are presented. Secondly, the mechanical properties of NCD and III-N materials have been determined. Several free standing structures were fabricated for the measurement of the material Young’s modulus and residual stress. In addition, NCD structures were measured under resonance in order to calculate the device performance in terms of frequency and quality factor. Intrinsic and extrinsic limiting factors for both figures were identified and models have been developed in order to take into account these imperfections in the device design stages. On the other hand, III-N materials usually present large strain gradients that lead to device deformation after release. These effects have been measured and modeled for the three binary materials of the system in order to provide the interpolation points for predicting the behavior of the III-N alloys. Finally, the gathered data has been used for developing analytic and numeric models for the design of various devices. The transduction properties are studied and optimized topologies are provided. Optimized design of the following devices is presented at the last chapter of this dissertation: _ AlN=NCD piezoelectrically actuated beams applied to RF nanoswitches for large power signals. _ AlN=NCD piezoelectrically actuated circular membranes applied to tunable lenses. _ GaN based air gap tunable optical Fabry-Pérot filters with electrostatic actuation. On the whole, new optimized fabrication processes has been developed for the fabrication of NCD and III-N MEMS structures. These processing techniques was used to produce structures that led to the determination of the main mechanical properties and device parameters needed for MEMS design. Lastly, the gathered data was used for the design of various optimized demonstrator devices.

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This paper presents the experimental results obtained by applying frequency-domain structural health monitoring techniques to assess the damage suffered on a special type of damper called Web Plastifying Damper (WPD). The WPD is a hysteretic type energy dissipator recently developed for the passive control of structures subjected to earthquakes. It consists of several I-section steel segments connected in parallel. The energy is dissipated through plastic deformations of the web of the I-sections, which constitute the dissipative parts of the damper. WPDs were subjected to successive histories of dynamically-imposed cyclic deformations of increasing magnitude with the shaking table of the University of Granada. To assess the damage to the web of the I-section steel segments after each history of loading, a new damage index called Area Index of Damage (AID) was obtained from simple vibration tests. The vibration signals were acquired by means of piezoelectric sensors attached on the I-sections, and non-parametric statistical methods were applied to calculate AID in terms of changes in frequency response functions. The damage index AID was correlated with another energy-based damage index-ID- which past research has proven to accurately characterize the level of mechanical damage. The ID is rooted in the decomposition of the load-displacement curve experienced by the damper into the so-called skeleton and Bauschinger parts. ID predicts the level of damage and the proximity to failure of the damper accurately, but it requires costly instrumentation. The experiments reported in this paper demonstrate a good correlation between AID and ID in a realistic seismic loading scenario consisting of dynamically applied arbitrary cyclic loads. Based on this correlation, it is possible to estimate ID indirectly from the AID, which calls for much simpler and less expensive instrumentation.

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Human Activity Recognition (HAR) is an emerging research field with the aim to identify the actions carried out by a person given a set of observations and the surrounding environment. The wide growth in this research field inside the scientific community is mainly explained by the high number of applications that are arising in the last years. A great part of the most promising applications are related to the healthcare field, where it is possible to track the mobility of patients with motor dysfunction as also the physical activity in patients with cardiovascular risk. Until a few years ago, by using distinct kind of sensors, a patient follow-up was possible. However, far from being a long-term solution and with the smartphone irruption, that monitoring can be achieved in a non-invasive way by using the embedded smartphone’s sensors. For these reasons this Final Degree Project arises with the main target to evaluate new feature extraction techniques in order to carry out an activity and user recognition, and also an activity segmentation. The recognition is done thanks to the inertial signals integration obtained by two widespread sensors in the greater part of smartphones: accelerometer and gyroscope. In particular, six different activities are evaluated walking, walking-upstairs, walking-downstairs, sitting, standing and lying. Furthermore, a segmentation task is carried out taking into account the activities performed by thirty users. This can be done by using Hidden Markov Models and also a set of tools tested satisfactory in speech recognition: HTK (Hidden Markov Model Toolkit).